公开(公告)号：US20060280597A1

公开(公告)日：2006-12-14

申请号：US10560131

申请日：2004-06-10

申请人： Hiroyuki Ochiai ,  Mitsutoshi Watanabe ,  Takashi Furukawa ,  Akihiro Goto ,  Masao Akiyoshi

发明人： Hiroyuki Ochiai ,  Mitsutoshi Watanabe ,  Takashi Furukawa ,  Akihiro Goto ,  Masao Akiyoshi

IPC分类号： F04D29/56

CPC分类号： F01D17/162 ,  C23C26/00 ,  F01D17/16 ,  F05D2220/40 ,  F05D2230/90 ,  F05D2300/509 ,  F16C33/1065 ,  F16C33/12

摘要： In a rotation member (5) rotatably engaged with a housing (3), a pulsing electric discharge is generated in a processing liquid or in a gas, between an electrode and the rotation member (5). The electrode is a chemical compound from metallic powder or metal, or a molded body formed by molding ceramic powder, or a molded body obtained by heating the molded body. Energy of the electric discharges causes coating to be formed on an engagement portion (15) engaging the housing (3), the coating formed from the material of the electrode or a substance to which the electrode material combined by the energy of the electric discharges.

摘要翻译： 在与壳体（3）可旋转地接合的旋转构件（5）中，在电极和旋转构件（5）之间的处理液体或气体中产生脉冲放电。 电极是来自金属粉末或金属的化合物，或通过模塑陶瓷粉末形成的成型体，或通过加热成型体而获得的成型体。 放电的能量使得在与壳体（3）接合的接合部分（15）上形成涂层，由电极的材料形成的涂层或通过放电的能量组合的电极材料的物质。

公开(公告)号：US07067011B2

公开(公告)日：2006-06-27

申请号：US10898992

申请日：2004-07-27

申请人： Tooru Inoue ,  Akihiro Goto

发明人： Tooru Inoue ,  Akihiro Goto

IPC分类号： B05C5/053 ,  B05C5/10

CPC分类号： C23C26/00 ,  B05D1/62 ,  B05D3/141 ,  C25D5/18 ,  C25D17/00 ,  C25D21/12

摘要： An apparatus has a green compact electrode including a material of a coating formed on a workpiece by a discharge, a power source for supplying a first voltage, a voltage detector for detecting a voltage between the workpiece and the electrode, and a pulse current generator for generating and outputting a pulse current from the first voltage, and for cutting off the output when a predetermined period of time has passed after the voltage is detected to be less than a detection voltage. The pulse current is supplied between the workpiece and the electrode, and the detection voltage is less than the first voltage by 5% to 20% of the first voltage.

摘要翻译： 一种装置具有包括通过放电在工件上形成的涂层的材料的绿色紧凑型电极，用于提供第一电压的电源，用于检测工件和电极之间的电压的电压检测器，以及用于 从第一电压产生和输出脉冲电流，并且在检测到电压小于检测电压之后经过预定时间段时切断输出。 在工件与电极之间提供脉冲电流，检测电压小于第一电压的5％〜20％。

公开(公告)号：US07064339B2

公开(公告)日：2006-06-20

申请号：US10816467

申请日：2004-03-31

申请人： Hiroshi Nishimura ,  Naoto Kihara ,  Kinya Kato ,  Toru Takagi ,  Akihiro Goto ,  Junji Ikeda ,  Kazuya Okamoto

发明人： Hiroshi Nishimura ,  Naoto Kihara ,  Kinya Kato ,  Toru Takagi ,  Akihiro Goto ,  Junji Ikeda ,  Kazuya Okamoto

IPC分类号： G01N21/00 ,  G21K7/00

CPC分类号： H01J37/26 ,  G01N23/225 ,  H01J37/1471 ,  H01J37/226 ,  H01J37/265 ,  H01J2237/0492 ,  H01J2237/057 ,  H01J2237/1501 ,  H01J2237/2482 ,  H01J2237/2538 ,  H01J2237/262 ,  H01J2237/2806 ,  H01J2237/2817 ,  H01J2237/282 ,  H01J2237/2823 ,  H01J2237/2826 ,  H01J2237/30438

