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91 条记录 (耗时 0.049 秒)

    Electric field reducing thrust plate
    21.
    发明申请
    Electric field reducing thrust plate 失效
    电场减压推力板

    公开(公告)号：US20050284754A1

    公开(公告)日：2005-12-29

    申请号：US10877137

    申请日：2004-06-24

    申请人： Harald Herchen ,  Dmitry Lubomirsky ,  Bo Zheng ,  Lily Pang

    发明人： Harald Herchen ,  Dmitry Lubomirsky ,  Bo Zheng ,  Lily Pang

    IPC分类号： C25D7/12 ,  C25D17/06 ,  H01L21/288

    CPC分类号： C25D7/12 ,  C25D17/06 ,  H01L21/2885

    摘要： A method and apparatus for an electrochemical processing cell that is configured to minimize bevel and backside deposition. The apparatus includes a contact ring assembly for supporting a substrate, a thrust plate movably positioned to engage a substrate positioned on the contact pins, and a lip seal member positioned to contact the thrust plate and the contact ring to prevent fluid flow therebetween. The lip seal includes a at least one bubble release channel formed therethrough. The method includes positioning an electric field barrier between a backside substrate engaging member and a frontside substrate supporting member to prevent electric field from traveling to the bevel and backside of the substrate. The electric field barrier including at least one bubble release channel formed therethrough.

    摘要翻译： 一种用于电化学处理电池的方法和装置，其被配置为最小化斜面和背面沉积。 该装置包括用于支撑基板的接触环组件，可移动地定位成接合位于接触销上的基板的止动板，以及定位成接触推力板和接触环以防止其间流体流动的唇形密封件。 唇形密封件包括通过其形成的至少一个气泡释放通道。 该方法包括在背面基板接合构件和前侧基板支撑构件之间定位电场屏障，以防止电场行进到基板的斜面和背面。 电场屏障包括至少一个通过其形成的气泡释放通道。

    Constructing an integrated road network
    23.
    发明授权
    Constructing an integrated road network 有权
    构建综合道路网

    公开(公告)号：US09350810B2

    公开(公告)日：2016-05-24

    申请号：US13979012

    申请日：2011-01-18

    申请人： Guiheng Zhou ,  Yizhen Zhao ,  Bo Zheng

    发明人： Guiheng Zhou ,  Yizhen Zhao ,  Bo Zheng

    IPC分类号： G06G7/48 ,  H04L29/08 ,  G01C21/34 ,  G01C21/32 ,  G06F17/50

    CPC分类号： H04L67/12 ,  G01C21/32 ,  G01C21/3484 ,  G06F17/509

    摘要： Information about different road networks is retrieved from different sources. Applicable rules and parameter values for constructing an integrated road network are determined for each road network. Roads are first extended at their endpoints. Intersection points among the extended roads are detected. Roads are then divided into road segments at the detected intersection points, and shorted by removing road segments extended beyond intersection points. To process a large scale of road information, extended roads are divided into road segments and distributed to reducers based on their geographic locations for the reducers to detect intersection points among the received road segments. The resulting road segments are then distributed to reducers based on the roads they belong to for the reducers to first reassemble the road segments, then divide the reassembled roads at the detected intersection points, and finally remove road segments extended beyond intersection points.

    摘要翻译： 从不同来源检索有关不同道路网络的信息。 为每个道路网络确定用于构建综合道路网络的适用规则和参数值。 道路首先在其终点延伸。 检测到延长道路之间的交点。 然后将道路在检测的交叉点分成道路段，并通过移除超出交叉点的道路段进行短路。 为了处理大量的道路信息，扩展道路被划分为道路段，并根据其地理位置分配给减速器，以减少接收路段之间的交点。 然后将所得到的路段分配到减速机，基于其所属的道路用于减速机，以首先重新组装路段，然后将重新组装的道路划分在检测的交叉点，最后移除超出交叉点的道路段。

    Constructing an Integrated Road Network
    24.
    发明申请
    Constructing an Integrated Road Network 有权
    建设综合道路网

