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公开(公告)号：US07684109B2
公开(公告)日：2010-03-23
申请号：US11713461
申请日：2007-02-28
申请人： Ed Godshalk , Guillaume Bouche
发明人： Ed Godshalk , Guillaume Bouche
CPC分类号： H03H9/175 , H03H3/04 , H03H2003/025
摘要： In an embodiment, set forth by way of example and not limitation, a Bragg mirror includes a first bi-layer of a first thickness and a second bi-layer of a second thickness which is different from the first thickness. In this exemplary embodiment, the first bi-layer consists essentially of a first high impedance layer and a first low impedance layer, and the second bi-layer of a second thickness which is different from the first thickness, the second bi-layer consisting essentially of a second high impedance layer and a second low impedance layer. Preferably, the first bi-layer is configured to substantially reflect a first wavelength and the second bi-layer is configured to substantially reflect a second wavelength different from the first wavelength.
摘要翻译： 在通过示例而非限制的方式阐述的实施例中，布拉格反射镜包括第一厚度的第一双层和与第一厚度不同的第二厚度的第二双层。 在该示例性实施例中，第一双层基本上由第一高阻抗层和第一低阻抗层组成，第二厚度与第一厚度不同的第二厚度构成，第二双层基本上由 的第二高阻抗层和第二低阻抗层。 优选地，第一双层被配置为基本上反射第一波长，并且第二双层被配置为基本上反射与第一波长不同的第二波长。
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公开(公告)号：US07565725B2
公开(公告)日：2009-07-28
申请号：US11512731
申请日：2006-08-30
申请人： Guillaume Bouche , Fabrice Casset , Pascal Ancey
发明人： Guillaume Bouche , Fabrice Casset , Pascal Ancey
IPC分类号： H01G7/00
CPC分类号： H01G5/16 , Y10T29/435 , Y10T29/49002 , Y10T29/4913 , Y10T29/49139 , Y10T29/49147 , Y10T29/49165 , Y10T83/0476 , Y10T83/0505 , Y10T83/051 , Y10T83/0577
摘要： A method for forming a variable capacitor including a conductive strip covering the inside of a cavity, and a flexible conductive membrane placed above the cavity, the cavity being formed according to the steps of: forming a recess in the substrate; placing a malleable material in the recess; having a stamp bear against the substrate at the level of the recess to give the upper part of the malleable material a desired shape; hardening the malleable material; and removing the stamp.
摘要翻译： 一种形成可变电容器的方法，所述可变电容器包括覆盖空腔内部的导电条和位于所述空腔上方的柔性导电膜，所述空腔根据以下步骤形成：在所述基板中形成凹部; 将可延展材料放置在凹槽中; 在凹部的水平处具有抵靠基板的印模，以使可延展材料的上部具有期望的形状; 硬化可延展材料; 并移除邮票。
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公开(公告)号：US07200908B2
公开(公告)日：2007-04-10
申请号：US11442420
申请日：2006-05-26
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/18 , H01H2059/0081 , Y10T29/43 , Y10T29/435 , Y10T29/49 , Y10T29/49002 , Y10T29/49105 , Y10T29/49156
摘要： A method of making a variable capacitor by forming a grove portion in an insulating substrate, two upper portions of the substrate located on either side of the groove portion forming two lateral edges, a conductive layer covering the inside of the groove portion, a flexible conductive membrane, placed above the groove portion by bearing on the edges, a dielectric layer covering the conductive layer or the membrane to insulate the conductive layer and the membrane, and terminals of application of a voltage between the conductive layer and the membrane, and such that the depth of the groove portion continuously increases from one of the edges to the bottom of the groove portion, and that the conductive layer covers the inside of the groove portion at least to reach one of the two edges, that it may cover.
摘要翻译： 一种通过在绝缘基板中形成槽部来制造可变电容器的方法，位于形成两个侧边缘的槽部分的任一侧上的基板的两个上部，覆盖槽部分内部的导电层，柔性导电 膜，通过承载在边缘上而置于凹槽部分上方，覆盖导电层或膜的电介质层以使导电层和膜绝缘，以及在导电层和膜之间施加电压的端子，使得 凹槽部分的深度从凹槽部分的一个边缘到底部连续地增加，并且导电层至少覆盖凹槽部分的内部，至少可以覆盖两个边缘中的一个。
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24.发明申请Titanium-tungsten alloy based mirrors and electrodes in bulk acoustic wave devices 审中-公开钛 - 钨合金基镜和电极在体声波器件中的应用公开(公告)号：US20070035364A1
公开(公告)日：2007-02-15
申请号：US11203543
申请日：2005-08-11
申请人： Uppili Sridhar , Ralph Wall , Guillaume Bouche
发明人： Uppili Sridhar , Ralph Wall , Guillaume Bouche
IPC分类号： H03H9/56
摘要： Titanium-tungsten alloy based mirrors and electrodes in bulk acoustic wave devices simplify processing by eliminating the need for adhesion, barrier and seed layers, and preserve the advantages of tungsten layers. Alternate layers of high and low acoustic impedance materials are use, wherein the high acoustic impedance layers are titanium-tungsten alloy layers, preferably deposited by physical vapor deposition, and isotropically patterned with a wet etch. SiO2 is preferably used for the low acoustic impedance layers, though other low acoustic impedance materials may be used if desired. Electrodes and loads may also be a Titanium-tungsten alloy. Titanium-tungsten alloys in the range of 3 to 15 percent of titanium by weight are preferred.
