Integrated laser diodes with quality facets on GaN substrates
    21.
    发明授权
    Integrated laser diodes with quality facets on GaN substrates 有权
    集成激光二极管,具有GaN衬底上的质量面

    公开(公告)号:US08767787B1

    公开(公告)日:2014-07-01

    申请号:US13546943

    申请日:2012-07-11

    IPC分类号: H01S5/00

    摘要: A laser diode device operable at a one or more wavelength ranges. The device has a first waveguide provided on a non-polar or semipolar crystal plane of gallium containing material. In a specific embodiment, the first waveguide has a first gain characteristic and a first direction. In a specific embodiment, the first waveguide has a first end and a second end and a first length defined between the first end and the second end. The device has a second waveguide provided on a non-polar or semipolar crystal plane of gallium containing material. In a specific embodiment, the second waveguide has a second gain characteristic and a second direction. In a specific embodiment, the second waveguide has a first end, a second end, and a second length defined between the first end and the second end.

    摘要翻译: 一种可在一个或多个波长范围下工作的激光二极管装置。 该器件具有设置在含镓材料的非极性或半极性晶面上的第一波导。 在具体实施例中,第一波导具有第一增益特性和第一方向。 在具体实施例中,第一波导具有限定在第一端和第二端之间的第一端和第二端以及第一长度。 该器件具有设置在含镓材料的非极性或半极性晶面上的第二波导。 在具体实施例中,第二波导具有第二增益特性和第二方向。 在具体实施例中,第二波导具有限定在第一端和第二端之间的第一端,第二端和第二长度。

    Self-aligned multi-dielectric-layer lift off process for laser diode stripes
    22.
    发明授权
    Self-aligned multi-dielectric-layer lift off process for laser diode stripes 有权
    用于激光二极管条纹的自对准多介质层剥离工艺

    公开(公告)号:US08728842B2

    公开(公告)日:2014-05-20

    申请号:US13425354

    申请日:2012-03-20

    IPC分类号: H01L33/32

    摘要: A method for forming a laser diode structure. The method includes providing a laser diode material having a surface region. A multilayer dielectric mask structure comprising alternating first and second dielectric layers is formed overlying the surface region. The method forms a laser diode structure using the multilayer dielectric mask structure as a mask. The method selectively removes a portion of the first dielectric layer to form one or more undercut regions between the second dielectric layers. A passivation layer overlies the multilayer dielectric mask structure and the undercut region remained intact. The dielectric mask structure is selectively removed, exposing a top surface region of the laser diode structure. A contact structure is formed overlying at least the exposed top surface region.

    摘要翻译: 一种形成激光二极管结构的方法。 该方法包括提供具有表面区域的激光二极管材料。 包括交替的第一和第二电介质层的多层电介质掩模结构形成在覆盖表面区域上。 该方法使用多层介电掩模结构作为掩模形成激光二极管结构。 该方法选择性地去除第一电介质层的一部分以在第二电介质层之间形成一个或多个底切区域。 钝化层覆盖多层电介质掩模结构,并且底切区保持完整。 选择性地去除电介质掩模结构,暴露激光二极管结构的顶表面区域。 形成至少覆盖暴露的顶表面区域的接触结构。

    Self-Aligned Multi-Dielectric-Layer Lift Off Process for Laser Diode Stripes
    24.
    发明申请
    Self-Aligned Multi-Dielectric-Layer Lift Off Process for Laser Diode Stripes 有权
    用于激光二极管条纹的自对准多电介质层剥离工艺

    公开(公告)号:US20120178198A1

    公开(公告)日:2012-07-12

    申请号:US13425354

    申请日:2012-03-20

    IPC分类号: H01L33/32

    摘要: A method for forming a laser diode structure. The method includes providing a laser diode material having a surface region. A multilayer dielectric mask structure comprising alternating first and second dielectric layers is formed overlying the surface region. The method forms a laser diode structure using the multilayer dielectric mask structure as a mask. The method selectively removes a portion of the first dielectric layer to form one or more undercut regions between the second dielectric layers. A passivation layer overlies the multilayer dielectric mask structure and the undercut region remained intact. The dielectric mask structure is selectively removed, exposing a top surface region of the laser diode structure. A contact structure is formed overlying at least the exposed top surface region.

