公开(公告)号：US5144184A

公开(公告)日：1992-09-01

申请号：US470938

申请日：1990-01-26

Applicant: Paul Greiff

Inventor： Paul Greiff

IPC: G01P15/097 ,  G01P15/10 ,  H03H3/013 ,  H03H9/24

CPC classification number: H03H9/24 ,  G01P15/097 ,  H03H3/013

Abstract: A micromechanical device having a frequency trimmable, resonant structure, including a semiconductor substrate forming a support frame. First and second flexures flexibly couple and support a structure within the support frame, to permit rotation with a resonant frequency about a first axis which passes through the flexures. First and second elongated openings located proximate the first and second flexures form first and second tension relief beams adjacent the flexures, for providing stress relief of the tensile forces between the resonant structure and the flexures, and for establishing and trimming the resonant frequency of the resonant structure. The resonant structure may also include first and second regions located proximate the elongated openings, the regions having a thickness which is substantially less than the thickness of the remainder of the resonant structure, to permit removal of at least a portion of the regions thereby enlarging the elongated openings and further trimming the resonant frequency of the resonant structure. Also disclosed is a method of trimming the resonant frequency of such a micromechanical device.

Abstract translation: 一种具有可调谐的谐振结构的微机械装置，包括形成支撑框架的半导体衬底。 第一和第二挠曲件柔性地联接和支撑支撑框架内的结构，以允许围绕穿过弯曲部的第一轴线的共振频率旋转。 位于第一和第二挠曲附近的第一和第二细长开口形成邻近弯曲部的第一和第二张力释放梁，用于提供在谐振结构和挠曲之间的张力的应力消除，以及用于建立和修整谐振的谐振频率 结构体。 谐振结构还可以包括位于细长开口附近的第一和第二区域，该区域具有基本上小于谐振结构的其余部分的厚度的厚度，以允许去除区域的至少一部分，从而扩大 细长的开口并进一步修整谐振结构的谐振频率。 还公开了一种修整这种微机械装置的谐振频率的方法。

公开(公告)号：US5111693A

公开(公告)日：1992-05-12

申请号：US560374

申请日：1990-07-30

Applicant: Paul Greiff

Inventor： Paul Greiff

IPC: G01C19/5719

CPC classification number: B81B3/0051 ,  G01C19/5719 ,  B81B2201/0235

Abstract: Motion restraints and a method for their fabrication are provided for use with a micromechanical transducer, such as a gyroscope or an accelerometer, to limit the motion of resiliently supported transducer elements, preventing extreme lateral or rotational displacement of the elements. The motion restraints are fabricated of a material such as gold that prevents or reduces the sticking of the transducer elements at points of contact between them. In one embodiment, the motion restraints include cantilevered depositions that extend from the substrate over the transducer element. In a further embodiment, the restraints includes a metal capped post and close-tolerance lateral restraints.

Abstract translation: 运动约束及其制造方法被提供用于诸如陀螺仪或加速度计的微机械换能器，以限制弹性支撑的换能器元件的运动，从而防止元件的极端横向或旋转位移。 运动限制由诸如金的材料制成，其防止或减少换能器元件在它们之间的接触点处的粘附。 在一个实施例中，运动约束包括在换能器元件上从衬底延伸的悬臂沉积。 在另一个实施例中，约束包括金属封盖柱和紧密公差横向约束。

公开(公告)号：US4516263A

公开(公告)日：1985-05-07

申请号：US373620

申请日：1982-04-30

Applicant: Brock S. Dew ,  Paul Greiff

Inventor： Brock S. Dew ,  Paul Greiff

IPC: G01S3/784 ,  G01S3/786 ,  H04N5/378 ,  G06K9/00 ,  G11C19/14 ,  H01L27/00 ,  H03H15/02

CPC classification number: G01S3/7864 ,  G01S3/784 ,  H04N3/1575

Abstract: A video signal processor, particularly for use in identifying light source position, in which a video signal stream from an image detector is processed directly on a substrate using charge coupled device stored image transfer technology. The video signal is clocked through an array of charge coupled devices in a plurality of closely adjacent channels on a single semiconductor chip in such manner that the pattern of signals stored on the chip in the region of the adjacent channels corresponds to the light source image on the detector. Video signal processing is shared between the chip and external electronics to provide an indication of signal strength (acquisition), signal background, and signal centroiding in both horizontal and vertical axes. Much of the signal processing is provided directly on the chip by segmenting and intercoupling the charge coupled device electrodes in a predetermined pattern. There results a reduction in the amount of interconnection, external electronics and the spatial distribution of the video signal that improves the system immunity to environmental noise and limits weight aloft.

