公开(公告)号：US08747556B2

公开(公告)日：2014-06-10

申请号：US13618741

申请日：2012-09-14

申请人： Hyman W. H. Lam ,  Bo Zheng ,  Hua Ai ,  Michael Jackson ,  Xiaoxiong Yuan ,  Hougong Wang ,  Salvador P. Umotoy ,  Sang Ho Yu

发明人： Hyman W. H. Lam ,  Bo Zheng ,  Hua Ai ,  Michael Jackson ,  Xiaoxiong Yuan ,  Hougong Wang ,  Salvador P. Umotoy ,  Sang Ho Yu

IPC分类号： C23C16/455 ,  C23F1/00 ,  H01L21/306 ,  C23C16/06 ,  C23C16/22

CPC分类号： C23C16/45565 ,  C23C16/4412 ,  C23C16/45536 ,  C23C16/45544 ,  C23C16/4558 ,  H01J37/32449 ,  Y10T137/87265

摘要： Embodiments of the invention provide apparatuses and methods for atomic layer deposition (ALD), such as plasma-enhanced ALD (PE-ALD). In some embodiments, a PE-ALD chamber is provided which includes a chamber lid assembly coupled with a chamber body having a substrate support therein. In one embodiment, the chamber lid assembly has an inlet manifold assembly containing an annular channel encompassing a centralized channel, wherein the centralized channel extends through the inlet manifold assembly, and the inlet manifold assembly further contains injection holes extending from the annular channel, through a sidewall of the centralized channel, and to the centralized channel. The chamber lid assembly further contains a showerhead assembly disposed below the inlet manifold assembly, a water box disposed between the inlet manifold assembly and the showerhead assembly, and a remote plasma system (RPS) disposed above and coupled with the inlet manifold assembly, and in fluid communication with the centralized channel.

摘要翻译： 本发明的实施例提供了诸如等离子体增强型ALD（PE-ALD）的原子层沉积（ALD）的装置和方法。 在一些实施例中，提供了一种PE-ALD室，其包括与其中具有基板支撑件的室主体耦合的室盖组件。 在一个实施例中，室盖组件具有入口歧管组件，其包含围绕集中通道的环形通道，其中集中通道延伸穿过入口歧管组件，并且入口歧管组件还包含从环形通道延伸的注入孔， 集中通道侧壁，集中通道。 腔室盖组件还包括设置在入口歧管组件下方的喷头组件，设置在入口歧管组件和喷头组件之间的水箱，以及设置在入口歧管组件上方并与入口歧管组件耦合的远程等离子体系统（RPS） 与集中通道的流体通信。

公开(公告)号：US20130008984A1

公开(公告)日：2013-01-10

申请号：US13618741

申请日：2012-09-14

申请人： Hyman Lam ,  Bo Zheng ,  Hua Ai ,  Michael Jackson ,  Xiaoxiong (John) Yuan ,  Hou Gong Wang ,  Salvador P. Umotoy ,  Sang Ho Yu

发明人： Hyman Lam ,  Bo Zheng ,  Hua Ai ,  Michael Jackson ,  Xiaoxiong (John) Yuan ,  Hou Gong Wang ,  Salvador P. Umotoy ,  Sang Ho Yu

IPC分类号： C23C16/455

CPC分类号： C23C16/45565 ,  C23C16/4412 ,  C23C16/45536 ,  C23C16/45544 ,  C23C16/4558 ,  H01J37/32449 ,  Y10T137/87265

摘要： Embodiments of the invention provide apparatuses and methods for atomic layer deposition (ALD), such as plasma-enhanced ALD (PE-ALD). In some embodiments, a PE-ALD chamber is provided which includes a chamber lid assembly coupled with a chamber body having a substrate support therein. In one embodiment, the chamber lid assembly has an inlet manifold assembly containing an annular channel encompassing a centralized channel, wherein the centralized channel extends through the inlet manifold assembly, and the inlet manifold assembly further contains injection holes extending from the annular channel, through a sidewall of the centralized channel, and to the centralized channel. The chamber lid assembly further contains a showerhead assembly disposed below the inlet manifold assembly, a water box disposed between the inlet manifold assembly and the showerhead assembly, and a remote plasma system (RPS) disposed above and coupled with the inlet manifold assembly, and in fluid communication with the centralized channel.

