公开(公告)号：US20060169910A1

公开(公告)日：2006-08-03

申请号：US10539179

申请日：2003-12-12

申请人： Jugen Frosien ,  Pavel Adamec

发明人： Jugen Frosien ,  Pavel Adamec

IPC分类号： H01J1/50

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/145 ,  H01J37/3177

摘要： The invention provides an optical system for a charged particle multi-beam system. The optical system comprises an electrostatic lens component and a magnetic lens component. The components are used to focus a plurality of charged particle beams in a separate opening for each of at least a plurality a charged particle beams traveling through the optical system.

摘要翻译： 本发明提供了一种用于带电粒子多光束系统的光学系统。 光学系统包括静电透镜部件和磁性透镜部件。 这些部件用于将多个带电粒子束聚焦在分开的开口中，用于至少多个穿过光学系统的带电粒子束中的每一个。

公开(公告)号：US20060151713A1

公开(公告)日：2006-07-13

申请号：US11323017

申请日：2005-12-30

申请人： Pavel Adamec

发明人： Pavel Adamec

IPC分类号： H01J1/50

CPC分类号： H01J37/12 ,  H01J37/14 ,  H01J37/28 ,  H01J2237/1205 ,  H01J2237/121 ,  H01J2237/1405 ,  H01J2237/1501 ,  H01J2237/2611 ,  H01J2237/2817

摘要： The invention provides a multiple lens assembly 1 for a charged particle beam device which comprises at least two lens sub units 2, each sub unit having an optical axis 3, wherein at least two of the optical axes of the lens sub units are inclined to each other. Further, the invention provides a charged particle beam device which comprises at least one multiple lens assembly and a method for operating a charged particle beam device.

摘要翻译： 本发明提供了一种用于带电粒子束装置的多透镜组件1，其包括至少两个透镜子单元2，每个子单元具有光轴3，其中透镜子单元的至少两个光轴倾斜于每个 其他。 此外，本发明提供一种带电粒子束装置，其包括至少一个多透镜组件和用于操作带电粒子束装置的方法。

公开(公告)号：US06825476B2

公开(公告)日：2004-11-30

申请号：US10182226

申请日：2002-09-26

申请人： Pavel Adamec

发明人： Pavel Adamec

IPC分类号： H01J37317

CPC分类号： H01J37/153 ,  H01J37/147 ,  H01J2237/04737 ,  H01J2237/04924

摘要： An improved column for a charged particle beam device is constituted by, among other things, deflectors for scanning the beam over the specimen, for aligning the beam with regard to the objective and for compensating aberrations caused by the objective. Thereby, the total number of electrode arrangements and/or coil arrangements that are used for the deflectors and that are independently controllable, is 8 or less.

摘要翻译： 用于带电粒子束装置的改进的列尤其包括用于扫描样品上的束的偏转器，用于使光束相对于物镜对准并且用于补偿由物镜引起的像差。 因此，用于偏转器并且可独立控制的电极布置和/或线圈布置的总数为8个或更小。

公开(公告)号：US08618500B2

公开(公告)日：2013-12-31

申请号：US13543608

申请日：2012-07-06

申请人： Pavel Adamec

发明人： Pavel Adamec

IPC分类号： H01J37/244 ,  H01J37/05 ,  G01R31/305

CPC分类号： H01J37/244 ,  H01J2237/2441 ,  H01J2237/2449 ,  H01J2237/24592

摘要： A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap, a particle optics configured for separating the signal beam in a first portion of the signal beam and in at least one second portion of the signal beam, configured for focusing the first portion of the signal beam, and configured for deflecting and focusing the at least one second portion of the signal beam, wherein the particle optics includes a first electrode and at least one second electrode. Therein, the first electrode is an inner electrode and the at least one second electrode is provided radially outward of the first electrode.

