MEMS mirror system for laser printing applications
    21.
    发明授权
    MEMS mirror system for laser printing applications 有权
    用于激光打印应用的MEMS镜系统

    公开(公告)号:US08361331B2

    公开(公告)日:2013-01-29

    申请号:US13009964

    申请日:2011-01-20

    CPC classification number: G02B26/0841 B41J2/471 G02B26/105

    Abstract: A MEMS mirror for a laser printing application includes providing a CMOS substrate including a pair of electrodes, and providing a reflecting mirror moveable over the substrate and the electrodes. Voltages applied to the electrodes create an electrostatic force causing an end of the mirror to be attracted to the substrate. A precise position of the mirror can be detected and controlled by sensing a change in capacitance between the mirror ends and the underlying electrodes.

    Abstract translation: 用于激光打印应用的MEMS镜包括提供包括一对电极的CMOS衬底,以及提供可移动到衬底和电极上的反射镜。 施加到电极的电压产生静电力,导致反射镜的一端被吸引到基板。 可以通过感测镜端和底层电极之间的电容变化来检测和控制反射镜的精确位置。

    Method and system for optical MEMS with flexible landing structures
    22.
    发明授权
    Method and system for optical MEMS with flexible landing structures 有权
    具有柔性着陆结构的光学MEMS的方法和系统

    公开(公告)号:US08314984B2

    公开(公告)日:2012-11-20

    申请号:US12031388

    申请日:2008-02-14

    CPC classification number: G02B26/0841 Y10T29/49826

    Abstract: An optical deflection device for a display application includes a semiconductor substrate comprising an upper surface region defining an upper surface plane. The optical deflection device also includes one or more electrode devices provided overlying the upper surface region and a hinge device including a silicon material and coupled to the upper surface region at a predetermined height above the upper surface plane. The optical deflection device further comprises a plurality of landing pads including a silicon material and coupled to the upper surface region at the predetermined height from the upper surface plane and a mirror structure. The mirror structure includes a post portion coupled to the hinge device and a mirror plate portion coupled to the post portion.

    Abstract translation: 用于显示器应用的光学偏转装置包括:半导体衬底,其包括限定上表面的上表面区域。 光学偏转装置还包括设置在上表面区域上的一个或多个电极装置和包括硅材料的铰链装置,并且在上表面平面上方的预定高度处联接到上表面区域。 光学偏转装置还包括多个着陆焊盘,其包括硅材料,并且在与上表面平面预定高度处的上表面区域和反射镜结构相耦合。 镜结构包括联接到铰链装置的柱部分和联接到柱部分的镜板部分。

    Thin-film bulk acoustic resonators having perforated resonator body supports that enhance quality factor
    24.
    发明授权
    Thin-film bulk acoustic resonators having perforated resonator body supports that enhance quality factor 有权
    具有穿孔谐振器体支架的薄膜体声共振器可以提高品质因数

    公开(公告)号:US08106724B1

    公开(公告)日:2012-01-31

    申请号:US12508257

    申请日:2009-07-23

    Abstract: Micro-electromechanical acoustic resonators include a substrate having a cavity therein and a resonator body suspended over the cavity. The resonator body is anchored on opposing sides thereof (by support beams) to first and second portions of the substrate. These first and second portions of the substrate, which extend over the cavity as first and second ledges, respectively, each have at least one perforation therein disposed over the cavity. These perforations may be open or filled. The first and second ledges are formed of a first material (e.g., silicon) and the first and second ledges are filled with a second material having a relatively high acoustic impedance relative to the first material. This second material may include a material selected from a group consisting of tungsten (W), copper (Cu), molybdenum (Mo).

    Abstract translation: 微机电声谐振器包括其中具有空腔的基板和悬在空腔上的谐振器体。 谐振器主体被固定在基板的第一和第二部分的相对侧(通过支撑梁)上。 基板的这些第一和第二部分分别在第一和第二凸缘之上延伸到空腔上,每个在其上设置有至少一个穿孔。 这些穿孔可以是开放的或填充的。 第一和第二凸缘由第一材料(例如硅)形成,并且第一和第二凸缘由相对于第一材料具有相对较高的声阻抗的第二材料填充。 该第二材料可以包括选自钨(W),铜(Cu),钼(Mo)的材料。

    Load Aware Power Controlling
    25.
    发明申请
    Load Aware Power Controlling 有权
    负载感知功率控制

    公开(公告)号:US20110275331A1

    公开(公告)日:2011-11-10

    申请号:US13143473

    申请日:2009-01-07

    Abstract: A User Equipment Apparatus is described, which include a Load Factor Determining Device and a Calculating Device. The Load Factor Determining Device is adapted for determining at least one load factor value of a neighbour sector. The Calculating Device is adapted for calculating a transmit power of the User Equipment Apparatus such that the at least one load factor value of a sector is considered.

