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公开(公告)号：US20240151744A1
公开(公告)日：2024-05-09
申请号：US18416771
申请日：2024-01-18
Applicant: TECHNOPROBE S.P.A.
Inventor： Flavio MAGGIONI
CPC classification number: G01R1/07378 , G01R1/06772 , G01R1/07328 , G01R1/07357 , G01R1/07371
Abstract: A testing head apt to verify the operation of a device under test integrated on a semiconductor wafer includes a plurality of contact elements, each including a body that extends between a first end portion and a second end portion, and a guide provided with a plurality of guide holes apt to house the contact elements. The guide includes a conductive portion that includes and electrically connects the holes of a group of guide holes to each other and is apt to contact a corresponding group of contact elements apt to carry a same type of signal.
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公开(公告)号：US11808788B2
公开(公告)日：2023-11-07
申请号：US17325783
申请日：2021-05-20
Applicant: TECHNOPROBE S.P.A.
Inventor： Flavio Maggioni
CPC classification number: G01R1/07378 , G01R1/06772 , G01R1/07328 , G01R1/07357 , G01R1/07371
Abstract: A testing head apt to verify the operation of a device under test integrated on a semiconductor wafer includes a plurality of contact elements, each including a body that extends between a first end portion and a second end portion, and a guide provided with a plurality of guide holes apt to house the contact elements. The guide includes a conductive portion that includes and electrically connects the holes of a group of guide holes to each other and is apt to contact a corresponding group of contact elements apt to carry a same type of signal.
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公开(公告)号：US20230288447A1
公开(公告)日：2023-09-14
申请号：US18005880
申请日：2021-07-08
Applicant: TECHNOPROBE S.P.A.
Inventor： Stefano FELICI , Fabio MORGANA , Roberto CRIPPA
CPC classification number: G01R1/06738 , G01R1/06761 , H01R13/2492
Abstract: A contact probe for a probe head for test equipment of electronic devices is provided. The contact probe includes a first end portion and a second end portion configured to realize a contact with suitable contact structures, and a body portion extended along a longitudinal development axis between respective the first and second end portions. The first end portion includes a base portion, a peripherally protruding element protruding from the base portion, and a hollow part having a base at a surface of the base portion and being surrounded by the peripherally protruding element. In addition, the peripherally protruding element is configured to penetrate into the contact structures.
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公开(公告)号：US11415600B2
公开(公告)日：2022-08-16
申请号：US17139782
申请日：2020-12-31
Applicant: Technoprobe S.p.A.
Inventor： Riccardo Vettori
Abstract: A probe card for testing a device under test having a plurality of contact pads includes a support plate having first contact pads thereon. A flexible membrane has a first face and a peripheral portion including second contact pads thereon. A plurality of contact probes are associated with a first face of the flexible membrane and are configured to abut onto the plurality of contact pads of the device under test. A sliding contact area includes: the first contact pads formed on the support plate; the second contact pads formed on the peripheral portion of the flexible membrane, the peripheral portion of the flexible membrane configured to come in pressing contact onto the support plate at the sliding contact area. A pressing element contacts the peripheral portion of the flexible membrane at the sliding contact area, and the pressing element puts the second contact pads into pressing contact with the first contact pads.
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公开(公告)号：US20210318355A1
公开(公告)日：2021-10-14
申请号：US17357833
申请日：2021-06-24
Applicant: Technoprobe S.p.A.
Inventor： Stefano FELICI
IPC: G01R1/073
Abstract: A probe head for testing a device under test integrated on a semiconductor wafer includes a plurality of contact probes, each having a first end and a second end, and at least one first lower guide and one second lower guide at the first end. The guides are parallel to each other and have a respective plurality of first and second guide holes for slidingly housing the contact probes. At least one third lower guide is substantially parallel to the first lower guide and to the second lower guide and includes a plurality of third guide holes for slidingly housing the contact probes. The guide holes are disposed in a shifted arrangement to eliminate a scrub movement of the first ends of each contact probe of the probe head.
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Patent Agency Ranking
公开(公告)号：US20210063478A1
公开(公告)日：2021-03-04
申请号：US17098179
申请日：2020-11-13
Applicant: Technoprobe S.p.A.