摘要翻译： 本发明的实施例提供了诸如等离子体增强型ALD（PE-ALD）的原子层沉积（ALD）的装置和方法。 在一些实施例中，提供了一种PE-ALD室，其包括与其中具有基板支撑件的室主体耦合的室盖组件。 在一个实施例中，室盖组件具有入口歧管组件，其包含围绕集中通道的环形通道，其中集中通道延伸穿过入口歧管组件，并且入口歧管组件还包含从环形通道延伸的注入孔， 集中通道侧壁，集中通道。 室盖组件还包括布置在入口歧管组件下方的喷头组件，设置在入口歧管组件和喷头组件之间的水箱，以及设置在入口歧管组件上方并与入口歧管组件耦合的远程等离子体系统（RPS） 与集中通道的流体通信。

公开(公告)号：US08293015B2

公开(公告)日：2012-10-23

申请号：US13232317

申请日：2011-09-14

申请人： Hyman W. H. Lam ,  Bo Zheng ,  Hua Ai ,  Michael Jackson ,  Xiaoxiong Yuan ,  Hougong Wang ,  Salvador P. Umotoy ,  Sang Ho Yu

发明人： Hyman W. H. Lam ,  Bo Zheng ,  Hua Ai ,  Michael Jackson ,  Xiaoxiong Yuan ,  Hougong Wang ,  Salvador P. Umotoy ,  Sang Ho Yu

IPC分类号： C23C16/455 ,  C23F1/00 ,  H01L21/306 ,  C23C16/06 ,  C23C16/22

CPC分类号： C23C16/45565 ,  C23C16/4412 ,  C23C16/45536 ,  C23C16/45544 ,  C23C16/4558 ,  H01J37/32449 ,  Y10T137/87265

摘要： Embodiments of the invention provide apparatuses and methods for atomic layer deposition (ALD), such as plasma-enhanced ALD (PE-ALD). In some embodiments, a PE-ALD chamber is provided which includes a chamber lid assembly coupled with a chamber body having a substrate support therein. In one embodiment, the chamber lid assembly has an inlet manifold assembly containing an annular channel encompassing a centralized channel, wherein the centralized channel extends through the inlet manifold assembly, and the inlet manifold assembly further contains injection holes extending from the annular channel, through a sidewall of the centralized channel, and to the centralized channel. The chamber lid assembly further contains a showerhead assembly disposed below the inlet manifold assembly, a water box disposed between the inlet manifold assembly and the showerhead assembly, and a remote plasma system (RPS) disposed above and coupled with the inlet manifold assembly, and in fluid communication with the centralized channel.

公开(公告)号：US08216017B2

公开(公告)日：2012-07-10

申请号：US12545868

申请日：2009-08-24

申请人： Yu-Heng Hsieh ,  Chu-Chi Ting ,  Shinn-Haw Huang ,  Chang-Jung Yang ,  Chia-Hua Ai

发明人： Yu-Heng Hsieh ,  Chu-Chi Ting ,  Shinn-Haw Huang ,  Chang-Jung Yang ,  Chia-Hua Ai

IPC分类号： H01J9/26 ,  H01J9/32

CPC分类号： H01J65/046 ,  H01J61/305

摘要： In a method of fabricating a planar light source, a first substrate is formed at first. First electrodes approximately parallel to each other are formed on the first substrate. Sets of first dielectric patterns are formed on the first substrate. Each set of the first dielectric patterns includes at least two first striped dielectric patterns, and each of the first striped dielectric patterns covers one of the first electrodes correspondingly. The edges of the top of each first striped dielectric pattern are raised in a peak shape. A phosphor layer is formed between the first striped dielectric patterns of each set of the first dielectric patterns. A second substrate is formed. The first and second substrates are bound; meanwhile, a discharge gas is injected into the discharge space.

