Film formation method and apparatus for semiconductor process
    21.
    发明申请
    Film formation method and apparatus for semiconductor process 有权
    用于半导体工艺的成膜方法和装置

    公开(公告)号:US20060032443A1

    公开(公告)日:2006-02-16

    申请号:US11188736

    申请日:2005-07-26

    IPC分类号: C23C16/00

    摘要: An impurity-doped silicon nitride or oxynitride film is formed on a target substrate by CVD, in a process field to be selectively supplied with a first process gas containing a silane family gas, a second process gas containing a nitriding or oxynitriding gas, and a third process gas containing a doping gas. This method alternately includes first to fourth steps. The first step performs supply of the first and third process gases to the field. The second step stops supply of the first to third process gases to the field. The third step performs supply of the second process gas to the field while stopping supply of the first and third process gases to the field, and includes an excitation period of exciting the second process gas by an exciting mechanism. The fourth step stops supply of the first to third process gases to the field.

    摘要翻译: 在目标衬底上通过CVD形成杂质掺杂的氮化硅或氧氮化物膜,在选择性地供给含有硅烷族气体的第一工艺气体,含有氮化或氮氧化气体的第二工艺气体的工艺领域中, 含有掺杂气体的第三工艺气体。 该方法交替地包括第一至第四步骤。 第一步向现场供应第一和第三工艺气体。 第二步停止向现场供应第一至第三工艺气体。 第三步骤在停止向场施加第一和第三处理气体的同时停止向现场供应第二处理气体,并且包括通过激励机构激励第二处理气体的激发周期。 第四步停止向现场供应第一至第三处理气体。

    Lens-fitted photo film unit, flash device, and lens-fitted photo film system
    23.
    发明申请
    Lens-fitted photo film unit, flash device, and lens-fitted photo film system 失效
    带镜头的摄影胶片单元,闪光灯装置和带镜头的摄影胶片系统

    公开(公告)号:US20050058441A1

    公开(公告)日:2005-03-17

    申请号:US10973912

    申请日:2004-10-27

    IPC分类号: G03B15/05 G03B15/03

    摘要: A flash device for a lens-fitted photo film unit pre-loaded with unexposed photo film is provided. A main capacitor stores charge. A flash emitter emits flash light. A flash circuit board charges the main capacitor, and drives the flash emitter by discharging the main capacitor in response to an exposing operation. A tightly closed flash case is secured to the lens-fitted photo film unit, for containing the main capacitor, the flash emitter and the flash circuit board. Also, the lens-fitted photo film unit includes a sync switch for generating a trigger signal in response to the exposing operation. Two switch contact points are disposed outside the flash case, for receiving the trigger signal from the sync switch. The two switch contact points disable discharge of the main capacitor while the flash case is away from the lens-fitted photo film unit, and are short-circuited for discharge of the main capacitor upon supply of the trigger signal while the flash case is secured to the lens-fitted photo film unit.

    摘要翻译: 提供一种预装有未曝光照相胶卷的装有镜头的摄影胶片单元的闪光装置。 主电容器存储电荷。 闪光发射器发射闪光灯。 闪电电路板对主电容器充电,并通过对主电容器进行放电来驱动闪光发射器,以响应曝光操作。 一个紧密封闭的闪光灯盒固定在装有镜头的摄影胶片单元上,用于容纳主电容器,闪光发射器和闪光电路板。 此外,装有镜头的摄影胶片单元包括用于响应于曝光操作产生触发信号的同步开关。 两个开关触点设置在闪光灯外部,用于从同步开关接收触发信号。 两个开关接触点在闪光灯壳远离装有镜头的摄影胶片单元时禁止主电容器的放电,并且在闪光灯壳固定到触摸信号的过程中短路以释放主电容器 配有镜头的摄影胶片单元。

    Network path controlling method and apparatus
    24.
    发明授权
    Network path controlling method and apparatus 失效
    网络路径控制方法和装置

    公开(公告)号:US06563834B1

    公开(公告)日:2003-05-13

    申请号:US09354598

    申请日:1999-07-16

    申请人: Jun Ogawa

    发明人: Jun Ogawa

    IPC分类号: H04L1228

    CPC分类号: H04L45/04 H04L45/54

    摘要: A network path controlling method and an apparatus therefor perform a path retrieval based on path information exchanged between routers in order that networks which share IP addresses hierarchized by arbitrarily dividing the IP addresses by an arbitrary bit length from an upper bit can be mutually connected through an upper one of hierarchized networks of the hierarchized IP addresses. Each of the routers exchanges hierarchy information of the highest hierarchized network in the hierarchized networks having the routers therebetween in the form of the path information. A source host allots and transmits the hierarchized information to an IP address of a destination host for a packet. A relaying router performs the path retrieval based on the hierarchy information.

