摘要:
Methods and apparatus supporting an electrical connection are disclosed. Systems previously equipped with wire interfaces, such as battery terminals, can be equipped with a connector assembly to significantly reduce a hazard of electrical shock to a user. The connector assembly includes a stress relief component that attenuates a force, applied to the stress relief component, to reduce its effect on the connector assembly. By attenuating the force, the connector assembly maintains a substantially fixed position relative to the battery pack component and mitigates a potential for disruption in electrical connectivity. Techniques disclosed herein benefit users of battery packs or other devices as well as manufacturers by increasing safety, reliability, and ergonomics.
摘要:
A method for forming salicides with lower sheet resistance and increased sheet resistance uniformity over a semiconductor process wafer including providing a semiconductor process wafer having exposed silicon containing areas at a process surface; depositing a metal layer including at least one of cobalt and titanium over the process surface; carrying out at least one thermal annealing process to react the metal layer and silicon to form a metal silicide over the silicon containing areas; and, wet etching unsilicided areas of the metal layer with a wet etching solution including phosphoric acid (H3PO4), nitric acid (HNO3), and a carboxylic acid to leave salicides covering silicon containing areas at the process surface.
摘要翻译:一种用于在半导体工艺晶片上形成具有较低的薄层电阻和增加的薄层电阻均匀性的硫化物的方法,包括提供在处理表面具有暴露的含硅区域的半导体工艺晶片; 在工艺表面上沉积包括钴和钛中的至少一种的金属层; 执行至少一个热退火工艺以使金属层和硅反应以在含硅区域上形成金属硅化物; 并用含有磷酸(H 3 PO 4),硝酸(HNO 3)和羧酸的湿蚀刻溶液湿法蚀刻金属层的无硅区域,以留下在工艺表面覆盖含硅区域的水杨酸盐。
摘要:
A new process is provided to create openings and interconnect patterns for the dual damascene structure. Four layers of dielectric are sequentially deposited over a pattern of interconnect metal. The via hole pattern is defined, the interconnect line pattern is next defined. The via pattern is etched though the upper layer of dielectric and through the stop layer. Only one etch processing step is used to create the desired vias and the desired interconnect line pattern. After the interconnect patterns and vias have been created in the four layers of dielectric, a barrier layer is blanket deposited, the metal is deposited for the dual damascene structure and the interconnect line pattern and polished.
摘要:
A method for making improved polysilicon FET gate electrodes having composite sidewall spacers is achieved. After forming the polysilicon gate electrodes on the substrate, a SiO.sub.2 stress-release layer is deposited having a trapezoidal shape. A Si.sub.3 N.sub.4 layer is deposited and plasma etched back using the SiO.sub.2 layer as an etch-endpoint-detect layer to form composite sidewall spacers that include portions of the trapezoidal-shaped oxide layer. The SiO.sub.2 layer protects the source/drain areas from plasma etch damage that could cause high leakage currents. The Si.sub.3 N.sub.4 also extends over the SiO.sub.2 layer at the upper edges of the polysilicon gate electrodes. This prevents erosion of the SiO.sub.2 along the gate electrodes when the remaining oxide is removed from the source/drain areas using hydrofluoric acid wet etching. When an insulating layer is deposited over the FETs, and self-aligned contact openings are etched to the source/drain areas and extending over the gate electrodes, the Si.sub.3 N.sub.4 extending over the portion of the trapezoidal-shaped SiO.sub.2 layer that forms part of the composite sidewall spacer protects the SiO.sub.2 from etching. This results in more reliable contacts without degrading the FET performance.
摘要翻译:实现了具有复合侧壁间隔物的改进的多晶硅FET栅电极的方法。 在基板上形成多晶硅栅电极之后,沉积具有梯形形状的SiO 2应力释放层。 沉积Si 3 N 4层并使用SiO 2层等离子体蚀刻回蚀刻端点检测层,以形成包括梯形氧化物层的部分的复合侧壁间隔物。 SiO 2层保护源极/漏极区域免受可能导致高漏电流的等离子体蚀刻损伤。 Si 3 N 4也在多晶硅栅电极的上边缘处在SiO 2层上延伸。 当使用氢氟酸湿蚀刻从剩余的氧化物从源极/漏极区域移除时,这防止了沿着栅电极的SiO 2的侵蚀。 当绝缘层沉积在FET上方,并且自对准接触开口被蚀刻到源极/漏极区域并且在栅电极上延伸时,Si3N4延伸超过形成复合材料的一部分的梯形SiO 2层的部分 侧壁间隔件保护SiO 2免受蚀刻。 这导致更可靠的触点,而不会降低FET性能。
摘要:
A dual damascene process forms a two level metal interconnect structure by first providing a interlayer oxide over a device structure and covering the interlevel oxide layer with an etch stop layer. The etch stop layer is patterned to form openings corresponding to the pattern of the interconnects that are to be formed in the first level of the two level interconnect structure. After the etch stop layer is patterned, an intermetal oxide layer is provided over the etch stop layer. Because the etch stop layer is relatively thin, the topography formed on the surface of the intermetal oxide layer is relatively small. A photoresist mask is then provided over the intermetal oxide layer with openings in the mask exposing portions of the intermetal oxide layer in the pattern of the wiring lines to be provided in the second level of the interconnect structure. The intermetal oxide layer is etched and the etching process continues to form openings in the interlayer oxide where the interlayer oxide is exposed by the openings in the etch stop layer. Thus, in a single etching step, the openings for both the second level wiring lines and the first level interconnects are defined. Metal is then deposited over the structure and excess metal is removed by chemical mechanical polishing to define the two level interconnect structure.
摘要:
Methods and apparatus supporting an electrical connection are disclosed. Systems previously equipped with wire interfaces, such as battery terminals, can be equipped with a connector assembly to significantly reduce a hazard of electrical shock to a user. The connector assembly includes a stress relief component that attenuates a force, applied to the stress relief component, to reduce its effect on the connector assembly. By attenuating the force, the connector assembly maintains a substantially fixed position relative to the battery pack component and mitigates a potential for disruption in electrical connectivity. Techniques disclosed herein benefit users of battery packs or other devices as well as manufacturers by increasing safety, reliability, and ergonomics.
摘要:
A method for providing a supporting structure in a flat-plate display is disclosed. The display has a display panel, a diffuser panel, a reflector panel to reflect light from a backlight unit towards the diffuser panel in order to illuminate the display panel. The supporting structure has a plurality of support pins located in that gap between the diffuser panel and the reflector panel for supporting the diffuser panel. The support pins are either molded with the diffuser panel, fused into the diffuser panel or attached to the diffuser panel using an index matching optical adhesive.
摘要:
A bad block identification method for a memory is provided. The memory includes at least one memory block for storing data. A data decoding function is performed on the data, and it is determined whether the data decoding function was performed successfully. If the data decoding function was not performed successfully, at least one predetermined location in the memory block is checked. It is determined whether the predetermined location is marked by predetermined information. If the predetermined location is not marked by the predetermined information, the memory block is identified as a bad block.