摘要翻译： 在制造平面光源的方法中，首先形成第一基板。 大致彼此平行的第一电极形成在第一基板上。 在第一基板上形成第一电介质图案集。 每组第一电介质图案包括至少两个第一条纹电介质图案，并且每个第一条状电介质图案相应地覆盖第一电极中的一个。 每个第一条纹电介质图案的顶部的边缘以峰形提升。 在每组第一电介质图案的第一条形电介质图案之间形成磷光体层。 形成第二基板。 第一和第二基底是结合的; 同时，将放电气体注入放电空间。

公开(公告)号：US07586262B2

公开(公告)日：2009-09-08

申请号：US11532105

申请日：2006-09-15

申请人： Chao-Jen Chang ,  Chia-Hua Ai

发明人： Chao-Jen Chang ,  Chia-Hua Ai

IPC分类号： H01J17/00 ,  H01J61/00

CPC分类号： H01J65/046 ,  H01J61/0672 ,  H01J61/305

摘要： A flat fluorescent lamp (FFL) is provided. Strip electrodes of the FFL include a plurality of electrode branches, and a plurality of dielectric branches is arranged around the electrode branches, so as to increase the coating area of the fluorescent material. The distribution position of the fluorescent material may be adjusted by the dielectric branches, thus enhancing the brightness of the FFL and improving the uniformity of the output light. The present invention further provides a liquid crystal display which utilizes the FFL as a backlight source for achieving a better display effect.

摘要翻译： 提供平面荧光灯（FFL）。 FFL的带状电极包括多个电极分支，并且在电极分支周围布置多个电介质分支，以增加荧光材料的涂覆面积。 可以通过介电分支来调节荧光材料的分布位置，从而提高FFL的亮度并提高输出光的均匀性。 本发明还提供一种利用FFL作为背光源的液晶显示器，以实现更好的显示效果。

公开(公告)号：US20080006830A1

公开(公告)日：2008-01-10

申请号：US11308967

申请日：2006-06-01

申请人： Yu-Heng Hsieh ,  Chu-Chi Ting ,  Shinn-Haw Huang ,  Chang-Jung Yang ,  Chia-Hua Ai

发明人： Yu-Heng Hsieh ,  Chu-Chi Ting ,  Shinn-Haw Huang ,  Chang-Jung Yang ,  Chia-Hua Ai

IPC分类号： H01L33/00 ,  H01L31/12 ,  H01L27/15 ,  H01L29/26

CPC分类号： H01J65/046 ,  H01J61/305

摘要： A planar light source including a first substrate, a second substrate, a sealant, first electrodes, sets of first dielectric patterns, a phosphor layer, and a discharge gas is provided. The second substrate is disposed above the first substrate. The sealant is disposed between the first and second substrates to form a cavity among the first substrate, the second substrate, and the sealant. The first electrodes are disposed on the first substrate, and each set of the first dielectric patterns has at least two first striped dielectric patterns. Each of the first striped dielectric patterns covers one of the first electrodes correspondingly. The edges of the top of each first striped dielectric pattern are raised in a peak shape. The phosphor layer is disposed on the first substrate and between the first striped dielectric patterns of each set of the first dielectric patterns. The discharge gas is injected into the cavity.

摘要翻译： 提供了包括第一基板，第二基板，密封剂，第一电极，第一电介质图案组，荧光体层和放电气体的平面光源。 第二基板设置在第一基板的上方。 密封剂设置在第一和第二基板之间，以在第一基板，第二基板和密封剂之间形成空腔。 第一电极设置在第一衬底上，并且每组第一电介质图案具有至少两个第一条状电介质图案。 每个第一条纹电介质图案相应地覆盖第一电极之一。 每个第一条纹电介质图案的顶部的边缘以峰形提升。 磷光体层设置在第一基板上并且在每组第一电介质图案的第一条形电介质图案之间。 将放电气体注入空腔。

公开(公告)号：US07038892B2

公开(公告)日：2006-05-02

申请号：US10674831

申请日：2003-09-30

申请人： Phong V. Chau ,  James Mac Freitag ,  Mustafa Michael Pinarbasi ,  Hua Ai Zeng ,  Howard Gordon Zolla

发明人： Phong V. Chau ,  James Mac Freitag ,  Mustafa Michael Pinarbasi ,  Hua Ai Zeng ,  Howard Gordon Zolla

IPC分类号： G11B5/39

CPC分类号： G11B5/3932

摘要： An apparatus having improved hard bias properties of layers of a magnetoresistance sensor is disclosed. Properties of the hard bias layer are improved using a seedlayer structure that includes at least a layer of silicon and a layer comprising chromium or chromium molybdenum. Further, benefits are achieved when the seedlayer structure includes a layer of tantalum.

