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    Method for making a magnetoresistive read head having a pinned layer width greater than the free layer stripe height
    1.
    发明申请
    Method for making a magnetoresistive read head having a pinned layer width greater than the free layer stripe height 失效
    用于制造具有大于自由层条纹高度的钉扎层宽度的磁阻读取头的方法

    公开(公告)号：US20060196040A1

    公开(公告)日：2006-09-07

    申请号：US11072559

    申请日：2005-03-03

    申请人： Marie-Claire Cyrille ,  Meng Ding ,  Elizabeth Dobisz ,  Kuok Ho ,  Scott MacDonald

    发明人： Marie-Claire Cyrille ,  Meng Ding ,  Elizabeth Dobisz ,  Kuok Ho ,  Scott MacDonald

    IPC分类号： G11B5/127 ,  C23C14/00

    CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G01R33/093 ,  G11B5/3163 ,  G11B5/3169 ,  G11B5/3903 ,  G11B2005/3996 ,  Y10T29/49041 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： A method for making a magnetoresistive read head so that the pinned ferromagnetic layer is wider than the stripe height of the free ferromagnetic layer uses ion milling with the ion beam aligned at an angle to the substrate supporting the stack of layers making up the read head. The stack is patterned with photoresist to define a rectangular region with front and back long edges aligned parallel to the read head track width. After ion milling in two opposite directions orthogonal to the front and back long edges, the pinned layer width has an extension. The extension makes the width of the pinned layer greater than the stripe height of the free layer after the substrate and stack of layers are lapped. The length of the extension is determined by the angle between the substrate and the ion beam and the thickness of the photoresist.

    摘要翻译： 一种用于制造磁阻读取头的方法，使得被钉扎铁磁层比自由铁磁层的条带高度宽，使用离子铣削，离子束与支撑构成读取头的层叠层的衬底成一角度对准。 叠层用光致抗蚀剂图案化以限定具有平行于读头磁道宽度排列的前后长边缘的矩形区域。 在与前后长边缘正交的两个相反方向离子铣削后，钉扎层宽度具有延伸。 在衬底和层叠层之后，延伸部使得钉扎层的宽度大于自由层的条带高度。 延伸长度由基板和离子束之间的角度以及光致抗蚀剂的厚度决定。

    Method for patterning a magnetoresistive sensor
    5.
    发明申请
    Method for patterning a magnetoresistive sensor 有权
    图案化磁阻传感器的方法

    公开(公告)号：US20060101636A1

    公开(公告)日：2006-05-18

    申请号：US10993499

    申请日：2004-11-18

    申请人： Marie-Claire Cyrille ,  Elizabeth Dobisz ,  Wipul Jayasekara ,  Jui-Lung Li

    发明人： Marie-Claire Cyrille ,  Elizabeth Dobisz ,  Wipul Jayasekara ,  Jui-Lung Li

    IPC分类号： G11B5/127 ,  H04R31/00

    CPC分类号： G11B5/3903 ,  Y10T29/49032 ,  Y10T29/49041 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： A method for constructing a magnetoresistive sensor using an etch mask that is resistant to the material removal process used to define the sensor width and stripe height. The method may include the use of a Ta etch mask formed under a photoresist mask, and the use of an ion milling process to define the sensor. The etch mask remains substantially intact after performing the ion milling and therefore is readily removed by a later CMP process. The etch mask layer is also very resistant to high temperatures such as those used in a desired atomic layer deposition of alumina, which is used to deposit conformal layers of alumina around the sensor.

    摘要翻译： 一种用于构造使用耐蚀刻材料去除工艺的蚀刻掩模的磁阻传感器的方法，所述方法用于限定传感器宽度和条纹高度。 该方法可以包括使用形成在光致抗蚀剂掩模下的Ta蚀刻掩模，以及使用离子铣削工艺来限定传感器。 在执行离子研磨之后，蚀刻掩模基本上保持完整，因此通过稍后的CMP工艺容易地除去。 蚀刻掩模层也非常耐高温，例如用于期望的氧化铝原子层沉积中使用的那些，其用于在传感器周围沉积保形层的氧化铝。

    In-line contiguous resistive lapping guide for magnetic sensors
    10.
    发明申请
    In-line contiguous resistive lapping guide for magnetic sensors 失效
    用于磁传感器的在线连续电阻研磨导轨

    公开(公告)号：US20060068685A1

    公开(公告)日：2006-03-30

    申请号：US10954868

    申请日：2004-09-30

    申请人： Marie-Claire Cyrille ,  Kuok San Ho ,  Tsann Lin ,  Scott MacDonald ,  Huey-Ming Tzeng

    发明人： Marie-Claire Cyrille ,  Kuok San Ho ,  Tsann Lin ,  Scott MacDonald ,  Huey-Ming Tzeng

    IPC分类号： B24B49/00

    CPC分类号： B24B37/00 ,  B24B37/013 ,  B24B41/06 ,  B24B49/10 ,  Y10T29/49036 ,  Y10T29/49048

    摘要： An in-line lapping guide uses a contiguous resistor in a cavity to separate a lithographically-defined sensor from the in-line lapping guide. As lapping proceeds through the cavity toward the sensor, the resistance across the sensor leads increases to a specific target, thereby indicating proximity to the sensor itself. The contiguous resistor is fabricated electrically in parallel to the sensor and the in-line lapping guide. The total resistance across the sensor leads show resistance change even when lapping through the cavity portion. One method to produce the contiguous resistor is to partial mill the cavity between the sensor and the in-line lapping guide so that a film of metal is left. Total resistance across leads is the parallel resistance of the sensor, the contiguous resistor, and the in-line lapping guide.

    摘要翻译： 在线研磨引导件使用空腔中的连续电阻器将光刻定影传感器与在线研磨导轨分离。 当研磨通过腔朝向传感器进行时，传感器引线上的电阻增加到特定目标，从而指示传感器本身的接近度。 连续的电阻器与传感器和在线研磨导轨平行地制造。 传感器引线上的总电阻即使在通过空腔部分研磨时也会显示电阻变化。 产生连续电阻器的一种方法是将传感器和在线研磨引导件之间的空腔部分研磨以留下金属膜。 引线之间的总电阻是传感器，相邻电阻器和在线研磨导轨的并联电阻。