公开(公告)号：US5986759A

公开(公告)日：1999-11-16

申请号：US127430

申请日：1998-07-13

Applicant: Donald Michael DeCain ,  Philip C. D. Hobbs ,  Keith Randal Pope

Inventor： Donald Michael DeCain ,  Philip C. D. Hobbs ,  Keith Randal Pope

IPC: G01B9/02

CPC classification number: G01B3/00 ,  G01B9/02068 ,  G01B2290/25

Abstract: Method and apparatus for realizing unusually sensitive and stable interferometric measurement capabilities. The apparatus comprises an optical interferometer with at least two optical outputs, the ratio of whose intensities can vary with a tuning parameter; and at least one detector, each of which is optically connected to the interferometer, and producing in aggregate at least two linearly-independent signals that depend on the light intensity and the tuning parameter, which are combined to produce a first measurement whose sensitivity to light intensity changes is substantially smaller than that of either of the two linearly-independent signals, and a second measurement whose sensitivity to the tuning parameter is substantially smaller than that of either of the two linearly-independent signals.

Abstract translation: 用于实现异常敏感和稳定的干涉测量能力的方法和装置。 该装置包括具有至少两个光学输出的光学干涉仪，其强度可以随着调谐参数而变化; 以及至少一个检测器，其中的每一个光学连接到干涉仪，并且集合地产生取决于光强度和调谐参数的至少两个线性独立的信号，其被组合以产生对光敏感的第一测量 强度变化明显小于两个线性独立信号中任一个的强度变化，而对调谐参数的灵敏度显着小于两个线性独立信号中的任一个的灵敏度的第二测量。

公开(公告)号：US5316970A

公开(公告)日：1994-05-31

申请号：US895181

申请日：1992-06-05

Applicant: John S. Batchelder ,  Vaughn P. Gross ,  Robert A. Gruver ,  Philip C. D. Hobbs ,  Kenneth D. Murray

Inventor： John S. Batchelder ,  Vaughn P. Gross ,  Robert A. Gruver ,  Philip C. D. Hobbs ,  Kenneth D. Murray

IPC: B01J19/00 ,  B01J19/12 ,  H01L21/00 ,  H01L21/304 ,  H05F3/06

CPC classification number: H01L21/67028 ,  H05F3/06 ,  Y10S430/138 ,  Y10S438/909

Abstract: Ionization of air without the use of corona discharge tips, thereby to avoid the generation of particulates from corrosion of the corona tips, is accomplished by use of a laser beam focussed to a small focal volume of intense electric field adjacent a semiconductor chip. The electric field is sufficiently intense to ionize air. In the manufacture of a semiconductor circuit chip, during those steps which are conducted in an air environment, opportunity exists to remove from a surface of a chip, or wafer, charge acquired during the manufacturing process. The ionized air is passed along the chip surface. Ions in the air discharge local regions of the chip surface which have become charged by steps of a manufacturing process. By way of further embodiment of the invention, the ionization may be produced by injection of molecules of water into the air, which molecules are subsequently ionized by a laser beam and directed toward the chip via a light shield with the aid of a magnetic field.

Abstract translation: 通过使用聚焦于与半导体芯片相邻的强电场的小焦点体积的激光束来实现空气的离子化，而不使用电晕放电尖端，从而避免由于电晕尖端的腐蚀而产生微粒。 电场足够强以使空气电离。 在半导体电路芯片的制造中，在空气环境中进行的那些步骤中，存在从制造过程中获取的芯片或晶片的表面去除电荷的机会。 电离空气沿芯片表面通过。 芯片表面的空气放电局部区域中的离子通过制造过程的步骤而被充电。 通过本发明的进一步的实施方式，电离可以通过将水分子注入到空气中来产生，该分子随后通过激光束被电离，并借助于磁场通过光屏指向芯片。

公开(公告)号：US5298975A

公开(公告)日：1994-03-29

申请号：US767300

申请日：1991-09-27

Applicant: Henri A. Khoury ,  Calvin K. Chi ,  Joachim G. Clabes ,  Philip C. D. Hobbs ,  Laszlo Landstein ,  Martin P. O'Boyle ,  Hemantha K. Wickramasinghe ,  Sandra K. Wolterman

