公开(公告)号：US08207443B2

公开(公告)日：2012-06-26

申请号：US12360804

申请日：2009-01-27

申请人： Peter Borden

发明人： Peter Borden

IPC分类号： H01L31/00 ,  H01L31/042

CPC分类号： H01L31/0747 ,  H01L31/022425 ,  H01L31/03682 ,  H01L31/03762 ,  H01L31/061 ,  Y02E10/546 ,  Y02E10/548

摘要： The present invention relates to electrical contacts in a semiconductor device, and more particularly to methods and apparatuses for providing point contacts in a polysilicon emitter or HIT type solar cell. According to certain aspects, the invention uses a dielectric layer interposed between the substrate and a conductive layer to provide a limited area over which junction current can flow. The benefit is that the metal grid conductors do not need to align to the contacts, and can be applied freely without registration. Another benefit of the invention is that it provides increased efficiency for poly emitter and HIT cells through use of point contacts to increase current density. A further benefit is that patterning can be accomplished using low cost methods such as inclusion masking, screen printing or laser ablation. A still further benefit is that final contacts do not need alignment to the point contacts, eliminating registration required for conventional point contact designs.

摘要翻译： 本发明涉及半导体器件中的电触点，更具体地说，涉及在多晶硅发射器或HIT型太阳能电池中提供点接触的方法和装置。 根据某些方面，本发明使用插入在基板和导电层之间的电介质层，以提供结流电流可流过的有限区域。 其优点在于，金属栅格导体不需要与触点对准，并且可以自由地应用而不需要注册。 本发明的另一个好处是它通过使用点接触来增加电流密度来提高多晶硅发射极和HIT电池的效率。 另外的好处是可以使用诸如夹杂物掩蔽，丝网印刷或激光烧蚀的低成本方法来实现图案化。 更进一步的好处是，最终接触不需要与点触点对准，消除了常规点接触设计所需的配准。

公开(公告)号：US20100311203A1

公开(公告)日：2010-12-09

申请号：US12479139

申请日：2009-06-05

申请人： Peter Borden ,  Michael P. Stewart ,  Li Xu ,  Hemant P. Mungekar ,  Christopher S. Olsen

发明人： Peter Borden ,  Michael P. Stewart ,  Li Xu ,  Hemant P. Mungekar ,  Christopher S. Olsen

IPC分类号： H01L31/0216

CPC分类号： H01L31/1868 ,  H01L31/022425 ,  H01L31/072 ,  Y02E10/50 ,  Y02P70/521

摘要： Embodiments of the invention contemplate the formation of a high efficiency solar cell using a novel plasma oxidation process to form a passivation film stack on a surface of a solar cell substrate. In one embodiment, the methods include providing a substrate having a first type of doping atom on a back surface of the substrate and a second type of doping atom on a front surface of the substrate, plasma oxidizing the back surface of the substrate to form an oxidation layer thereon, and forming a silicon nitride layer on the oxidation layer.

摘要翻译： 本发明的实施例考虑使用新颖的等离子体氧化工艺形成高效太阳能电池，以在太阳能电池基板的表面上形成钝化膜堆叠。 在一个实施方案中，所述方法包括提供在衬底的背面上具有第一类型的掺杂原子的衬底和在衬底的前表面上的第二类型的掺杂原子，等离子体氧化衬底的背表面以形成 氧化层，并在氧化层上形成氮化硅层。

公开(公告)号：US07838400B2

公开(公告)日：2010-11-23

申请号：US12175357

申请日：2008-07-17

申请人： Peter Borden

发明人： Peter Borden

IPC分类号： H01L21/26 ,  H01L21/42

CPC分类号： H01L31/02168 ,  Y02E10/50

摘要： A method of manufacturing a solar cell is provided. One surface of a semiconductor substrate is doped with a n-type dopant. The substrate is then subjected to a thermal oxidation process to form an oxide layer on one or both surfaces of the substrate. The thermal process also diffuses the dopant into the substrate, smoothing the concentration profile. The smoothed concentration gradient enables the oxide layer to act as a passivating layer. Anti-reflective coatings may be applied over the oxide layers, and a reflective layer may be applied on the surface opposite the doped surface to complete the solar cell.