摘要翻译： 描述了用于检测信号光束的二次带电粒子检测装置。 所述装置包括具有至少两个具有主动检测区域的检测元件的检测器装置，其中所述主动检测区域被间隙分开，所述粒子光学器件被配置用于在所述信号束的第一部分中和在至少一个 所述信号光束的第二部分被配置用于聚焦所述信号光束的所述第一部分，并且被配置为偏转和聚焦所述信号光束的所述至少一个第二部分，其中所述粒子光学器件包括第一电极和至少一个第二电极。 其中，第一电极是内电极，并且至少一个第二电极设置在第一电极的径向外侧。

公开(公告)号：US08530837B2

公开(公告)日：2013-09-10

申请号：US13204528

申请日：2011-08-05

申请人： Pavel Adamec

发明人： Pavel Adamec

IPC分类号： H01J37/285 ,  G01N23/00 ,  G21K7/00

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/2449 ,  H01J2237/245

摘要： A charged particle beam device for inspecting a specimen includes a charged particle beam source adapted to generate a primary charged particle beam; an objective lens device adapted to direct the primary charged particle beam onto the specimen; a retarding field device adapted to accelerate secondary charged particles starting from the specimen, a first detector device having a central opening, includes at least two azimuthal detector segments for detecting secondary particles, wherein the objective lens device is adapted such that particles with different starting angles from the specimen exhibit crossovers at substantially the same distance from the specimen between the objective lens and the detector device, and an aperture located between the objective lens and the crossovers, having an opening which is equal to or smaller than the central opening in the detector device.

摘要翻译： 用于检查样本的带电粒子束装置包括适于产生初级带电粒子束的带电粒子束源; 适于将初级带电粒子束引导到样本上的物镜装置; 适于加速从样本开始的次级带电粒子的延迟场设备，具有中心开口的第一检测器装置包括至少两个用于检测次级粒子的方位角检测器段，其中物镜装置适于使得起始角度不同的颗粒 来自该样本的物镜在与物镜和检测器装置之间的样本基本上相同的距离处展开交叉，以及位于物镜和交越器之间的孔，其具有等于或小于检测器中的中心开口的开口 设备。

公开(公告)号：US08101911B2

公开(公告)日：2012-01-24

申请号：US12264848

申请日：2008-11-04

申请人： Pavel Adamec

发明人： Pavel Adamec

IPC分类号： H01J37/20

CPC分类号： H01J37/1471 ,  H01J2237/1501

摘要： A charged particle gun alignment assembly for emitting a charged particle beam along an optical axis of a charged particle beam device is described. The charged particle gun alignment assembly is configured to compensate for misalignment of the charged particle beam and includes a charged particle source having an emitter with a virtual source defining a virtual source plane substantially perpendicular to the optical axis; a condenser lens for imaging the virtual source; a final beam limiting aperture adapted for shaping the charged particle beam; and a double stage deflection assembly positioned between the condenser lens and the final beam limiting aperture, wherein the working distance of the condenser lens is 15 mm or less.

摘要翻译： 描述了一种用于沿带电粒子束装置的光轴发射带电粒子束的带电粒子枪对准组件。 带电粒子枪对准组件被配置为补偿带电粒子束的未对准，并且包括具有发射器的带电粒子源，发射器具有限定基本上垂直于光轴的虚拟源平面的虚拟源; 用于对虚拟源成像的聚光透镜; 用于对带电粒子束进行成形的最终光束限制孔; 以及位于聚光透镜和最终光束限制孔之间的双级偏转组件，其中聚光透镜的工作距离为15mm或更小。

公开(公告)号：US08008629B2

公开(公告)日：2011-08-30

申请号：US11781794

申请日：2007-07-23

申请人： Pavel Adamec ,  Shemesh Dror

发明人： Pavel Adamec ,  Shemesh Dror

IPC分类号： G01N23/00

CPC分类号： H01J37/1472 ,  H01J37/1478 ,  H01J37/28 ,  H01J2237/1506 ,  H01J2237/2811 ,  H01J2237/2814

摘要： A charged particle beam device is provided. The device includes a primary objective lens for focusing a primary charged particle beam, the primary objective lens defining an optical axis, a specimen stage defining a specimen location area, a deflection unit for deflecting the primary charged particle beam between the primary objective lens and the specimen location area, towards a beam path for impingement on the specimen, wherein the deflection unit is movable with respect to the optical axis.

