公开(公告)号：US07919903B2

公开(公告)日：2011-04-05

申请号：US11540655

申请日：2006-10-02

Applicant: Young-tack Hong ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

Inventor： Young-tack Hong ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

IPC: H01L41/00

CPC classification number: B41J2/04581 ,  B41J2/04541

Abstract: A Micro Electro Mechanical System (MEMS) switch includes a substrate, a fixed signal line formed on the substrate, a movable signal line spaced apart from one of an upper surface and a lower surface of the fixed signal line, and at least one piezoelectric actuator connected to a first end of the movable signal line so as to bring or separate the movable signal line in contact with or from the fixed signal line. The piezoelectric actuator includes a first electrode, a piezoelectric layer formed on the first electrode, a second electrode formed on the piezoelectric layer, and a connecting layer formed on the second electrode and connected with the movable signal line.

Abstract translation: 微机电系统（MEMS）开关包括基板，形成在基板上的固定信号线，与固定信号线的上表面和下表面之一间隔开的可移动信号线，以及至少一个压电致动器 连接到可移动信号线的第一端，以使可移动信号线与固定信号线接触或分离。 压电致动器包括第一电极，形成在第一电极上的压电层，形成在压电层上的第二电极，以及形成在第二电极上并与可移动信号线连接的连接层。

公开(公告)号：US07911300B2

公开(公告)日：2011-03-22

申请号：US12697629

申请日：2010-02-01

Applicant: Il-jong Song ,  Dong-ha Shim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Che-heung Kim ,  Sang-hun Lee ,  Young-tack Hong

Inventor： Il-jong Song ,  Dong-ha Shim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Che-heung Kim ,  Sang-hun Lee ,  Young-tack Hong

IPC: H01H51/22

CPC classification number: H01H59/0009 ,  H01H2059/0018

Abstract: A MEMS RF-switch is provided for controlling switching on/off of transmission of AC signals. The MEMS RF-switch of the present invention includes: a first electrode coupled to one terminal of the power source; a semiconductor layer combined with an upper surface of the first electrode, and forming a potential barrier to become insulated when a bias signal is applied from the power source; and a second electrode disposed at a predetermined distance away from the semiconductor layer, and being coupled to the other terminal of the power source, wherein the second electrode contacts the semiconductor layer when a bias signal is applied from the power source. Therefore, although the bias signal may not be cut off, free electrons and holes are recombined in the semiconductor layer, whereby charge buildup and sticking can be prevented.

Abstract translation: 提供了用于控制AC信号的传输的接通/断开的MEMS RF开关。 本发明的MEMS RF开关包括：耦合到电源的一个端子的第一电极; 与所述第一电极的上表面组合的半导体层，并且当从所述电源施加偏置信号时，形成电位势垒以变得绝缘; 以及第二电极，设置在距离半导体层预定距离处，并且耦合到电源的另一个端子，其中当从电源施加偏置信号时，第二电极接触半导体层。 因此，尽管偏置信号可能不会被切断，但自由电子和空穴在半导体层中重新结合，从而可以防止电荷积累和粘附。

公开(公告)号：US07545246B2

公开(公告)日：2009-06-09

申请号：US11515717

申请日：2006-09-06

Applicant: Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Hong ,  Che-heung Kim

Inventor： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Hong ,  Che-heung Kim

IPC: H01H51/22

CPC classification number: H01H57/00 ,  H01H2057/006 ,  Y10T403/7026

Abstract: A piezoelectric Micro Electro Mechanical System (MEMS) switch includes a substrate, first and second fixed signal lines symmetrically formed in a spaced-apart relation to each other on the substrate to have a predetermined gap therebetween, a piezoelectric actuator disposed in alignment with the first and the second fixed signal lines in the predetermined gap, and having a first end supported on the substrate to allow the piezoelectric actuator to be movable up and down, and a movable signal line having a first end connected to one of the first and the second fixed signal lines, and a second end configured to be in contact with, or separate from the other of the first and second fixed signal lines, the movable signal line at least one side thereof being connected to an upper surface of the piezoelectric actuator.

