APPARATUS AND METHOD FOR MANUFACTURING SUBSTRATE
    22.
    发明申请
    APPARATUS AND METHOD FOR MANUFACTURING SUBSTRATE 审中-公开
    用于制造基板的装置和方法

    公开(公告)号:US20110200753A1

    公开(公告)日:2011-08-18

    申请号:US12762924

    申请日:2010-04-19

    IPC分类号: B05D3/12 B05C11/00

    摘要: Disclosed herein is an apparatus for manufacturing a substrate, including: a first chamber supplying an insulation layer; a second chamber including a roughening roller roughening at least one side of the insulation layer supplied from the first chamber, an evaporator depositing a metal layer on the roughened insulation layer, and a pressing roller pressing the insulation layer and the metal layer; and a third chamber storing the insulation layer including the metal layer formed thereon, the insulation layer being taken out from the second chamber. The apparatus for manufacturing a substrate is advantageous in that substrates are continuously produced, thus increasing the productivity of the substrates and preventing the substrates from being contaminated by the air.

    摘要翻译: 本文公开了一种用于制造衬底的装置,包括:提供绝缘层的第一腔室; 第二室,包括使从第一室供应的绝缘层的至少一侧粗糙化的粗糙化辊;在粗糙化绝缘层上沉积金属层的蒸发器;以及按压绝缘层和金属层的加压辊; 以及第三室,存储包括形成在其上的金属层的绝缘层,绝缘层从第二室取出。 用于制造基板的装置的优点在于,连续地生产基板,从而提高基板的生产率并防止基板被空气污染。