公开(公告)号：US20110115841A1

公开(公告)日：2011-05-19

申请号：US12917098

申请日：2010-11-01

申请人： Sukehiro Ito

发明人： Sukehiro Ito

IPC分类号： B41J29/38

CPC分类号： B41J2/12 ,  B41J2/04563 ,  B41J2/16579

摘要： A discharge test device including: a head that includes a plurality of nozzles discharging liquid to a medium, a temperature obtaining section that obtains a temperature related to the head, a detection electrode that faces the head with a predetermined distance therebetween, an identification section that applies a predetermined voltage to the detection electrode and identifies an abnormal nozzle on the basis of voltage change of the detection electrode generated by liquid discharge from the nozzles, and a control section that controls the head and the identification section so that: when the temperature obtained by the temperature obtaining section is within a first temperature range, the head discharges the liquid to the medium after the identification section identifies the abnormal nozzle, when the temperature obtained by the temperature obtaining section is outside the first temperature range and within a second temperature range that is larger than the first temperature range, the head discharges the liquid to the medium without the abnormal nozzle being identified by the identification section, and when the temperature obtained by the temperature obtaining section is outside the second temperature range, the abnormal nozzle is not identified and the liquid is not discharged to the medium.

摘要翻译： 一种放电测试装置，包括：头，其包括将液体排出到介质的多个喷嘴，获得与头相关的温度的温度获取部，与其之间具有预定距离的头部的检测电极;识别部， 对检测电极施加预定的电压，并根据从喷嘴的液体排出产生的检测电极的电压变化来识别异常喷嘴;以及控制部，其控制头部和识别部，使得：当获得的温度 通过温度获取部在第一温度范围内，当由温度获取部获得的温度在第一温度范围之外且在第二温度范围内时，在识别部识别异常喷嘴之后，喷头将液体排出到介质 大于第一温度范围t 他的头将液体排放到介质上，而不会由识别部分识别出异常的喷嘴，当温度获得部分获得的温度在第二温度范围之外时，不会识别异常喷嘴，液体不会排放到 中。

公开(公告)号：US20110090284A1

公开(公告)日：2011-04-21

申请号：US12902963

申请日：2010-10-12

申请人： Sukehiro Ito

发明人： Sukehiro Ito

IPC分类号： B41J2/135

CPC分类号： B41J2/14274 ,  B41J2/0451 ,  B41J2/04541 ,  B41J2/04581 ,  B41J2/04588 ,  B41J2/16547 ,  B41J2/16579

摘要： The printing apparatus includes: a head which discharges liquid from a nozzle and is grounded; a detection electrode which is opposed to the nozzle at a predetermined interval and is sealed by an insulating member; a power source which ensures the detection electrode is at a predetermined potential; a determining unit which detects a change in potential of the detecting electrode that is caused by the discharge of the liquid from the nozzle and determines a nozzle that does not normally discharge the liquid to the head on the basis of the change in potential of the detection electrode; and a cap portion which abuts the head during non-printing and accommodates the detection electrode.

摘要翻译： 打印装置包括：头部，其从喷嘴排出液体并接地; 检测电极，其以预定间隔与所述喷嘴相对并且被绝缘构件密封; 确保检测电极处于预定电位的电源; 检测从喷嘴排出液体引起的检测电极的电位变化的判定单元，基于检测电位的变化，确定不能正常地将液体喷射到头部的喷嘴 电极; 以及在非打印期间与头部邻接并容纳检测电极的盖部。

公开(公告)号：US20090207211A1

公开(公告)日：2009-08-20

申请号：US12361225

申请日：2009-01-28

申请人： Sukehiro Ito

发明人： Sukehiro Ito

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2202/08

摘要： A liquid jet head includes: a pressure generation chamber 11 communicating with a nozzle opening 13 ejecting a liquid; a piezoelectric element 17 causing pressure change inside the pressure generation chamber 11; a case head 20 having an accommodation portion 19 accommodating the piezoelectric element 17; and a flexible printed board 50 having a driving circuit 60 mounted thereon and connected to the piezoelectric element 17 to drive the piezoelectric element 17. The accommodation portion 19 of the case head 20 is provided with a flow passage member 21 holding a base end portion of the piezoelectric element 17 and being connected to the driving circuit 60 in a thermally conductive manner, the case head 20 is provided with a liquid introduction passage 30 for supplying the liquid to the pressure generation chamber 11, and the flow passage member 21 partitions a part of at least a wall surface of the liquid introduction passage 30.