摘要翻译： 提供一种制造太阳能电池的方法。 掺杂有n型掺杂剂的半导体衬底的一个表面。 然后对衬底进行热氧化处理以在衬底的一个或两个表面上形成氧化物层。 热处理也将掺杂剂扩散到衬底中，使浓度分布平滑。 平滑的浓度梯度使得氧化物层能够用作钝化层。 可以在氧化物层上施加抗反射涂层，并且可以在与掺杂表面相对的表面上施加反射层以完成太阳能电池。

公开(公告)号：US20100275984A1

公开(公告)日：2010-11-04

申请号：US12456404

申请日：2009-06-15

申请人： Martin Kaes ,  Peter Borden ,  Kamel Ounadjela ,  Andreas Kraenzl ,  Alain Blosse ,  Fritz G. Kirscht

发明人： Martin Kaes ,  Peter Borden ,  Kamel Ounadjela ,  Andreas Kraenzl ,  Alain Blosse ,  Fritz G. Kirscht

IPC分类号： H01L31/02 ,  H01L31/18

CPC分类号： H01L31/18 ,  H01L31/022425 ,  H01L31/068 ,  H01L31/0684 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： A simplified manufacturing process and the resultant bifacial solar cell (BSC) are provided, the simplified manufacturing process reducing manufacturing costs. The BSC includes an active region located on the front surface of the substrate, formed for example by a phosphorous diffusion step. The back surface includes a doped region, the doped region having the same conductivity as the substrate but with a higher doping level. Contact grids are formed, for example by screen printing. Front junction isolation is accomplished using a laser scribe.

摘要翻译： 提供了简化的制造工艺和所得的双面太阳能电池（BSC），简化的制造工艺降低了制造成本。 BSC包括位于基板的前表面上的有源区，例如通过磷扩散步骤形成。 背面包括掺杂区域，该掺杂区域具有与衬底相同的导电性但具有较高的掺杂水平。 形成接触网格，例如通过丝网印刷。 使用激光划片实现前结隔离。

公开(公告)号：US20100275983A1

公开(公告)日：2010-11-04

申请号：US12456378

申请日：2009-06-15

申请人： Martin Kaes ,  Peter Borden ,  Kamel Ounadjela ,  Andreas Kraenzl ,  Alain Blosse ,  Fritz G. Kirscht

发明人： Martin Kaes ,  Peter Borden ,  Kamel Ounadjela ,  Andreas Kraenzl ,  Alain Blosse ,  Fritz G. Kirscht

IPC分类号： H01L31/0352 ,  H01L31/0232

CPC分类号： H01L31/18 ,  H01L31/022425 ,  H01L31/068 ,  H01L31/0684 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： A simplified manufacturing process and the resultant bifacial solar cell (BSC) are provided, the simplified manufacturing process reducing manufacturing costs. The BSC includes an active region located on the front surface of the substrate, formed for example by a phosphorous diffusion step. After removing the PSG, assuming phosphorous diffusion, and isolating the front junction, dielectric layers are deposited on the front and back surfaces. Contact grids are formed, for example by screen printing. Prior to depositing the back surface dielectric, a metal grid may be applied to the back surface, the back surface contact grid registered to, and alloyed to, the metal grid during contact firing.

摘要翻译： 提供了简化的制造工艺和所得的双面太阳能电池（BSC），简化的制造工艺降低了制造成本。 BSC包括位于基板的前表面上的有源区，例如通过磷扩散步骤形成。 在去除PSG之后，假设磷扩散并隔离前端，电介质层沉积在前表面和后表面上。 形成接触网格，例如通过丝网印刷。 在沉积后表面电介质之前，可以在接触点火期间将金属网格施加到后表面，后表面接触栅格，注册到金属栅格并与之合并。

公开(公告)号：US07517709B1

公开(公告)日：2009-04-14

申请号：US11941253

申请日：2007-11-16

申请人： Peter Borden

发明人： Peter Borden

IPC分类号： H01L21/00 ,  H01L31/00

CPC分类号： H01L31/1804 ,  B23K26/0661 ,  B23K26/18 ,  B23K26/40 ,  B23K2101/40 ,  B23K2103/50 ,  H01L31/022425 ,  Y02E10/547 ,  Y02P70/521

摘要： A method for fabricating point contacts to the rear surface of a silicon solar cell by coating the rear surface with a masking layer and a laser absorptive layer and directing laser radiation to the rear surface to form openings therein after which doping material is applied through the openings and contacts are applied. The doping is preferably performed by plasma immersion ion implantation.

摘要翻译： 一种用于通过用掩模层和激光吸收层涂覆后表面并将激光辐射引导到后表面以在其中形成开口的方式来制造到硅太阳能电池的后表面的点接触，之后通过开口施加掺杂材料 并应用联系人。 掺杂优选通过等离子体浸没离子注入进行。

公开(公告)号：US20070042390A1

公开(公告)日：2007-02-22

申请号：US11207351

申请日：2005-08-19

申请人： Peter Borden

发明人： Peter Borden

IPC分类号： C12Q1/68 ,  G01N33/53 ,  G06K9/00 ,  G06F19/00

CPC分类号： G01N21/6428 ,  B82Y15/00 ,  G01N21/6456 ,  G03F7/70625

摘要： Critical Dimension (CD) of features on a semiconductor substrate may be indicated utilizing the site-specific binding properties of organic or biological molecules. In accordance with one embodiment of the present invention, a fluorescent tagged organic molecule is fabricated having a length corresponding to the desired CD. The semiconductor substrate is exposed to a solution containing the organic molecule. The solution is then removed and the structure analyzed for the presence of the fluorescent tag, indicating a feature having the desired CD. Fluorescent tagged biological molecules of known size such as peptides or proteins, or nucleic acids such as DNA or RNA, may also be employed for CD measurement. Alternatively, a CD marker molecule may be designed to exhibit preferential binding, such that it fails to bind to the substrate in instances of incomplete resist development or etching.

