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21.发明授权Electronic apparatus with a micro-electromechanical switch made of a piezoeletric material 有权具有由压电材料制成的微机电开关的电子设备公开(公告)号：US07952259B2
公开(公告)日：2011-05-31
申请号：US10584044
申请日：2004-12-21
IPC分类号： H01L41/08
CPC分类号： H01H57/00 , H01G5/16 , H01G5/40 , H01H1/0036 , H01H2057/006 , H01L41/0933
摘要： The device improved according to the invention comprises a micro-electromechanical switch (MEMS) with a piezoelectric element connected to a mechanical support on both sides at the edges. The electrode design of this piezoelectric element is characterized by two electrodes mounted on at least one of the surfaces.
摘要翻译： 根据本发明改进的装置包括具有压电元件的微机电开关（MEMS），所述压电元件在边缘处两端连接到机械支撑。 该压电元件的电极设计的特征在于安装在至少一个表面上的两个电极。
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公开(公告)号：US08238074B2
公开(公告)日：2012-08-07
申请号：US11913285
申请日：2006-04-21
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/40 , H01H2059/0072 , Y10T29/435
摘要： The present invention provides a capacitive RF-MEMS device comprising a vertically integrated decoupling capacitor (14). The decoupling capacitor (14) therefore does not take extra area. Furthermore, the RF-MEMS according to the invention needs less interconnects, which also saves space and which reduces the series inductance/resistance in the RF path.
摘要翻译： 本发明提供一种包括垂直集成去耦电容器（14）的电容式RF-MEMS器件。 因此，去耦电容器（14）不占用额外的面积。 此外，根据本发明的RF-MEMS需要更少的互连，这也节省了空间，并且降低了RF路径中的串联电感/电阻。
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公开(公告)号：US08104921B2
公开(公告)日：2012-01-31
申请号：US12595656
申请日：2008-04-16
申请人： Dirk Hente , Wolfgang Otto Budde , Herbert Lifka , Peter Gerard Steeneken , Peter Van De Weijer , Joseph Hendrik Anna Maria Jacobs , Volker Van Elsbergen
发明人： Dirk Hente , Wolfgang Otto Budde , Herbert Lifka , Peter Gerard Steeneken , Peter Van De Weijer , Joseph Hendrik Anna Maria Jacobs , Volker Van Elsbergen
IPC分类号： F21V1/00
CPC分类号： E06B9/386 , E06B2009/2417 , E06B2009/247 , F21S11/00 , F21S19/005 , F21Y2105/00 , F21Y2115/15
摘要： The present invention relates to a daylight deflection system including an arrangement of louvers (5) which are aligned and formed to block daylight impinging from an outer side (3) at higher angles of incidence with respect to a horizontal direction (19), to deflect daylight impinging from the outer side (3) at lower angles of incidence with respect to the horizontal direction (19) towards an indoor ceiling, and to allow visual transmission in at least the horizontal direction (19). In this deflection system OLED's (8) or optical light guides (16) coupled to LED's (17) are attached to or integrated in the louvers (5), said OLED's (8) or light guides (16) being microstructured at a surface to deflect the daylight toward the indoor sealing. With this daylight deflection system indoor lighting combining daylight and artificial light is achieved in a compact manner.
摘要翻译： 本发明涉及一种日光偏转系统，其包括百叶窗（5）的布置，所述百叶窗（5）的排列和形成以阻挡相对于水平方向（19）以较高入射角从外侧（3）入射的日光，以偏转 从外侧（3）以相对于水平方向（19）的入射角朝向室内天花板入射的日光，并允许至少水平方向（19）的视觉传播。 在该偏转系统中，耦合到LED（17）的OLED（8）或光导体（16）附接到或组合在百叶窗（5）中，所述OLED（8）或导光体（16）在表面处微结构化 使日光偏向室内密封。 利用这种日光偏转系统，结合日光和人造光的室内照明以紧凑的方式实现。
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公开(公告)号：US20080253057A1
公开(公告)日：2008-10-16
申请号：US12090004
申请日：2006-10-10
IPC分类号： H01G7/00
CPC分类号： H01G5/16
摘要： A micro-electromechanical device has a substrate (60), a movable element (15), a pair of electrodes (40) arranged on the substrate and on the movable element to move the movable element, and a controller (50) to supply the electrodes. To move the movable element to an intermediate position one or more pulses are applied during the movement, timed to compensate for under or over damping of the movement. This can reduce a settling delay. It can be applied to tunable RF capacitors. To control a decrease in the gap, a single pulse of a maximum supply level compensates for the inherent slowness of the device and over damping. To compensate for under damping, the pulses have a period corresponding to a resonant frequency, and comprise peaks and troughs above and below the final supply level, such that successive ones of the peaks and troughs are closer to the given supply level.
