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1.发明申请Method for making a magnetoresistive read head having a pinned layer width greater than the free layer stripe height 失效用于制造具有大于自由层条纹高度的钉扎层宽度的磁阻读取头的方法公开(公告)号：US20060196040A1
公开(公告)日：2006-09-07
申请号：US11072559
申请日：2005-03-03
申请人： Marie-Claire Cyrille , Meng Ding , Elizabeth Dobisz , Kuok Ho , Scott MacDonald
发明人： Marie-Claire Cyrille , Meng Ding , Elizabeth Dobisz , Kuok Ho , Scott MacDonald
CPC分类号： B82Y25/00 , B82Y10/00 , G01R33/093 , G11B5/3163 , G11B5/3169 , G11B5/3903 , G11B2005/3996 , Y10T29/49041 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for making a magnetoresistive read head so that the pinned ferromagnetic layer is wider than the stripe height of the free ferromagnetic layer uses ion milling with the ion beam aligned at an angle to the substrate supporting the stack of layers making up the read head. The stack is patterned with photoresist to define a rectangular region with front and back long edges aligned parallel to the read head track width. After ion milling in two opposite directions orthogonal to the front and back long edges, the pinned layer width has an extension. The extension makes the width of the pinned layer greater than the stripe height of the free layer after the substrate and stack of layers are lapped. The length of the extension is determined by the angle between the substrate and the ion beam and the thickness of the photoresist.
摘要翻译： 一种用于制造磁阻读取头的方法，使得被钉扎铁磁层比自由铁磁层的条带高度宽，使用离子铣削，离子束与支撑构成读取头的层叠层的衬底成一角度对准。 叠层用光致抗蚀剂图案化以限定具有平行于读头磁道宽度排列的前后长边缘的矩形区域。 在与前后长边缘正交的两个相反方向离子铣削后，钉扎层宽度具有延伸。 在衬底和层叠层之后，延伸部使得钉扎层的宽度大于自由层的条带高度。 延伸长度由基板和离子束之间的角度以及光致抗蚀剂的厚度决定。
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公开(公告)号：US20060101636A1
公开(公告)日：2006-05-18
申请号：US10993499
申请日：2004-11-18
CPC分类号： G11B5/3903 , Y10T29/49032 , Y10T29/49041 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for constructing a magnetoresistive sensor using an etch mask that is resistant to the material removal process used to define the sensor width and stripe height. The method may include the use of a Ta etch mask formed under a photoresist mask, and the use of an ion milling process to define the sensor. The etch mask remains substantially intact after performing the ion milling and therefore is readily removed by a later CMP process. The etch mask layer is also very resistant to high temperatures such as those used in a desired atomic layer deposition of alumina, which is used to deposit conformal layers of alumina around the sensor.
摘要翻译： 一种用于构造使用耐蚀刻材料去除工艺的蚀刻掩模的磁阻传感器的方法，所述方法用于限定传感器宽度和条纹高度。 该方法可以包括使用形成在光致抗蚀剂掩模下的Ta蚀刻掩模，以及使用离子铣削工艺来限定传感器。 在执行离子研磨之后，蚀刻掩模基本上保持完整，因此通过稍后的CMP工艺容易地除去。 蚀刻掩模层也非常耐高温，例如用于期望的氧化铝原子层沉积中使用的那些，其用于在传感器周围沉积保形层的氧化铝。
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公开(公告)号：US20100273028A1
公开(公告)日：2010-10-28
申请号：US12827080
申请日：2010-06-30
申请人： Elizabeth Dobisz , David Margulies , Olav Hellwig , Xiao Z. Wu
发明人： Elizabeth Dobisz , David Margulies , Olav Hellwig , Xiao Z. Wu
摘要： Patterned media and associated methods of fabrication are provided in which vertical magnetic grains are grown on a patterned seed layer. The patterned seed layer includes a matrix of islands of a first seed material. Each island of first seed material is separated from other islands by a region of second seed material. The first seed material is selected to initiate growth of magnetic material, and the second seed material is selected to initiate growth of non-magnetic material. Subsequently, magnetic material is grown on the first seed material and non-magnetic material is grown on the second seed material. Deposition may be simultaneously. The magnetic and non-magnetic materials form well-defined vertical columns over the first and second seed materials respectively. Thus, each island behaves as an isolated magnetic unit, which switches independently from its neighbor units, which are magnetically separated by the non-magnetic material.