摘要翻译： 体积波形器件中的钛 - 钨合金镜和电极通过消除对粘合，阻挡层和种子层的需要，并且保留了钨层的优点，从而简化了加工过程。 使用高和低声阻抗材料的交替层，其中高声阻抗层是钛 - 钨合金层，优选通过物理气相沉积沉积，并用湿蚀刻各向同性地图案化。 优选地，低SiO 2 SiO 2用于低声阻抗层，尽管如果需要可以使用其它低声阻抗材料。 电极和负载也可以是钛 - 钨合金。 优选钛 - 钨合金的重量比为3〜15％的钛 - 钨合金。
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公开(公告)号：US20060157820A1
公开(公告)日：2006-07-20
申请号：US11298910
申请日：2005-12-09
IPC分类号： H01L29/00
CPC分类号： H01L28/91 , H01L27/0805 , H01L27/10861 , H01L29/66181
摘要： A process for producing a capacitor integrated into an electronic circuit comprises the formation of a trench in a substrate through a conductive portion similar to an MOS transistor gate. Alternating conductive, insulating and conductive layers are deposited inside the trench T in order to form a lower electrode, a dielectric and an upper electrode of the capacitor, respectively. The conductive portion is used to electrically connect the lower electrode to other electronic components of the circuit without an additional cost with respect to the connection of the circuit transistors.
摘要翻译： 一种集成到电子电路中的电容器的制造方法包括通过类似于MOS晶体管栅极的导电部分在衬底中形成沟槽。 交替的导电，绝缘和导电层沉积在沟槽T的内部，以分别形成电容器的下电极，电介质和上电极。 导电部分用于将下电极与电路的其它电子部件电连接，而不会对电路晶体管的连接造成额外的成本。
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公开(公告)号：US20060114638A1
公开(公告)日：2006-06-01
申请号：US10999211
申请日：2004-11-29
IPC分类号： H01G5/00
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/18 , H01H2059/0081 , Y10T29/43 , Y10T29/435 , Y10T29/49 , Y10T29/49002 , Y10T29/49105 , Y10T29/49156
摘要： A variable capacitor having a groove portion formed in an insulating substrate, two upper portions of the substrate located on either side of the groove portion forming two lateral edges, a conductive layer covering the inside of the groove portion, a flexible conductive membrane, placed above the groove portion by bearing on the edges, a dielectric layer covering the conductive layer or the membrane to insulate the conductive layer and the membrane, and terminals of application of a voltage between the conductive layer and the membrane, and such that the depth of the groove portion continuously increases from one of the edges to the bottom of the groove portion, and that the conductive layer covers the inside of the groove portion at least to reach one of the two edges, that it may cover.
摘要翻译： 一种可变电容器，其具有形成在绝缘基板中的槽部，位于形成两个侧边缘的槽部的任一侧的基板的两个上部，覆盖所述槽部的内部的导电层，位于上方的柔性导电膜 沟槽部分通过承载在边缘上，覆盖导电层或膜的电介质层以使导电层和膜绝缘，以及在导电层和膜之间施加电压的端子，并且使得 凹槽部分从凹槽部分的一个边缘到底部连续地增加，并且导电层至少覆盖凹槽部分的内部至少可以覆盖两个边缘中的一个。
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公开(公告)号：US06927352B2
公开(公告)日：2005-08-09
申请号：US10841180
申请日：2004-05-07
申请人： Guillaume Bouche , Daniel Saias
发明人： Guillaume Bouche , Daniel Saias
CPC分类号： H01H59/0009 , H01H61/02 , H01H2001/0063 , H01H2001/0068 , H01H2061/006
摘要： A multiposition microswitch that includes a cavity, a mobile portion made of a deformable material extending above the cavity, at least three conductive tracks extending on the cavity bottom, and a contact pad on the lower surface of the mobile part. The mobile part is capable of deforming, under the action of a stressing mechanism, from an idle position where the contact pad is distant from the conductive tracks to an on position from among several distinct on positions. The contact pad electrically connects, in each distinct on position, at least two of the at least three conductive tracks, at least one of the conductive tracks connected to the contact pad in each distinct on position being different from the conductive tracks connected to the contact pad in the other distinct on positions.
