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    Scanning electron microscope having multiple detectors and a method for multiple detector based imaging
    1.
    发明授权
    Scanning electron microscope having multiple detectors and a method for multiple detector based imaging 有权
    具有多个检测器的扫描电子显微镜和用于多检测器成像的方法

    公开(公告)号：US07847267B2

    公开(公告)日：2010-12-07

    申请号：US10502104

    申请日：2003-10-22

    Applicant: Dror Shemesh ,  Pavel Adamec

    Inventor： Dror Shemesh ,  Pavel Adamec

    IPC: H01J37/244

    CPC classification number: H01J37/244 ,  G01N23/2251 ,  H01J37/28 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2449 ,  H01J2237/24495 ,  H01J2237/281 ,  H01J2237/2815 ,  H01J2237/2817

    Abstract: A system and method for multi detector detection of electrons, the method includes the steps of directing a primary electron beam, through a column, to interact with an inspected object, directing, by introducing a substantial electrostatic field, electrons reflected or scattered from the inspected objects towards multiple interior detectors, whereas at least some of the directed electrons are reflected or scattered at small angle in relation to the inspected object; and receiving detection signals from at least one interior detector.

    Abstract translation: 一种用于电子的多检测器检测的系统和方法，该方法包括以下步骤：通过列引导一次电子束与检测对象相互作用，通过引入实质的静电场来引导从检查的反射或散射的电子 物体朝向多个内部检测器，而至少一些定向电子相对于被检查物体以小角度反射或散射; 以及从至少一个内部检测器接收检测信号。

    CHARGED PARTICLE DETECTOR ASSEMBLY, CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR GENERATING AN IMAGE
    2.
    发明申请
    CHARGED PARTICLE DETECTOR ASSEMBLY, CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR GENERATING AN IMAGE 有权
    充电颗粒检测器组件，充电颗粒光束装置和用于产生图像的方法

    公开(公告)号：US20080191134A1

    公开(公告)日：2008-08-14

    申请号：US11923421

    申请日：2007-10-24

    Applicant: Gilad Almogy ,  Dror Shemesh ,  Pavel Adamec

    Inventor： Gilad Almogy ,  Dror Shemesh ,  Pavel Adamec

    IPC: G01N23/00 ,  G01T1/00

    CPC classification number: H01J37/244 ,  H01J2237/2443 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/24465 ,  H01J2237/2802 ,  H01J2237/2804

    Abstract: A charged particle detector assembly comprises a particle detector, which has at least one particle sensitive region for detecting at least a portion of the spatial distribution of charged particles and for generating a two-dimensional optical signal which correlates to the detected spatial distribution. Further, an image conduit has an input coupled to the particle sensitive region of the particle detector for transmitting the two-dimensional optical signal to at least one optical detector. Further, a selecting means is adapted for selecting at least a portion of the two-dimensional optical signal.

    Abstract translation: 带电粒子检测器组件包括粒子检测器，该粒子检测器具有至少一个用于检测带电粒子的空间分布的至少一部分的粒子敏感区域，并用于产生与检测到的空间分布相关的二维光信号。 此外，图像导管具有耦合到粒子检测器的粒子敏感区域的输入端，用于将二维光信号传输到至少一个光学检测器。 此外，选择装置适于选择二维光信号的至少一部分。

    Charged particle detector assembly, charged particle beam apparatus and method for generating an image
    3.
    发明授权
    Charged particle detector assembly, charged particle beam apparatus and method for generating an image 有权
    带电粒子检测器组件，带电粒子束装置和产生图像的方法

    公开(公告)号：US07842930B2

    公开(公告)日：2010-11-30

    申请号：US11923421

    申请日：2007-10-24

    Applicant: Gilad Almogy ,  Dror Shemesh ,  Pavel Adamec

    Inventor： Gilad Almogy ,  Dror Shemesh ,  Pavel Adamec

    IPC: H01J37/28

    CPC classification number: H01J37/244 ,  H01J2237/2443 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/24465 ,  H01J2237/2802 ,  H01J2237/2804

    Abstract: A charged particle detector assembly comprises a particle detector, which has at least one particle sensitive region for detecting at least a portion of the spatial distribution of charged particles and for generating a two-dimensional optical signal which correlates to the detected spatial distribution. Further, an image conduit has an input coupled to the particle sensitive region of the particle detector for transmitting the two-dimensional optical signal to at least one optical detector. Further, a selecting means is adapted for selecting at least a portion of the two-dimensional optical signal.

    Abstract translation: 带电粒子检测器组件包括粒子检测器，该粒子检测器具有至少一个用于检测带电粒子的空间分布的至少一部分的粒子敏感区域，并用于产生与检测到的空间分布相关的二维光信号。 此外，图像导管具有耦合到粒子检测器的粒子敏感区域的输入端，用于将二维光信号传输到至少一个光学检测器。 此外，选择装置适于选择二维光信号的至少一部分。

    Scanning electron microscope having multiple detectors and a method for multiple detector based imaging
    4.
    发明申请
    Scanning electron microscope having multiple detectors and a method for multiple detector based imaging 有权
    具有多个检测器的扫描电子显微镜和用于多检测器成像的方法

    公开(公告)号：US20060054814A1

    公开(公告)日：2006-03-16

    申请号：US10502104

    申请日：2003-10-22

    Applicant: Dror Shemesh ,  Pavel Adamec

    Inventor： Dror Shemesh ,  Pavel Adamec

    IPC: G21K7/00

    CPC classification number: H01J37/244 ,  G01N23/2251 ,  H01J37/28 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2449 ,  H01J2237/24495 ,  H01J2237/281 ,  H01J2237/2815 ,  H01J2237/2817

    Abstract: A system and method for multi detector detection of electrons, the method includes the steps of directing a primary electron beam, through a column, to interact with an inspected object, directing, by introducing a substantial electrostatic field, electrons reflected or scattered from the inspected objects towards multiple interior detectors, whereas at least some of the directed electrons are reflected or scattered at small angle in relation to the inspected object; and receiving detection signals from at least one interior detector.