    公开(公告)号：US20130290400A1

    公开(公告)日：2013-10-31

    申请号：US13979012

    申请日：2011-01-18

    申请人： Guiheng Zhou ,  Yizhen Zhao ,  Bo Zheng

    发明人： Guiheng Zhou ,  Yizhen Zhao ,  Bo Zheng

    IPC分类号： H04L29/08

    CPC分类号： H04L67/12 ,  G01C21/32 ,  G01C21/3484 ,  G06F17/509

    摘要： Information about different road networks is retrieved from different sources. Applicable rules and parameter values for constructing an integrated road network are determined for each road network. Roads are first extended at their endpoints. Intersection points among the extended roads are detected. Roads are then divided into road segments at the detected intersection points, and shorted by removing road segments extended beyond intersection points. To process a large scale of road information, extended roads are divided into road segments and distributed to reducers based on their geographic locations for the reducers to detect intersection points among the received road segments. The resulting road segments are then distributed to reducers based on the roads they belong to for the reducers to first reassemble the road segments, then divide the reassembled roads at the detected intersection points, and finally remove road segments extended beyond intersection points.

    摘要翻译： 从不同来源检索有关不同道路网络的信息。 为每个道路网络确定用于构建综合道路网络的适用规则和参数值。 道路首先在其终点延伸。 检测到延长道路之间的交点。 然后将道路在检测的交叉点分成道路段，并通过移除超出交叉点的道路段进行短路。 为了处理大量的道路信息，扩展道路被划分为道路段，并根据其地理位置分配给减速器，以减少接收路段之间的交点。 然后将所得到的路段分配到减速机，基于其所属的道路用于减速机，以首先重新组装路段，然后将重新组装的道路划分在检测的交叉点，最后移除超出交叉点的道路段。

    Short point-of-interest title generation
    25.
    发明授权
    Short point-of-interest title generation 有权
    短期利益标题产生

    公开(公告)号：US08429204B2

    公开(公告)日：2013-04-23

    申请号：US13549340

    申请日：2012-07-13

    申请人： Jiang Qian ,  Vincent Zhou ,  Bo Zheng ,  Yu Zheng

    发明人： Jiang Qian ,  Vincent Zhou ,  Bo Zheng ,  Yu Zheng

    IPC分类号： G06F17/30 ,  G06F17/28

    CPC分类号： G06F17/2745

    摘要： Short POI titles are generated by removing unnecessary administrative area prefixes from existing POI titles and replacing necessary administrative area prefixes with shorter aliases. Administrative area prefixes are identified and analyzed to determine whether they are necessary. The analysis includes determining (1) whether the remainders with the prefixes excluded include a common suffix as a prefix, and (2) whether the remainders are unique in an applicable metropolis area. If a remainder does not include as a prefix a common suffix and is unique in the applicable metropolis area, the corresponding prefix is determined unnecessary and removed from the existing POI title to generate a short POI title. Otherwise, the corresponding prefix is determined necessary and replaced with a shorter alias to generate a short POI title.

    摘要翻译： 通过从现有POI标题中删除不必要的管理区域前缀，并用较短的别名替换必要的管理区域前缀来生成简短的POI标题。 对行政区域前缀进行识别和分析，以确定它们是否必要。 分析包括确定（1）排除前缀的余数是否包括作为前缀的公共后缀，以及（2）在适用的大都会区域中剩余部分是否是唯一的。 如果余数不包括作为前缀的公共后缀，并且在适用的大都市区域中是唯一的，则相应的前缀被确定为不必要的并且从现有POI标题中移除以生成短的POI标题。 否则，相应的前缀被确定为必需，并用较短的别名替换以生成短的POI标题。

    APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION
    29.
    发明申请
    APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION 有权
    用于原子层沉积的装置和方法

    公开(公告)号：US20100003406A1

    公开(公告)日：2010-01-07

    申请号：US12494901

    申请日：2009-06-30

    申请人： Hyman Lam ,  Bo Zheng ,  Hua Ai ,  Michael Jackson ,  Xiaoxiong (John) Yuan ,  Hou Gong Wang ,  Salvador P. Umotoy ,  Sang Ho Yu

