Method and apparatus for evaluating processing apparatus status and predicting processing result
    21.
    发明授权
    Method and apparatus for evaluating processing apparatus status and predicting processing result 有权
    用于评估处理装置状态和预测处理结果的方法和装置

    公开(公告)号:US07689028B2

    公开(公告)日:2010-03-30

    申请号:US10984932

    申请日:2004-11-10

    IPC分类号: G06K9/00

    摘要: A method for predicting a processing result includes a process of performing a principal component analysis on a plurality of detected data obtained during a first standard processing, to construct a principal component analysis model; a process of obtaining residuals of the principal component analysis model as first residuals; a process of performing a second standard processing; and a process of obtaining a plurality of detected data from a plurality of detectors during the second standard processing. And, the detected data obtained during the second standard processing are applied to the principal component analysis model, to obtain second residuals. The method further includes a process of weighting the second residuals based on weighting references, and constructing a new multivariate analysis model with use of the weighted second residuals; and a process of predicting a processing result of the second standard processing with use of the multivariate analysis model.

    摘要翻译: 一种用于预测处理结果的方法包括对在第一标准处理期间获得的多个检测数据执行主成分分析的过程,以构建主成分分析模型; 获得主成分分析模型残差作为第一残差的过程; 执行第二标准处理的处理; 以及在第二标准处理期间从多个检测器获得多个检测数据的处理。 并且,将在第二标准处理期间获得的检测数据应用于主成分分析模型,以获得第二残差。 该方法还包括基于加权参考来加权第二残差的过程,以及使用加权的第二残差构建新的多变量分析模型; 以及使用多变量分析模型预测第二标准处理的处理结果的处理。

    High performance optical add/drop multiplexer and optical wavelength multiplexing network
    22.
    发明授权
    High performance optical add/drop multiplexer and optical wavelength multiplexing network 失效
    高性能光分插复用器和光波分复用网

    公开(公告)号:US06611638B2

    公开(公告)日:2003-08-26

    申请号:US09942539

    申请日:2001-08-30

    申请人: Shinji Sakano

    发明人: Shinji Sakano

    IPC分类号: G02B628

    摘要: In making use of an add/drop multiplexer for demultiplexing or multiplexing signal light of a few specific wavelengths from signal light subjected to optical wavelength multiplexing, a fiber bragg grating is excellent for enhancing rejection of a leakage of a demultiplexed light, but with respect to a high speed optical signal at the demultiplexing or multiplexing, a waveform deterioration occurs. When a dielectric multilayer film filter is used for dealing with the high speed optical signal, a plurality of filters are used to suppress a coherent cross talk, resulting in an increase of loss of pass-through light and an increase of costs. For a filter portion of at least demultiplexing part, a dielectric multilayer film filter which is short in an optical path and free from deterioration of a high speed optical signal is used, and for demultiplexed light leakage rejecting part between the demultiplexing part and the multiplexing part, a fiber bragg grating which is low in loss of pass-through light, is low in cost and is excellent in the rejection characteristics of filter light is used.

    摘要翻译: 在使用分散多路复用器来对经过光波长多路复用的信号光进行多路复用或复用几个特定波长的信号光的光纤布拉格光栅对于增强对解复用光的泄漏的抑制是非常好的,但是相对于 在解复用或多路复用时的高速光信号发生波形恶化。 当使用电介质多层膜滤波器来处理高速光信号时,使用多个滤波器来抑制相干串扰,导致通过光的损耗增加和成本的增加。对于滤波器 使用至少解复用部分的部分,在光路中短路并且没有高速光信号劣化的电介质多层膜滤波器,并且在解复用部分和多路复用部分之间用于解复用的漏光拒绝部分,光纤 通过光损失低的布拉格光栅成本低,使用滤光器的抑制特性优异。

    Optical fiber and method for coupling optical fibers
    23.
    发明授权
    Optical fiber and method for coupling optical fibers 失效
    光纤和耦合光纤的方法

    公开(公告)号:US06173095B2

    公开(公告)日:2001-01-09

    申请号:US09311144

    申请日:1999-05-13

    申请人: Shinji Sakano

    发明人: Shinji Sakano

    IPC分类号: G02B626

    CPC分类号: G02B6/262 G02B6/3818

    摘要: A single-mode optical fiber for outputting high-power light wherein a diameter of a mode field at an output end of the optical fiber is made large to thereby lower a light power density. Material higher in thermal conductivity or melting temperature than material of the optical fiber is coated on the end face of the fiber. A thickness of the coating film is set to cause light wavelength to be phase-shifted by ¼ of the wavelength to reduce reflection at the connecting end face. The same type of optical fiber is used as a party optical fiber to be connected therewith.