摘要翻译： 公开了一种具有改进的磁阻传感器层的硬偏置特性的装置。 使用包括至少一层硅层和包含铬或铬钼的层的种子层结构来改善硬偏置层的性质。 此外，当种子层结构包括一层钽时，实现了益处。

公开(公告)号：US08817426B2

公开(公告)日：2014-08-26

申请号：US13275208

申请日：2011-10-17

申请人： Zheng Gao ,  Yingfan Xu ,  Hua Ai Zeng

发明人： Zheng Gao ,  Yingfan Xu ,  Hua Ai Zeng

IPC分类号： G11B5/39

CPC分类号： G01R33/093 ,  G11B5/3909

摘要： A magnetic read sensor having improved magnetic performance and robustness. The magnetic sensor includes a magnetic free layer and a magnetic pinned layer structure. The magnetic pinned layer structure includes first and second magnetic layers separated from one another by a non-magnetic coupling layer. The second magnetic layer of the magnetic pinned layer structure includes a layer of CoFeBTa, which prevents the diffusion of atoms and also promotes a desired BCC crystalline grain growth. The magnetic free layer structure can also include such a CoFeBTa layer for further prevention of atomic diffusion and further promotion of a desired BCC grain growth.

摘要翻译： 具有改进的磁性能和鲁棒性的磁读取传感器。 磁传感器包括无磁性层和磁性固定层结构。 磁性钉扎层结构包括通过非磁性耦合层彼此分开的第一和第二磁性层。 磁性钉扎层结构的第二磁性层包括一层CoFeBTa，其阻止原子扩散并且还促进所需的BCC晶粒生长。 磁性层结构还可以包括用于进一步防止原子扩散和进一步促进所需BCC晶粒生长的CoFeBTa层。

公开(公告)号：US08697031B2

公开(公告)日：2014-04-15

申请号：US11569989

申请日：2005-06-02

申请人： Hua Ai ,  Jeffrey L. Duerk ,  Chris Flask ,  Jinming Gao ,  Jonathan S. Lewin ,  Xintao Shuai ,  Brent Weinberg

发明人： Hua Ai ,  Jeffrey L. Duerk ,  Chris Flask ,  Jinming Gao ,  Jonathan S. Lewin ,  Xintao Shuai ,  Brent Weinberg

IPC分类号： A61K51/00 ,  A61M36/14 ,  A61K49/14 ,  A61K51/04 ,  A61K51/08 ,  A61K38/04 ,  A61K38/08 ,  A61K38/16

CPC分类号： A61K49/1809 ,  A61K9/1075 ,  A61K47/62 ,  A61K47/6907 ,  A61K49/126 ,  A61K49/1806 ,  A61K51/065 ,  A61K51/1237

摘要： The invention relates to micelles that are elaborated with functionality useful for imaging and/or selectively targeting tissue, e.g., in the delivery of hydrophobic agents.

摘要翻译： 本发明涉及具有用于成像和/或选择性靶向组织的功能的功能的胶束，例如在疏水剂的递送中。

公开(公告)号：US20130094108A1

公开(公告)日：2013-04-18

申请号：US13275208

申请日：2011-10-17

申请人： Zheng Gao ,  Yingfan Xu ,  Hua Ai Zeng

发明人： Zheng Gao ,  Yingfan Xu ,  Hua Ai Zeng

IPC分类号： G11B5/127 ,  G11B5/33 ,  G11B5/60

CPC分类号： G01R33/093 ,  G11B5/3909

摘要： A magnetic read sensor having improved magnetic performance and robustness. The magnetic sensor includes a magnetic free layer and a magnetic pinned layer structure. The magnetic pinned layer structure includes first and second magnetic layers separated from one another by a non-magnetic coupling layer. The second magnetic layer of the magnetic pinned layer structure includes a layer of CoFeBTa, which prevents the diffusion of atoms and also promotes a desired BCC crystalline grain growth. The magnetic free layer structure can also include such a CoFeBTa layer for further prevention of atomic diffusion and further promotion of a desired BCC grain growth.

摘要翻译： 具有改进的磁性能和鲁棒性的磁读取传感器。 磁传感器包括无磁性层和磁性固定层结构。 磁性钉扎层结构包括通过非磁性耦合层彼此分开的第一和第二磁性层。 磁性钉扎层结构的第二磁性层包括一层CoFeBTa，其阻止原子扩散并且还促进所需的BCC晶粒生长。 磁性层结构还可以包括用于进一步防止原子扩散和进一步促进所需BCC晶粒生长的CoFeBTa层。