公开(公告)号：US06846690B2

公开(公告)日：2005-01-25

申请号：US10308482

申请日：2002-12-03

Applicant: Alexis Farcy ,  Philippe Coronel ,  Pascal Ancey ,  Joaquin Torres

Inventor： Alexis Farcy ,  Philippe Coronel ,  Pascal Ancey ,  Joaquin Torres

IPC: B81B7/00 ,  B81C3/00 ,  H01L21/00 ,  H01L21/30

CPC classification number: B81C1/0023 ,  B29C2043/5825

Abstract: The fabrication of an integrated circuit includes a first phase of producing an electronic chip and a second phase of producing at least one auxiliary component placed above the chip and of producing a protective cover which covers the auxiliary component. The first phase of producing the chip is effected from a first semiconductor substrate and comprises the formation of a cavity lying in a chosen region of the chip and emerging at the upper surface of the chip. The second production phase includes the production of the auxiliary component from a second semiconductor substrate, separate from the first, and then the placement in the cavity of the auxiliary component supported by the second substrate and the mutual adhesion of the second substrate to the upper surface of the chip lying outside the cavity. The second substrate then also forms the protective cover.

Abstract translation: 集成电路的制造包括制造电子芯片的第一阶段和产生放置在芯片上方的至少一个辅助部件并产生覆盖辅助部件的保护盖的第二阶段。 制造芯片的第一阶段从第一半导体衬底实现，并且包括形成位于芯片的选定区域中并且出现在芯片的上表面处的空腔。 第二生产阶段包括从第二半导体衬底生产辅助部件，与第一半导体衬底分离，然后放置在由第二衬底支撑的辅助部件的空腔中，以及将第二衬底与上表面的相互粘合 的芯片位于腔外。 第二基板然后也形成保护盖。

公开(公告)号：US09201528B2

公开(公告)日：2015-12-01

申请号：US13490347

申请日：2012-06-06

Applicant: Cedrick Chappaz ,  Pascal Ancey ,  Yves Gilot ,  Serge Laffont ,  Olivier Girard

Inventor： Cedrick Chappaz ,  Pascal Ancey ,  Yves Gilot ,  Serge Laffont ,  Olivier Girard

IPC: G06F3/041 ,  G08B6/00 ,  H01L41/08 ,  H01L41/318 ,  G06F3/01

CPC classification number: G06F3/041 ,  G06F3/016 ,  G08B6/00 ,  H01L41/0805 ,  H01L41/318 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49165

Abstract: The disclosure relates to a method of manufacturing vibratory elements, comprising forming on a substrate a multilayer structure by an integrated circuit manufacturing method, the multilayer structure comprising an element susceptible of vibrating when it is subjected to an electrical signal, and electrodes for transmitting an electrical signal to the vibratory element, the vibratory element comprising a mechanical coupling face that is able to transmit to control element vibrations perceptible by a user.

Abstract translation: 本发明涉及一种制造振动元件的方法，包括通过集成电路制造方法在基板上形成多层结构，所述多层结构包括当受到电信号时易于振动的元件，以及用于传输电气的电极 信号到振动元件，振动元件包括机械耦合面，其能够传递到用户可感知的控制元件振动。

公开(公告)号：US07586391B2

公开(公告)日：2009-09-08

申请号：US11845362

申请日：2007-08-27

Applicant: Alexandre Volatier ,  Pascal Ancey ,  Bertrand Dubus

Inventor： Alexandre Volatier ,  Pascal Ancey ,  Bertrand Dubus

IPC: H03H9/54 ,  H03H9/70 ,  H01L41/083

CPC classification number: H03H9/60 ,  H03H9/583 ,  H03H9/584 ,  H03H9/587 ,  H03H9/588 ,  H03H9/589 ,  Y10T29/42

Abstract: A switchable filter may include a first acoustic resonator including first electrodes, and a first resonant layer between the first electrodes and having electrostrictive material. The switchable filter may further include a second acoustic resonator including second electrodes, and a second resonant layer between the second electrodes and having electrostrictive material. The second acoustic resonator may be acoustically coupled with the first acoustic resonator. At least one of the first electrodes and at least one of the second electrodes may be arranged between the first resonant layer and the second resonant layer. The electrostrictive material may adjust a resonance and a filter switching of the first and second acoustic resonators as a function of a control voltage applied to terminals of the first and second acoustic resonators. Two electrodes from one of the first electrodes and the second electrodes may be filter input electrodes. Two electrodes from one of the first electrodes and the second electrodes may be filter output electrodes.

