摘要:
An impurity-doped silicon nitride or oxynitride film is formed on a target substrate by CVD, in a process field to be selectively supplied with a first process gas containing a silane family gas, a second process gas containing a nitriding or oxynitriding gas, and a third process gas containing a doping gas. This method alternately includes first to fourth steps. The first step performs supply of the first and third process gases to the field. The second step stops supply of the first to third process gases to the field. The third step performs supply of the second process gas to the field while stopping supply of the first and third process gases to the field, and includes an excitation period of exciting the second process gas by an exciting mechanism. The fourth step stops supply of the first to third process gases to the field.
摘要:
The present invention is a thermal processing method of conducting a thermal process to an object to be processed, a base film having been formed on a surface of the object to be processed, the base film consisting of a SiO2 film or a SiON film. The method includes: an arranging step of arranging the object to be processed in a processing container; and a laminating step of supplying a source gas and an ammonia gas alternatively and repeatedly, so as to form a silicon nitride film on the base film repeatedly, the source gas being selected from a group consisting of dichlorosilane, hexachlorodisilane and tetrachlorosilane.
摘要翻译:本发明是对待处理物体进行热处理的热处理方法,在被处理物的表面上形成的基膜,由SiO 2 2 SUB >电影或SiON电影。 该方法包括:将处理对象物置于处理容器内的布置步骤; 以及层叠步骤,交替重复地供给源气体和氨气,以在所述基膜上重复形成氮化硅膜,所述源气体选自二氯硅烷,六氯二硅烷和四氯硅烷。
摘要:
A flash device for a lens-fitted photo film unit pre-loaded with unexposed photo film is provided. A main capacitor stores charge. A flash emitter emits flash light. A flash circuit board charges the main capacitor, and drives the flash emitter by discharging the main capacitor in response to an exposing operation. A tightly closed flash case is secured to the lens-fitted photo film unit, for containing the main capacitor, the flash emitter and the flash circuit board. Also, the lens-fitted photo film unit includes a sync switch for generating a trigger signal in response to the exposing operation. Two switch contact points are disposed outside the flash case, for receiving the trigger signal from the sync switch. The two switch contact points disable discharge of the main capacitor while the flash case is away from the lens-fitted photo film unit, and are short-circuited for discharge of the main capacitor upon supply of the trigger signal while the flash case is secured to the lens-fitted photo film unit.
摘要:
A network path controlling method and an apparatus therefor perform a path retrieval based on path information exchanged between routers in order that networks which share IP addresses hierarchized by arbitrarily dividing the IP addresses by an arbitrary bit length from an upper bit can be mutually connected through an upper one of hierarchized networks of the hierarchized IP addresses. Each of the routers exchanges hierarchy information of the highest hierarchized network in the hierarchized networks having the routers therebetween in the form of the path information. A source host allots and transmits the hierarchized information to an IP address of a destination host for a packet. A relaying router performs the path retrieval based on the hierarchy information.
摘要:
All of optical elements constituting a projecting optical system 10 are reflection mirrors 1 to 4. The reflection mirrors 1 to 4 are arranged in a plate-shaped support member 6 with a relative positional relation between the reflection mirrors being fixed. A position of the whole projecting optical system 10 with respect to an image-forming component 5 is adjust by moving the support member 6.
摘要:
Novel purine nucleosidase derived from Ochrobactrum anthropi microorganisms, a gene system coding therefor, uses therefor and particularly its use in the production of beer.
摘要:
The present disclosure provides a novel aldehyde synthase gene having activity of synthesizing a medium-chain aldehyde. Such gene encodes a protein comprising the amino acid sequence as shown in SEQ ID NO: 2.
摘要:
In a substrate processing apparatus, a film deposition device and a heat processing device to perform an anneal processing are airtightly connected to a vacuum conveying chamber, and a substrate rotating unit to cause a substrate to rotate around a vertical axis is provided in the vacuum conveying chamber. A control unit is arranged to stop a relative rotation of a plurality of reactive gas supplying units, a separating gas supplying unit and a table by a rotation device in the middle of a film deposition process of the substrate, cause a conveying unit to take out the substrate from a vacuum chamber, and output a control signal that causes a substrate rotating unit to change a direction of the substrate.
摘要:
A network failure detecting method for detecting a failure of a network including a number of transferring devices by tracing data flow rates of the transferring devices based on physical topologies of the transferring devices for the network, composing a group of the transferring devices adjacent to one another, data flow rates of which have failed to be obtained, as one virtual transferring device; and replacing physical topologies of the group of the transferring devices adjacent to one another, data flow rates of which have failed to be obtained, with a physical topology of the composed virtual transferring device.
摘要:
An illumination device includes a light source that is configured to emit diffused light, and a plurality of light guiding bodies configured such that the light emitted by light source is entered from one end surface and the light is exited from other end surface. End surface of each light guiding body is arranged into a concave shape, and end surface is arranged into a planar shape.