    Abstract translation: 描述了一种用户设备装置,其包括负载因子确定装置和计算装置。 负载因子确定装置适于确定相邻扇区的至少一个负载因子值。 计算装置适于计算用户设备设备的发射功率,使得考虑扇区的至少一个负载因子值。

    MEMS mirror system for laser printing applications
    26.
    发明授权
    MEMS mirror system for laser printing applications 有权
    用于激光打印应用的MEMS镜系统

    公开(公告)号:US07898561B2

    公开(公告)日:2011-03-01

    申请号:US12019822

    申请日:2008-01-25

    CPC classification number: G02B26/0841 B41J2/471 G02B26/105

    Abstract: A MEMS mirror for a laser printing application includes providing a CMOS substrate including a pair of electrodes, and providing a reflecting mirror moveable over the substrate and the electrodes. Voltages applied to the electrodes create an electrostatic force causing an end of the mirror to be attracted to the substrate. A precise position of the mirror can be detected and controlled by sensing a change in capacitance between the mirror ends and the underlying electrodes.

    Abstract translation: 用于激光打印应用的MEMS镜包括提供包括一对电极的CMOS衬底,以及提供可移动到衬底和电极上的反射镜。 施加到电极的电压产生静电力,导致反射镜的一端被吸引到基板。 可以通过感测镜端和底层电极之间的电容变化来检测和控制反射镜的精确位置。

    Micro-electromechanical devices having variable capacitors therein that compensate for temperature-induced frequency drift in acoustic resonators
    27.
    发明授权
    Micro-electromechanical devices having variable capacitors therein that compensate for temperature-induced frequency drift in acoustic resonators 有权
    具有可变电容器的微机电装置,其补偿声谐振器中的温度感应频率漂移

    公开(公告)号:US07834524B2

    公开(公告)日:2010-11-16

    申请号:US12404830

    申请日:2009-03-16

    CPC classification number: H03H9/172 H03H2009/241 Y10T29/42

    Abstract: Micro-electromechanical devices include a temperature-compensation capacitor and a thin-film bulk acoustic resonator having a first terminal electrically coupled to an electrode of the temperature-compensation capacitor. The temperature-compensation capacitor includes a bimorph beam having a first electrode thereon and a second electrode extending opposite the first electrode. This bimorph beam is configured to yield an increase in spacing between the first and second electrodes in response to an increase in temperature of the micro-electromechanical device. This increase in spacing between the first and second electrodes leads to a decrease in capacitance of the temperature-compensation capacitor. Advantageously, this decrease in capacitance can be used to counteract a negative temperature coefficient of frequency associated with the thin-film bulk acoustic resonator, and thereby render the resonant frequency of the micro-electromechanical device more stable in response to temperature fluctuations.

    Abstract translation: 微机电装置包括温度补偿电容器和具有电耦合到温度补偿电容器的电极的第一端子的薄膜体声波谐振器。 温度补偿电容器包括其上具有第一电极的双压电晶片和与第一电极相对延伸的第二电极。 该双压电晶片梁被配置为响应于微机电装置的温度升高而产生第一和第二电极之间的间隔的增加。 这种第一和第二电极之间的间隔增加导致温度补偿电容器的电容降低。 有利地,电容的这种减小可以用于抵消与薄膜体声波谐振器相关联的频率的负温度系数,从而使得微机电装置的谐振频率响应于温度波动而更加稳定。

    SYSTEM AND METHOD OF SENSING AND REMOVING RESIDUAL CHARGE FROM A PROCESSED WAFER
    28.
    发明申请
    SYSTEM AND METHOD OF SENSING AND REMOVING RESIDUAL CHARGE FROM A PROCESSED WAFER 有权
    从处理过的波形传感和去除残留电荷的系统和方法

    公开(公告)号:US20100271744A1

    公开(公告)日:2010-10-28

    申请号:US12505381

    申请日:2009-07-17

    CPC classification number: H01L21/6833 H01L21/68742 H01L22/14

    Abstract: Systems and methods for removing residual charge from a processed wafer are described. Removal of residual charge eliminates de-chucking failure that may break or damage the wafer. Residual charge is removed by applying a reverse polarity discharging DC voltage to an electrode embedded in an electrostatic chuck (ESC) supporting the wafer, and providing an outlet to the residual charge to ground via a lift pin assembly. Lift pin assembly is kept at the same potential with respect to a pedestal of the ESC to avoid sparking during the application of RF power to generate plasma. A residual charge sensor is included to sense and measure the amount of residual charge, so that the parameters of the reverse polarity discharging voltage can be adjusted in a subsequent de-chucking operation.