摘要翻译： 液体喷射头包括：与喷射液体的喷嘴开口13连通的压力产生室11; 在压力产生室11内产生压力变化的压电元件17; 壳体头20具有容纳压电元件17的容纳部分19; 以及具有安装在其上的驱动电路60并与压电元件17连接以驱动压电元件17的柔性印刷电路板50.壳体磁头20的容纳部分19设有流动通道部件21， 压电元件17以导热方式连接到驱动电路60，壳体头20设置有用于将液体供应到压力产生室11的液体引入通道30，并且流动通道构件21将部件 至少是液体导入通道30的壁表面。

公开(公告)号：US09165741B2

公开(公告)日：2015-10-20

申请号：US14235892

申请日：2012-07-04

申请人： Yusuke Ominami ,  Tomohisa Ohtaki ,  Sukehiro Ito

发明人： Yusuke Ominami ,  Tomohisa Ohtaki ,  Sukehiro Ito

IPC分类号： H01J37/06 ,  H01J37/18 ,  H01J37/28

CPC分类号： H01J37/18 ,  H01J37/06 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/166 ,  H01J2237/18 ,  H01J2237/202 ,  H01J2237/2445 ,  H01J2237/2608

摘要： A charged particle beam device capable of observing a sample in an air atmosphere or gas atmosphere has a thin film for separating the atmospheric pressure space from the decompressed space. A vacuum evacuation pump evacuates a first housing; and a detector detects a charged particle beam (obtained by irradiation of the sample) in the first housing. A thin film is provided to separate the inside of the first housing and the inside of a second housing at least along part of the interface between the first and second housings. An opening part is formed in the thin film so that its opening area on a charged particle irradiation unit's side is larger than its opening area on the sample side; and the thin film which covers the sample side of the opening part transmits or allows through the primary charged particle beam and the charged particle beam.

摘要翻译： 能够在空气气氛或气体气氛中观察样品的带电粒子束装置具有用于将压缩空间与减压空间分离的薄膜。 真空排气泵抽出第一壳体; 并且检测器检测在第一壳体中的带电粒子束（通过样品的照射获得）。 提供薄膜以至少沿着第一和第二壳体之间的界面的一部分分离第一壳体的内部和第二壳体的内部。 在薄膜中形成开口部，使得带电粒子照射单元侧的开口面积大于样品侧的开口面积; 并且覆盖开口部的样品侧的薄膜透过或允许通过初级带电粒子束和带电粒子束。

公开(公告)号：US08710439B2

公开(公告)日：2014-04-29

申请号：US14111174

申请日：2012-03-02

申请人： Yusuke Ominami ,  Sukehiro Ito ,  Tomohisa Ohtaki

发明人： Yusuke Ominami ,  Sukehiro Ito ,  Tomohisa Ohtaki

IPC分类号： H01J37/28 ,  H01J37/20 ,  G01N13/10

CPC分类号： H01J37/18 ,  H01J37/16 ,  H01J37/185 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/16 ,  H01J2237/164 ,  H01J2237/1825 ,  H01J2237/2007 ,  H01J2237/2608

摘要： Provided is a charged particle beam apparatus or charged particle microscope capable of observing an observation target sample in an air atmosphere or a gas environment without making significant changes to the configuration of a conventional high vacuum charged particle microscope. In a charged particle beam apparatus configured such that a thin film (10) is used to separate a vacuum environment and an air atmosphere (or a gas environment), an attachment (121) capable of holding the thin film (10) and whose interior can be maintained at an air atmosphere or a gas environment is inserted into a vacuum chamber (7) of a high vacuum charged particle microscope. The attachment (121) is vacuum-sealed and fixed to a vacuum partition of the vacuum sample chamber. Image quality is further improved by replacing the atmosphere in the attachment with helium or a light-elemental gas that has a lower mass than atmospheric gases such as nitrogen or water vapor.