Abstract translation: 一种压电微电子机械系统（MEMS）开关包括基板，第一和第二固定信号线，其在基板上以彼此间隔开的关系对称地形成，以在其间具有预定的间隙;压电致动器，其布置成与第一 并且所述第二固定信号线处于所述预定间隙中，并且具有支撑在所述基板上的第一端，以允许所述压电致动器能够上下移动;以及可移动信号线，其具有连接到所述第一和第二 固定信号线，以及构造成与第一和第二固定信号线中的另一个接触或分离的第二端，可移动信号线的至少一侧连接到压电致动器的上表面。

公开(公告)号：US07545081B2

公开(公告)日：2009-06-09

申请号：US11594813

申请日：2006-11-09

Applicant: Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Houng ,  Che-heung Kim

Inventor： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Houng ,  Che-heung Kim

IPC: H01L41/08

CPC classification number: H01H57/00 ,  H01L41/094 ,  H01L41/314 ,  H01L41/33

Abstract: A piezoelectric RF micro electro mechanical system (MEMS) device and a method of fabricating the same are provided, in which the RF MEMS device is driven upward at a low voltage based on a piezoelectric effect. The piezoelectric RF MEMS device includes an upper substrate provided with an RF output signal line, a piezoelectric actuator positioned below the RF output signal line, and a lower substrate provided with a cavity so that one end of the piezoelectric actuator is fixed to the lower substrate and its other end is movably spaced apart from the upper and lower substrates, wherein the piezoelectric actuator is provided with an RF input signal line thereon, and a contact pad is provided to connect the RF output signal line with the RF input signal line when the piezoelectric actuator is driven upward. A method of fabricating a piezoelectric RF MEMS device includes providing an upper substrate including an RF output signal line, providing a lower substrate including a piezoelectric actuator having an RF input signal line corresponding to the RF output signal line, and assembling the upper substrate and the lower substrate.

Abstract translation: 提供了一种压电RF微机电系统（MEMS）器件及其制造方法，其中基于压电效应，RF MEMS器件以低电压向上驱动。 压电RF MEMS器件包括：设置有RF输出信号线的上基板，位于RF输出信号线下方的压电致动器;以及设置有空腔的下基板，使得压电致动器的一端固定到下基板 并且其另一端与上基板和下基板可移动地间隔开，其中压电致动器在其上设置有RF输入信号线，并且提供接触焊盘以将RF输出信号线与RF输入信号线连接， 压电致动器被向上驱动。 制造压电RF MEMS器件的方法包括提供包括RF输出信号线的上基板，提供包括具有对应于RF输出信号线的RF输入信号线的压电致动器的下基板，以及组装上基板和 下基板。

公开(公告)号：US20090115875A1

公开(公告)日：2009-05-07

申请号：US12119611

申请日：2008-05-13

Applicant: Min-seog CHOI ,  Seung-wan Lee ,  Woon-bae Kim ,  Eun-sung Lee ,  Kyu-dong Jung ,  Che-heung Kim

Inventor： Min-seog CHOI ,  Seung-wan Lee ,  Woon-bae Kim ,  Eun-sung Lee ,  Kyu-dong Jung ,  Che-heung Kim

IPC: H04N5/335 ,  H01L31/0232

CPC classification number: H04N5/335 ,  H01L24/97 ,  H01L27/14618 ,  H01L27/14683 ,  H01L2224/16 ,  H01L2924/15788 ,  H01L2924/3511 ,  H04N5/2253 ,  H04N5/2257 ,  H04N5/3696 ,  H01L2924/00

Abstract: An image sensor module having a sensor chip closely adhered on a concave surface and a fabrication method thereof are disclosed. The image sensor module includes at least one sensor chip, at least one sensor chip-mounting structure comprising a substrate and a polymer layer formed on the substrate, the polymer layer having an concave surface formed on an upper part thereof by a polymer molding method, so that the sensor chip is bent and bonded on the concave surface, and at least one lens fixed on the at least one sensor chip-mounting structure above the sensor chip.