摘要翻译： 提供了图案化的介质和相关联的制造方法，其中在图案种子层上生长垂直磁性颗粒。 图案化种子层包括第一种子材料的岛的基质。 第一种子材料的每个岛通过第二种子材料的区域与其他岛屿分离。 选择第一种子材料以引发磁性材料的生长，并且选择第二种子材料以引发非磁性材料的生长。 随后，在第一种子材料上生长磁性材料，并且在第二种子材料上生长非磁性材料。 沉积可能同时进行。 磁性和非磁性材料分别在第一种子材料和第二种子材料上形成明确的垂直柱。 因此，每个岛作为孤立的磁性单元，其独立地从其相邻单元切换，其被非磁性材料磁分离。
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4.发明申请Current-in-plane magnetoresistive sensor with longitudinal biasing layer having a nonmagnetic oxide central region and method for fabrication of the sensor 失效具有具有非磁性氧化物中心区域的纵向偏置层的电流平面内磁阻传感器和用于制造传感器的方法公开(公告)号：US20050040438A1
公开(公告)日：2005-02-24
申请号：US10917982
申请日：2004-08-13
申请人： Elizabeth Dobisz , Robert Fontana , James Nix , Neil Smith
发明人： Elizabeth Dobisz , Robert Fontana , James Nix , Neil Smith
IPC分类号： G01R33/09 , G11B5/012 , G11B5/31 , G11B5/39 , H01L31/0232
CPC分类号： B82Y25/00 , B82Y10/00 , G01R33/093 , G11B5/012 , G11B5/3116 , G11B5/3903 , G11B5/3932 , G11B2005/3996 , Y10T29/49044
摘要： A current-in-the-plane (CIP) giant magnetoresistive (GMR) spin valve sensor has its free layer magnetization stabilized by longitudinal biasing through the use of free layer end-region antiferromagnetic exchange coupling. An antiparallel coupling (APC) layer, such as Ru, is formed on the free layer and a ferromagnetic bias layer is formed on the APC layer. The bias layer is a continuous layer that extends across the entire width of the free layer. The central region of the bias layer is formed of nonmagnetic oxides of one or more of the elements making up the bias layer, with the bias layer end regions remaining ferromagnetic. The oxidized central region of the bias layer defines the central active track-width region of the underlying free layer. The ferromagnetic end regions of the bias layer are antiferromagnetically coupled across the APC layer to the corresponding underlying free layer end regions to provide the longitudinal biasing.
摘要翻译： 电流平面（CIP）巨磁阻（GMR）自旋阀传感器通过使用自由层末端反铁磁交换耦合的纵向偏置使其自由层磁化稳定。 在自由层上形成诸如Ru的反平行耦合（APC）层，并且在APC层上形成铁磁偏置层。 偏置层是在自由层的整个宽度上延伸的连续层。 偏置层的中心区域由构成偏置层的一个或多个元件的非磁性氧化物形成，偏置层端部区域保持铁磁性。 偏置层的氧化中心区域限定了下层自由层的中心主动轨迹宽度区域。 偏置层的铁磁端区域跨越APC层反铁磁耦合到相应的下游自由层端部区域以提供纵向偏置。
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公开(公告)号：US06773865B2
公开(公告)日：2004-08-10
申请号：US10414572
申请日：2003-04-15
IPC分类号： G03F700
摘要： This invention discloses an anti-charging layer for beam lithography and mask fabrication. This invention reduces beam displacement and increases pattern placement accuracy. The process will be used in the beam fabrication of high-resolution lithographic masks as well as beam direct write lithography of electronic devices. The anti-charging layer is formed by the use of metal films bound to metal ligating self-assembled monolayers (SAMs) as discharge layers.