Abstract translation: 特别是用于识别光源位置的视频信号处理器，其中使用电荷耦合器件存储的图像传输技术在基板上直接处理来自图像检测器的视频信号流。 视频信号通过在单个半导体芯片上的多个紧密相邻的通道中的电荷耦合器件的阵列进行计时，以使存储在相邻通道区域中的芯片上的信号的模式对应于光源图像 检测器。 视频信号处理在芯片和外部电子设备之间共享，以提供在水平轴和垂直轴上的信号强度（采集），信号背景和信号质心的指示。 信号处理的大部分通过以预定图案分段和互耦合电荷耦合的器件电极而直接在芯片上提供。 结果导致互连量，外部电子设备和视频信号的空间分布的减少，这提高了系统对环境噪声的抵抗力并且在高处限制了重量。

公开(公告)号：US4067037A

公开(公告)日：1978-01-03

申请号：US676019

申请日：1976-04-12

Applicant: Paul Greiff

Inventor： Paul Greiff

IPC: H01L21/033 ,  H01L29/08 ,  H01L29/10 ,  H01L29/732 ,  H01L29/72 ,  H01L27/02 ,  H01L27/12

CPC classification number: H01L29/0804 ,  H01L21/033 ,  H01L29/1004 ,  H01L29/7322 ,  Y10S148/106

Abstract: A transistor structure capable of high frequency operation with low collector currents is obtained by fabricating the transistor using nitride techniques to minimize the emitter area and base width area beyond that obtainable by conventional masking techniques. The emitter is surrounded on three sides by low capacitance dielectric which reduces its emitter-to-collector capacitance and hence improves high frequency performance.

Abstract translation: 通过使用氮化物技术制造晶体管可以获得能够以低集电极电流进行高频操作的晶体管结构，以将发射极面积和基极宽度面积最小化超过通过常规掩蔽技术获得的面积和基极宽度 发射极在三面被低电容电介质环绕，从而降低了发射极对集电极的电容，从而提高了高频性能。

公开(公告)号：US08633373B2

公开(公告)日：2014-01-21

申请号：US12152195

申请日：2008-05-12

Applicant: Paul Greiff ,  Robert DiMatteo ,  Eric Brown ,  Christopher Leitz

Inventor： Paul Greiff ,  Robert DiMatteo ,  Eric Brown ,  Christopher Leitz

IPC: H01L31/058

CPC classification number: H02S10/30

Abstract: An MTPV thermophotovoltaic chip comprising a photovoltaic cell substrate, micron/sub-micron gap-spaced from a juxtaposed heat or infrared radiation-emitting substrate, with a radiation-transparent intermediate window substrate preferably compliantly adhered to the photovoltaic cell substrate and bounding the gap space therewith.

Abstract translation: 一种MTPV热光伏芯片，其包括光伏电池基板，与并置的热或红外辐射发射基板间隔开的微米/亚微米间隙，其具有辐射透明的中间窗口基板，优选地柔顺地粘附到所述光伏电池基板并且限定所述间隙空间 随之而来。

公开(公告)号：US08076569B2

公开(公告)日：2011-12-13

申请号：US12152196

申请日：2008-05-12

Applicant: Paul Greiff ,  Robert DiMatteo ,  Eric Brown ,  Christopher Leitz

Inventor： Paul Greiff ,  Robert DiMatteo ,  Eric Brown ,  Christopher Leitz

IPC: H01L31/00 ,  H01L35/00 ,  H01L37/00 ,  H01L35/34

CPC classification number: H01L31/024 ,  H02S10/30

Abstract: A near-field energy conversion structure and method of assembling the same, utilizing a sub-micrometer “near field” gap between juxtaposed photocell infrared radiation receiver and heat emitter surfaces, wherein compliant membrane structures, preferably fluid-filled, are interposed in the structure.