Abstract translation: 公开了一种具有密封在凹面上的传感器芯片的图像传感器模块及其制造方法。 图像传感器模块包括至少一个传感器芯片，至少一个传感器芯片安装结构，包括基板和形成在基板上的聚合物层，所述聚合物层通过聚合物模塑法在其上部形成有凹形表面， 使得传感器芯片弯曲并接合在凹面上，以及固定在传感器芯片上方的至少一个传感器芯片安装结构上的至少一个透镜。

公开(公告)号：US20070159510A1

公开(公告)日：2007-07-12

申请号：US11540655

申请日：2006-10-02

Applicant: Young-tack Hong ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

Inventor： Young-tack Hong ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

IPC: B41J2/04

CPC classification number: B41J2/04581 ,  B41J2/04541

Abstract: A Micro Electro Mechanical System (MEMS) switch includes a substrate, a fixed signal line formed on the substrate, a movable signal line spaced apart from one of an upper surface and a lower surface of the fixed signal line, and at least one piezoelectric actuator connected to a first end of the movable signal line so as to bring or separate the movable signal line in contact with or from the fixed signal line. The piezoelectric actuator includes a first electrode, a piezoelectric layer formed on the first electrode, a second electrode formed on the piezoelectric layer, and a connecting layer formed on the second electrode and connected with the movable signal line.

Abstract translation: 微机电系统（MEMS）开关包括基板，形成在基板上的固定信号线，与固定信号线的上表面和下表面之一间隔开的可移动信号线，以及至少一个压电致动器 连接到可移动信号线的第一端，以使可移动信号线与固定信号线接触或分离。 压电致动器包括第一电极，形成在第一电极上的压电层，形成在压电层上的第二电极，以及形成在第二电极上并与可移动信号线连接的连接层。

公开(公告)号：US20070024401A1

公开(公告)日：2007-02-01

申请号：US11385700

申请日：2006-03-22

Applicant: Jun-o Kim ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Hee-moon Jeong ,  Young-tack Hong ,  Sang-hun Lee

Inventor： Jun-o Kim ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Hee-moon Jeong ,  Young-tack Hong ,  Sang-hun Lee

IPC: H01P1/10

CPC classification number: H01P1/127 ,  B81B3/0013 ,  B81B2201/016 ,  H01H59/0009

Abstract: An RF MEMS switch having asymmetrical spring rigidity. The RF MEMS switch has supporting members spaced apart in a certain interval on a substrate, a membrane being a motion member suspended by plural spring members extended on both sides of the membrane, and a bottom electrode being a contact surface on an upper surface of the substrate facing a bottom surface of the membrane, wherein the plural spring members placed on opposite sides of the membrane have asymmetrical rigidity, and a portion of the membrane on a side of stronger spring rigidity is first separated from the contact surface when the RF MEMS switch is turned off. The present invention has an advantage of easy separation of the switch from the contact surface, when the switch is turned off, due to the different rigidity of the springs located on the sides of the membrane.

Abstract translation: 具有不对称弹簧刚度的RF MEMS开关。 RF MEMS开关具有在基板上以一定间隔隔开的支撑构件，膜是由在膜的两侧延伸的多个弹簧构件悬挂的运动构件，底电极是位于膜的上表面上的接触表面 衬底面向膜的底表面，其中放置在膜的相对侧上的多个弹簧构件具有不对称的刚性，并且当RF MEMS开关在膜的另一侧具有更强的弹簧刚度的一部分首先与接触表面分离 已关闭 本发明的优点在于，当开关断开时，由于位于膜侧面的弹簧的刚度不同，开关与接触表面容易分离。

公开(公告)号：US20070012654A1

公开(公告)日：2007-01-18

申请号：US11472312

申请日：2006-06-22

Applicant: Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Duck-hwan Kim ,  Yun-kwon Park ,  Hee-moon Jeong ,  Young-tack Hong ,  Che-heung Kim ,  Seok-chul Yun ,  Kuang-woo Nam

Inventor： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Duck-hwan Kim ,  Yun-kwon Park ,  Hee-moon Jeong ,  Young-tack Hong ,  Che-heung Kim ,  Seok-chul Yun ,  Kuang-woo Nam