摘要： Charged-particle-beam (CPB) mapping projection-optical systems and adjustment methods for such systems are disclosed that can be performed quickly and accurately. In a typical system, an irradiation beam is emitted from a source, passes through an irradiation-optical system, and enters a Wien filter (“E×B”). Upon passing through the E×B, the irradiation beam passes through an objective-optical system and is incident on an object surface. Such impingement generates an observation beam that returns through the objective-optical system and the E×B in a different direction to a detector via an imaging-optical system. An adjustment-beam source emits an adjustment beam used for adjusting and aligning the position of, e.g., the object surface and/or the Wien's condition of the E×B. The adjustment beam can be off-axis relative to the objective-optical system. For such adjusting and aligning, fiducial marks (situated, e.g., in the plane of the object surface) can be used that are optimized for the CPB-optical system and the off-axis optical system. Desirably, the image formed on the detector when electrical voltage and current are not applied to the E×B is in the same position as the image formed on the detector when electrical voltage and current are applied to the E×B. Also provided are “evaluation charts” for use in such alignments that do not require adjustment of the optical axis of the irradiation-optical system, and from which the kinetic-energy distribution of the emitted adjustment beam is stable.

摘要翻译： 公开了可以快速且准确地执行这种系统的带电粒子束（CPB）映射投影光学系统和调整方法。 在典型的系统中，照射光束从光源发出，通过照射光学系统，并进入维恩滤光片（“ExB”）。 当通过ExB时，照射光束通过物镜光学系统并且入射到物体表面上。 这种冲击产生观察光束，该观察光束经由成像光学系统通过物镜 - 光学系统和ExB以不同的方向返回到检测器。 调整光束源发射用于调整和对准例如物体表面的位置和/或ExB的维恩状态的调节光束。 调节光束可以相对于物镜光学系统偏轴。 对于这种调整和对准，可以使用为CPB光学系统和离轴光学系统优化的基准标记（例如位于物体表面的平面中）。 理想地，当电压和电流未施加到ExB时，在检测器上形成的图像与当将电压和电流施加到ExB时形成在检测器上的图像位于相同的位置。 还提供了用于这种对准的“评估图”，其不需要调整照射光学系统的光轴，并且发射的调节光束的动能分布从该对准是稳定的。

公开(公告)号：US20060081462A1

公开(公告)日：2006-04-20

申请号：US11291878

申请日：2005-12-02

申请人： Akihiro Goto ,  Masao Akiyoshi ,  Katsuhiro Matsuo ,  Hiroyuki Ochiai ,  Mitsutoshi Watanabe ,  Takashi Furukawa

发明人： Akihiro Goto ,  Masao Akiyoshi ,  Katsuhiro Matsuo ,  Hiroyuki Ochiai ,  Mitsutoshi Watanabe ,  Takashi Furukawa

IPC分类号： C25C7/02

CPC分类号： C23C24/00 ,  B22F2998/10 ,  B22F2999/00 ,  C23C26/00 ,  B22F1/0096 ,  B22F3/02 ,  B22F1/0011

摘要： An electrode for electric discharge surface treatment, in which a pulse-like electric discharge is caused between the electrode and a work in a dielectric fluid or an atmosphere, and in which a coat of an electrode material or a substance that is generated by a reaction of the electrode material due to an electric discharge energy is formed on a surface of the work, is a molded powder that is formed by molding a material powder including a metallic powder, a metallic compound powder, and a conductive ceramic powder. A powder solid that is formed as a result of coagulation of the material powder, and that is included in the molded powder has a diameter shorter than a distance between the electrode and the work.

