公开(公告)号：US07847267B2

公开(公告)日：2010-12-07

申请号：US10502104

申请日：2003-10-22

申请人： Dror Shemesh ,  Pavel Adamec

发明人： Dror Shemesh ,  Pavel Adamec

IPC分类号： H01J37/244

CPC分类号： H01J37/244 ,  G01N23/2251 ,  H01J37/28 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2449 ,  H01J2237/24495 ,  H01J2237/281 ,  H01J2237/2815 ,  H01J2237/2817

摘要： A system and method for multi detector detection of electrons, the method includes the steps of directing a primary electron beam, through a column, to interact with an inspected object, directing, by introducing a substantial electrostatic field, electrons reflected or scattered from the inspected objects towards multiple interior detectors, whereas at least some of the directed electrons are reflected or scattered at small angle in relation to the inspected object; and receiving detection signals from at least one interior detector.

摘要翻译： 一种用于电子的多检测器检测的系统和方法，该方法包括以下步骤：通过列引导一次电子束与检测对象相互作用，通过引入实质的静电场来引导从检查的反射或散射的电子 物体朝向多个内部检测器，而至少一些定向电子相对于被检查物体以小角度反射或散射; 以及从至少一个内部检测器接收检测信号。

公开(公告)号：US20080191134A1

公开(公告)日：2008-08-14

申请号：US11923421

申请日：2007-10-24

申请人： Gilad Almogy ,  Dror Shemesh ,  Pavel Adamec

发明人： Gilad Almogy ,  Dror Shemesh ,  Pavel Adamec

IPC分类号： G01N23/00 ,  G01T1/00

CPC分类号： H01J37/244 ,  H01J2237/2443 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/24465 ,  H01J2237/2802 ,  H01J2237/2804

摘要： A charged particle detector assembly comprises a particle detector, which has at least one particle sensitive region for detecting at least a portion of the spatial distribution of charged particles and for generating a two-dimensional optical signal which correlates to the detected spatial distribution. Further, an image conduit has an input coupled to the particle sensitive region of the particle detector for transmitting the two-dimensional optical signal to at least one optical detector. Further, a selecting means is adapted for selecting at least a portion of the two-dimensional optical signal.

摘要翻译： 带电粒子检测器组件包括粒子检测器，该粒子检测器具有至少一个用于检测带电粒子的空间分布的至少一部分的粒子敏感区域，并用于产生与检测到的空间分布相关的二维光信号。 此外，图像导管具有耦合到粒子检测器的粒子敏感区域的输入端，用于将二维光信号传输到至少一个光学检测器。 此外，选择装置适于选择二维光信号的至少一部分。

公开(公告)号：US07842930B2

公开(公告)日：2010-11-30

申请号：US11923421

申请日：2007-10-24

申请人： Gilad Almogy ,  Dror Shemesh ,  Pavel Adamec

发明人： Gilad Almogy ,  Dror Shemesh ,  Pavel Adamec

IPC分类号： H01J37/28

CPC分类号： H01J37/244 ,  H01J2237/2443 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/24465 ,  H01J2237/2802 ,  H01J2237/2804

摘要： A charged particle detector assembly comprises a particle detector, which has at least one particle sensitive region for detecting at least a portion of the spatial distribution of charged particles and for generating a two-dimensional optical signal which correlates to the detected spatial distribution. Further, an image conduit has an input coupled to the particle sensitive region of the particle detector for transmitting the two-dimensional optical signal to at least one optical detector. Further, a selecting means is adapted for selecting at least a portion of the two-dimensional optical signal.

摘要翻译： 带电粒子检测器组件包括粒子检测器，该粒子检测器具有至少一个用于检测带电粒子的空间分布的至少一部分的粒子敏感区域，并用于产生与检测到的空间分布相关的二维光信号。 此外，图像导管具有耦合到粒子检测器的粒子敏感区域的输入端，用于将二维光信号传输到至少一个光学检测器。 此外，选择装置适于选择二维光信号的至少一部分。

公开(公告)号：US20060054814A1

公开(公告)日：2006-03-16

申请号：US10502104

申请日：2003-10-22

申请人： Dror Shemesh ,  Pavel Adamec

发明人： Dror Shemesh ,  Pavel Adamec

IPC分类号： G21K7/00

CPC分类号： H01J37/244 ,  G01N23/2251 ,  H01J37/28 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2449 ,  H01J2237/24495 ,  H01J2237/281 ,  H01J2237/2815 ,  H01J2237/2817

摘要： A system and method for multi detector detection of electrons, the method includes the steps of directing a primary electron beam, through a column, to interact with an inspected object, directing, by introducing a substantial electrostatic field, electrons reflected or scattered from the inspected objects towards multiple interior detectors, whereas at least some of the directed electrons are reflected or scattered at small angle in relation to the inspected object; and receiving detection signals from at least one interior detector.

