Coupled resonator filter and fabrication method thereof
    21.
    发明申请
    Coupled resonator filter and fabrication method thereof 有权
    耦合谐振滤波器及其制造方法

    公开(公告)号:US20070139139A1

    公开(公告)日:2007-06-21

    申请号:US11455190

    申请日:2006-06-19

    IPC分类号: H03H9/54

    摘要: A coupled resonator filter and a method of fabricating the coupled resonator filter are provided. The method includes: sequentially stacking a first electrode, a first piezoelectric layer, a second electrode, an insulating layer, a third electrode, a second piezoelectric layer, and a fourth electrode on a surface of a substrate; sequentially patterning the first electrode, the first piezoelectric layer, the second electrode, the insulating layer, the third electrode, the second piezoelectric layer, and the fourth electrode to expose areas of the first, second, and third electrodes; forming a plurality of connection electrodes respectively connected to the exposed areas of the first, second, and third electrodes and an area of the fourth electrode; and etching an area of the substrate underneath the first electrode to form an air gap.

    摘要翻译: 提供耦合谐振滤波器和制造耦合谐振滤波器的方法。 该方法包括:在基板的表面上依次堆叠第一电极,第一压电层,第二电极,绝缘层,第三电极,第二压电层和第四电极; 顺序地构图第一电极,第一压电层,第二电极,绝缘层,第三电极,第二压电层和第四电极,以暴露第一,第二和第三电极的区域; 形成分别连接到第一,第二和第三电极的暴露区域和第四电极的区域的多个连接电极; 并且蚀刻在第一电极下方的衬底的区域以形成气隙。

    METHOD OF FABRICATING INKJET PRINTHEAD
    22.
    发明申请
    METHOD OF FABRICATING INKJET PRINTHEAD 有权
    制造喷墨打印机的方法

    公开(公告)号:US20070131648A1

    公开(公告)日:2007-06-14

    申请号:US11423982

    申请日:2006-06-14

    IPC分类号: G01D15/00 G11B5/127

    摘要: A method of fabricating an inkjet printhead. The method of fabricating an inkjet printhead includes sequentially forming an insulating layer, a heater, and an electrode on a substrate and forming a passivation layer on the insulating layer to cover the heater and the electrode; forming a trench that exposes the substrate by sequentially etching the passivation layer and the insulating layer; forming a sacrificial layer to form an ink chamber on the passivation layer to fill the trench; forming a seed layer to provide a plating on the sacrificial layer and the passivation layer; forming a nozzle mold on the seed layer positioned over the heater; forming a plating layer on the seed layer to a predetermined thickness; forming an ink feed hole by etching a rear surface of the substrate to expose the sacrificial layer which is filled in the trench; forming a nozzle by sequentially removing the nozzle mold and the seed layer positioned under the nozzle mold; and forming the ink chamber by removing the sacrificial layer which is exposed by the nozzle and the ink feed hole.

    摘要翻译: 一种制造喷墨打印头的方法。 制造喷墨打印头的方法包括在基板上依次形成绝缘层,加热器和电极,并在绝缘层上形成钝化层以覆盖加热器和电极; 形成通过依次蚀刻钝化层和绝缘层而使衬底暴露的沟槽; 形成牺牲层以在所述钝化层上形成墨水腔以填充所述沟槽; 形成种子层以在所述牺牲层和所述钝化层上提供电镀; 在位于加热器上方的种子层上形成喷嘴模具; 在种子层上形成预定厚度的镀层; 通过蚀刻所述衬底的后表面以暴露所述沟槽中填充的所述牺牲层来形成供墨孔; 通过依次去除位于喷嘴模具下方的喷嘴模具和籽晶层形成喷嘴; 以及通过去除由喷嘴和供墨孔暴露的牺牲层来形成墨室。

    Fuse box of semiconductor device
    23.
    发明申请
    Fuse box of semiconductor device 失效
    半导体器件保险丝盒

