Critically exposed lapping of magnetic sensors for target signal output
    21.
    发明授权
    Critically exposed lapping of magnetic sensors for target signal output 有权
    严重暴露的磁传感器研磨目标信号输出

    公开(公告)号:US07245459B2

    公开(公告)日:2007-07-17

    申请号:US10955570

    申请日:2004-09-30

    IPC分类号: G11B5/127 B24B249/00

    CPC分类号: G11B5/127 Y10T29/49036

    摘要: Magnetic sensors are fabricated with an initial length that is slightly longer than their finished length. The sensors are then critically lapped and exposed for target signal output. The final target length of the sensors is obtained by first exposing the sensors to a photolithographic process and then directly lapping the excess length from the sensors. The length of sensor material that is removed is in the range of several nanometers. The target end point during lapping may be ascertained by detecting the change in resistance between the sensor and leads in the lapping tool as the excess material is lapped from the sensor.

    摘要翻译: 磁传感器制造的初始长度比其完成的长度稍长。 然后对传感器进行严格研磨和曝光,以进行目标信号输出。 传感器的最终目标长度通过首先将传感器暴露于光刻工艺,然后直接从传感器研磨多余长度来获得。 被去除的传感器材料的长度在几纳米的范围内。 研磨过程中的目标终点可以通过检测传感器与研磨工具中的引线之间的电阻变化来确定,因为多余的材料从传感器上研磨。

    In-line contiguous resistive lapping guide for magnetic sensors
    22.
    发明授权
    In-line contiguous resistive lapping guide for magnetic sensors 失效
    用于磁传感器的在线连续电阻研磨导轨

    公开(公告)号:US07244169B2

    公开(公告)日:2007-07-17

    申请号:US10954868

    申请日:2004-09-30

    IPC分类号: B24B49/00 B24B51/00 G11B5/42

    摘要: An in-line lapping guide uses a contiguous resistor in a cavity to separate a lithographically-defined sensor from the in-line lapping guide. As lapping proceeds through the cavity toward the sensor, the resistance across the sensor leads increases to a specific target, thereby indicating proximity to the sensor itself. The contiguous resistor is fabricated electrically in parallel to the sensor and the in-line lapping guide. The total resistance across the sensor leads show resistance change even when lapping through the cavity portion. One method to produce the contiguous resistor is to partial mill the cavity between the sensor and the in-line lapping guide so that a film of metal is left. Total resistance across leads is the parallel resistance of the sensor, the contiguous resistor, and the in-line lapping guide.

    摘要翻译: 在线研磨引导件使用空腔中的连续电阻器将光刻定影传感器与在线研磨导轨分离。 当研磨通过腔朝向传感器进行时,传感器引线上的电阻增加到特定目标,从而指示传感器本身的接近度。 连续的电阻器与传感器和在线研磨导轨平行地制造。 传感器引线上的总电阻即使在通过空腔部分研磨时也会显示电阻变化。 产生连续电阻器的一种方法是将传感器和在线研磨引导件之间的空腔部分研磨,使得留下金属膜。 引线之间的总电阻是传感器,相邻电阻器和在线研磨导轨的并联电阻。

    Method for making a magnetoresistive read head having a pinned layer width greater than the free layer stripe height
    23.
    发明申请
    Method for making a magnetoresistive read head having a pinned layer width greater than the free layer stripe height 失效
    用于制造具有大于自由层条纹高度的钉扎层宽度的磁阻读取头的方法

    公开(公告)号:US20060196040A1

    公开(公告)日:2006-09-07

    申请号:US11072559

    申请日:2005-03-03

    IPC分类号: G11B5/127 C23C14/00

    摘要: A method for making a magnetoresistive read head so that the pinned ferromagnetic layer is wider than the stripe height of the free ferromagnetic layer uses ion milling with the ion beam aligned at an angle to the substrate supporting the stack of layers making up the read head. The stack is patterned with photoresist to define a rectangular region with front and back long edges aligned parallel to the read head track width. After ion milling in two opposite directions orthogonal to the front and back long edges, the pinned layer width has an extension. The extension makes the width of the pinned layer greater than the stripe height of the free layer after the substrate and stack of layers are lapped. The length of the extension is determined by the angle between the substrate and the ion beam and the thickness of the photoresist.