摘要翻译： 一种用于电子的多检测器检测的系统和方法，该方法包括以下步骤：通过列引导一次电子束与检测对象相互作用，通过引入实质的静电场来引导从检查的反射或散射的电子 物体朝向多个内部检测器，而至少一些定向电子相对于被检查物体以小角度反射或散射; 以及从至少一个内部检测器接收检测信号。

公开(公告)号：US20120241605A1

公开(公告)日：2012-09-27

申请号：US13460470

申请日：2012-04-30

申请人： Dror Shemesh

发明人： Dror Shemesh

IPC分类号： H01J37/26

CPC分类号： H01J37/28 ,  H01J2237/057 ,  H01J2237/2814

摘要： A method for improving the resolution of a scanning electron microscope, the method including: defining an energy band in response to an expected penetration depth of secondary electrons in an object; illuminating the object with a primary electron beam; and generating images from electrons that arrive at a spectrometer having an energy within the energy band. A scanning electron microscope that includes: a stage for supporting an object; a controller, adapted to receive or define an energy band an energy band in response to an expected penetration depth of secondary electrons in an object; illumination optics adapted to illuminate the object with a primary electron beam; a spectrometer; controlled by the controller so as to selectively reject electrons in response to the defined energy band; and a processor that is adapted to generate images from detection signals provided by the spectrometer.

摘要翻译： 一种用于提高扫描电子显微镜的分辨率的方法，所述方法包括：响应于对象中二次电子的预期穿透深度来定义能带; 用一次电子束照射物体; 以及从能量到达具有能带内的光谱仪的电子产生图像。 一种扫描电子显微镜，包括：用于支撑物体的台; 控制器，适于响应于物体中二次电子的预期穿透深度而接收或限定能带的能带; 适于用一次电子束照射物体的照明光学器件; 光谱仪 由控制器控制，以响应于限定的能带选择性地拒绝电子; 以及适于根据由该光谱仪提供的检测信号产生图像的处理器。

公开(公告)号：US07312446B2

公开(公告)日：2007-12-25

申请号：US10530159

申请日：2003-10-08

申请人： Dror Shemesh

发明人： Dror Shemesh

IPC分类号： G01N23/00

CPC分类号： G01N23/2252

摘要： Systems and methods for process monitoring based upon X-ray emission induced by a beam of charged particles such as electrons or ions. Concept as expressed herein.

摘要翻译： 基于由诸如电子或离子的带电粒子束引起的X射线发射的过程监测的系统和方法。 概念如本文所述。

公开(公告)号：US07233008B1

公开(公告)日：2007-06-19

申请号：US11080036

申请日：2005-03-14

申请人： Igor Petrov ,  Dror Shemesh

发明人： Igor Petrov ,  Dror Shemesh

IPC分类号： G03B27/54 ,  G03B27/42

CPC分类号： G03B27/42 ,  G03B27/54

摘要： A inspection system includes: a lens arrangement adapted to generate a substantially symmetrical electrostatic field about an optical axis and to direct a primary electron beam towards an object that is oriented in relation to the optical axis at a non-normal angle; and at least on additional electrode, positioned outside the lens arrangement such as to increase symmetry of an electromagnetic field in the vicinity of an interaction point between the primary electron beam and the object. A method for inspecting an object includes: passing a primary electron beam, along an optical axis, through a substantially symmetrical electrostatic field defined within an electron lens arrangement; and propagating the primary electron beam from the lens arrangement towards an interaction point with an object that is oriented in relation to the optical axis at a non-normal angle, while maintaining, by at least one additional electrode positioned outside the lens arrangement, a substantially symmetrical electrical field in a vicinity of the interaction point.