摘要翻译： 微机电装置具有基板（60），可动元件（15），布置在基板上的一对电极（40）和用于移动可移动元件的可移动元件，以及控制器（50） 电极。 为了将可移动元件移动到中间位置，在运动期间施加一个或多个脉冲，定时以补偿运动的低于或超过阻尼。 这可以减少建立延迟。 它可以应用于可调谐RF电容。 为了控制间隙的减小，最大电源电平的单个脉冲补偿器件的固有慢度和过阻尼。 为了补偿在阻尼下，脉冲具有对应于谐振频率的周期，并且包括高于和低于最终供应水平的峰谷，使得连续的峰和谷更靠近给定的供给水平。
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公开(公告)号：US09016133B2
公开(公告)日：2015-04-28
申请号：US12985052
申请日：2011-01-05
CPC分类号： G01L9/0047 , G01L9/0072 , H01H35/346
摘要： Various embodiments relate to a pressure sensor and related methods of manufacturing and use. A pressure sensor may include an electrical contact included in a flexible membrane that deflects in response to a measured ambient pressure. The electrical contact may be separated from a signal path through a cavity formed using a sacrificial layer and PVD plugs. At one or more defined touch-point pressure thresholds, the membrane of the pressure sensor may deflect so that the state of contact between an electrical contact and one or more sections of a signal path may change. In some embodiments, the change of state may cause the pressure sensor to trigger an alarm in the electrical circuit. Various embodiments also enable the operation of the electrical circuit for testing and calibration through the use of one or more actuation electrode layers.
摘要翻译： 各种实施例涉及压力传感器和相关的制造和使用方法。 压力传感器可以包括包括在柔性膜中的电触点，其响应于测量的环境压力而偏转。 电接触可以通过通过使用牺牲层和PVD插塞形成的腔的信号路径分离。 在一个或多个限定的接触点压力阈值处，压力传感器的膜可以偏转，使得电触点与信号路径的一个或多个部分之间的接触状态可能改变。 在一些实施例中，状态的改变可能导致压力传感器触发电路中的警报。 各种实施例还使得电路的操作能够通过使用一个或多个致动电极层进行测试和校准。
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公开(公告)号：US08818265B2
公开(公告)日：2014-08-26
申请号：US13454815
申请日：2012-04-24
申请人： Peter Gerard Steeneken , Maarten Jacobus Swanenberg , Henk Boezen , Gerhard Koops , Frans Bontekoe , Reinout Woltjer
发明人： Peter Gerard Steeneken , Maarten Jacobus Swanenberg , Henk Boezen , Gerhard Koops , Frans Bontekoe , Reinout Woltjer
摘要： One or more embodiments provide circuitry for isolation and communication of signals between circuits operating in different voltage domains using capacitive coupling. The embodiments utilize capacitive structures having increased breakdown voltage in comparison to previous parallel plate implementations. The capacitive isolation is provided by parallel plate capacitive structures, each implemented to have parallel plates of different horizontal sizes. Due to the difference in horizontal size, edges of the parallel plates, where electric fields are the strongest, are laterally offset from the region where the parallel plates overlap. As a result, breakdown voltage between the parallel plates is increased.
摘要翻译： 一个或多个实施例提供用于使用电容耦合在不同电压域中工作的电路之间的信号的隔离和通信的电路。 与先前的平行板实现相比，这些实施例利用具有增加的击穿电压的电容结构。 电容隔离由平行板电容结构提供，每个电容结构被实现为具有不同水平尺寸的平行板。 由于水平尺寸的差异，电场最强的平行板的边缘与平行板重叠的区域横向偏移。 结果，平行板之间的击穿电压增加。
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公开(公告)号：US20130316646A1
公开(公告)日：2013-11-28
申请号：US13478737
申请日：2012-05-23
CPC分类号： H01G4/385 , H01G4/06 , H01L23/48 , H01L23/642 , H01L25/0655 , H01L28/60 , H01L2224/48137 , H01L2924/00014 , H01P1/04 , H03H7/004 , H04B5/0012 , H01L2224/45099
摘要： In one or more embodiments, circuitry is provided for isolation and communication of signals between circuits operating in different voltage domains using capacitive coupling. The capacitive coupling is provided by one or more capacitive structures having a breakdown voltage that is defined by way of the various components and their spacing. The capacitive structures each include three capacitive plates arranged to have two plates located in an upper layer and one plate located in a lower layer. A communication signal can be transmitted via the capacitive coupling created between the lower plate and each of the upper plates, respectively.
