MEMS transducer system and associated methods

    公开(公告)号:US10511923B2

    公开(公告)日:2019-12-17

    申请号:US15938665

    申请日:2018-03-28

    Abstract: The disclosure provides a system, comprising: a MEMS capacitive transducer, comprising one or more first capacitive plates coupled to a first node and one or more second capacitive plates coupled to a second node; biasing circuitry coupled to the first node, operable to provide a biasing voltage to the one or more first capacitive plates; and test circuitry coupled to the second node, operable to: selectively apply one or more current sources to the second node, so as to charge and discharge the MEMS capacitive transducer and so vary a signal based on a voltage at said second node between an upper value and a lower value; determine a parameter that is indicative of a time period of the variation of the signal; and determine a capacitance of the MEMS capacitive transducer based on the parameter that is indicative of the time period.

    Biasing of electromechanical systems microphone with alternating-current voltage waveform

    公开(公告)号:US09900707B1

    公开(公告)日:2018-02-20

    申请号:US15363798

    申请日:2016-11-29

    Inventor: Axel Thomsen

    Abstract: A MEMS microphone may include a backplate comprising first and second electrodes electrically isolated from one another and mechanically coupled to the backplate in a fixed relationship relative to the backplate and a diaphragm configured to displace relative to the backplate as a function of sound pressure incident upon the diaphragm, the diaphragm comprising third and fourth electrodes electrically isolated from one another and mechanically coupled to the diaphragm in a fixed relationship relative to the diaphragm such that the third and fourth electrodes displace relative to the backplate as a function of sound pressure incident upon the diaphragm. The first and third electrodes may form a first capacitor and the second and fourth electrodes may form a second capacitor, the capacitance of each which may be a function of the displacement of the diaphragm, and each of which may be biased by an alternating-current voltage waveform.

    Driver circuitry and operation
    28.
    发明授权

    公开(公告)号:US11368151B2

    公开(公告)日:2022-06-21

    申请号:US17349536

    申请日:2021-06-16

    Abstract: This application relates to methods and apparatus for driving a transducer with switching drivers where the switching driver has an output bridge stage for switching an output node between switching voltages and a modulator for controlling the duty cycle of the output bridge stage based on an input signal. The switching driver also includes a voltage controller for providing the switching voltages which is operable to provide different switching voltages in different driver modes. A controller is provided to control the driver mode of operation and the duty cycle of the switching driver based on the input signal, and the controller is configured to transition from a present driver mode to a new driver mode by controlling the voltage controller to provide the switching voltages for the new mode and controlling the modulator to vary the duty cycle of the output bridge stage. The change in duty cycle is controlled such that there is no substantial discontinuity in switching ripple due to the mode transition.

    Noise reduction in voltage reference signal

    公开(公告)号:US10460819B2

    公开(公告)日:2019-10-29

    申请号:US15365451

    申请日:2016-11-30

    Abstract: A variable resistor may be coupled between a reference voltage source and components of an integrated circuit to reduce issues relating to thermal noise from a reference voltage signal generated by the reference voltage source. The variable resistor may be set to a low level during a first time period and a high level during a second time period, in which the time periods correspond to a sampling period of a switched-capacitor circuit. The low resistance time period may allow quick settling of an input reference voltage signal, whereas the high resistance time period may reduce a bandwidth of noise on a sampling capacitor coupled to the reference voltage signal. The variable resistor and switched-capacitor network may be used in an analog-to-digital converter (ADC), such as in audio circuits.

    Microelectromechanical systems microphone with electrostatic force feedback to measure sound pressure

    公开(公告)号:US09813831B1

    公开(公告)日:2017-11-07

    申请号:US15363863

    申请日:2016-11-29

    Inventor: Axel Thomsen

    Abstract: A MEMS may include a backplate comprising first and second electrodes electrically isolated from one another and mechanically coupled to the backplate in a fixed relationship relative to the backplate, and a diaphragm configured to mechanically displace relative to the backplate as a function of sound pressure incident upon the diaphragm. The diaphragm may comprise third and fourth electrodes electrically isolated from one another and mechanically coupled to the diaphragm in a fixed relationship relative to the diaphragm such that the third and fourth electrodes mechanically displace relative to the backplate as the function of the sound pressure. The first and third electrodes may form a first capacitor, the second and fourth electrodes may form a second capacitor, and the first capacitor may be configured to sense a displacement of the diaphragm responsive to which the second capacitor may be configured to apply an electrostatic force to the diaphragm to return the diaphragm to an original position.

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