Abstract translation: 可切换滤波器可以包括包括第一电极的第一声谐振器和在第一电极之间并具有电致伸缩材料的第一谐振层。 可切换滤波器还可以包括包括第二电极的第二声谐振器和在第二电极之间并具有电致伸缩材料的第二谐振层。 第二声谐振器可以与第一声谐振器声学耦合。 第一电极中的至少一个和第二电极中的至少一个可以布置在第一谐振层和第二谐振层之间。 电致伸缩材料可以根据施加到第一和第二声谐振器的端子的控制电压来调节第一和第二声谐振器的谐振和滤波器切换。 来自第一电极和第二电极中的一个的两个电极可以是滤波器输入电极。 来自第一电极和第二电极之一的两个电极可以是滤波器输出电极。

公开(公告)号：US20090152998A1

公开(公告)日：2009-06-18

申请号：US12266471

申请日：2008-11-06

Applicant: Nicolas Abele ,  Pascal Ancey ,  Alexandre Talbot ,  Karim Segueni ,  Guillaume Bouche ,  Thomas Skotnicki ,  Stephane Monfray ,  Fabrice Cassett

Inventor： Nicolas Abele ,  Pascal Ancey ,  Alexandre Talbot ,  Karim Segueni ,  Guillaume Bouche ,  Thomas Skotnicki ,  Stephane Monfray ,  Fabrice Cassett

IPC: H01L41/00 ,  H01L21/20

CPC classification number: H03H9/2405 ,  H03H3/0072 ,  H03H2009/02496

Abstract: A microresonator comprising a single-crystal silicon resonant element and at least one activation electrode placed close to the resonant element, in which the resonant element is placed in an opening of a semiconductor layer covering a substrate, the activation electrode being formed in the semiconductor layer and being level at the opening.

Abstract translation: 一种微谐振器，包括单晶硅谐振元件和靠近谐振元件放置的至少一个激活电极，其中谐振元件放置在覆盖衬底的半导体层的开口中，激活电极形成在半导体层中 并在开幕式的水平。

公开(公告)号：US07391143B2

公开(公告)日：2008-06-24

申请号：US11731942

申请日：2007-04-02

Applicant: Guillaume Bouche ,  Gregory Caruyer ,  Pascal Ancey

Inventor： Guillaume Bouche ,  Gregory Caruyer ,  Pascal Ancey

IPC: H01L41/083

CPC classification number: H03H9/175

Abstract: An acoustic resonator assembly includes a layer of high-acoustic-impedance material and a layer of low-acoustic-impedance material made of a low-electrical-permittivity material. This assembly may support the resonator over an interconnect layer or act as a decoupling assembly between two active elements of the resonator. The assembly may alternatively include three low-acoustic impedance layers. Alternatively, the assembly may include three acoustic impedance layers wherein two of the layers are low acoustic impedance layers and the third layer has a higher acoustic impedance than the first two or alternatively is a high-acoustic impedance layer.

Abstract translation: 声谐振器组件包括高声阻抗材料层和由低电容率材料制成的低声阻抗材料层。 该组件可以在互连层上支撑谐振器或者用作谐振器的两个有源元件之间的去耦组件。 组件可以替代地包括三个低声阻抗层。 或者，组件可以包括三个声阻抗层，其中两个层是低声阻抗层，并且第三层具有比前两个更高的声阻抗，或者备选地是高声阻抗层。

公开(公告)号：US07391142B2

公开(公告)日：2008-06-24

申请号：US10537283

申请日：2003-11-27

Applicant: Guillaume Bouche ,  Gregory Caruyer ,  Pascal Ancey

Inventor： Guillaume Bouche ,  Gregory Caruyer ,  Pascal Ancey

IPC: H01L41/08

CPC classification number: H03H9/175

Abstract: A support 7 for an acoustic resonator 4 includes at least one bilayer assembly having a layer of high acoustic impedance material 11 and a layer of low acoustic impedance material 12 made of material having a low electrical permittivity.

Abstract translation: 用于声共振器4的支撑件7包括具有高声阻抗材料层11的至少一个双层组件和由具有低电容率的材料制成的低声阻抗材料层12。

公开(公告)号：US20080129416A1

公开(公告)日：2008-06-05

申请号：US11845362

申请日：2007-08-27

Applicant: Alexandre VOLATIER ,  Pascal Ancey ,  Bertrand Dubus

Inventor： Alexandre VOLATIER ,  Pascal Ancey ,  Bertrand Dubus

IPC: H03H9/00 ,  H01L41/22

CPC classification number: H03H9/60 ,  H03H9/583 ,  H03H9/584 ,  H03H9/587 ,  H03H9/588 ,  H03H9/589 ,  Y10T29/42

Abstract: A switchable filter may include a first acoustic resonator including first electrodes, and a first resonant layer between the first electrodes and having electrostrictive material. The switchable filter may further include a second acoustic resonator including second electrodes, and a second resonant layer between the second electrodes and having electrostrictive material. The second acoustic resonator may be acoustically coupled with the first acoustic resonator. At least one of the first electrodes and at least one of the second electrodes may be arranged between the first resonant layer and the second resonant layer. The electrostrictive material may adjust a resonance and a filter switching of the first and second acoustic resonators as a function of a control voltage applied to terminals of the first and second acoustic resonators. Two electrodes from one of the first electrodes and the second electrodes may be filter input electrodes. Two electrodes from one of the first electrodes and the second electrodes may be filter output electrodes.