    摘要翻译: 一种用于输出大功率光的单模光纤,其中使光纤的输出端的模场的直径变大,从而降低光功率密度。 导热性或熔融温度高于光纤材料的材料涂覆在纤维的端面上。 将涂膜的厚度设定为使波长相对于波长的1/4来减少连接端面的反射。 使用相同类型的光纤作为与其连接的聚光光纤。

    Optical amplifier unit control methods optical amplifier systems and
systems which use the methods and amplifier systems
    24.
    发明授权
    Optical amplifier unit control methods optical amplifier systems and systems which use the methods and amplifier systems 失效
    光放大器单元控制方法采用光放大器系统和系统的方法和放大系统

    公开(公告)号:US6078422A

    公开(公告)日:2000-06-20

    申请号:US978044

    申请日:1997-11-25

    摘要: An optical amplifier controlling method and optical amplifier system which are simple in composition, maintain the S/N ratio of an optical signal output, have high control responsiveness, suppress the generation of a light surge, and amplify the optical signal, and a system using the method and amplifier system. The optical amplifier system includes an optical amplifier unit which is supplied with energy by pumping light and amplifies with the supplied energy an optical signal inputted to the amplifier unit. The optical amplifier system includes a gain control unit for controlling the gain of the amplifier system depending on the strength of the optical signal inputted to the amplifier system such that the amplifier has a maximum gain at a predetermined value of the strength of the optical signal inputted in the optical amplifier system and an area of a positive gain of not more than the maximum gain for a strength of the optical signal of not more than the predetermined value.

    摘要翻译: 一种组成简单,维持光信号输出的S / N比的光放大器控制方法和光放大器系统具有高控制响应性,抑制光浪涌的产生和放大光信号,以及使用 该方法和放大器系统。 光放大器系统包括光放大器单元,其通过泵浦光而被供能,并且以所提供的能量放大输入到放大器单元的光信号。 光放大器系统包括增益控制单元,用于根据输入到放大器系统的光信号的强度来控制放大器系统的增益,使得放大器在输入的光信号的强度的预定值处具有最大增益 在光放大器系统中,对于光信号强度不大于预定值的正增益不大于最大增益的区域。

    Optical fiber and method for coupling optical fibers
    25.
    发明授权
    Optical fiber and method for coupling optical fibers 失效
    光纤和耦合光纤的方法

    公开(公告)号:US5930421A

    公开(公告)日:1999-07-27

    申请号:US822007

    申请日:1997-03-24

    申请人: Shinji Sakano

    发明人: Shinji Sakano

    CPC分类号: G02B6/262 G02B6/3818

    摘要: A single-mode optical fiber for outputting high-power light wherein a diameter of a mode field at an output end of the optical fiber is made large to thereby lower a light power density. Material higher in thermal conductivity or melting temperature than material of the optical fiber is coated on the end face of the fiber. A thickness of the coating film is set to cause light wavelength to be phase-shifted by 1/4 of the wavelength to reduce reflection at the connecting end face. The same type of optical fiber is used as a party optical fiber to be connected therewith.