Inventor： Henri A. Khoury ,  Calvin K. Chi ,  Joachim G. Clabes ,  Philip C. D. Hobbs ,  Laszlo Landstein ,  Martin P. O'Boyle ,  Hemantha K. Wickramasinghe ,  Sandra K. Wolterman

IPC: G01B7/34 ,  G01B7/00 ,  G01B11/00 ,  G01B11/02 ,  G01B11/30 ,  G01B21/02 ,  G01B21/30 ,  G01M11/00 ,  G01N37/00 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q30/02 ,  G01Q60/24 ,  G03F7/20 ,  G01B11/04

CPC classification number: G03F7/70633 ,  B82Y35/00 ,  G01B11/02 ,  G01Q20/02 ,  G01Q30/025 ,  Y10S977/87

Abstract: An integrated scanning force microprobe and optical microscopy metrology system is disclosed, that measures the depth and width of a trench in a sample. The probe remains fixed while the sample is moved relative to the probe. The system detects the proximity of the probe to a sample and to the side walls of the trench, providing output signals indicating the vertical and transverse relationship of the probe to the sample. The system adjusts the relative position of the sample vertically and transversely as a function of the output signals. Variety of probes can be used with this system to detect the depth and width of the trench. The probe should have at least one protuberance extending down to sense the bottom of the trench. The tip of the probe can have Lateral protuberances that can extend in opposite directions (across the width of the trench) from the probe to detect the side walls of the trench. Forces on the protuberances are measured to determine the depth and the location of the side walls of the trench.

Abstract translation: 公开了一种集成的扫描力微探针和光学显微术测量系统，其测量样品中的沟槽的深度和宽度。 当样品相对于探针移动时，探针保持固定。 系统检测探头与样品和沟槽侧壁的接近度，提供指示探针与样品的垂直和横向关系的输出信号。 该系统根据输出信号垂直和横向地调整样本的相对位置。 该系统可以使用各种探头来检测沟槽的深度和宽度。 探针应具有向下延伸的至少一个突起以感测沟槽的底部。 探针的尖端可以具有横向突起，其可以从探针沿相反方向（跨越沟槽的宽度）延伸以检测沟槽的侧壁。 测量突起上的力以确定沟槽的侧壁的深度和位置。

公开(公告)号：US5294806A

公开(公告)日：1994-03-15

申请号：US17214

申请日：1993-02-12

Applicant: John S. Batchelder ,  Donald M. DeCain ,  Philip C. D. Hobbs

Inventor： John S. Batchelder ,  Donald M. DeCain ,  Philip C. D. Hobbs

IPC: G01N15/10 ,  G01N15/02 ,  G01N15/14 ,  G01N21/21 ,  G01N21/47 ,  G01N21/94 ,  G01N15/06

CPC classification number: G01N15/0205 ,  G01N21/94 ,  G01N15/1434 ,  G01N2015/0238 ,  G01N2015/145

Abstract: A particle detector that determines the presence of particles in an enclosed volume includes a laser that directs an optical beam to a beam splitter that produces first and second beams. An optical system directs the first beam into the enclosed volume. A detector is positioned adjacent the volume in order to receive back scattered optical energy arising from a particle in the volume encountering the first beam. The back scattered optical energy and the second beam are optically combined so as to overlap in a region and in the overlap region the back scattered optical energy and second beam are in the same state of focus, of the same polarization and are substantially parallel. A detector located at the overlap region produces an electrical signal indicative of the intensity of the back scattered light. A signal processor analyzes the electrical signal to determine the presence of the particle.

Abstract translation: 确定封闭体积中颗粒的存在的粒子检测器包括将光束引导到产生第一和第二光束的分束器的激光器。 光学系统将第一光束引导到封闭的体积中。 检测器邻近体积定位，以便接收从遇到第一光束的体积中的颗粒产生的反向散射的光能。 后散射光能和第二光束被光学组合以便在区域中重叠，并且在重叠区域中，后散射光能和第二光束处于相同偏振的相同聚焦状态并且基本平行。 位于重叠区域的检测器产生指示背散射光强度的电信号。 信号处理器分析电信号以确定颗粒的存在。