IPC: C23F1/00 ,  H01B13/00

CPC classification number: H01H61/02 ,  H01H61/063 ,  H01H2061/006

Abstract: A MEMS switch includes a lower substrate having a signal line on an upper surface of the lower substrate; an upper substrate, having a cavity therein, disposed apart from the upper surface of the lower substrate by a distance, and having a membrane layer on a lower surface of the upper substrate; a bimetal layer formed in the cavity of the upper substrate on the membrane layer; a heating layer formed on a lower surface of the membrane layer; and a contact member formed on a lower surface of the heating layer. The contact member can come into contact with or separate from the signal line. A method for manufacturing the MEMS switch includes preparing the upper and lower substrates and combining them so that a surface having the signal line faces a surface having the contact member and the upper and lower substrates are disposed apart by a distance.

Abstract translation: MEMS开关包括在下基板的上表面上具有信号线的下基板; 在其上具有空腔的上基板，与下基板的上表面隔开一段距离，并且在上基板的下表面上具有膜层; 形成在膜层上的上基板的空腔中的双金属层; 形成在所述膜层的下表面上的加热层; 以及形成在所述加热层的下表面上的接触构件。 接触构件可以与信号线接触或分离。 制造MEMS开关的方法包括制备上基板和下基板并将其组合，使得具有信号线的表面面向具有接触构件的表面，并且上下基板分开一定距离。

公开(公告)号：US08576469B2

公开(公告)日：2013-11-05

申请号：US12692285

申请日：2010-01-22

Applicant: Che-heung Kim ,  Seog-woo Hong

Inventor： Che-heung Kim ,  Seog-woo Hong

IPC: G02B26/02

CPC classification number: G02B26/02 ,  G02B5/005 ,  G03B9/22

Abstract: There are provided a light screening apparatus and a manufacturing method thereof. The light screening apparatus includes a substrate, a transparent electrode, a plurality of roll-up actuators and a plurality of light screening patterns. The substrate includes a light-transmitting region and the transparent electrode is formed on one surface of the substrate. Each roll-up actuator, which has opaque characteristics, is fixed on the circumference portion of the light-transmitting region and includes a fixing end and a moving part which extends from the fixing end. Gaps are formed between adjacent roll-up actuators, and the light screening patterns are formed on the substrate at locations corresponding to the gaps. The light-screening patterns prevent light incident through the gaps from being transmitted to the light-transmitting region.

Abstract translation: 提供了一种遮光装置及其制造方法。 遮光装置包括基板，透明电极，多个卷起致动器和多个遮光图案。 基板包括透光区域，并且透明电极形成在基板的一个表面上。 具有不透明特性的每个卷起致动器固定在透光区域的圆周部分上，并且包括固定端和从固定端延伸的移动部分。 在相邻的卷起致动器之间形成间隙，并且在对应于间隙的位置处在基板上形成遮光图案。 遮光图案防止通过间隙入射的光透射到透光区域。

公开(公告)号：US08379284B2

公开(公告)日：2013-02-19

申请号：US12537743

申请日：2009-08-07

Applicant: Che-heung Kim

Inventor： Che-heung Kim

IPC: G02B26/02

CPC classification number: G02B26/02

Abstract: A micro shutter device and a method of manufacturing the same are provided. A barrier is provided to define a unit pixel. Film actuators are formed within the unit pixel. The film actuators are configured to be bent in opposite directions to each other from a substrate so that light passing through the substrate from an external light source is blocked in a voltage non-applied state, and to be straightened perpendicularly to the substrate so that the light is transmitted upon voltage application. Accordingly, it is possible to increase the aperture ratio and thus improve the light efficiency. Furthermore, it is possible to reduce voltage necessary to drive the film actuators and thus increase the drive speed.

Abstract translation: 提供一种微型快门装置及其制造方法。 提供屏障来定义单位像素。 薄膜致动器形成在单位像素内。 膜致动器被配置为从基板彼此相反的方向弯曲，使得从外部光源穿过基板的光在未施加电压的状态下被阻挡，并且垂直于基板被拉直，使得 电压施加时发光。 因此，可以增加开口率，从而提高光效率。 此外，可以减少驱动膜致动器所需的电压，从而提高驱动速度。