    摘要翻译: 一种用于输出大功率光的单模光纤,其中使光纤的输出端的模场的直径变大,从而降低光功率密度。 导热性或熔融温度高于光纤材料的材料涂覆在纤维的端面上。 将涂膜的厚度设定为使波长相对于波长相差+ E,fra 1/4 + EE,以减少连接端面的反射。 使用相同类型的光纤作为与其连接的聚光光纤。

    Information providing server and wireless communication terminal
    27.
    发明授权
    Information providing server and wireless communication terminal 失效
    信息提供服务器和无线通信终端

    公开(公告)号:US08484320B2

    公开(公告)日:2013-07-09

    申请号:US12862381

    申请日:2010-08-24

    申请人: Shinji Sakano

    发明人: Shinji Sakano

    IPC分类号: G06F15/177 G06F15/16

    摘要: A service providing server transmits service information to a wireless communication terminal via a wireless base station. The service information includes AP identification information of AP software necessary to execute each of a plurality of wireless services, and a utilization priority level of the AP software. The wireless communication terminal receives the service information and displays the name of AP that has the highest priority level in the service information (S55). If an application menu is selected in this state (S56), the name of the AP that has the next highest priority level is displayed (S55). If executing AP software is selected (S56) while the name of the AP is being displayed, this AP software is started up (S53).

    摘要翻译: 服务提供服务器经由无线基站向无线通信终端发送业务信息。 服务信息包括执行多个无线服务中的每一个所需的AP软件的AP识别信息和AP软件的使用优先级。 无线通信终端接收服务信息,并在服务信息中显示优先级最高的AP的名称(S55)。 如果在该状态下选择了应用程序菜单(S56),则显示具有次高优先级的AP的名称(S55)。 如果正在显示AP的名称(S56),则启动AP软件(S53)。

    Controlling device for substrate processing apparatus and method therefor
    28.
    发明授权
    Controlling device for substrate processing apparatus and method therefor 有权
    基板处理装置的控制装置及其方法

    公开(公告)号:US07844357B2

    公开(公告)日:2010-11-30

    申请号:US11874626

    申请日:2007-10-18

    申请人: Shinji Sakano

    发明人: Shinji Sakano

    IPC分类号: G06F19/00

    摘要: A target value that serves as a control value with feed forward control is optimized. A TL performs a feed forward and a feedback control of a PM. A storage unit stores a plurality of recipes indicating different processing sequences, and a target value that serves as a control value when performing an etching process. A communication unit causes an IMM to measure a processing state of the wafer and receives measurement information. A computation unit computes a feedback value for the current wafer processed in the current cycle, based on pre-processing and post-processing measurement information for the wafer. An update unit updates the target value using the feedback value. A recipe adjustment unit changes the recipe to change the process performed in the same PM. When the process is performed after changing, the updated target value is used to perform feed forward control of the wafer in the same PM.

    摘要翻译: 作为具有前馈控制的控制值的目标值被优化。 TL执行PM的前馈和反馈控制。 存储单元存储指示不同处理顺序的多个配方,以及当执行蚀刻处理时用作控制值的目标值。 通信单元使IMM测量晶片的处理状态并接收测量信息。 计算单元基于晶片的预处理和后处理测量信息来计算当前周期中处理的当前晶片的反馈值。 更新单元使用反馈值更新目标值。 配方调整单元更改配方以更改在同一个PM中执行的过程。 当改变之后执行处理时,更新的目标值被用于在相同的PM中执行晶片的前馈控制。

    Optical termination apparatus and optical transmission system
    29.
    发明申请
    Optical termination apparatus and optical transmission system 审中-公开
    光终端设备和光传输系统

    公开(公告)号:US20070065089A1

    公开(公告)日:2007-03-22

    申请号:US11503995

    申请日:2006-08-15

    IPC分类号: G02B6/00

    摘要: A Triple-Player PON system is configured to have an optical line terminal (OLT) and an element management system (EMS), which are placed in a central office, an optical network terminal (ONT) placed in a subscriber's house, an optical splitter, a trunk line optical fiber, and a termination optical fiber. A variable optical attenuator is provided before a video optical receiver of the ONT, thereby to control the optical attenuation of the variable optical attenuator by a controller so that an input into the video optical receiver becomes an appropriate power.

    摘要翻译: 三播放器PON系统被配置为具有放置在中心局的光线路终端(OLT)和元件管理系统(EMS),放置在用户住宅内的光网络终端(ONT),光分路器 ,中继线光纤和终端光纤。 在ONT的视频光接收器之前提供可变光衰减器,从而通过控制器控制可变光衰减器的光衰减,使得对视频光接收机的输入变为适当的功率。