    摘要翻译: 一种用于制造磁阻读取头的方法,使得被钉扎铁磁层比自由铁磁层的条带高度宽,使用离子铣削,离子束与支撑构成读取头的层叠层的衬底成一角度对准。 叠层用光致抗蚀剂图案化以限定具有平行于读头磁道宽度排列的前后长边缘的矩形区域。 在与前后长边缘正交的两个相反方向离子铣削后,钉扎层宽度具有延伸。 在衬底和层叠层之后,延伸部使得钉扎层的宽度大于自由层的条带高度。 延伸长度由基板和离子束之间的角度以及光致抗蚀剂的厚度决定。

    Anti-parallel tab sensor fabrication using chemical-mechanical polishing process
    24.
    发明授权
    Anti-parallel tab sensor fabrication using chemical-mechanical polishing process 失效
    使用化学机械抛光工艺制造反平行片传感器

    公开(公告)号:US07057863B2

    公开(公告)日:2006-06-06

    申请号:US10982220

    申请日:2004-11-05

    IPC分类号: G11B5/39

    摘要: A method for fabricating a sensor having anti-parallel tab regions. The method includes forming a free layer, and forming a first layer of a carbon composition above the active area of the free layer. A layer of resist is formed above the first layer of carbon composition. A bias layer is formed above the tab areas of the free layer, the bias layer being operative to substantially pin magnetic moments of the tab areas of the free layer. Leads are formed above the bias layer. A second layer of carbon composition is formed above the tab areas of the free layer. Any material above a plane extending parallel to portions of the second layer of carbon composition above the tab areas are removed using chemical-mechanical polishing. Any remaining carbon composition is removed.

    摘要翻译: 一种用于制造具有反平行突片区域的传感器的方法。 该方法包括形成自由层,并且在自由层的有效区域上方形成碳组合物的第一层。 在第一层碳组合物之上形成一层抗蚀剂。 偏置层形成在自由层的突片区域上方,偏置层可操作以基本上固定自由层的突片区域的磁矩。 引线形成在偏置层上方。 第二层碳组合物形成在自由层的突片区域上方。 使用化学机械抛光除去平行于第二层碳组合物的部分的平面延伸的平面上的任何材料。 任何剩余的碳组成被除去。

    Dual angle milling for current perpendicular to plane (CPP) magnetoresistive sensor definition
    25.
    发明申请
    Dual angle milling for current perpendicular to plane (CPP) magnetoresistive sensor definition 失效
    用于垂直于平面(CPP)磁阻传感器定义的电流的双角铣削

    公开(公告)号:US20050269288A1

    公开(公告)日:2005-12-08

    申请号:US11200757

    申请日:2005-08-09

    摘要: A method for constructing a magnetoresistive sensor which eliminates all redeposited material (redep) from the sides of the sensor. The method involves forming a mask over a plurality of sensor layers, and then performing an ion mill at an angle that is nearly normal to the surface of the sensor layers. A second (glancing) ion mill is then performed at a larger angle with respect to the normal. The first ion mill may be 0-30 degrees with respect to normal, whereas the second ion mill can be 50-89 degrees with respect to normal. The first ion mill is performed with a larger bias voltage than the second ion mill. The higher bias voltage of the first ion mill provides a well collimated ion beam to form straight vertical side walls. The lower bias voltage of the second ion mill prevent damage to the sensor layers during the removal of redep from the sides of the sensor.