    摘要翻译: 一种形成激光二极管结构的方法。 该方法包括提供具有表面区域的激光二极管材料。 包括交替的第一和第二电介质层的多层电介质掩模结构形成在覆盖表面区域上。 该方法使用多层介电掩模结构作为掩模形成激光二极管结构。 该方法选择性地去除第一电介质层的一部分以在第二电介质层之间形成一个或多个底切区域。 钝化层覆盖多层电介质掩模结构,并且底切区保持完整。 选择性地去除电介质掩模结构,暴露激光二极管结构的顶表面区域。 形成至少覆盖暴露的顶表面区域的接触结构。

    Self-aligned multi-dielectric-layer lift off process for laser diode stripes
    25.
    发明授权
    Self-aligned multi-dielectric-layer lift off process for laser diode stripes 有权
    用于激光二极管条纹的自对准多介质层剥离工艺

    公开(公告)号:US08143148B1

    公开(公告)日:2012-03-27

    申请号:US12502382

    申请日:2009-07-14

    IPC分类号: H01L21/30 H01L33/00

    摘要: A method for forming a laser diode structure. The method includes providing a laser diode material having a surface region. A multilayer dielectric mask structure comprising alternating first and second dielectric layers is formed overlying the surface region. The method forms a laser diode structure using the multilayer dielectric mask structure as a mask. The method selectively removes a portion of the first dielectric layer to form one or more undercut regions between the second dielectric layers. A passivation layer overlies the multilayer dielectric mask structure and the undercut region remained intact. The dielectric mask structure is selectively removed, exposing a top surface region of the laser diode structure. A contact structure is formed overlying at least the exposed top surface region.

    摘要翻译: 一种形成激光二极管结构的方法。 该方法包括提供具有表面区域的激光二极管材料。 包括交替的第一和第二电介质层的多层电介质掩模结构形成在覆盖表面区域上。 该方法使用多层电介质掩模结构作为掩模形成激光二极管结构。 该方法选择性地去除第一电介质层的一部分以在第二电介质层之间形成一个或多个底切区域。 钝化层覆盖多层电介质掩模结构,并且底切区保持完整。 选择性地去除电介质掩模结构,暴露激光二极管结构的顶表面区域。 形成至少覆盖暴露的顶表面区域的接触结构。

    Integrated total internal reflectors for high-gain laser diodes with high quality cleaved facets on nonpolar/semipolar GaN substrates
    27.
    发明授权
    Integrated total internal reflectors for high-gain laser diodes with high quality cleaved facets on nonpolar/semipolar GaN substrates 有权
    用于高增益激光二极管的集成内部反射器,在非极性/半极性GaN衬底上具有高质量的切割面

    公开(公告)号:US08259769B1

    公开(公告)日:2012-09-04

    申请号:US12502058

    申请日:2009-07-13

    IPC分类号: H01S5/00

    摘要: A laser diode device operable at a one or more wavelength ranges. The device has a first waveguide provided on a non-polar or semipolar crystal plane of gallium containing material. In a specific embodiment, the first waveguide has a first gain characteristic and a first direction. In a specific embodiment, the first waveguide has a first end and a second end and a first length defined between the first end and the second end. The device has a second waveguide provided on a non-polar or semipolar crystal plane of gallium containing material. In a specific embodiment, the second waveguide has a second gain characteristic and a second direction. In a specific embodiment, the second waveguide has a first end, a second end, and a second length defined between the first end and the second end. In a specific embodiment, the second waveguide has the first end being coupled to the first end of the first waveguide. The second length is in a different direction from the second length. In a specific embodiment, the device has a cleaved region provided on the second end of the second waveguide, the cleaved region being perpendicular to the second direction of the second waveguide.

    摘要翻译: 一种可在一个或多个波长范围下工作的激光二极管装置。 该器件具有设置在含镓材料的非极性或半极性晶面上的第一波导。 在具体实施例中,第一波导具有第一增益特性和第一方向。 在具体实施例中,第一波导具有限定在第一端和第二端之间的第一端和第二端以及第一长度。 该器件具有设置在含镓材料的非极性或半极性晶面上的第二波导。 在具体实施例中,第二波导具有第二增益特性和第二方向。 在具体实施例中,第二波导具有限定在第一端和第二端之间的第一端,第二端和第二长度。 在具体实施例中,第二波导具有第一端耦合到第一波导的第一端。 第二长度与第二长度不同。 在具体实施例中,该器件具有设置在第二波导的第二端上的解理区域,该解理区域垂直于第二波导的第二方向。