公开(公告)号：US20160153779A1

公开(公告)日：2016-06-02

申请号：US14531123

申请日：2014-11-03

Applicant: Analog Devices, Inc.

Inventor： Gaurav Vohra ,  Jeffrey A. Gregory

IPC: G01C19/5698

CPC classification number: G01C19/5698 ,  G01C19/5684 ,  G01P15/097 ,  G01P15/125 ,  G01P15/18

Abstract: Methods and apparatus for sensing linear acceleration with a MEMS resonator mass, alone, or concurrently with sensing rate of rotation. A resonator mass, which may be a disk or a ring structure, is driven at a resonance frequency of one of the vibration modes of the resonator mass. The amplitude of vibration of that mode is sensed by a set of at least two drive-sense electrodes disposed at opposing positions across the resonator mass. A linear acceleration is derived based at least on a difference between signals of the opposing electrodes. Linear acceleration may be sensed in multiple orthogonal dimensions using multiple pairs of opposing electrodes. Rotation rate may be derived concurrently by sensing the energy coupled into an orthogonal mode of the resonator mass.

Abstract translation: 用于单独使用MEMS谐振器质量感测线性加速度的方法和装置，或与感测转速相同。 谐振器块可以是盘或环形结构，以共振器质量的振动模式之一的谐振频率被驱动。 该模式的振动的振幅由布置在谐振器块的相对位置处的至少两个驱动感测电极的集合来感测。 至少基于相对电极的信号之间的差异导出线性加速度。 可以使用多对相对电极在多个正交维度上感测线性加速度。 可以通过感测耦合到谐振器质量的正交模式中的能量同时导出旋转速率。

公开(公告)号：US11746004B2

公开(公告)日：2023-09-05

申请号：US17668326

申请日：2022-02-09

Applicant: Analog Devices, Inc.

Inventor： Charles Blackmer ,  Jeffrey A. Gregory ,  Nikolay Pokrovskiy ,  Bradley C. Kaanta

IPC: B81C1/00 ,  G01C19/5755 ,  G01P15/08

CPC classification number: B81C1/00063 ,  B81C1/00166 ,  G01C19/5755 ,  G01P15/0802 ,  B81B2201/0235 ,  B81B2201/0242

Abstract: Microelectromechanical system (MEMS) inertial sensors exhibiting reduced parasitic capacitance are described. The reduction in the parasitic capacitance may be achieved by forming localized regions of thick dielectric material. These localized regions may be formed inside trenches. Formation of trenches enables an increase in the vertical separation between a sense capacitor and the substrate, thereby reducing the parasitic capacitance in this region. The stationary electrode of the sense capacitor may be placed between the proof mass and the trench. The trench may be filled with a dielectric material. Part of the trench may be filled with air, in some circumstances, thereby further reducing the parasitic capacitance. These MEMS inertial sensors may serve, among other types of inertial sensors, as accelerometers and/or gyroscopes. Fabrication of these trenches may involve lateral oxidation, whereby columns of semiconductor material are oxidized.

公开(公告)号：US11519726B2

公开(公告)日：2022-12-06

申请号：US16906484

申请日：2020-06-19

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  Laura Cornelia Popa

IPC: G01C19/5769 ,  G01C19/5733

Abstract: Couplers for selectively coupling in-plane and out-of-plane motion between moving masses are provided herein. In particular, aspects of the present application provide for a coupler configured to couple in-plane motion between moving masses while decoupling out-of-plane motion between the moving masses. The selective couplers as described herein may be used in a device, such as a microelectromechanical systems (MEMS) inertial sensor. In some embodiments, a MEMS inertial sensor comprises a first mass configured to move in-plane, a second mass configured to move in-plane and out-of-plane, and a coupler coupling the first and second masses and comprising two levers coupled to an anchor point by respective tethers and coupled to each other by a spring.

公开(公告)号：US10746548B2

公开(公告)日：2020-08-18

申请号：US14532256

申请日：2014-11-04

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  Igor P. Prikhodko

IPC: G01C19/5677 ,  G01C19/5684 ,  G01C19/567

Abstract: Novel structural features applicable to a variety of inertial sensors. A composite ring composed of concentric subrings is supported by a compliant support structure suspending the composite ring relative to a substrate. The compliant support structure may either be interior or exterior to the composite ring. The compliant support may be composed of multiple substantially concentric rings coupled to neighboring rings by transverse members regularly spaced at intervals that vary with radius relative to a central axis of symmetry. Subrings making up the composite ring may vary in width so as to provide larger displacement amplitudes at intermediate radii, for example. In other embodiments, electrodes are arranged to reduce sensitivity to vibration and temperature, and shock stops are provided to preclude shorting in response to shocks.