    摘要翻译: 一种用于构造磁阻传感器的方法,其从传感器的侧面消除所有再沉积的材料(重新进行)。 该方法包括在多个传感器层上形成掩模,然后以与传感器层的表面几乎垂直的角度执行离子磨。 然后相对于法线以较大的角度执行第二(扫视)离子磨。 第一离子磨可相对于正常为0-30度,而第二离子磨可相对于正常为50-89度。 第一离子磨机以比第二离子磨机更大的偏压进行。 第一离子磨的较高的偏置电压提供了准直的离子束以形成直立的垂直侧壁。 第二离子磨的偏置电压较低可以防止传感器层从传感器的侧面移除重新进行检测。

    Spin-valve or tunnel-junction radio-frequency oscillator, process for adjusting the frequency of such an oscillator and network consisting of a plurality of such oscillators
    27.
    发明授权
    Spin-valve or tunnel-junction radio-frequency oscillator, process for adjusting the frequency of such an oscillator and network consisting of a plurality of such oscillators 有权
    旋转阀或隧道结射频振荡器,用于调整这种振荡器和由多个这样的振荡器组成的网络的频率的过程

    公开(公告)号:US08542072B2

    公开(公告)日:2013-09-24

    申请号:US13245540

    申请日:2011-09-26

    IPC分类号: H03B28/00

    CPC分类号: H03B15/006 H01L43/08

    摘要: A radio-frequency oscillator incorporates a magnetoresistive device within which an electron current is able to flow. The device includes a stack including: a magnetic trapped layer, the magnetization of which is of substantially fixed direction; a magnetic free layer; and a non-magnetic intermediate layer-interposed between the free layer and the trapped layer. The oscillator also includes a mechanism capable of making an electron current flow in the layers constituting the stack and in a direction perpendicular to the plane which contains the layers. At least the free layer is devoid of any material at its center. The electron current density flowing through the stack is capable of generating a magnetization in the free layer in a micromagnetic configuration in the shape of a skewed vortex flowing in the free layer around the center of the free layer.

    摘要翻译: 射频振荡器包括电磁流能够流动的磁阻器件。 该装置包括堆叠,其包括:磁化层,其磁化基本上是固定的方向; 无磁层; 以及介于自由层和捕获层之间的非磁性中间层。 该振荡器还包括能够在构成叠层的层中并且在垂直于包含这些层的平面的方向上产生电子电流的机构。 至少自由层在其中心没有任何材料。 流过堆叠的电子密度能够以自由层中的自由层周围的自由层流动的歪斜涡流的形状在微磁结构中产生磁化。

    MAGNETORESISTIVE RADIOFREQUENCY OSCILLATOR AND METHOD FOR GENERATING AN OSCILLATING SIGNAL
    28.
    发明申请
    MAGNETORESISTIVE RADIOFREQUENCY OSCILLATOR AND METHOD FOR GENERATING AN OSCILLATING SIGNAL 有权
    磁阻无线电振荡器及产生振荡信号的方法

    公开(公告)号:US20130057357A1

    公开(公告)日:2013-03-07

    申请号:US13582294

    申请日:2011-03-01

    IPC分类号: H03J7/04

    CPC分类号: H03B15/006

    摘要: The invention relates to a radiofrequency oscillator which incorporates: a spin-polarized electric current magnetoresistive device (6) for generating an oscillating signal at an oscillation frequency on an output terminal (10), and a terminal (18) for controlling the frequency or amplitude of the oscillating signal, and a feedback loop (44) comprising an amplifier (46) provided with: an input connected to the output terminal (10) of the magnetoresistive device (6) so as to amplify the portion of an oscillating signal detected at the output terminal, and an output connected to the control terminal (18) so as to inject onto said control terminal the amplified portion of the oscillating signal which is phase-related to the oscillating signal generated at the output terminal.