    Abstract translation: 一种用于电子的多检测器检测的系统和方法，该方法包括以下步骤：通过列引导一次电子束与检测对象相互作用，通过引入实质的静电场来引导从检查的反射或散射的电子 物体朝向多个内部检测器，而至少一些定向电子相对于被检查物体以小角度反射或散射; 以及从至少一个内部检测器接收检测信号。

    Method and system for providing a compensated auger spectrum
    5.
    发明授权
    Method and system for providing a compensated auger spectrum 有权
    用于提供经补偿的螺旋钻频谱的方法和系统

    公开(公告)号：US07912657B2

    公开(公告)日：2011-03-22

    申请号：US11877125

    申请日：2007-10-23

    Applicant: Dror Shemesh ,  Yuri Shirman

    Inventor： Dror Shemesh ,  Yuri Shirman

    IPC: G01B5/28 ,  G01K1/08

    CPC classification number: G01N23/2276

    Abstract: A system for providing a compensated Auger spectrum, the system includes: a processor, adapted to generate a compensated Auger spectrum in response to a non-compensated Auger spectrum and in response to an electric potential related parameter, and an interface to an electron detector that is adapted to detect electrons emitted from the first area, wherein the interface is connected to the processor, and wherein the electric potential related parameter reflects a state of a first area of an object that was illuminated by a charged particle beam during the generation of the non-compensated Auger spectrum.

    Abstract translation: 一种用于提供经补偿的俄歇频谱的系统，该系统包括：处理器，适于响应于未补偿的俄歇频谱和响应于电位相关参数产生经补偿的俄歇频谱，以及与电子检测器的接口， 适于检测从所述第一区域发射的电子，其中所述界面连接到所述处理器，并且其中所述电位相关参数反映在所述第一区域生成期间被带电粒子束照射的物体的第一区域的状态 非补偿俄歇谱。

    Methods and systems for process monitoring using x-ray emission
    8.
    发明申请
    Methods and systems for process monitoring using x-ray emission 有权
    使用X射线发射的过程监测的方法和系统

    公开(公告)号：US20060049349A1

    公开(公告)日：2006-03-09

    申请号：US10530159

    申请日：2003-10-08

    Applicant: Dror Shemesh

    Inventor： Dror Shemesh

    IPC: G21K7/00 ,  G01N23/00

    CPC classification number: G01N23/2252

    Abstract: Systems and methods for process monitoring based upon X-ray emission induced by a beam of charged particles such as electrons or ions. Concept as expressed herein.

    Abstract translation: 基于由诸如电子或离子的带电粒子束引起的X射线发射的过程监测的系统和方法。 概念如本文所述。

    METHOD AND SYSTEM FOR ENHANCING RESOLUTION OF A SCANNING ELECTRON MICROSCOPE
    9.
    发明申请
    METHOD AND SYSTEM FOR ENHANCING RESOLUTION OF A SCANNING ELECTRON MICROSCOPE 审中-公开
    用于增强扫描电子显微镜分辨率的方法和系统

    公开(公告)号：US20120241605A1

    公开(公告)日：2012-09-27

    申请号：US13460470

    申请日：2012-04-30

    Applicant: Dror Shemesh

    Inventor： Dror Shemesh

    IPC: H01J37/26

    CPC classification number: H01J37/28 ,  H01J2237/057 ,  H01J2237/2814

    Abstract: A method for improving the resolution of a scanning electron microscope, the method including: defining an energy band in response to an expected penetration depth of secondary electrons in an object; illuminating the object with a primary electron beam; and generating images from electrons that arrive at a spectrometer having an energy within the energy band. A scanning electron microscope that includes: a stage for supporting an object; a controller, adapted to receive or define an energy band an energy band in response to an expected penetration depth of secondary electrons in an object; illumination optics adapted to illuminate the object with a primary electron beam; a spectrometer; controlled by the controller so as to selectively reject electrons in response to the defined energy band; and a processor that is adapted to generate images from detection signals provided by the spectrometer.

    Abstract translation: 一种用于提高扫描电子显微镜的分辨率的方法，所述方法包括：响应于对象中二次电子的预期穿透深度来定义能带; 用一次电子束照射物体; 以及从能量到达具有能带内的光谱仪的电子产生图像。 一种扫描电子显微镜，包括：用于支撑物体的台; 控制器，适于响应于物体中二次电子的预期穿透深度而接收或限定能带的能带; 适于用一次电子束照射物体的照明光学器件; 光谱仪 由控制器控制，以响应于限定的能带选择性地拒绝电子; 以及适于根据由该光谱仪提供的检测信号产生图像的处理器。

    Methods and systems for process monitoring using x-ray emission
    10.
    发明授权
    Methods and systems for process monitoring using x-ray emission 有权
    使用X射线发射的过程监测的方法和系统

    公开(公告)号：US07312446B2

    公开(公告)日：2007-12-25

    申请号：US10530159

    申请日：2003-10-08

    Applicant: Dror Shemesh

    Inventor： Dror Shemesh

    IPC: G01N23/00

    CPC classification number: G01N23/2252

    Abstract: Systems and methods for process monitoring based upon X-ray emission induced by a beam of charged particles such as electrons or ions. Concept as expressed herein.

    Abstract translation: 基于由诸如电子或离子的带电粒子束引起的X射线发射的过程监测的系统和方法。 概念如本文所述。

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