摘要翻译： 一种多位微动开关，其包括空腔，由空腔上方延伸的可变形材料制成的移动部分，在空腔底部延伸的至少三个导电轨道，以及在所述移动部件的下表面上的接触垫。 移动部件能够在应力机构的作用下从接触垫远离导电轨道的空闲位置变形到几个不同的位置之间的打开位置。 接触焊盘在每个不同的位置上电连接至少三个导电轨道中的至少两个，至少一个导电轨道在每个不同的位置上连接到接触焊盘，其不同于连接到触点的导电轨迹 垫在另一个不同的位置。
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28.发明授权公开(公告)号：US08522411B1
公开(公告)日：2013-09-03
申请号：US12564723
申请日：2009-09-22
申请人： Guillaume Bouche , Ralph N. Wall
发明人： Guillaume Bouche , Ralph N. Wall
摘要： A method of fabricating a piezoelectric resonator includes providing a bottom electrode and a piezoelectric layer coupled to the bottom electrode. A bottom metal layer of a top electrode is deposited on the piezoelectric layer. A top metal layer of the top electrode is deposited on the bottom metal layer. A photoresist layer is deposited on the top metal layer. The photoresist layer is patterned and etched. The top metal layer is patterned and etched while the etched photoresist layer remains. The bottom metal layer is patterned and etched such that an entire perimeter side surface of the top metal layer is recessed relative to a perimeter edge of the bottom metal layer. The etched photoresist layer is removed. A passivation layer is deposited on the top and bottom metal layers such that the top and bottom metal layers are isolated from a subsequent metal etch step.
摘要翻译： 制造压电谐振器的方法包括提供底电极和耦合到底电极的压电层。 顶部电极的底部金属层沉积在压电层上。 顶部电极的顶部金属层沉积在底部金属层上。 光致抗蚀剂层沉积在顶部金属层上。 对光致抗蚀剂层进行图案化和蚀刻。 顶层金属层被图案化和蚀刻，同时蚀刻的光致抗蚀剂层保留。 底部金属层被图案化和蚀刻，使得顶部金属层的整个周边侧表面相对于底部金属层的周边边缘凹陷。 蚀刻光刻胶层被去除。 钝化层沉积在顶部和底部金属层上，使得顶部和底部金属层与随后的金属蚀刻步骤隔离。
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公开(公告)号：US08201311B1
公开(公告)日：2012-06-19
申请号：US12221907
申请日：2008-08-06
申请人： Haim Ben Hamou , Ralph N. Wall , Guillaume Bouche
发明人： Haim Ben Hamou , Ralph N. Wall , Guillaume Bouche
CPC分类号： H03H9/175 , H03H3/02 , H03H9/02086 , H03H9/131 , H03H9/589 , Y10T29/42 , Y10T29/49005 , Y10T29/49156
摘要： A piezoelectric layer is coupled to a bottom electrode in a method of fabricating a piezoelectric resonator. A bottom metal layer of a top electrode is deposited on the piezoelectric layer. The bottom metal layer is patterned and etched. A top metal layer of the top electrode is deposited on the etched bottom metal layer. The top metal layer is patterned and etched. An interconnect metal layer is deposited on the etched top metal layer and the piezoelectric layer such that the interconnect metal layer isolates the bottom metal layer from subsequent etch steps.
摘要翻译： 在制造压电谐振器的方法中，压电层耦合到底电极。 顶部电极的底部金属层沉积在压电层上。 底部金属层被图案化和蚀刻。 顶部电极的顶部金属层沉积在蚀刻的底部金属层上。 顶层金属层被图案化和蚀刻。 互连金属层沉积在蚀刻的顶部金属层和压电层上，使得互连金属层将底部金属层与随后的蚀刻步骤隔离。
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公开(公告)号：US20100123948A1
公开(公告)日：2010-05-20
申请号：US12697242
申请日：2010-01-30
申请人： Ed Godshalk , Guillaume Bouche
发明人： Ed Godshalk , Guillaume Bouche
CPC分类号： H03H9/175 , H03H3/04 , H03H2003/025
摘要： In an embodiment, set forth by way of example and not limitation, a Bragg mirror includes a first bi-layer of a first thickness and a second bi-layer of a second thickness which is different from the first thickness. In this exemplary embodiment, the first bi-layer consists essentially of a first high impedance layer and a first low impedance layer, and the second bi-layer of a second thickness which is different from the first thickness, the second bi-layer consisting essentially of a second high impedance layer and a second low impedance layer. Preferably, the first bi-layer is configured to substantially reflect a first wavelength and the second bi-layer is configured to substantially reflect a second wavelength different from the first wavelength.
摘要翻译： 在通过示例而非限制的方式阐述的实施例中，布拉格反射镜包括第一厚度的第一双层和与第一厚度不同的第二厚度的第二双层。 在该示例性实施例中，第一双层基本上由第一高阻抗层和第一低阻抗层组成，第二厚度与第一厚度不同的第二厚度构成，第二双层基本上由 的第二高阻抗层和第二低阻抗层。 优选地，第一双层被配置为基本上反射第一波长，并且第二双层被配置为基本上反射与第一波长不同的第二波长。
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