    摘要翻译: 本发明涉及一种射频振荡器,其包括:用于在输出端子(10)上以振荡频率产生振荡信号的自旋极化电流磁阻器件(6)和用于控制频率或振幅的端子(18) 以及包括放大器(46)的反馈回路(44),所述放大器(46)具有:连接到所述磁阻器件(6)的输出端子(10)的输入端,以便放大所述振荡信号部分 输出端子和连接到控制端子(18)的输出端,以便将与在输出端子处产生的振荡信号相关的振荡信号的放大部分注入到所述控制端子上。

    MAGNETORESISTIVE RADIOFREQUENCY OSCILLATOR AND METHOD FOR GENERATING AN OSCILLATING SIGNAL
    29.
    发明申请
    MAGNETORESISTIVE RADIOFREQUENCY OSCILLATOR AND METHOD FOR GENERATING AN OSCILLATING SIGNAL 有权
    磁阻无线电振荡器及产生振荡信号的方法

    公开(公告)号:US20130057356A1

    公开(公告)日:2013-03-07

    申请号:US13582291

    申请日:2011-03-01

    IPC分类号: H03J7/04

    CPC分类号: H03B15/006 H03L5/00 H03L7/26

    摘要: The invention relates to a radio frequency oscillator which incorporates: a spin-polarized electric current magnetoresistive device (6), a terminal (18) for controlling the frequency or amplitude of the oscillating signal, a servo loop (34) connected between the output terminal and the control terminal for applying a control signal to the control terminal in order to slave a characteristic of the oscillating signal to a reference value, the servo loop (34) comprising: a sensor (36) of the amplitude of the oscillating signal oscillations, and a comparator (38) capable of generating the control signal according to the measured amplitude and the reference value.

    摘要翻译: 本发明涉及一种射频振荡器,其包括:自旋极化电流磁阻器件(6),用于控制振荡信号的频率或振幅的端子(18),连接在输出端子 以及用于将控制信号施加到所述控制端子以便将所述振荡信号的特性从属于参考值的所述控制端子,所述伺服环路(34)包括:振荡信号振荡幅度的传感器(36) 以及能够根据测量的幅度和参考值产生控制信号的比较器(38)。

    SPIN-VALVE OR TUNNEL-JUNCTION RADIO-FREQUENCY OSCILLATOR, PROCESS FOR ADJUSTING THE FREQUENCY OF SUCH AN OSCILLATOR AND NETWORK CONSISTING OF A PLURALITY OF SUCH OSCILLATORS
    30.
    发明申请
    SPIN-VALVE OR TUNNEL-JUNCTION RADIO-FREQUENCY OSCILLATOR, PROCESS FOR ADJUSTING THE FREQUENCY OF SUCH AN OSCILLATOR AND NETWORK CONSISTING OF A PLURALITY OF SUCH OSCILLATORS 有权
    旋转阀或隧道无线电频率振荡器,调整这种振荡器频率的方法和包含这种振荡器的多重性的网络

    公开(公告)号:US20120075031A1

    公开(公告)日:2012-03-29

    申请号:US13245540

    申请日:2011-09-26

    IPC分类号: H03B5/40

    CPC分类号: H03B15/006 H01L43/08

    摘要: A radio-frequency oscillator incorporates a magnetoresistive device within which an electron current is able to flow. The device includes a stack including: a magnetic trapped layer, the magnetization of which is of substantially fixed direction; a magnetic free layer; and a non-magnetic intermediate layer-interposed between the free layer and the trapped layer. The oscillator also includes a mechanism capable of making an electron current flow in the layers constituting the stack and in a direction perpendicular to the plane which contains the layers. At least the free layer is devoid of any material at its center. The electron current density flowing through the stack is capable of generating a magnetization in the free layer in a micromagnetic configuration in the shape of a skewed vortex flowing in the free layer around the center of the free layer.

    摘要翻译: 射频振荡器包括电磁流能够流动的磁阻器件。 该装置包括堆叠,其包括:磁化层,其磁化基本上是固定的方向; 无磁层; 以及介于自由层和捕获层之间的非磁性中间层。 该振荡器还包括能够在构成叠层的层中并且在垂直于包含这些层的平面的方向上产生电子电流的机构。 至少自由层在其中心没有任何材料。 流过堆叠的电子密度能够以自由层中的自由层周围的自由层流动的歪斜涡流的形状在微磁结构中产生磁化。