High efficiency trap for deposition process
    25.
    发明申请
    High efficiency trap for deposition process 审中-公开
    用于沉积工艺的高效陷阱

    公开(公告)号:US20060276049A1

    公开(公告)日:2006-12-07

    申请号:US11145742

    申请日:2005-06-06

    CPC分类号: C23C16/4412

    摘要: The present invention provides a system, apparatus and method for improving the efficiency of a semiconductor processing system, such as a deposition system by decreasing or substantially eliminating the accumulation of by-products in the apparatus components of the semiconductor processing system. The present invention further relates to improving the efficiency of a foreline trap associated with a semiconductor processing system, wherein the trap removes substantially all of the by-products from the exhaust gas from the processing chamber. In addition, the present invention provides a system, apparatus and method for efficiently clearing traps of accumulated by-products from exhaust gas of a semiconductor processing system.

    摘要翻译: 本发明提供了一种用于通过减少或基本上消除半导体处理系统的装置部件中的副产物积聚来提高诸如沉积系统的半导体处理系统的效率的系统,装置和方法。 本发明还涉及提高与半导体处理系统相关联的前级线圈的效率,其中捕集阱基本上从处理室排出的废气中除去所有副产物。 此外,本发明提供一种用于有效地清除半导体处理系统的排气中积聚的副产物的捕集阱的系统,装置和方法。

    Packed bed for nucleic acid capture and amplification
    26.
    发明申请
    Packed bed for nucleic acid capture and amplification 审中-公开
    用于核酸捕获和扩增的包装床

    公开(公告)号:US20060257907A1

    公开(公告)日:2006-11-16

    申请号:US11405128

    申请日:2006-04-13

    IPC分类号: C12Q1/68 C12P19/34

    摘要: A system for nucleic acid capture and amplification comprising introducing a sample potentially containing the nucleic acid into a packed bed wherein the nucleic acid adheres to the packed bed, introducing an amplification mix into the packed bed, and thermal cycling the packed bed and the nucleic acid between denaturation and annealing temperatures for PCR amplification. One embodiment provides an apparatus for DNA capture and amplification comprising a tubing or housing having a cavity, bed media in the cavity, and a heater operatively connected to the tubing or housing.

    摘要翻译: 一种用于核酸捕获和扩增的系统,包括将可能含有核酸的样品引入填充床中,其中核酸粘附到填充床,将扩增混合物引入填充床中,以及热循环填充床和核酸 在变性和退火温度之间进行PCR扩增。 一个实施例提供了一种用于DNA捕获和扩增的装置,其包括具有空腔的管或壳体,空腔中的床介质和可操作地连接到管道或壳体的加热器。