公开(公告)号：US20240094078A1

公开(公告)日：2024-03-21

申请号：US18254235

申请日：2021-11-02

Applicant: FUJIKIN INCORPORATED ,  NIDEC COPAL ELECTRONICS CORPORATION

Inventor： Atsushi HIDAKA ,  Takatoshi NAKATANI ,  Kaoru HIRATA ,  Kouji NISHINO ,  Nobukazu IKEDA ,  Masaki FUKASAWA

IPC: G01L9/00 ,  G01L19/00

CPC classification number: G01L9/0044 ,  G01L19/0007

Abstract: The pressure sensor 10 comprises: a bottomed cylindrical sensor module 11 having inside a pressure receiving chamber C1 communicating with a flow path and including a diaphragm 11a in contact with the pressure receiving chamber; a pressure detecting element 12 for outputting a strain of the diaphragm 11a as a pressure; a base ring 14 fixed at an outer edge of an open-side end part 11c of the sensor module and disposed on an outer peripheral side of the sensor module 11; a hermetic member 13 fixed to the base ring 14 for forming a sealed vacuum chamber C2 opposite to the pressure receiving chamber C1 across the diaphragm 11a; a gasket 18 sandwiched between the base ring 14 and a body 5; and a pressing flange 19 for pressing the base ring 14 to the body 5 through the gasket 18.

公开(公告)号：US20230296464A1

公开(公告)日：2023-09-21

申请号：US18040917

申请日：2021-09-14

Applicant: FUJIKIN INCORPORATED

Inventor： Atsushi HIDAKA ,  Takatoshi NAKATANI ,  Tomokazu HIROTA ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: G01L19/14 ,  G01L19/00 ,  G01L7/08

CPC classification number: G01L19/147 ,  G01L19/0084 ,  G01L7/08

Abstract: A cover component 3 is used for a pressure sensor 1 that is fixed to a mounting surface 5S of a body 5 with a flow path F1 formed therein, and that has protrudes protruding from the mounting surface 5S, the cover component comprising a hollow member 3a having an inner peripheral surface facing a side surface of the protruding portion of the pressure sensor 1, and a cover member 3b fixed to the hollow member 3a and covering the protruding portion of the pressure sensor 1.

公开(公告)号：US20220074851A1

公开(公告)日：2022-03-10

申请号：US17423500

申请日：2020-01-21

Applicant: FUJIKIN INCORPORATED

Inventor： Masaaki NAGASE ,  Kazuteru TANAKA ,  Masahiko TAKIMOTO ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: G01N21/3504

Abstract: A Concentration measurement device 100 comprises: a measurement cell 4 having a flow path through which a gas flows, a light source 1 for generating incident light to the measurement cell, a photodetector 7 for detecting light emitted from the measurement cell, a pressure sensor 20 for detecting a pressure of the gas in the measurement cell, a temperature sensor 22 for detecting a temperature of the gas in the measurement cell, and an arithmetic circuit 8 for calculating a concentration of the gas based on an output P of the pressure sensor, an output T of the temperature sensor, an output I of the photodetector, and an extinction coefficient α, wherein the arithmetic circuit 8 is configured to calculate the concentration using the extinction coefficient α determined on the basis of the output of the temperature sensor 22.

公开(公告)号：US20210396657A1

公开(公告)日：2021-12-23

申请号：US17288300

申请日：2019-10-18

Applicant: FUJIKIN INCORPORATED

Inventor： Masaaki NAGASE ,  Hidekazu ISHII ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: G01N21/31 ,  G01N21/85 ,  G01N33/00

Abstract: A concentration measurement device 100 includes a light source 22 for generating incident light to a measurement space 10A, a photodetector 24 for receiving light emitted from the measurement space, and an arithmetic control circuit 26 for calculating a concentration of a measurement fluid on the basis of an output of the photodetector, and the light source includes a first light-emitting element 22a for generating light having a first wavelength, and a second light-emitting element 22b for generating light having a second wavelength, and the concentration measurement device is configured so as to calculate the concentration using either light of the first wavelength or the second wavelength on the basis of the pressure or temperature of the measurement fluid.

公开(公告)号：US20210310844A1

公开(公告)日：2021-10-07

申请号：US17264173

申请日：2019-07-16

Applicant: FUJIKIN INCORPORATED

Inventor： Masaaki NAGASE ,  Satoru YAMASHITA ,  Masayoshi KAWASHIMA ,  Masahiko TAKIMOTO ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: G01F1/88

Abstract: A control unit 3 of a flow rate control system 1 comprises: a recording unit 31 for recording measured values of a pressure sensor P and a temperature sensor T, a storage unit 32 for storing volume data between a first valve V1 and a second valve V2 corresponding to the measured value of the pressure sensor P, and an arithmetic unit 33 for calculating a flow rate based on a first pressure value P1 and a first temperature value T1 measured after opening the first valve V1 and the second valve V2 to flow a gas and then closing the first valve V1 and the second valve V2 simultaneously in a state where the gas is flowing; a second pressure value P2 and a second temperature value T2 measured after opening the first valve V1 and the second valve V2 to flow a gas, closing the second valve V2 in a state where the gas is flowing, and then closing the first valve V1 after a predetermined time Δt has elapsed; and a volume value V between the first valve V1 and the second valve V2 which corresponds to the second pressure value P2.