摘要翻译： 提供带电粒子束装置。 该装置包括用于聚焦初级带电粒子束的主物镜，限定光轴的主物镜，限定样本位置区域的样本台，用于使主要物镜和第一物镜之间的初级带电粒子束偏转的偏转单元 样本定位区域，朝向用于冲击样本的光束路径，其中偏转单元可相对于光轴移动。

公开(公告)号：US20070018562A1

公开(公告)日：2007-01-25

申请号：US11489979

申请日：2006-07-20

申请人： Pavel Adamec ,  Fang Zhou

发明人： Pavel Adamec ,  Fang Zhou

IPC分类号： H01J1/02

CPC分类号： H01J37/06 ,  H01J37/02 ,  H01J37/073 ,  H01J49/48 ,  H01J2237/06316

摘要： A field emitter arrangement and a method of cleaning an emitting surface of a field emitter are provided. The field emitter arrangement may include a field emitter tip having an emitting surface, wherein said field emitter tip is adapted to generate a primary beam of charged particles, and at least one electron source adapted to illuminate the emitting surface of the field emitter tip. The method of cleaning the emitting surface may include providing the field emitter having the emitting surface and at least one electron source adapted to illuminate the emitting surface and illuminating the emitting surface of the field emitter with a cleansing electron beam generated by the at least one electron source.

摘要翻译： 提供场发射器布置和清洁场发射器的发射表面的方法。 场发射器配置可以包括具有发射表面的场发射器尖端，其中所述场发射极尖端适于产生带电粒子的主光束，以及适于照射场发射器尖端的发射表面的至少一个电子源。 清洁发射表面的方法可以包括提供具有发射表面的场致发射体和至少一个电子源，其适于照射发射表面并用由至少一个电子产生的清洁电子束照射场发射器的发射表面 资源。

公开(公告)号：US20060054814A1

公开(公告)日：2006-03-16

申请号：US10502104

申请日：2003-10-22

申请人： Dror Shemesh ,  Pavel Adamec

发明人： Dror Shemesh ,  Pavel Adamec

IPC分类号： G21K7/00

CPC分类号： H01J37/244 ,  G01N23/2251 ,  H01J37/28 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2449 ,  H01J2237/24495 ,  H01J2237/281 ,  H01J2237/2815 ,  H01J2237/2817

摘要： A system and method for multi detector detection of electrons, the method includes the steps of directing a primary electron beam, through a column, to interact with an inspected object, directing, by introducing a substantial electrostatic field, electrons reflected or scattered from the inspected objects towards multiple interior detectors, whereas at least some of the directed electrons are reflected or scattered at small angle in relation to the inspected object; and receiving detection signals from at least one interior detector.

摘要翻译： 一种用于电子的多检测器检测的系统和方法，该方法包括以下步骤：通过列引导一次电子束与检测对象相互作用，通过引入实质的静电场来引导从检查的反射或散射的电子 物体朝向多个内部检测器，而至少一些定向电子相对于被检查物体以小角度反射或散射; 以及从至少一个内部检测器接收检测信号。

公开(公告)号：US20060049348A1

公开(公告)日：2006-03-09

申请号：US10937802

申请日：2004-09-08

申请人： Igor Petrov ,  Pavel Adamec ,  Zvika Rosenberg

发明人： Igor Petrov ,  Pavel Adamec ,  Zvika Rosenberg

IPC分类号： G01N23/225 ,  H01J37/28

CPC分类号： H01J37/28 ,  G01N23/2204 ,  G01N23/2251 ,  H01J2237/04756 ,  H01J2237/24578 ,  H01J2237/24592 ,  H01J2237/2817

摘要： A method and system are presented for controlling inspection of a sample with a charged particle beam. A certain given voltage is supplied to an anode of the column to provide a required accelerating voltage for a charged particle beam. A certain negative voltage is supplied to the sample selected so as to provide a desirably high effective voltage of the column at said given voltage of the anode. A certain voltage is supplied an electrode of a lens arrangement located closer to the sample, this voltage being selected to satisfy one of the following conditions: the electrode voltage is either equal to or slightly lower than that of the sample; and the electrode voltage is significantly higher than that of the sample.