摘要翻译： 一种用于放电表面处理的电极，其中在电极和电介质流体或大气中的工件之间产生脉冲状放电，并且其中电极材料或通过反应产生的物质的涂层 是通过模制包含金属粉末，金属化合物粉末和导电陶瓷粉末的材料粉末而形成的在工件表面上形成的由放电能量引起的电极材料的成型粉末。 由于材料粉末凝结而形成的粉末固体，其包含在成型粉末中的直径比电极和工件之间的距离短。

公开(公告)号：US06930273B2

公开(公告)日：2005-08-16

申请号：US10297385

申请日：2001-01-23

申请人： Toshio Nakashima ,  Kouichirou Hattori ,  Yoshikazu Ukai ,  Atsushi Taneda ,  Akihiro Goto ,  Takashi Hashimoto

发明人： Toshio Nakashima ,  Kouichirou Hattori ,  Yoshikazu Ukai ,  Atsushi Taneda ,  Akihiro Goto ,  Takashi Hashimoto

IPC分类号： B23H1/02 ,  B23H7/00 ,  B23H7/04 ,  C01F11/18 ,  C05D3/02 ,  C09C1/02 ,  B23H7/14

CPC分类号： B23H7/04 ,  B23H1/022

摘要： A power supply unit for wire electrical discharge machining using an ac high-frequency power supply for applying an ac high-frequency voltage between a wire electrode (1a) and a workpiece (2) includes a high-frequency oscillation and amplification circuit (4) and a pulse power supply (5) which is an ac-high-frequency-voltage intermittently supplying unit for effecting the application of the ac high-frequency voltage between the electrode and the workpiece and a pause thereof. In wire electrical discharge machining using this power supply unit for wire electrical discharge machining, it is possible to suppress the vibration of the wire electrode (1a) due tog the electrostatic force acting between the wire electrode (1a) and the workpiece (2), making it possible to improve the straightness accuracy of a machined surface of the workpiece (2) and make surface roughness small.

摘要翻译： 使用用于在线电极（1a）和工件（2）之间施加交流高频电压的交流高频电源的放线加工用电源单元包括高频振荡放大电路（4） 以及脉冲电源（5），其是用于在电极和工件之间施加交流高频电压及其暂停的交流高频电压间歇供电单元。 在使用该电力供给单元进行电线放电加工的线放电加工中，能够抑制线电极（1a）与线电极（1a）和工件（2）之间的静电力的振动， 使得可以提高工件（2）的加工表面的平直度精度，并使表面粗糙度小。

公开(公告)号：US20050035088A1

公开(公告)日：2005-02-17

申请号：US09763194

申请日：2001-02-20

申请人： Kazunobu Fujikawa ,  Akihiro Goto

发明人： Kazunobu Fujikawa ,  Akihiro Goto

IPC分类号： B23H7/02 ,  B23H7/08 ,  B23H9/00 ,  C23C26/00 ,  B23H7/00

CPC分类号： B23H7/08 ,  B23H7/02 ,  B23H9/00 ,  B23H9/008 ,  C23C26/00

摘要： A surface discharge processing apparatus generates an electric discharge between an electrode and a workpiece (1) thereby forming a surface reforming layer on the surface of the workpiece. The apparatus comprises a wire electrode (2) for surface discharge processing used as the surface discharge processing electrode, and a wire electrode feeder composed of a feed reel (3) for feeding this wire electrode (2) for surface discharge processing to the workpiece (1), and a takeup reel (4) in additional to the conventional components. The wire electrode (2) is composed of a core wire (2a) made of ductile material, and a surface discharge processing material (2b) made of a surface reforming material adhered to this core wire or a raw material for the surface reforming material.

摘要翻译： 表面放电处理装置在电极和工件（1）之间产生放电，从而在工件的表面上形成表面改性层。 该装置包括用作表面放电处理电极的用于表面放电处理的线电极（2）和由用于将该线电极（2）供给到工件的表面放电处理的馈电线轴（3） 1）以及卷绕卷轴（4）。 线电极（2）由延性材料制的芯线（2a）和粘附在该芯线上的表面改性材料或表面改性材料的原料构成的表面放电处理材料（2b）构成。