摘要翻译： 本发明公开了一种用于光束光刻和掩模制造的防充电层。 本发明减少了光束位移并增加了图案放置精度。 该过程将用于高分辨率光刻掩模的光束制造以及电子器件的光束直写光刻。 通过使用与金属结合自组装单层（SAM）作为放电层结合的金属膜形成防充电层。
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公开(公告)号：US08546001B2
公开(公告)日：2013-10-01
申请号：US12827080
申请日：2010-06-30
申请人： Elizabeth Dobisz , David Margulies , Olav Hellwig , Xiao Z. Wu
发明人： Elizabeth Dobisz , David Margulies , Olav Hellwig , Xiao Z. Wu
摘要： Patterned media and associated methods of fabrication are provided in which vertical magnetic grains are grown on a patterned seed layer. The patterned seed layer includes a matrix of islands of a first seed material. Each island of first seed material is separated from other islands by a region of second seed material. The first seed material is selected to initiate growth of magnetic material, and the second seed material is selected to initiate growth of non-magnetic material. Subsequently, magnetic material is grown on the first seed material and non-magnetic material is grown on the second seed material. Deposition may be simultaneously. The magnetic and non-magnetic materials form well-defined vertical columns over the first and second seed materials respectively. Thus, each island behaves as an isolated magnetic unit, which switches independently from its neighbor units, which are magnetically separated by the non-magnetic material.
摘要翻译： 提供了图案化的介质和相关联的制造方法，其中在图案种子层上生长垂直磁性颗粒。 图案化种子层包括第一种子材料的岛的基质。 第一种子材料的每个岛通过第二种子材料的区域与其他岛屿分离。 选择第一种子材料以引发磁性材料的生长，并且选择第二种子材料以引发非磁性材料的生长。 随后，在第一种子材料上生长磁性材料，并且在第二种子材料上生长非磁性材料。 沉积可能同时进行。 磁性和非磁性材料分别在第一种子材料和第二种子材料上形成明确的垂直柱。 因此，每个岛作为孤立的磁性单元，其独立地从其相邻单元切换，其被非磁性材料磁分离。
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公开(公告)号：US06586158B2
公开(公告)日：2003-07-01
申请号：US09864384
申请日：2001-05-25
IPC分类号： G03F700
摘要： This invention discloses an anti-charging layer for beam lithography and mask fabrication. This invention reduces beam displacement and increases pattern placement accuracy. The process will be used in the beam fabrication of high-resolution lithographic masks as well as beam direct write lithography of electronic devices. The anti-charging layer is formed by the use of metal films bound to metal ligating self-assembled monolayers (SAMs) as discharge layers.
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公开(公告)号：US07776388B2
公开(公告)日：2010-08-17
申请号：US11850165
申请日：2007-09-05
申请人： Elizabeth Dobisz , David Margulies , Olav Hellwig , Xiao Z. Wu
发明人： Elizabeth Dobisz , David Margulies , Olav Hellwig , Xiao Z. Wu
摘要： Patterned media and associated methods of fabrication are provided in which vertical magnetic grains are grown on a patterned seed layer. The patterned seed layer includes a matrix of islands of a first seed material. Each island of first seed material is separated from other islands by a region of second seed material. The first seed material is selected to initiate growth of magnetic material, and the second seed material is selected to initiate growth of non-magnetic material. Subsequently, magnetic material is grown on the first seed material and non-magnetic material is grown on the second seed material. Deposition may be simultaneously. The magnetic and non-magnetic materials form well-defined vertical columns over the first and second seed materials respectively. Thus, each island behaves as an isolated magnetic unit, which switches independently from its neighbor units, which are magnetically separated by the non-magnetic material.