    发明人： Hyman Lam ,  Bo Zheng ,  Hua Ai ,  Michael Jackson ,  Xiaoxiong (John) Yuan ,  Hou Gong Wang ,  Salvador P. Umotoy ,  Sang Ho Yu

    IPC分类号： C23C16/34

    CPC分类号： C23C16/45565 ,  C23C16/4412 ,  C23C16/45536 ,  C23C16/45544 ,  C23C16/4558 ,  H01J37/32449 ,  Y10T137/87265

    摘要： Embodiments of the invention provide apparatuses and methods for atomic layer deposition (ALD), such as plasma-enhanced ALD (PE-ALD). In some embodiments, a PE-ALD chamber is provided which includes a chamber lid assembly coupled with a chamber body having a substrate support therein. In one embodiment, the chamber lid assembly has an inlet manifold assembly containing an annular channel encompassing a centralized channel, wherein the centralized channel extends through the inlet manifold assembly, and the inlet manifold assembly further contains injection holes extending from the annular channel, through a sidewall of the centralized channel, and to the centralized channel. The chamber lid assembly further contains a showerhead assembly disposed below the inlet manifold assembly, a water box disposed between the inlet manifold assembly and the showerhead assembly, and a remote plasma system (RPS) disposed above and coupled with the inlet manifold assembly, and in fluid communication with the centralized channel.

    摘要翻译： 本发明的实施例提供了诸如等离子体增强型ALD（PE-ALD）的原子层沉积（ALD）的装置和方法。 在一些实施例中，提供了一种PE-ALD室，其包括与其中具有基板支撑件的室主体耦合的室盖组件。 在一个实施例中，室盖组件具有入口歧管组件，其包含围绕集中通道的环形通道，其中集中通道延伸穿过入口歧管组件，并且入口歧管组件还包含从环形通道延伸的注入孔， 集中通道侧壁，集中通道。 腔室盖组件还包括设置在入口歧管组件下方的喷头组件，设置在入口歧管组件和喷头组件之间的水箱，以及设置在入口歧管组件上方并与入口歧管组件耦合的远程等离子体系统（RPS） 与集中通道的流体通信。

    Electric field reducing thrust plate
    30.
    发明授权
    Electric field reducing thrust plate 失效
    电场减压推力板

    公开(公告)号：US07285195B2

    公开(公告)日：2007-10-23

    申请号：US10877137

    申请日：2004-06-24

    申请人： Harald Herchen ,  Dmitry Lubomirsky ,  Bo Zheng ,  Lily L. Pang

    发明人： Harald Herchen ,  Dmitry Lubomirsky ,  Bo Zheng ,  Lily L. Pang

    IPC分类号： C25D17/00 ,  C25D5/00 ,  C25D17/10

    CPC分类号： C25D7/12 ,  C25D17/06 ,  H01L21/2885

    摘要： A method and apparatus for an electrochemical processing cell that is configured to minimize bevel and backside deposition. The apparatus includes a contact ring assembly for supporting a substrate, a thrust plate movably positioned to engage a substrate positioned on the contact pins, and a lip seal member positioned to contact the thrust plate and the contact ring to prevent fluid flow therebetween. The lip seal includes at least one bubble release channel formed therethrough. The method includes positioning an electric field barrier between a backside substrate engaging member and a frontside substrate supporting member to prevent electric field from traveling to the bevel and backside of the substrate. The electric field barrier including at least one bubble release channel formed therethrough.

    摘要翻译： 一种用于电化学处理电池的方法和装置，其被配置为最小化斜面和背面沉积。 该装置包括用于支撑基板的接触环组件，可移动地定位成接合位于接触销上的基板的止动板，以及定位成接触推力板和接触环以防止其间流体流动的唇形密封构件。 唇形密封件包括至少一个通过其形成的气泡释放通道。 该方法包括在背面基板接合构件和前侧基板支撑构件之间定位电场屏障，以防止电场行进到基板的斜面和背面。 电场屏障包括至少一个通过其形成的气泡释放通道。