公开(公告)号：US06744002B1

公开(公告)日：2004-06-01

申请号：US10181210

申请日：2002-07-15

申请人： Akihiro Goto

发明人： Akihiro Goto

IPC分类号： B23H702

CPC分类号： B23H7/04 ,  B23H7/02 ,  B23H7/34 ,  B23H7/36 ,  B23H2600/12

摘要： In wire electric discharge machining in which electric discharge energy is supplied between a wire electrode (1a) and a workpiece (2) by a machining electric power supply means (16) so as to machine the workpiece (2) when the wire electrode (1a) and the workpiece (2) are relatively traveled with each other by a positioning means, there are provided a first process in which rough machining is conducted in a working solution (4a) and a second process in which finish-machining is conducted in gas (7) such as air, oxygen, nitrogen or inert gas, and the positioning means is controlled by a control means (17) so that a relative traveling speed of the wire electrode (1a) with the workpiece (2) in the second process can be set at a constant rate not lower than a predetermined rate at which a short circuit can not continue between the electrodes for a predetermined period of time and more which has been previously set according to a required specification. It is possible to realize a high accuracy and quality of wire electric discharge machining and also it is possible to realize an enhancement of productivity.

摘要翻译： 在电线放电加工中，其中通过加工电源装置（16）在线电极（1a）和工件（2）之间提供放电能量，以便当线电极（1a）加工工件 ）和工件（2）通过定位装置相对移动，提供了在工作溶液（4a）中进行粗加工的第一工序和在气体中进行精加工的第二工序 （7），诸如空气，氧气，氮气或惰性气体，并且定位装置由控制装置（17）控制，使得在第二过程中线电极（1a）与工件（2）的相对行进速度 可以以不低于电极之间的短路不能持续预定时间段的预定速率的恒定速率设定，并且根据所需规格预先设定的预定速率。 可以实现电火花线切割加工的高精度和高质量，并且可以实现生产率的提高。

公开(公告)号：US06670602B1

公开(公告)日：2003-12-30

申请号：US09324896

申请日：1999-06-03

申请人： Yoshiaki Kohama ,  Akihiro Goto ,  Muneki Hamashima ,  Yukiharu Okubo

发明人： Yoshiaki Kohama ,  Akihiro Goto ,  Muneki Hamashima ,  Yukiharu Okubo

IPC分类号： H01J314

CPC分类号： H01J37/28 ,  H01J2237/2817

摘要： New and improved scanning device and corresponding method that include and involve a movable stage on which a specimen is positioned, irradiation means which irradiates an electron beam onto an irradiation region of the specimen, secondary beam detection means used in generating a picture of the irradiation region by detecting a secondary beam which consists of at least one of secondary electrons or reflected electrons from the irradiation region of the electron beam, an imaging electron optical system which causes imaging of the secondary beam on a detection surface of the secondary beam detection means, and which is arranged between the specimen and the secondary beam detection means. The secondary beam detection means is equipped with a fluorescent unit which is arranged on the detection surface, and which converts the secondary beam into light, and one-dimensional line sensors which have a structure arrayed in two dimensions forming electric charge by photoelectric conversion, an array imaging element which continuously adds up the electric charge of the accumulated image in a predetermined line of the line sensors, and the electric charge of the line of the image which moves accompanying the movement of the stage, and a two-dimensional imaging element which emits electric charge by means of photoelectric conversion. The scanning device and corresponding method further include and involve changeover means for selectively irradiating the light converted by means of the fluorescent unit to an imaging element which is either one of the array imaging elements and the two-dimensional imaging element.

摘要翻译： 新的改进的扫描装置及其相应的方法，其包括并涉及其上放置试样的可移动台，将电子束照射到试样的照射区域上的照射装置，用于产生照射区域的图像的二次束检测装置 通过检测由来自电子束的照射区域的二次电子或反射电子中的至少一种构成的次级光束，使次光束在二次光束检测装置的检测表面上成像的成像电子光学系统，以及 其布置在样本和次级束检​​测装置之间。 二次光束检测装置配备有布置在检测表面上并将次光束转换为光的荧光单元和具有通过光电转换形成电荷的二维排列的结构的一维线传感器， 阵列成像元件，其连续地将累积图像的电荷累积在行传感器的预定线中，以及伴随舞台移动移动的图像线的电荷，以及二维成像元件 通过光电转换发射电荷。 扫描装置和相应的方法还包括并包括切换装置，用于选择性地将通过荧光单元转换的光照射到作为阵列成像元件和二维成像元件之一的成像元件。