Abstract translation: 近场能量转换结构及其组装方法，利用并置的光电池红外辐射接收器和发热表面之间的亚微米“近场”间隙，其中优选流体填充的柔性膜结构插入结构中 。

公开(公告)号：US20110209748A1

公开(公告)日：2011-09-01

申请号：US13068207

申请日：2011-05-05

Applicant: Paul Greiff

Inventor： Paul Greiff

IPC: H01L31/02 ,  H01L31/18

CPC classification number: H01L31/024 ,  H02S10/30 ,  Y02E10/50

Abstract: A micron gap thermo-photo-voltaic device including a photovoltaic substrate, a heat source substrate, and a plurality of spacers separating the photovoltaic substrate from the heat source substrate by a submicron gap. Each spacer includes an elongated thin-walled structure disposed in a well formed in the heat source substrate and having a top surface less than a micron above the heat source substrate. Also disclosed are methods of making the spacers.

Abstract translation: 一种微米间隙热电装置，包括光伏基板，热源基板和多个间隔件，其通过亚微米间隙将光伏基板与热源基板隔离开。 每个间隔物包括细长的薄壁结构，其设置在形成于热源基底中的阱中，并具有在热源基底上方小于微米的顶表面。 还公开了制造间隔物的方法。

公开(公告)号：US07977135B2

公开(公告)日：2011-07-12

申请号：US12154120

申请日：2008-05-20

Applicant: Paul Greiff ,  Robert Stephen DiMatteo

Inventor： Paul Greiff ,  Robert Stephen DiMatteo

IPC: H01L21/00

CPC classification number: H02S10/30

Abstract: A method of making a micron gap thermal photovoltaic device includes forming at least one standoff on a photovoltaic substrate, depositing a sacrificial layer on the photovoltaic substrate and about the standoff, forming an emitter attached to the standoff and having a lower planar surface separated from the photovoltaic substrate by the sacrificial layer, and removing the sacrificial layer to form a sub-micron gap between the photovoltaic substrate and the lower planar surface of the emitter.

Abstract translation: 一种制造微米间隙热光伏器件的方法包括在光伏基板上形成至少一个支座，在光伏基板上并围绕支座沉积牺牲层，形成附着在支座上的发射器，并且具有与 通过牺牲层去除光电衬底，以及去除牺牲层以在光伏衬底和发射极的下平面表面之间形成亚微米间隙。

公开(公告)号：US20090277488A1

公开(公告)日：2009-11-12

申请号：US12152196

申请日：2008-05-12

Applicant: Paul Greiff ,  Robert DiMatteo ,  Eric Brown ,  Christopher Leitz

Inventor： Paul Greiff ,  Robert DiMatteo ,  Eric Brown ,  Christopher Leitz

IPC: H01L37/00 ,  H01L35/34

CPC classification number: H01L31/024 ,  H02S10/30

Abstract: A near-field energy conversion structure and method of assembling the same, utilizing a sub-micrometer “near field” gap between juxtaposed photocell infrared radiation receiver and heat emitter surfaces, wherein compliant membrane structures, preferably fluid-filled, are interposed in the structure.

Abstract translation: 近场能量转换结构及其组装方法，利用并置的光电池红外辐射接收器和发热表面之间的亚微米“近场”间隙，其中优选流体填充的柔性膜结构插入结构中 。

公开(公告)号：US06230567B1

公开(公告)日：2001-05-15

申请号：US09366462

申请日：1999-08-03

Applicant: Paul Greiff

Inventor： Paul Greiff

IPC: G01P1500

CPC classification number: G01P1/006 ,  G01P15/08 ,  G01P15/125 ,  G01P2015/0831

Abstract: A low thermal strain flexure support for a micromechanical device includes a substrate; a micromechanical device having a rotational axis and a longitudinal axis; an anchor structure disposed on the substrate proximate the longitudinal axis of the micromechanical device; first and second support members extending outwardly oppositely from the anchor structure; and first and second flexures extending inwardly in the direction of the axis of rotation of the micromechanical device from the first and second support members, respectively, to the micromechanical device for suspending the micromechanical device from the substrate.

Abstract translation: 用于微机械装置的低热应变挠曲支撑件包括基底; 具有旋转轴线和纵向轴线的微机械装置; 锚定结构，其设置在靠近所述微机械装置的纵向轴线的所述基板上; 第一和第二支撑构件从锚结构向外相对地延伸; 以及分别从微机械装置的旋转轴线的方向从第一和第二支撑构件向内延伸到用于将微机械装置从衬底悬挂的微机械装置的第一和第二挠曲。