公开(公告)号：US20200149162A1

公开(公告)日：2020-05-14

申请号：US16628193

申请日：2018-07-20

Applicant: FUJIKIN INCORPORATED

Inventor： Atsushi HIDAKA ,  Takatoshi NAKATANI ,  Keisuke NAKATSUJI ,  Keiji HIRAO ,  Yukio MINAMI ,  Nobukazu IKEDA

IPC: C23C16/448 ,  H05B3/06 ,  H05B3/12

Abstract: In order to optimally supply a raw material by using a heater, the fluid control device (100) includes a fluid heating section (1) provided with a flow path or a fluid accommodation portion inside, and a heater (10) for heating the fluid heating section, the heater having a heating element (10a) and a metallic heat transfer member (10b) thermally connected to the heating element and arranged so as to surround the fluid heating section, and the surface of the heat transfer member facing the fluid heating section includes a surface (S1) subjected to surface treatment for improving heat dissipation.

公开(公告)号：US20200011720A1

公开(公告)日：2020-01-09

申请号：US16483518

申请日：2018-02-08

Applicant: FUJIKIN INCORPORATED

Inventor： Masaaki NAGASE ,  Yohei SAWADA ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: G01F3/38 ,  G01L19/00 ,  G01K13/00 ,  G05D7/06

Abstract: The flow rate measuring method is performed in a common gas supply system comprising a plurality of gas supply paths each having a first valve, and a gas measuring device formed downstream side of the plurality of gas supply paths, having a pressure sensor, a temperature sensor, and a downstream side second valve. The flow rate measuring method includes: a first step of opening any one of the first valves and the second valve to allow gas to flow, closing the second valve while gas is flowing, and closing the first valve after a predetermined time has elapsed, and then measuring a pressure and a temperature after the first valve has been closed; a second step of opening any one of first valves and the second valve to allow gas to flow, closing the any one of the first valve and the second valve at the same time while gas is flowing, and then measuring a pressure and temperature after the first valve and the second valve have been closed; and a third step of calculating the flow rate in accordance with the pressure and temperature measured in the first step and the pressure and temperature measured in the second step.

公开(公告)号：US20190243391A1

公开(公告)日：2019-08-08

申请号：US16340155

申请日：2017-10-12

Applicant: FUJIKIN INCORPORATED

Inventor： Kaoru HIRATA ,  Katsuyuki SUGITA ,  Takahiro IMAI ,  Shinya OGAWA ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: G05D7/06 ,  H01L21/67

CPC classification number: G05D7/0635 ,  G05D7/06 ,  H01L21/67017

Abstract: A fluid control device includes a main body block including a first flow passage, and a second flow passage, a first and second fluid control units installed on an installation surface of the main body block. The first and second flow passages include a first portion extending along a first direction and a second flow passage portion orthogonal to the first direction. The second portion is formed of a hole extending from a side surface of the main body block and a sealing member.

公开(公告)号：US20190094847A1

公开(公告)日：2019-03-28

申请号：US16088333

申请日：2017-03-23

Applicant: FUJIKIN INCORPORATED

Inventor： Masaaki NAGASE ,  Kaoru HIRATA ,  Yohei SAWADA ,  Katsuyuki SUGITA ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: G05B23/02 ,  G05D7/06

Abstract: A pressure-type flow rate control device includes a restriction part, a control valve disposed upstream of the restriction part, an upstream pressure sensor, a downstream pressure sensor, and a controller that diagnoses flow rate control by using pressure drop data on a flow passage between the control valve and the restriction part and reference pressure drop data, wherein a close command is issued to the control valve and a shutoff valve provided downstream of the downstream pressure sensor, and the controller determines whether a predetermined critical expansion condition is satisfied by using outputs of the upstream pressure sensor and the downstream pressure sensor after the control valve is closed, and diagnoses flow rate control by using the pressure drop data acquired during a period in which the predetermined critical expansion condition is satisfied.

公开(公告)号：US20170037987A1

公开(公告)日：2017-02-09

申请号：US15107044

申请日：2014-12-22

Applicant: FUJIKIN INCORPORATED

Inventor： Ryousuke DOHI ,  Naofumi YASUMOTO ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: F16L15/00 ,  F16L55/027

CPC classification number: F16L15/008 ,  F16L55/027 ,  G01F1/42 ,  G01F15/005 ,  G05D7/0635

Abstract: A flow passage sealing structure for omitting a process of welding or caulking an orifice plate and a filter plate to an orifice base and a filter base as base materials and allowing further miniaturization, includes a main block (1) including main flow passages (1a, 1b), recessed portions (12, 13) provided in side surfaces of the main block and having female screws in inner peripheral surfaces, thin plates (6, 8) abutting against the bottom surfaces of the recessed portions and having through holes, gasket rings (16, 17) abutting against the thin plates (6, 8), pressing pipelines (20, 21) having large-diameter portions and internal flow passages communicable with the main flow passages (1a, 1b) and abutting against the gasket rings, and fastening screws (22) abutting against the large-diameter portions and pressing the pressing pipelines by being inserted around the outside of the pressing pipelines and screwed into the female screws.

Abstract translation: 一种流通密封结构，用于省略将孔板和过滤板焊接或铆接到孔底部和过滤器底座作为基础材料并允许进一步小型化的过程，包括主块（1），主块（1）包括主流动通道（1a， 1b），设置在主块的侧表面中并且在内周表面中具有内螺纹的凹部（12,13），与凹部的底面抵接的薄板（6,8），并具有通孔，垫圈环 （16,17），抵靠薄板（6,8），具有大直径部分的压力管道（20,21）和与主流动通道（1a，1b）连通并且与垫圈环邻接的内部流动通道， 和紧固螺钉（22），该紧固螺钉（22）抵靠大直径部分，并且通过插入压力管道的外部并拧入内螺纹中来挤压压力管道。