Method and apparatus for measuring material properties using
transient-grating spectroscopy
    21.
    发明授权
    Method and apparatus for measuring material properties using transient-grating spectroscopy 失效
    使用瞬态光栅光谱测量材料性质的方法和装置

    公开(公告)号:US6075602A

    公开(公告)日:2000-06-13

    申请号:US318322

    申请日:1999-05-25

    摘要: The invention provides an apparatus for measuring a property of a sample (using, e.g., ISTS) that includes: 1) an excitation laser that generates an excitation laser beam; 2) an optical system aligned along an optical axis that separates the excitation laser beam into at least three sub-beams; 3) an imaging system aligned along the optical axis that collects the sub-beams and focuses them onto the sample to form an optical interference pattern that generates a time-dependent response in the sample; 4) a probe laser that generates a probe laser beam that diffracts off the time-dependent response to form a signal beam; 5) a detector that detects the signal beam and in response generates a radiation-induced electronic response; and 6) a processor that processes the radiation-induced electronic response to determine the property of the sample.

    摘要翻译: 本发明提供一种用于测量样品(使用例如ISTS)的性质的装置,其包括:1)产生激发激光束的激发激光; 2)沿着光轴对准的光学系统,其将激发激光束分离成至少三个子光束; 3)沿着光轴对准的成像系统,其收集子光束并将它们聚焦到样品上以形成在样品中产生时间依赖性响应的光学干涉图案; 4)探测激光器,其产生衍射时间依赖响应以形成信号光束的探测激光束; 5)检测信号光束并作为响应的检测器产生辐射诱发的电子响应; 以及6)处理器,其处理辐射诱导的电子响应以确定样品的性质。

    Method and device for simultaneously measuring the thickness of multiple
thin metal films in a multilayer structure
    22.
    发明授权
    Method and device for simultaneously measuring the thickness of multiple thin metal films in a multilayer structure 失效
    用于同时测量多层结构中多个薄金属膜的厚度的方法和装置

    公开(公告)号:US6069703A

    公开(公告)日:2000-05-30

    申请号:US86975

    申请日:1998-05-28

    摘要: An apparatus for measuring a property of a structure comprising at least one layer, the appratus including a light source that produces an optical pulse having a duration of less than 10 ps; a diffractive element that receives the optical pulse and diffracts it to generate at least two excitation pulses; an optical system that spatially and temporally overlaps at least two excitation pulses on or in the structure to form an excitation pattern, containing at least two light regions, that launches an acoustic wave having an out-of-plane component that propagates through the layer, reflects off a lower boundary of the layer, and returns to a surface of the structure to modulate a property of the structure; a light source that produces a probe pulse that diffracts off the modulated property to generate at least one signal pulse; a detector that receives at least one signal pulse and in response generates a light-induced electrical signal; and an analyzer that analyzes the light-induced electrical signal to measure the property of the structure.

    摘要翻译: 一种用于测量包括至少一层的结构的性质的装置,所述装置包括产生具有小于10ps的持续时间的光脉冲的光源; 衍射元件,其接收光脉冲并衍射以产生至少两个激励脉冲; 在该结构上或其结构中空间和时间上重叠至少两个激励脉冲以形成激发图案的光学系统,其包含至少两个光区域,该至少两个光区域发射具有传播通过该层的平面外部分的声波, 反射层的下边界,并返回到结构的表面以调节结构的性质; 产生探测脉冲的光源,其衍射出调制特性以产生至少一个信号脉冲; 接收至少一个信号脉冲并作为响应的检测器产生光诱导的电信号; 以及分析器,其分析光感应电信号以测量结构的性质。

    Peripheral access devices and sensors for use with vehicle telematics devices and systems
    25.
    发明申请
    Peripheral access devices and sensors for use with vehicle telematics devices and systems 有权
    用于车辆远程信息处理设备和系统的外围接入设备和传感器