Inventor： Riccardo VETTORI
Abstract: A probe card for a test equipment of electronic devices includes a flexible membrane configured to carry high frequency signals between a device under test and a support plate. The flexible membrane is connected to the support plate through a peripheral zone, and a damping structure is arranged between the support plate and the flexible membrane. A plurality of micro contact probes include a body extending between a first end and a second end, and the second end is configured to abut onto contact pads of the device under test, and the damping structure and the first ends of the micro contact probes are in contact with opposite faces of a same contact zone of the flexible membrane. The flexible membrane includes at least one weakening zone arranged between the contact zone and the peripheral zone.
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公开(公告)号：US10782319B2
公开(公告)日：2020-09-22
申请号：US16219783
申请日：2018-12-13
Applicant: TECHNOPROBE S.P.A.
Inventor： Roberto Crippa , Stefano Felici
Abstract: A probe card for testing of electronic devices comprises a testing head with plural contact probes inserted into guide holes of an upper guide and a lower guide, and a space transformer, each of the contact probes having a first terminal portion projecting from the lower guide with a first length and ending with a contact tip adapted to abut onto a respective contact pad of a device to be tested, and a second terminal portion projecting from the upper guide with a second length and ending with a contact head adapted to abut onto a contact pad of the space transformer. The probe card comprises a spacer element interposed between the space transformer and the upper guide and removable to adjust the first length of the first terminal portion by changing the second length of the second terminal portion and approaching the upper guide and the space transformer.
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公开(公告)号：US10551433B2
公开(公告)日：2020-02-04
申请号：US15703614
申请日：2017-09-13
Applicant: TECHNOPROBE S.p.A.
Inventor： Roberto Crippa , Raffaele Vallauri , Emanuele Bertarelli , Daniele Perego
Abstract: A testing head for testing a device includes a couple of plate-like supports separated from each other by a suitable gap and provided with respective guide holes to slidably house a plurality of contact probes, each including a rod-like body extending along a preset longitudinal axis between a first and second ends, the first end being a contact tip that abuts a contact pad of the device and the second end being a contact head that abuts a contact pad of a space transformer. At least one of the supports comprises a couple of guides that are parallel to each other and separated by an additional gap and provided with corresponding guide holes. Each contact probe comprises a protruding element or stopper originating from a lateral wall and realized in correspondence of one wall of a guide hole of the guides contacting the lateral wall of the contact probe.
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29.发明授权公开(公告)号：US10509056B2
公开(公告)日：2019-12-17
申请号：US15257443
申请日：2016-09-06
Applicant: Technoprobe S.p.A.
Inventor： Riccardo Liberini , Raffaele Vallauri , Giuseppe Crippa
IPC: G01R1/073
Abstract: A probe card for a testing apparatus of electronic devices comprises at least one testing head which houses a plurality of contact probes, each contact probe having at least one contact tip suitable to abut onto contact pads of a device under test, and a support plate of the testing head associated with a stiffener and an intermediate support, connected to the support plate and suitable to provide a spatial transformation of the distances between contact pads made on opposite sides thereof. Conveniently, the probe card comprises a support which is joined to the intermediate support, which is made of a material compatible with the printed circuit board technologies and has a coefficient of thermal expansion greater than 10×10−6° C.−1, the support being made of a metal material having a coefficient of thermal expansion lower than 6×10−6° C.−1.
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30.发明申请公开(公告)号：US20190302185A1
公开(公告)日：2019-10-03
申请号：US16442394
申请日：2019-06-14
Applicant: TECHNOPROBE S.P.A.
Inventor： Flavio MAGGIONI
IPC: G01R31/319 , G01R1/073 , G01R3/00
Abstract: A probe head comprises a plate-shaped support including respective pluralities of guide holes, a plurality of contact probes being slidingly housed in the respective pluralities of guide holes and including at least a first group of contact probes being apt to carry only one type of signal chosen between ground and power supply signals, a conductive portion realized on the support and including a plurality of the guide holes housing the contact probes of the first group, and at least one filtering capacitor having at least one capacitor plate being electrically connected to the conductive portion, the conductive portion electrically connecting the contact probes of the first group.
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