公开(公告)号：US10081535B2

公开(公告)日：2018-09-25

申请号：US13926384

申请日：2013-06-25

Applicant: Analog Devices, Inc.

Inventor： Li Chen ,  Thomas Kieran Nunan ,  Kuang L. Yang ,  Jeffrey A. Gregory

IPC: B81B7/00 ,  B81C1/00 ,  H01L21/02 ,  H01L25/065

CPC classification number: B81B7/0029 ,  B81C1/00238 ,  B81C1/00349 ,  H01L21/02126 ,  H01L25/0657 ,  H01L2224/81801 ,  H01L2924/10253 ,  H01L2924/1461

Abstract: One or more conductive shielding plates are formed in a standard ASIC wafer top metal layer, e.g., for blocking cross-talk from MEMS device structure(s) on the MEMS wafer to circuitry on the ASIC wafer when the MEMS device is capped directly by the ASIC wafer in a wafer-level chip scale package. Generally speaking, a shielding plate should be at least slightly larger than the MEMS device structure it is shielding (e.g., a movable MEMS structure such as an accelerometer proof mass or a gyroscope resonator), and the shielding plate cannot be in contact with the MEMS device structure during or after wafer bonding. Thus, a recess is formed to ensure that there is sufficient cavity space away from the top surface of the MEMS device structure. The shielding plate is electrically conductive and can be biased, e.g., to the same voltage as the opposing MEMS device structure in order to maintain zero electrostatic attraction force between the MEMS device structure and the shielding plate.

公开(公告)号：US20180172445A1

公开(公告)日：2018-06-21

申请号：US15383366

申请日：2016-12-19

Applicant: Analog Devices, Inc.

Inventor： Igor P. Prikhodko ,  John A. Geen ,  Jeffrey A. Gregory

IPC: G01C19/567 ,  G01C19/5712

CPC classification number: G01C19/574

Abstract: Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit anti-phase motion. The couplers move in opposite directions of each other, such that one coupler on one side of the movable masses moves in a first linear direction and another coupler on the opposite side of the movable masses moves in a second linear direction opposite the first linear direction. The couplers ensure proper anti-phase motion of the masses.

公开(公告)号：US09599471B2

公开(公告)日：2017-03-21

申请号：US14531123

申请日：2014-11-03

Applicant: Analog Devices, Inc.

Inventor： Gaurav Vohra ,  Jeffrey A. Gregory

IPC: G01C19/56 ,  G01C19/5698 ,  G01C19/5684 ,  G01P15/097 ,  G01P15/125 ,  G01P15/18

CPC classification number: G01C19/5698 ,  G01C19/5684 ,  G01P15/097 ,  G01P15/125 ,  G01P15/18

Abstract: Methods and apparatus for sensing linear acceleration with a MEMS resonator mass, alone, or concurrently with sensing rate of rotation. A resonator mass, which may be a disk or a ring structure, is driven at a resonance frequency of one of the vibration modes of the resonator mass. The amplitude of vibration of that mode is sensed by a set of at least two drive-sense electrodes disposed at opposing positions across the resonator mass. A linear acceleration is derived based at least on a difference between signals of the opposing electrodes. Linear acceleration may be sensed in multiple orthogonal dimensions using multiple pairs of opposing electrodes. Rotation rate may be derived concurrently by sensing the energy coupled into an orthogonal mode of the resonator mass.

公开(公告)号：US20160123735A1

公开(公告)日：2016-05-05

申请号：US14532256

申请日：2014-11-04

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  Igor P. Prikhodko

IPC: G01C19/5677

Abstract: Novel structural features applicable to a variety of inertial sensors. A composite ring composed of concentric subrings is supported by a compliant support structure suspending the composite ring relative to a substrate. The compliant support structure may either be interior or exterior to the composite ring. The compliant support may be composed of multiple substantially concentric rings coupled to neighboring rings by transverse members regularly spaced at intervals that vary with radius relative to a central axis of symmetry. Subrings making up the composite ring may vary in width so as to provide larger displacement amplitudes at intermediate radii, for example. In other embodiments, electrodes are arranged to reduce sensitivity to vibration and temperature, and shock stops are provided to preclude shorting in response to shocks.

Abstract translation: 新颖的结构特征适用于各种惯性传感器。 由同心子环组成的复合环由相对于衬底悬挂复合环的柔性支撑结构支撑。 柔性支撑结构可以在复合环的内部或外部。 顺应性支撑件可以由多个基本上同心的环组成，所述多个基本上同心的环通过相对于中心对称轴线以半径相对规则地间隔开的横向构件联接到相邻环。 构成复合环的子弹的宽度可以变化，以便例如在中间半径处提供较大的位移振幅。 在其他实施例中，电极被布置成降低对振动和温度的敏感性，并且提供冲击停止以防止响应于冲击的短路。