    公开(公告)号:US20070007620A1

    公开(公告)日:2007-01-11

    申请号:US11321622

    申请日:2005-12-30

    申请人: Hyung Choi

    发明人: Hyung Choi

    IPC分类号: H01L29/00

    摘要: A fuse box of a semiconductor device is provided. More specifically, provided is a device of forming a uniformly residual oxide film by rearranging fuse boxes in consideration of an etching ratio depending on plasma density of the semiconductor device to prevent a fuse attack. During a repair etching process to open a fuse box in a chip, an etching loading effect is evenly reflected depending on pattern density of the fuse box so that the residual oxide film is regularly distributed in each fuse of all fuse boxes regardless of the size of an open region. As a result, the fuse attack resulting from an excessive etching process on the oxide film on a small fuse is prevented in fuse blowing to improve yield of FTA (Fixed To Attempt) yield.

    摘要翻译: 提供半导体器件的保险丝盒。 更具体地,提供了考虑到取决于半导体器件的等离子体密度的蚀刻比率来重新布置熔丝盒来形成均匀残留的氧化膜的装置,以防止熔丝攻击。 在打开芯片中的保险丝盒的修复蚀刻工艺期间,根据保险丝盒的图案密度均匀地反射刻蚀负载效应,使得残余氧化膜规则地分布在所有保险丝盒的每个保险丝中,而不管其尺寸如何 一个开放的地区。 结果,在保险丝熔断时,防止了在小熔断器上对氧化膜进行过度蚀刻处理而引起的保险丝攻击,以提高FTA(固定尝试)产量的产量。

    Method for manufacturing metal structure having different heights
    24.
    发明授权
    Method for manufacturing metal structure having different heights 有权
    具有不同高度的金属结构的制造方法

    公开(公告)号:US07148141B2

    公开(公告)日:2006-12-12

    申请号:US11012312

    申请日:2004-12-16

    IPC分类号: H01L21/44

    摘要: Disclosed is a method for forming a plurality of metal structures having different heights on a semiconductor substrate. The disclosed method for manufacturing a metal structure having different heights includes: forming a plurality of seed layers, to have heights corresponding to the metal structure to be formed, on a semiconductor substrate so that those layers can be electrically separated, performing a plating process using a plating mold, and applying different currents to the respective seed layers so that the plating thickness can be adjusted for each of the seed layers. Accordingly, a plurality of metal structures having different heights can be obtained by a plating mold forming process and a plating process that are performed just once, respectively.

    摘要翻译: 公开了一种在半导体衬底上形成具有不同高度的多个金属结构体的方法。 所公开的制造具有不同高度的金属结构体的方法包括:在半导体衬底上形成多个种子层以具有与要形成的金属结构相对应的高度,使得这些层可以电分离,使用 电镀模具,并且向相应的种子层施加不同的电流,使得可以针对每个种子层调整镀层厚度。 因此,可以通过分别进行一次的电镀模具成型工序和电镀工序来获得具有不同高度的多个金属结构体。

    Flat type piezoelectric ultrasonic motor
    25.
    发明申请
    Flat type piezoelectric ultrasonic motor 失效
    扁平型压电超声波电机

    公开(公告)号:US20060108895A1

    公开(公告)日:2006-05-25

    申请号:US11082004

    申请日:2005-03-16

    IPC分类号: H02N2/00

    CPC分类号: H02N2/16

    摘要: There is provided a flat type piezoelectric ultrasonic motor for generating a rotation force to a rotor by ultrasonic vibrations. In the piezoelectric ultrasonic motor, a vibrator is formed of elastic material at a given size, a plurality of piezoelectric plates are attached on the vibrator, a rotor is drivingly connected to the vibrator thereby to be rotated, and a power source unit applies driving voltages to the piezoelectric plates. The piezoelectric plates are arranged on quartered surface areas of the vibrator in such a way that longitudinal axes of neighboring piezoelectric plates form a given angle therebetween and opposing piezoelectric plates have opposite polarizations, and the power source unit applies alternating driving voltages to the piezoelectric plates thereby to make the rotor rotated, thereby making it possible to simplify the piezoelectric plates' shape, minimize its size and enhance its driving efficiency.