公开(公告)号：US06245599B1

公开(公告)日：2001-06-12

申请号：US09456508

申请日：1999-12-08

申请人： Akihiro Goto ,  Hirochika Kawaguchi ,  Yoshiharu Takahashi ,  Takao Takahashi ,  Takashi Arita ,  Satoshi Ookyuu ,  Hirokazu Taki

发明人： Akihiro Goto ,  Hirochika Kawaguchi ,  Yoshiharu Takahashi ,  Takao Takahashi ,  Takashi Arita ,  Satoshi Ookyuu ,  Hirokazu Taki

IPC分类号： H01L2166

CPC分类号： G06F17/5077 ,  G06F2217/40 ,  H01L23/49816 ,  H01L23/49838 ,  H01L24/48 ,  H01L24/49 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/49175 ,  H01L2924/00014 ,  H01L2924/01019 ,  H01L2924/01039 ,  H01L2924/14 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

摘要： The primary objective of the present invention is to select a connecting combination of the plurality of solder ball connection pads and the plurality of wire bond pads, and generate an optimum wiring candidate. For this objective, the wiring pattern generation unit generates a wiring pattern as the information for specifying an in-area wiring route to be wired in each row and an in-area wiring route to be connected to the next row among the solder ball connection pad area closer to the wire bond pad area, based on the design conditions of the wiring route stored in the design condition memory. Then, the wiring plan generation unit generates a wiring plan laying out the plurality of wiring routes by combining the wiring patterns generated for each row, and the wiring rule check unit selects some of the generated wiring plans suited for the wiring rules and generates the plurality of wiring candidates. Furthermore, the quality rating unit rates the generated wiring candidates and selects the best wiring candidate.

摘要翻译： 本发明的主要目的是选择多个焊球连接焊盘和多个引线接合焊盘的连接组合，并且生成最佳布线候选。 为此目的，布线图案生成单元生成布线图案，作为用于指定要在每行中进行布线的区域内布线路线的信息和要连接到焊球连接垫中的下一行的区域内布线路线 基于存储在设计条件存储器中的布线路线的设计条件，更靠近导线焊盘区域的区域。 然后，布线计划生成单元通过组合为每行生成的布线图案来生成布置多条布线路线的布线图，并且布线规则检查单元选择适合布线规则的一些生成的布线图，并且生成多个 接线候选人。 此外，质量评级单元对生成的接线候选进行评估，并选择最佳布线候选。

公开(公告)号：US5603852A

公开(公告)日：1997-02-18

申请号：US534310

申请日：1995-09-27

申请人： Akihiro Goto ,  Mitsuyoshi Wada ,  Yoshio Ozaki

发明人： Akihiro Goto ,  Mitsuyoshi Wada ,  Yoshio Ozaki

IPC分类号： B23H1/02 ,  B23H7/16 ,  B23H11/00

CPC分类号： B23H11/00 ,  B23H1/02 ,  B23H1/022 ,  B23H1/024 ,  B23H7/16

摘要： A machining pulse control apparatus applies a first polarity pulse voltage during a machining operation and a second opposite polarity voltage in a machining stop period in which the electrode is moved away from and toward the workpiece during a jump operation. Preferably, the second opposite polarity is applied for a period of time sufficient to maintain the voltage across the machining gap at zero voltage. The amount of direct current voltage applied during the jump operation is adaptively controlled.

摘要翻译： 加工脉冲控制装置在加工操作期间施加第一极性脉冲电压，在加工停止期间施加第二极性电压，其中在跳跃操作期间电极远离工件并朝向工件移动。 优选地，将第二相反极性施加足以将加工间隙两端的电压维持在零电压的时间段。 在跳跃操作期间施加的直流电压的量被自适应地控制。