    Abstract translation: 描述了从处理的晶片去除残余电荷的系统和方法。 去除残留电荷可消除可能破坏或损坏晶片的去夹紧故障。 通过对嵌入在支撑晶片的静电卡盘(ESC)中的电极施加反向极性放电DC电压并且通过升降销组件向剩余电荷提供出口,从而去除残余电荷。 提升销组件相对于ESC的基座保持在相同的电位,以避免在施加RF功率以产生等离子体时产生火花。 包括剩余电荷传感器以感测和测量剩余电荷的量,从而可以在随后的去夹紧操作中调整反极性放电电压的参数。

    FABRICATION OF A HIGH FILL RATIO SILICON SPATIAL LIGHT MODULATOR
    29.
    发明申请
    FABRICATION OF A HIGH FILL RATIO SILICON SPATIAL LIGHT MODULATOR 有权
    高比例硅太阳能光调制器的制造

    公开(公告)号:US20100112492A1

    公开(公告)日:2010-05-06

    申请号:US12690878

    申请日:2010-01-20

    CPC classification number: G02B26/0841

    Abstract: A method for forming an optical deflection device includes providing a semiconductor substrate comprising an upper surface region and a plurality of drive devices within one or more portions of the semiconductor substrate. The upper surface region includes one or more patterned structure regions and at least one open region to expose a portion of the upper surface region to form a resulting surface region. The method also includes forming a planarizing material overlying the resulting surface region to fill the at least one open region and cause formation of an upper planarized layer using the fill material. The method further includes forming a thickness of silicon material at a temperature of less than 300° C. to maintain a state of the planarizing material.

    Abstract translation: 一种形成光偏转装置的方法包括提供半导体衬底的一个或多个部分内包括上表面区域和多个驱动装置的半导体衬底。 上表面区域包括一个或多个图案化结构区域和至少一个开放区域,以暴露上表面区域的一部分以形成所得表面区域。 该方法还包括形成覆盖所得表面区域的平坦化材料以填充至少一个开放区域,并且使用填充材料形成上部平坦化层。 该方法还包括在小于300℃的温度下形成硅材料的厚度以保持平坦化材料的状态。

    Sensor-Assisted Motion Estimation for Efficient Video Encoding
    30.
    发明申请
    Sensor-Assisted Motion Estimation for Efficient Video Encoding 审中-公开
    用于高效视频编码的传感器辅助运动估计

    公开(公告)号:US20100079605A1

    公开(公告)日:2010-04-01

    申请号:US12568078

    申请日:2009-09-28

    CPC classification number: H04N5/225 H04N19/527

    Abstract: An apparatus comprising a sensor assisted video encoder (SaVE) configured to estimate global motion in a video sequence using sensor data, at least one sensor coupled to the SaVE and configured to generate the sensor data, and a camera equipped device coupled to the SaVE and the sensor and configured to capture the video sequence, wherein the SaVE estimates local motion in the video sequence based on the estimated global motion to reduce encoding time. Also included is a method comprising obtaining a video sequence, obtaining sensor data synchronized with the video sequence, converting the sensor data into global motion predictors, using the global motion predictors to reduce the search range for local motion estimation, and using a search algorithm for local motion estimation based on the reduced search range.

    Abstract translation: 一种装置,包括被配置为使用传感器数据估计视频序列中的全局运动的传感器辅助视频编码器(SaVE),耦合到所述SaVE并被配置为生成所述传感器数据的至少一个传感器,以及耦合到所述SaVE和 所述传感器并且被配置为捕获所述视频序列,其中所述SaVE基于估计的全局运动估计所述视频序列中的局部运动,以减少编码时间。 还包括获得视频序列,获得与视频序列同步的传感器数据,使用全局运动预测器将传感器数据转换为全局运动预测器的方法,以减少用于局部运动估计的搜索范围,以及使用搜索算法 基于缩小搜索范围的局部运动估计。

Patent Agency Ranking