Biosensor electrophoresis
    21.
    发明授权
    Biosensor electrophoresis 失效
    生物传感器电泳

    公开(公告)号:US07622027B1

    公开(公告)日:2009-11-24

    申请号:US11214279

    申请日:2005-08-29

    CPC classification number: G01N27/453

    Abstract: The invention provides methods of detecting, purifying, quantifying, and separating molecules using an electrophoresis adapted biosensor.

    Abstract translation: 本发明提供使用电泳适配生物传感器检测,纯化,定量和分离分子的方法。

    Flexural plate wave sensor and array
    28.
    发明授权
    Flexural plate wave sensor and array 有权
    弯曲板波传感器和阵列

    公开(公告)号:US07266990B2

    公开(公告)日:2007-09-11

    申请号:US11357911

    申请日:2006-02-17

    Abstract: A method for manufacturing a flexural plate wave sensor includes the steps of depositing an etch-stop layer over a substrate, depositing a membrane layer over the etch stop layer, depositing a piezoelectric layer over the membrane layer, forming a transducer on the piezoelectric layer, etching a cavity through the substrate, the cavity having substantially parallel interior walls, and removing the portion of the etch stop layer between the cavity and the membrane layer to expose a portion of the membrane layer.

    Abstract translation: 制造弯曲板波传感器的方法包括以下步骤:在衬底上沉积蚀刻停止层,在蚀刻停止层上沉积膜层,在膜层上沉积压电层,在压电层上形成换能器, 通过衬底蚀刻空腔,空腔具有基本上平行的内壁,并且去除腔和膜层之间的蚀刻停止层的部分以暴露膜层的一部分。

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