公开(公告)号：US08220906B2

公开(公告)日：2012-07-17

申请号：US12354713

申请日：2009-01-15

申请人： Sukehiro Ito

发明人： Sukehiro Ito

IPC分类号： B41J2/045

CPC分类号： B41J2/14274 ,  B41J2/1612 ,  B41J2/1623 ,  B41J2002/14362

摘要： An ink jet recording head 10 is provided which includes: piezoelectric elements 17 as a pressure generation unit that causes pressure change in pressure generation chambers 11 which are communicated with nozzle openings 13 that eject liquid; a driving circuit 60 as a driving unit that generates a driving signal for driving the pressure generation unit; a case head 20 that accommodates therein the driving unit; and a thermal conductor 35 that is in contact with the driving unit and the case head 20, in which the thermal conductor 35 and the case head 20 are fixed to each other via an thermally conductive adhesive layer 72 as a thermally conductive layer.

摘要翻译： 提供一种喷墨记录头10，其包括：作为压力产生单元的压电元件17，其产生与喷射液体的喷嘴开口13连通的压力产生室11的压力变化; 作为驱动单元的驱动电路60，其产生用于驱动压力产生单元的驱动信号; 容纳在其中的驱动单元的壳体头20; 以及与驱动单元和壳体头20接触的热导体35，其中热导体35和壳体头20通过作为导热层的导热粘合剂层72彼此固定。

公开(公告)号：US20120127299A1

公开(公告)日：2012-05-24

申请号：US13387424

申请日：2010-07-20

申请人： Tomohisa Ohtaki ,  Masahiko Ajima ,  Sukehiro Ito ,  Mitsuru Onuma ,  Akira Omachi

发明人： Tomohisa Ohtaki ,  Masahiko Ajima ,  Sukehiro Ito ,  Mitsuru Onuma ,  Akira Omachi

IPC分类号： H04N7/18

CPC分类号： H01J37/28 ,  F16F15/04 ,  H01J37/16 ,  H01J2237/0216

摘要： A scanning electron microscope includes a main scanning electron microscope unit having an electron optical column and a sample chamber, a controller over the main scanning electron microscope unit, a single housing that houses both the main scanning electron microscope unit and the controller, and a bottom plate disposed under the single housing, the main scanning electron microscope unit and the controller. A first leg member is attached to a bottom face of the bottom plate on a side of the controller with a first opening hole provided through the bottom plate on a side of the main scanning electron microscope unit, and a damper is fixed to a bottom face of the main scanning electron microscope unit and disposed through the first opening hole.

摘要翻译： 扫描电子显微镜包括具有电子光学柱和样品室的主扫描电子显微镜单元，主扫描电子显微镜单元上的控制器，容纳主扫描电子显微镜单元和控制器的单个壳体，底部 设置在单个壳体下方的主扫描电子显微镜单元和控制器。 第一腿部件在控制器的一侧的底板的底面上，在主扫描电子显微镜单元的一侧具有通过底板提供的第一开孔，并且阻尼器固定到底面 的主扫描电子显微镜单元，并且通过第一开孔设置。

公开(公告)号：US07154089B2

公开(公告)日：2006-12-26

申请号：US11006556

申请日：2004-12-08

申请人： Junichi Katane ,  Sukehiro Ito

发明人： Junichi Katane ,  Sukehiro Ito

IPC分类号： G01N23/00

CPC分类号： H01J37/28 ,  H01J2237/2448 ,  H01J2237/2449

摘要： A scanning electron microscope in which the secondary electrons generated from a specimen are efficiently caught by a secondary electron detector by correcting and controlling the trajectory of the secondary electrons is disclosed. A first auxiliary electrode impressed with a negative potential of several to several tens of volts is arranged in the vicinity of a radiation hole of the primary electron beam under an objective lens, and a second auxiliary electrode impressed with a positive voltage is arranged on the side of the first auxiliary electrode nearer to the secondary electron detector thereby to correct and control the trajectory of the secondary electrons. Further, a third auxiliary electrode for assisting in catching the secondary electrons generated from the specimen is arranged on the front surface of the secondary electron detector.