    摘要翻译: 提供了一种用于通过超声波振动向转子产生旋转力的平面型压电超声波马达。 在压电超声波马达中,振动器由给定尺寸的弹性材料形成,多个压电板安装在振动器上,转子驱动地连接到振动器从而旋转,电源单元将驱动电压 到压电板。 压电板被布置在振动器的四分之一的表面区域上,使相邻的压电板的纵向轴线在其间形成给定的角度,相对的压电板具有相反的极化,并且电源单元向压电板施加交替的驱动电压 以使转子旋转,从而可以简化压电板的形状,使其尺寸最小化并提高其驱动效率。

    Silicon-on-insulator substrate, fabricating method thereof, and method for fabricating floating structure using the same
    26.
    发明申请
    Silicon-on-insulator substrate, fabricating method thereof, and method for fabricating floating structure using the same 有权
    绝缘体上硅衬底及其制造方法以及使用其制造浮动结构的方法

    公开(公告)号:US20060081929A1

    公开(公告)日:2006-04-20

    申请号:US11242824

    申请日:2005-10-05

    IPC分类号: H01L21/84 H01L27/12

    CPC分类号: B81C1/00579 B81C2201/0132

    摘要: A silicon-on-insulator (SOI) substrate including laminated layers of a substrate, an oxide layer, and a silicon layer in order. The oxide layer has an electrifying hole fluidly connected with the substrate and the electrifying hole is filled with a part of the silicon layer. A method for fabricating the floating structure is also disclosed which includes the steps of forming an oxide layer having a predetermined thickness on a substrate, forming one or more electrifying holes in an area of the oxide layer corresponding to an inner part of the floating structure, forming a silicon layer on the oxide layer including an electrification structure electrically connecting the silicon layer to the substrate, forming a pattern for the floating structure on the silicon layer, removing the oxide layer corresponding to an inner area of the pattern, forming a thermal oxide layer on a surface of the silicon layer, and removing the thermal oxide layer to form the floating structure.

    摘要翻译: 一种绝缘体上硅(SOI)衬底,包括衬底,氧化物层和硅层的叠层。 氧化物层具有与基板流体连接的带电孔,并且充电孔填充有硅层的一部分。 还公开了一种用于制造浮动结构的方法,其包括在衬底上形成具有预定厚度的氧化物层的步骤,在与浮动结构的内部对应的氧化物层的区域中形成一个或多个通电孔, 在所述氧化物层上形成硅层,所述硅层包括将所述硅层电连接到所述衬底的带电结构,在所述硅层上形成所述浮动结构的图案,除去与所述图案的内部区域对应的所述氧化物层,形成热氧化物 层,并且去除热氧化物层以形成浮动结构。

    Method for gyroscope using SMS wafer and gyroscope fabricated by the same
    27.
    发明申请
    Method for gyroscope using SMS wafer and gyroscope fabricated by the same 有权
    使用SMS晶圆和陀螺仪制作的陀螺仪的方法

    公开(公告)号:US20050132798A1

    公开(公告)日:2005-06-23

    申请号:US11002241

    申请日:2004-12-03

    摘要: Method for fabricating a gyroscope including: fabricating a SMS wafer where a first wafer, a metal film, and a second wafer are sequentially stacked; forming a cantilever or a bridge shaped-structure on the relevant portion of the first wafer through the photolithography process; attaching to the surface of the first wafer, a first cap made of glass and having a predetermined space for sealing the movable structure in a vacuum state; separating and removing the metal film and the second wafer from the first wafer; and attaching to the backside of the first wafer, the second cap which is structurally and materially symmetric to the first cap. The SMS wafer is fabricated by depositing the metal film on the second wafer and bonding the first wafer on the metal film using metal paste or material of polymer series. With lower material costs, improvements in performance and characteristics can be achieved.