摘要翻译： 检查系统包括：透镜装置，其适于产生围绕光轴的基本上对称的静电场，并且将一次电子束引向朝向相对于光轴以非正常角度取向的物体; 并且至少在位于透镜装置外部的另外的电极上，以增加电子束在一次电子束和物体之间的相互作用点附近的对称性。 用于检查物体的方法包括：使沿着光轴的一次电子束通过限定在电子透镜装置内的基本上对称的静电场; 并且将来自透镜装置的一次电子束传播到与以非正常角度相对于光轴定向的物体的相互作用点，同时通过位于透镜装置外部的至少一个附加电极基本上 在相互作用点附近的对称电场。

公开(公告)号：US06900065B2

公开(公告)日：2005-05-31

申请号：US10327398

申请日：2002-12-19

申请人： Vicky Rashkovan ,  Dror Shemesh

发明人： Vicky Rashkovan ,  Dror Shemesh

IPC分类号： G01R31/311 ,  H01L23/544 ,  H01L21/66 ,  G01R31/08 ,  G01R31/26

CPC分类号： H01L22/34 ,  G01R31/311

摘要： An apparatus and a method for electrically testing a semiconductor wafer, the method including: (i) depositing electrical charges at certain points of a test pattern; (ii) scanning at least a portion of the test pattern such as to enhance charge differences resulting from defects; and (iii) collecting charged particles emitted from the at least scanned portion as a result of the scanning, thus providing an indication about an electrical state of the respective test structure.

摘要翻译： 一种用于电测试半导体晶片的装置和方法，所述方法包括：（i）在测试图案的某些点放置电荷; （ii）扫描至少一部分测试图案，以增强由缺陷导致的电荷差异; 和（iii）作为扫描的结果收集从至少扫描的部分发射的带电粒子，从而提供关于各个测试结构的电状态的指示。

公开(公告)号：US06670610B2

公开(公告)日：2003-12-30

申请号：US10005190

申请日：2001-11-26

申请人： Dror Shemesh ,  Ariel Ben-Porath ,  Dubi Shachal ,  Alexey Stepanov

发明人： Dror Shemesh ,  Ariel Ben-Porath ,  Dubi Shachal ,  Alexey Stepanov

IPC分类号： H01J3726

CPC分类号： H01J37/3056 ,  H01J37/304 ,  H01J2237/28

摘要： A system and method for directing the object, such as a semiconductor die. The system includes a first images such as a scanning electron microscope, a stage for moving the object and a second imager and miller such as a focused ion beam generator. The object is images to locate a desired location in which the object is to be milled and a landmark that is utilized for directing the miller. The system can include additional steps of milling, analyzing and movement of the object.

公开(公告)号：US07683317B2

公开(公告)日：2010-03-23

申请号：US11532465

申请日：2006-09-15

申请人： Dror Shemesh

发明人： Dror Shemesh

IPC分类号： H01J40/00 ,  H01J47/00

CPC分类号： H01J37/28 ,  H01J2237/057

摘要： A method for detecting hidden defects and patterns, the method includes: receiving an object that comprises an opaque layer positioned above an intermediate layer; defining an energy band in response to at least one characteristic of the opaque layer and at least one characteristic of a scanning electron microscope; illuminating the object with a primary electron beam; and generating images from electrons that arrive to a spectrometer having an energy within the energy band. A scanning electron microscope that includes a stage for supporting an object that comprises an opaque layer positioned above an intermediate layer; a controller, adapted to receive or define an energy band in response to at least one characteristic of the opaque layer and at least one characteristic of a scanning electron microscope; illumination optics adapted to illuminate the object with a primary electron beam; an electron spectrometer, controlled by the controller such as to selectively reject electrons in response to the defined energy band; and a processor, coupled to the spectrometer, adapted to generate images from detection signals provided by the spectrometer.

摘要翻译： 一种用于检测隐藏的缺陷和图案的方法，所述方法包括：接收包含位于中间层上方的不透明层的对象; 响应于不透明层的至少一个特性和扫描电子显微镜的至少一个特征限定能带; 用一次电子束照射物体; 以及从到达具有能带内的能量的光谱仪的电子产生图像。 一种扫描电子显微镜，其包括用于支撑物体的台，所述台包括位于中间层上方的不透明层; 控制器，适于响应于所述不透明层的至少一个特性和扫描电子显微镜的至少一个特性接收或限定能带; 适于用一次电子束照射物体的照明光学器件; 由控制器控制的电子光谱仪，以便响应于限定的能带选择性地拒绝电子; 以及耦合到所述光谱仪的处理器，适于从由所述光谱仪提供的检测信号产生图像。