摘要翻译： 公开了一种扫描电子显微镜，其中从样品产生的二次电子被二次电子检测器有效地捕获，通过校正和控制二次电子的轨迹。 在物镜下方的一次电子束的放射孔附近配置有数十〜数十伏的负电位的第一辅助电极，并且在侧面配置施加正电压的第二辅助电极 的第二辅助电极，从而校正和控制二次电子的轨迹。 此外，在二次电子检测器的前表面上布置有用于辅助捕获从试样产生的二次电子的第三辅助电极。

公开(公告)号：US09543111B2

公开(公告)日：2017-01-10

申请号：US13982805

申请日：2011-11-02

申请人： Yusuke Ominami ,  Sukehiro Ito ,  Masami Katsuyama

发明人： Yusuke Ominami ,  Sukehiro Ito ,  Masami Katsuyama

IPC分类号： H01J37/28 ,  H01J37/16 ,  H01J37/18 ,  H01J37/26

CPC分类号： H01J37/16 ,  H01J37/18 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/2608 ,  H01J2237/2811

摘要： Provided is a charged particle beam device or charged particle microscope permitting observation of even a large-sized specimen in the air atmosphere or a gaseous atmosphere.A charged particle beam device that adopts a thin film which partitions a vacuum atmosphere and the air atmosphere (or gaseous atmosphere) includes a charged particle optical lens barrel in which a charged particle optical system is stored, a housing in which a route along which a primary charged particle beam emitted from the charged particle optical lens barrel reaches the thin film is sustained in the vacuum atmosphere, and a mechanism that bears the charged particle optical lens barrel and first housing against a device installation surface. As the bearing mechanism, a housing having an opening through which a large-sized specimen is carried in or a mechanism having a shape other than the shape of the housing, such as, a post is adopted.

摘要翻译： 采用分隔真空气氛的薄膜和空气气氛（或气体气氛）的带电粒子束装置包括其中存储带电粒子光学系统的带电粒子光学镜筒，其中沿着 从带电粒子光学透镜镜筒发射的到达薄膜的初级带电粒子束在真空气氛中被维持，并且使得带电粒子光学镜片镜筒和第一壳体抵抗装置安装​​表面的机构。 作为轴承机构，采用具有大尺寸样本的开口的壳体或具有除壳体的形状以外的形状的机构，例如柱。

公开(公告)号：US20140246583A1

公开(公告)日：2014-09-04

申请号：US14349630

申请日：2012-09-03

申请人： Yusuke Ominami ,  Mami Konomi ,  Sukehiro Ito ,  Tomohisa Ohtaki ,  Shinsuke Kawanishi

发明人： Yusuke Ominami ,  Mami Konomi ,  Sukehiro Ito ,  Tomohisa Ohtaki ,  Shinsuke Kawanishi

IPC分类号： H01J37/22 ,  H01J37/26

CPC分类号： H01J37/18 ,  H01J37/16 ,  H01J37/20 ,  H01J37/22 ,  H01J37/226 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/166 ,  H01J2237/182 ,  H01J2237/2007 ,  H01J2237/204 ,  H01J2237/2602 ,  H01J2237/2608

摘要： Provided is an inspection apparatus or observation apparatus enabling appropriate inspection or observation of a sample in an easy-to-use manner, using a charged-particle technique and an optical technique. Specifically, provided is an inspection or observation apparatus including: a first casing forming at least part of a first space constituting at least part of a region through which a primary charged-particle beam emitted from a charged-particle irradiation section reaches a sample, the first space capable of being maintained in a vacuum state; a second casing provided on the first casing to form at least part of a second space capable of storing the sample therein; a partition wall section for partitioning the first space and the second space from each other, the partition wall section disposed so as to be coaxial with the charged-particle irradiation section when the sample is irradiated with the primary charged-particle beam from the charged-particle irradiation section; and an optical observation section for casting light onto the sample and detecting light from the sample from the same direction as the charged-particle irradiation section.

摘要翻译： 提供了使用带电粒子技术和光学技术，以易于使用的方式对样品进行适当的检查或观察的检查装置或观察装置。 具体地，提供一种检查或观察装置，包括：第一壳体，其形成构成从带电粒子照射部分发射的初级带电粒子束到达样品的区域的至少一部分的至少一部分的第一空间， 能够保持在真空状态的第一空间; 设置在所述第一壳体上以形成能够将所述样品存储在其中的至少一部分第二空间的第二壳体; 用于将第一空间和第二空间彼此分隔开的分隔壁部分，当从带电粒子束照射样品的初级带电粒子束时，分隔壁部分设置成与带电粒子照射部分同轴， 粒子照射部; 以及光学观察部，用于将光线投射到样品上，并从与带电粒子照射部相同的方向检测来自样品的光。