Abstract translation: 可切换滤波器可以包括包括第一电极的第一声谐振器和在第一电极之间并具有电致伸缩材料的第一谐振层。 可切换滤波器还可以包括包括第二电极的第二声谐振器和在第二电极之间并具有电致伸缩材料的第二谐振层。 第二声谐振器可以与第一声谐振器声学耦合。 第一电极中的至少一个和第二电极中的至少一个可以布置在第一谐振层和第二谐振层之间。 电致伸缩材料可以根据施加到第一和第二声谐振器的端子的控制电压来调节第一和第二声谐振器的谐振和滤波器切换。 来自第一电极和第二电极之一的两个电极可以是滤波器输入电极。 来自第一电极和第二电极之一的两个电极可以是滤波器输出电极。

公开(公告)号：US20070182284A1

公开(公告)日：2007-08-09

申请号：US11731942

申请日：2007-04-02

Applicant: Guillaume Bouche ,  Gregory Caruyer ,  Pascal Ancey

Inventor： Guillaume Bouche ,  Gregory Caruyer ,  Pascal Ancey

IPC: H01L41/04

CPC classification number: H03H9/175

Abstract: An acoustic resonator assembly includes a layer of high-acoustic-impedance material and a layer of low-acoustic-impedance material made of a low-electrical-permittivity material. This assembly may support the resonator over an interconnect layer or act as a decoupling assembly between two active elements of the resonator. The assembly may alternatively include three low-acoustic impedance layers. Alternatively, the assembly may include three acoustic impedance layers wherein two of the layers are low acoustic impedance layers and the third layer has a higher acoustic impedance than the first two or alternatively is a high-acoustic impedance layer.

Abstract translation: 声谐振器组件包括高声阻抗材料层和由低电容率材料制成的低声阻抗材料层。 该组件可以在互连层上支撑谐振器或者用作谐振器的两个有源元件之间的去耦组件。 组件可以替代地包括三个低声阻抗层。 或者，组件可以包括三个声阻抗层，其中两个层是低声阻抗层，并且第三层具有比前两个更高的声阻抗，或者备选地是高声阻抗层。

公开(公告)号：US20070087513A1

公开(公告)日：2007-04-19

申请号：US11512731

申请日：2006-08-30

Applicant: Guillaume Bouche ,  Fabrice Casset ,  Pascal Ancey

Inventor： Guillaume Bouche ,  Fabrice Casset ,  Pascal Ancey

IPC: H01L21/76 ,  H01L21/20

CPC classification number: H01G5/16 ,  Y10T29/435 ,  Y10T29/49002 ,  Y10T29/4913 ,  Y10T29/49139 ,  Y10T29/49147 ,  Y10T29/49165 ,  Y10T83/0476 ,  Y10T83/0505 ,  Y10T83/051 ,  Y10T83/0577

Abstract: A method for forming a variable capacitor including a conductive strip covering the inside of a cavity, and a flexible conductive membrane placed above the cavity, the cavity being formed according to the steps of: forming a recess in the substrate; placing a malleable material in the recess; having a stamp bear against the substrate at the level of the recess to give the upper part of the malleable material a desired shape; hardening the malleable material; and removing the stamp.

Abstract translation: 一种形成可变电容器的方法，所述可变电容器包括覆盖空腔内部的导电条和位于所述空腔上方的柔性导电膜，所述空腔根据以下步骤形成：在所述基板中形成凹部; 将可延展材料放置在凹槽中; 在凹部的水平处具有抵靠基板的印模，以使可延展材料的上部具有期望的形状; 硬化可延展材料; 并移除邮票。

公开(公告)号：US20050199970A1

公开(公告)日：2005-09-15

申请号：US10895616

申请日：2004-07-21

Applicant: Stephane Monfray ,  Pascal Ancey ,  Thomas Skotnicki ,  Karim Segueni

Inventor： Stephane Monfray ,  Pascal Ancey ,  Thomas Skotnicki ,  Karim Segueni

IPC: B81B3/00 ,  H03H9/24 ,  H01L27/14

CPC classification number: H03H9/2405 ,  H03H2009/02511

Abstract: An electromechanical resonator includes a monocrystalline-silicon substrate (S) provided with an active zone (ZA) delimited by an insulating region, a vibrating beam (10) anchored by at least one of its free ends on the insulating region and including a monocrystalline-silicon vibrating central part (12), and a control electrode (E) arranged above the beam and bearing on the active zone. The central part (12) of the beam is separated from the active zone (ZA) and from the control electrode (E).

Abstract translation: 机电谐振器包括设置有由绝缘区限定的有源区（ZA）的单晶硅衬底（S），由绝缘区上的至少一个自由端锚定的振动束（10），并且包括单晶硅衬底 硅振动中心部分（12）和布置在梁的上方并且承载在活动区上的控制电极（E）。 光束的中心部分（12）与有源区（ZA）和控制电极（E）分离。