    摘要翻译: 网络路径控制方法及其装置基于在路由器之间交换的路径信息执行路径检索,以便通过任意位长度从IP地址任意划分IP地址而分级的IP地址的网络可以通过 层次化IP地址的分层网络的上层之一。 每个路由器以路径信息的形式在具有路由器之间的分级网络中交换最高层次化网络的层次信息。 源主机将分层信息分配并发送到分组的目的地主机的IP地址。 中继路由器根据层次信息执行路径检索。

    Projector
    25.
    发明授权

    公开(公告)号:US06527397B2

    公开(公告)日:2003-03-04

    申请号:US09919861

    申请日:2001-08-02

    IPC分类号: G03B2114

    CPC分类号: G03B21/28

    摘要: All of optical elements constituting a projecting optical system 10 are reflection mirrors 1 to 4. The reflection mirrors 1 to 4 are arranged in a plate-shaped support member 6 with a relative positional relation between the reflection mirrors being fixed. A position of the whole projecting optical system 10 with respect to an image-forming component 5 is adjust by moving the support member 6.

    Substrate processing apparatus, substrate processing method, and computer-readable storage medium
    28.
    发明授权
    Substrate processing apparatus, substrate processing method, and computer-readable storage medium 有权
    基板处理装置,基板处理方法和计算机可读存储介质

    公开(公告)号:US08992685B2

    公开(公告)日:2015-03-31

    申请号:US12753978

    申请日:2010-04-05

    摘要: In a substrate processing apparatus, a film deposition device and a heat processing device to perform an anneal processing are airtightly connected to a vacuum conveying chamber, and a substrate rotating unit to cause a substrate to rotate around a vertical axis is provided in the vacuum conveying chamber. A control unit is arranged to stop a relative rotation of a plurality of reactive gas supplying units, a separating gas supplying unit and a table by a rotation device in the middle of a film deposition process of the substrate, cause a conveying unit to take out the substrate from a vacuum chamber, and output a control signal that causes a substrate rotating unit to change a direction of the substrate.

    摘要翻译: 在基板处理装置中,进行退火处理的成膜装置和热处理装置气密地连接到真空输送室,并且在真空输送中设置使基板绕垂直轴旋转的基板旋转单元 房间。 控制单元设置成在基板的成膜过程的中间通过旋转装置停止多个反应气体供给单元,分离气体供给单元和台的相对旋转,使得输送单元取出 来自真空室的基板,并且输出使基板旋转单元改变基板的方向的控制信号。

    Network failure detecting method and device
    29.
    发明授权
    Network failure detecting method and device 失效
    网络故障检测方法及装置

    公开(公告)号:US08537692B2

    公开(公告)日:2013-09-17

    申请号:US12607214

    申请日:2009-10-28

    IPC分类号: H04L1/00

    CPC分类号: H04L41/0677 H04L41/12

    摘要: A network failure detecting method for detecting a failure of a network including a number of transferring devices by tracing data flow rates of the transferring devices based on physical topologies of the transferring devices for the network, composing a group of the transferring devices adjacent to one another, data flow rates of which have failed to be obtained, as one virtual transferring device; and replacing physical topologies of the group of the transferring devices adjacent to one another, data flow rates of which have failed to be obtained, with a physical topology of the composed virtual transferring device.

    摘要翻译: 一种网络故障检测方法,用于通过基于所述网络的传送设备的物理拓扑来跟踪传送设备的数据流速来检测包括多个传送设备的网络的故障,构成彼此相邻的一组传送设备 作为一个虚拟传送设备,其数据流速未能获得; 并且通过组合的虚拟传送设备的物理拓扑来替换彼此相邻的传输设备的组的物理拓扑,其数据流速不能获得。

    ILLUMINATION DEVICE AND PROJECTION DISPLAY DEVICE USING THE SAME
    30.
    发明申请
    ILLUMINATION DEVICE AND PROJECTION DISPLAY DEVICE USING THE SAME 审中-公开
    照明装置和使用其的投影显示装置

    公开(公告)号:US20120327375A1

    公开(公告)日:2012-12-27

    申请号:US13583142

    申请日:2010-03-09

    IPC分类号: G03B21/14 G02B6/04

    摘要: An illumination device includes a light source that is configured to emit diffused light, and a plurality of light guiding bodies configured such that the light emitted by light source is entered from one end surface and the light is exited from other end surface. End surface of each light guiding body is arranged into a concave shape, and end surface is arranged into a planar shape.

    摘要翻译: 照明装置包括被配置为发射漫射光的光源和被配置为使得由光源发射的光从一个端面进入并且光从另一端面退出的多个导光体。 每个导光体的端面被布置成凹形,并且端面被布置成平面形状。