摘要翻译： 提供了图案化的介质和相关联的制造方法，其中在图案种子层上生长垂直磁性颗粒。 图案化种子层包括第一种子材料的岛的基质。 第一种子材料的每个岛通过第二种子材料的区域与其他岛屿分离。 选择第一种子材料以引发磁性材料的生长，并且选择第二种子材料以引发非磁性材料的生长。 随后，在第一种子材料上生长磁性材料，并且在第二种子材料上生长非磁性材料。 沉积可能同时进行。 磁性和非磁性材料分别在第一种子材料和第二种子材料上形成明确的垂直柱。 因此，每个岛作为孤立的磁性单元，其独立地从其相邻单元切换，其被非磁性材料磁分离。
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9.发明申请Thermally stable oxidized bias layer structure for magnetoresistive magnetic head for a hard disk drive 失效用于硬盘驱动器的磁阻磁头的热稳定氧化偏压层结构公开(公告)号：US20050007705A1
公开(公告)日：2005-01-13
申请号：US10615554
申请日：2003-07-07
IPC分类号： G11B5/39
CPC分类号： G11B5/3906 , Y10T29/49032
摘要： The magnetic head of the present invention includes a magnetoresistive read head element in which a magnetic bias layer is deposited across the surface of the wafer above the free magnetic layer. Central portions of the biasing layer that correspond to the read head track width are oxidized to essentially remove the magnetic moment of the bias layer material in those central locations. An oxygen diffusion barrier layer is then deposited upon the oxidized central portions of the biasing layer to prevent diffusion or migration of oxygen from the oxidized central regions of the biasing layer. An insulation layer, a second magnetic shield layer and further structures of the magnetic head are subsequently fabricated.
摘要翻译： 本发明的磁头包括磁阻读头元件，其中磁偏置层跨过自由磁层上的晶片表面。 对应于读头磁道宽度的偏置层的中心部分被氧化以基本上去除那些中心位置处的偏置层材料的磁矩。 然后将氧扩散阻挡层沉积在偏置层的氧化中心部分上，以防止氧从偏置层的氧化中心区域扩散或迁移。 随后制造绝缘层，第二磁屏蔽层和磁头的其它结构。
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公开(公告)号：US20090059430A1
公开(公告)日：2009-03-05
申请号：US11850165
申请日：2007-09-05
申请人： Elizabeth Dobisz , David Margulies , Olav Hellwig , Xiao Z. Wu
发明人： Elizabeth Dobisz , David Margulies , Olav Hellwig , Xiao Z. Wu
IPC分类号： G11B15/10
摘要： Patterned media and associated methods of fabrication are provided in which vertical magnetic grains are grown on a patterned seed layer. The patterned seed layer includes a matrix of islands of a first seed material. Each island of first seed material is separated from other islands by a region of second seed material. The first seed material is selected to initiate growth of magnetic material, and the second seed material is selected to initiate growth of non-magnetic material. Subsequently, magnetic material is grown on the first seed material and non-magnetic material is grown on the second seed material. Deposition may be simultaneously. The magnetic and non-magnetic materials form well-defined vertical columns over the first and second seed materials respectively. Thus, each island behaves as an isolated magnetic unit, which switches independently from its neighbor units, which are magnetically separated by the non-magnetic material.
摘要翻译： 提供了图案化的介质和相关联的制造方法，其中在图案种子层上生长垂直磁性颗粒。 图案化种子层包括第一种子材料的岛的基质。 第一种子材料的每个岛通过第二种子材料的区域与其他岛屿分离。 选择第一种子材料以引发磁性材料的生长，并且选择第二种子材料以引发非磁性材料的生长。 随后，在第一种子材料上生长磁性材料，并且在第二种子材料上生长非磁性材料。 沉积可能同时进行。 磁性和非磁性材料分别在第一种子材料和第二种子材料上形成明确的垂直柱。 因此，每个岛作为孤立的磁性单元，其独立地从其相邻单元切换，其被非磁性材料磁分离。
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