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公开(公告)号：US08493157B2
公开(公告)日：2013-07-23
申请号：US12999716
申请日：2009-06-18
IPC分类号： H03H9/46 , H01L41/107
CPC分类号： H03D7/00 , H03H9/02259 , H03H9/02275 , H03H9/2452 , H03H9/465 , H03H2009/02496 , H03H2009/2442
摘要： A method of operating a micro-electromechanical system, comprising a resonator; an actuation electrode; and a first detection electrode, to filter and mix a plurality of signals. The method comprises applying a first alternating voltage signal to the actuation electrode, wherein an actuation force is generated having a frequency bandwidth that is greater than and includes a resonant bandwidth of a mechanical frequency response of the resonator, and wherein a displacement of the resonator is produced which is filtered by the mechanical frequency response and varies a value of an electrical characteristic of the first detection electrode. The method also comprises applying a second alternating voltage signal to the first detection electrode, wherein the second voltage signal is mixed with the varying value to produce a first alternating current signal. The first alternating current signal is detected at the first detection electrode.
摘要翻译： 一种操作微机电系统的方法，包括：谐振器; 致动电极; 以及第一检测电极，以过滤和混合多个信号。 该方法包括向致动电极施加第一交流电压信号，其中产生具有大于并包括谐振器的机械频率响应的谐振带宽的频率带宽的致动力，并且其中谐振器的位移为 产生的，其被机械频率响应过滤，并且改变第一检测电极的电特性的值。 该方法还包括向第一检测电极施加第二交流电压信号，其中第二电压信号与变化值混合以产生第一交流信号。 在第一检测电极处检测第一交流信号。
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公开(公告)号：US08456260B2
公开(公告)日：2013-06-04
申请号：US12942051
申请日：2010-11-09
申请人： Peter Gerard Steeneken , Hilco Suy
发明人： Peter Gerard Steeneken , Hilco Suy
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H1/20 , Y10T29/49105
摘要： A MEMS switch comprises a substrate, first and second signal lines over the substrate, which each terminate at a connection region, a lower actuation electrode over the substrate and movable contact electrode suspended over the connection regions of the first and second signal lines. An upper actuation electrode is provided over the lower actuation electrode. The connection regions of the first and second signal lines are at a first height from the substrate, wherein signal line portions extending from the connection regions are at a lower height from the substrate, and the lower actuation electrode is provided over the lower height signal line portions, so that the lower height signal line portions are buried. The area available for the actuation electrodes becomes larger and undesired forces and interference are reduced.
摘要翻译： MEMS开关包括衬底，衬底上的第一和第二信号线，其每个终止于连接区域，衬底上的下部致动电极和悬挂在第一和第二信号线的连接区域上的可动接触电极。 上致动电极设置在下致动电极上。 第一信号线和第二信号线的连接区域处于距离基板的第一高度，其中从连接区域延伸的信号线部分处于距离基板的较低高度，并且下部致动电极设置在下部高度信号线 使得下部高度信号线部分被埋入。 可用于致动电极的面积变大，并且减少了不期望的力和干扰。
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公开(公告)号：US20120286846A1
公开(公告)日：2012-11-15
申请号：US13105591
申请日：2011-05-11
申请人： Olaf Wunnicke , Willem Frederik Adrianus Besling , Gerrit Willem den Besten , Michael Joehren , Klaus Reimann , James Raymond Spehar , Peter Gerard Steeneken
发明人： Olaf Wunnicke , Willem Frederik Adrianus Besling , Gerrit Willem den Besten , Michael Joehren , Klaus Reimann , James Raymond Spehar , Peter Gerard Steeneken
IPC分类号： H03K17/00
CPC分类号： H01H59/0009
摘要： A switching circuit employs switches operating at low on resistance and high off capacitance. In connection with various example embodiments, a switching circuit selectively couples a communication port to one of two or more internal circuits based upon a type of input at the communication port. A sensor circuit senses the type of the input and, based upon the sensed input type, actuates one or more switches in the switching circuit.
摘要翻译： 开关电路采用工作在低导通电阻和高关断电容的开关。 结合各种示例实施例，切换电路基于通信端口处的输入类型，将通信端口选择性地耦合到两个或多个内部电路中的一个。 传感器电路感测输入的类型，并且基于所感测的输入类型来驱动开关电路中的一个或多个开关。
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