    公开(公告)号:US20120053759A1

    公开(公告)日:2012-03-01

    申请号:US13244017

    申请日:2011-09-23

    IPC分类号: G06F17/00

    摘要: A telematics method and system includes, and uses, a telematics device with a controller in communication with a diagnostic system configured to receive diagnostic information from a host vehicle; a position-locating system configured to determine location information of the host vehicle; a wireless transceiver configured to transmit and receive information through a wireless network to and from at least one Internet-accessible website; and, a communication interface including at least a short range wireless interface link. The telematics device may be embodied in an access device, which may include the position-locating system. The access device may be a smartphone, or similar device, that retrieves/transmits diagnostic data/information, and other data/information to/from the vehicle via the short range wireless link. The access device performs various telematics device functions; it uses a long range wireless interface to communicate diagnostic and related information to a central host computer, and to receive related information from same.

    摘要翻译: 远程信息处理方法和系统包括并使用具有控制器的远程信息处理设备,所述控制器与被配置为从主车辆接收诊断信息的诊断系统通信; 位置定位系统,被配置为确定所述主车辆的位置信息; 无线收发器被配置为通过无线网络向至少一个因特网可访问网站发送和接收信息; 以及至少包括短距离无线接口链路的通信接口。 远程信息处理设备可以被实现在可以包括位置定位系统的接入设备中。 接入设备可以是经由短距离无线链路检索/发送诊断数据/信息以及其它数据/信息到车辆的智能电话或类似设备。 接入设备执行各种远程信息处理设备功能; 它使用远程无线接口将诊断和相关信息传送到中央主机,并从其接收相关信息。

    BODY-WORN SENSOR FEATURING A LOW-POWER PROCESSOR AND MULTI-SENSOR ARRAY FOR MEASURING BLOOD PRESSURE
    27.
    发明申请
    BODY-WORN SENSOR FEATURING A LOW-POWER PROCESSOR AND MULTI-SENSOR ARRAY FOR MEASURING BLOOD PRESSURE 审中-公开
    身体传感器专用低功率处理器和用于测量血压的多传感器阵列

    公开(公告)号:US20120108983A1

    公开(公告)日:2012-05-03

    申请号:US13346408

    申请日:2012-01-09

    IPC分类号: A61B6/00 A61B5/022

    摘要: A system is described that continuously measures a patient's blood pressure over a length of time. The system features a sensor assembly featuring a flexible cable configured to wrap around a portion of a patient's arm. The flexible cable features a back surface that includes at least two electrodes that are positioned to contact the patient's skin to generate electrical signals. It additionally features an optical sensor that includes at least one light source and at least one photodetector. These components form an optical sensor that is configured to generate an optical signal by detecting optical radiation emitted by the at least one light source and reflected from a blood vessel underneath the patient's skin.

    摘要翻译: 描述了在一段时间内持续测量患者的血压的系统。 该系统具有传感器组件,该传感器组件具有柔性电缆,该柔性电缆构造成围绕患者手臂的一部分。 柔性电缆具有后表面,其包括至少两个电极,其被定位成接触患者的皮肤以产生电信号。 它还具有包括至少一个光源和至少一个光电检测器的光学传感器。 这些组件形成光学传感器,其被配置为通过检测由至少一个光源发射并从患者皮肤下方的血管反射的光辐射来产生光学信号。

    Method and device for measuring the thickness of opaque and transparent films
    28.
    发明授权
    Method and device for measuring the thickness of opaque and transparent films 失效
    用于测量不透明和透明膜厚度的方法和装置

    公开(公告)号:US06348967B1

    公开(公告)日:2002-02-19

    申请号:US09568931

    申请日:2000-05-11

    IPC分类号: G01N2100

    摘要: A method for determining the thickness of a thin sample is described. The method includes the step of exciting time-dependent acoustic waveguide modes in the sample with an excitation radiation field. The acoustic waveguide modes are detected by diffracting probe radiation off a ripple morphology induced on the sample's surface by the acoustic waveguide modes. The diffracted probe radiation is then analyzed to measure phase velocities or frequencies of the acoustic waveguide modes. A thickness of the thin sample is determined by comparing the measured phase velocities or frequencies to the phase velocities or frequencies calculated from a mathematical model.