摘要翻译： 半导体衬底上的特征的临界尺寸（CD）可以利用有机或生物分子的位点特异性结合特性来表示。 根据本发明的一个实施方案，制造具有对应于期望CD的长度的荧光标记的有机分子。 将半导体衬底暴露于含有机分子的溶液中。 然后除去溶液并分析荧光标记的存在，指示具有所需CD的特征。 已知尺寸的荧光标记的生物分子，例如肽或蛋白质，或核酸如DNA或RNA，也可用于CD测量。 或者，可以设计CD标记分子以显示优先结合，使得在不完全的抗蚀剂显影或蚀刻的情况下，其不能结合到基底。

公开(公告)号：US20050088187A1

公开(公告)日：2005-04-28

申请号：US10976587

申请日：2004-10-29

申请人： Peter Borden ,  Regina Nijmeijer ,  Beverly Klemme

发明人： Peter Borden ,  Regina Nijmeijer ,  Beverly Klemme

IPC分类号： G01R31/303 ,  G01R31/302 ,  G01N21/00 ,  G01R31/26

CPC分类号： G01R31/303

摘要： A coefficient of a function that relates a measurement from a wafer to a parameter used in making the measurement (such as the power of a beam used in the measurement) is determined. The coefficient is used to evaluate the wafer (e.g. to accept or reject the wafer for further processing), and/or to control fabrication of another wafer. In one embodiment, the coefficient is used to control operation of a wafer processing unit (that may include, e.g. an ion implanter), or a heat treatment unit (such as a rapid thermal annealer).

摘要翻译： 确定将来自晶片的测量与用于进行测量的参数（诸如在测量中使用的光束的功率）相关联的功能的系数。 该系数用于评估晶片（例如，接受或拒绝晶片以进行进一步处理）和/或控制另一晶片的制造。 在一个实施例中，系数用于控制晶片处理单元（可包括例如离子注入机）或热处理单元（例如快速热退火炉）的操作。

公开(公告)号：US5266798A

公开(公告)日：1993-11-30

申请号：US742798

申请日：1991-08-08

申请人： Peter Borden ,  Mark Nokes ,  Maurits Kain ,  James Stolz

发明人： Peter Borden ,  Mark Nokes ,  Maurits Kain ,  James Stolz

IPC分类号： G01N15/02 ,  G01N21/53 ,  H01J5/02

CPC分类号： G01N21/53 ,  G01N15/0205

摘要： A particle sensor which employs the principle that a particle passing through an intense laser beam will scatter light to a photodetector which then generates a measurable signal is provided. The particle sensor uses prisms and a cylindrical lens to compress the laser beam to make it very thin along the axis of particle motion but very wide in the plane perpendicular to particle motion, thereby simultaneously providing high beam intensity for enhanced sensitivity and a large detection area. The optical components of the sensor are mounted on separate sections which allows the optical components to be separately aligned and changed so that the sensor may be easily adapted to various applications.

摘要翻译： 提供了一种粒子传感器，其采用通过强激光束的粒子将光散射到然后产生可测量信号的光电检测器的原理。 粒子传感器使用棱镜和柱面透镜来压缩激光束，使其沿着粒子运动的轴线非常薄，但垂直于粒子运动的平面非常宽，从而同时提供高光束强度，增强灵敏度和大的检测面积 。 传感器的光学部件安装在分开的部分上，这允许光学部件被单独对准和改变，使得传感器可以容易地适应于各种应用。

公开(公告)号：US5157678A

公开(公告)日：1992-10-20

申请号：US725785

申请日：1991-07-03

申请人： Peter Borden

发明人： Peter Borden

IPC分类号： G01N15/02 ,  G01N21/53

CPC分类号： G01N21/53 ,  G01N15/0205 ,  G01N2201/0231

摘要： A housing for a laser based particle monitor comprising a pair of pipes for directing particle flow through a chamber. In one embodiment, elbows are disposed on the piping such that the interior of the chamber cannot be viewed from a point outside the housing.

摘要翻译： 一种用于激光粒子监测器的壳体，包括用于引导颗粒流过腔室的一对管道。 在一个实施例中，弯管被布置在管道上，使得不能从壳体外部的点观察室的内部。