    摘要翻译: 制造陀螺仪的方法,包括:制造顺序堆叠第一晶片,金属膜和第二晶片的SMS晶片; 通过光刻工艺在第一晶片的相关部分上形成悬臂或桥形结构; 附接到第一晶片的表面,由玻璃制成的第一盖,并且具有用于在真空状态下密封可移动结构的预定空间; 从第一晶片分离和去除金属膜和第二晶片; 并且附接到所述第一晶片的所述背面,所述第二盖在所述第一盖结构和物理上对称。 通过在第二晶片上沉积金属膜并使用金属浆料或聚合物系列材料将第一晶片接合在金属膜上来制造SMS晶片。 随着材料成本的降低,可以实现性能和特性的提高。

    Operating method for design system associated with prestressed concrete
cylinder pipes using graphic user interface
    28.
    发明授权
    Operating method for design system associated with prestressed concrete cylinder pipes using graphic user interface 失效
    使用图形用户界面与预应力混凝土筒管相关的设计系统的操作方法

    公开(公告)号:US6151680A

    公开(公告)日:2000-11-21

    申请号:US99962

    申请日:1998-06-19

    IPC分类号: G06F17/50 G06T19/00 G06F11/00

    摘要: A design system associated with prestressed concrete cylinder pipe (PCCP) using a graphic user interface (GUI), which is capable of carrying out, in an integrated fashion, a variety of operations such as operations for the design of embedded-cylinder pipe (ECP), lined-cylinder pipes (LCP), and fittings, computer-aided drawing (CAD) interfaces, operations for quantity calculation, operations for inquiry to a Database, and operations for a demo presentation, in a GUI environment allowing for the easy use of the design system by the user. In accordance with this operating method, it is possible to not only reduce the time taken to design ECP, LCP, and fittings, but also to allow the user to achieve such a design even when he has no theoretical knowledge of that design while only having knowledge of data inputting and outputting.

    摘要翻译: 与使用图形用户界面(GUI)的预应力混凝土圆柱管(PCCP)相关联的设计系统,其能够以集成的方式执行各种操作,例如嵌入式气缸管道(ECP)的设计操作 ),衬里缸管(LCP)和配件,计算机辅助绘图(CAD)界面,数量计算操作,查询数据库操作和演示演示操作,可在易于使用的GUI环境中 的用户设计系统。 根据这种操作方法,不仅可以减少设计ECP,LCP和配件所需的时间,而且还可以使用户即使在没有理论知识的情况下也可以实现这样的设计,而只有 数据输入和输出知识。

    Light emitting diode integrated with lens, line printer head, and method of manufacturing the light emitting diode
    29.
    发明授权
    Light emitting diode integrated with lens, line printer head, and method of manufacturing the light emitting diode 有权
    集成了透镜,线打印头的发光二极管和制造发光二极管的方法

    公开(公告)号:US09278545B2

    公开(公告)日:2016-03-08

    申请号:US12805893

    申请日:2010-08-23

    摘要: Provided are a light emitting diode unit including a light emitting diode integrated with a lens, a line printer head using the light emitting diode, and a method of manufacturing the light emitting diode. The light emitting diode unit includes the light emitting diode layer bonded to a transparent substrate after removing a growth substrate on which the light emitting layer is grown, and a lens that refracts light emitted from the light emitting diode is formed on the transparent substrate.

    摘要翻译: 提供了一种包括与透镜集成的发光二极管的发光二极管单元,使用该发光二极管的行式打印机头,以及制造该发光二极管的方法。 发光二极管单元包括在除去其上生长发光层的生长衬底之后结合到透明衬底的发光二极管层,并且在透明衬底上形成折射从发光二极管发射的光的透镜。