    摘要翻译: 描述了用于确定薄样品的厚度的方法。 该方法包括利用激发辐射场激发样品中与时间相关的声波导模式的步骤。 通过声波导模式将探针辐射从样品表面感应出的波纹形态衍射出来,来检测声波导模式。 然后分析衍射探针辐射以测量声波导模式的相速度或频率。 通过将测量的相速度或频率与从数学模型计算的相速度或频率进行比较来确定薄样品的厚度。

    Method and device for measuring the thickness of thin films near a sample's edge and in a damascene-type structure
    29.
    发明授权
    Method and device for measuring the thickness of thin films near a sample's edge and in a damascene-type structure 失效
    用于测量样品边缘和镶嵌型结构附近薄膜厚度的方法和装置

    公开(公告)号:US06256100B1

    公开(公告)日:2001-07-03

    申请号:US09067411

    申请日:1998-04-27

    IPC分类号: G01N2184

    CPC分类号: G01B11/0666

    摘要: A method for measuring a structure that contains overlying and underlying films in a region where the overlying film's thickness rapidly decreases until the underlying film is exposed (e.g., an edge-exclusion structure). The method includes the steps of: (1) exciting acoustic modes in a first portion of the region with at least one excitation laser beam; (2) detecting the acoustic modes with a probe laser beam that is either reflected or diffracted to generate a signal beam; (3) analyzing the signal beam to determine a property of the structure (e.g., the thickness of the overlying layer) in the first portion of the region; (4) translating the structure or the excitation and probe laser beams; and (5) repeating the exciting, detecting, and analyzing steps to determine a property of the structure in a second portion of the region.

    摘要翻译: 一种用于测量在覆盖膜的厚度迅速减小直到底层膜暴露的区域(例如,边缘排除结构)中的覆盖和下层膜的结构的测量方法。 该方法包括以下步骤:(1)利用至少一个激发激光束激发该区域的第一部分中的声模; (2)用反射或衍射的探针激光束检测声学模式以产生信号光束; (3)分析信号光束以确定该区域的第一部分中的结构的性质(例如,上覆层的厚度); (4)平移结构或激发和探测激光束; 和(5)重复激励,检测和分析步骤以确定该区域的第二部分中的结构的属性。

    Method and apparatus for measuring the concentration of ions implanted
in semiconductor materials
    30.
    发明授权
    Method and apparatus for measuring the concentration of ions implanted in semiconductor materials 失效
    测量注入半导体材料的离子浓度的方法和装置

    公开(公告)号:US6118533A

    公开(公告)日:2000-09-12

    申请号:US926850

    申请日:1997-09-10

    CPC分类号: G01N21/1717 G01N21/17

    摘要: A method and apparatus that determines a concentration of ions implanted in a material is described. The method includes the steps of: 1) generating at least two excitation laser sub-pulses and a probe pulse from a single pulse emitted from a laser; 2) irradiating a region of the material with a grating pattern formed by overlapping at least two excitation laser sub-pulses to initiate a time-dependent response in the region; 3) diffracting a probe laser pulse off the region to generate at least one time-dependent signal beam; 4) detecting at least one time-dependent signal beam to generate a signal waveform; and 5) processing the signal waveform to determine the concentration of ions implanted in the material.

    摘要翻译: 描述了确定植入材料中的离子的浓度的方法和装置。 该方法包括以下步骤:1)从激光器发射的单个脉冲产生至少两个激发激光子脉冲和探针脉冲; 2)用通过重叠至少两个激发激光子脉冲形成的光栅图案来照射材料的区域以在该区域中引发时间依赖性响应; 3)将探测激光脉冲衍射出该区域以产生至少一个时间依赖信号光束; 4)检测至少一个时间相关的信号波束以产生信号波形; 和5)处理信号波形以确定植入材料中的离子的浓度。