摘要:
In order to distinguish a duplicated record carrier from an original record carrier, a pattern is included in a ROM type record carrier. The pattern is oriented perpendicular to the reading direction of the record carrier. During illegal duplication the spatial relationship is disturb which can be easily detected. The patterns can be read out simultaneously by the same single read-out spot by including both patterns within the diameter of the optical spot, thus guaranteeing that the read-out patterns are actually still spatially close together.
摘要:
The invention relates to a carrier (11) and an apparatus (100) for optical detection in a sample (1) in a sample chamber (2). The carrier (11) comprises an optical structure (50) for refracting an input light beam (L1) into the adjacent sample chamber (2) and for collecting an output light beam (L2) from light that originates in the sample chamber (2) from the input light beam. Preferably, the optical structure (50) comprises grooves in the surface (12) of the carrier (11) in which the input light beam is transmitted over a short distance through a sample. The optical structure (50) can also be used for a wetting detection.
摘要:
A device for directing radiation to a layer (1) is described. The device includes a first optical element (L1) for focusing a first radiation beam (B1) originating from a first radiation source (S1) onto said layer, a second optical element (L2) for focusing a second radiation beam (B2) originating from a second radiation source (S2) onto said layer. The wavelengths of the radiation from said first and said second radiation source are different from each other. The first and second optical element are jointly movable with respect to said radiation sources, wherein the focal points of the two radiation beams at least substantially coincide with various movements of the first optical element and the second optical element with respect to the radiation sources. The second optical element (L2) has an aperture (A2) which allows optically undisturbed passage of the first radiation beam (B1). In this way a compact and light configuration of L1 and L2 is achieved as well as an improved radiation beam quality. Further an apparatus comprising such a device and a method using such an apparatus are disclosed.
摘要:
An imprinting method is disclosed which involves irradiating a photo-curable imprintable medium in a flowable state on a substrate with radiation to initiate curing of the medium, after the irradiating, contacting the medium with a template to form an imprint in the medium, allowing the medium to substantially cure such that the medium is in a substantially non-flowable state while the medium is contacted by the template, and separating the template from the medium while the medium is in the substantially non-flowable state.
摘要:
An off-axis alignment system in a lithographic projection apparatus uses broadband radiation to illuminate a phase grating on the wafer. The broadband radiation source may include fluorescent materials, e.g. Yag:Ce or ND:Yag crystals illuminated by excitation light.
摘要:
For irradiating a layer a radiation beam is directed and focussed to a spot on the layer, relative movement of the layer relative to the lens is caused so that, successively, different portions of the layer are irradiated and an interspace between a surface of the lens nearest to the layer is maintained. Furthermore, at least a portion of the interspace through which the radiation irradiates the spot on the layer is maintained filled with a liquid, the liquid being supplied via a supply conduit. At least a portion of the liquid fills up a recess through which the radiation irradiates the spot.
摘要:
The invention relates to an optical sensor device (100) that comprises a plurality of objectives (152) for generating primary images of corresponding sensor regions (111). The primary images are then mapped with intermediate optics (153) onto a detector plane (154), particularly onto the sensitive plane of an image sensor.
摘要:
The invention relates to an optical sensor device (100) that comprises a plurality of objectives (152) for generating primary images of corresponding sensor regions (111). The primary images are then mapped with intermediate optics (153) onto a detector plane (154), particularly onto the sensitive plane of an image sensor.
摘要:
The invention relates to a method and an optical device (150) in which a light beam (L) is coupled into a transparent component, for example into a foil (110). The incoupling is achieved by astigmatically focusing a light beam (L) onto an oblong entrance window (W) of the foil (110), wherein a focal line (Fx) of the light beam (L) is oriented along the axis (x) of extension of the entrance window (W). Preferably, a second focal line (Fy) of the light beam (L) is disposed inside the transparent component (110) below a region of interest (112).
摘要:
A filtering apparatus for filtering a fluid includes a filter element for filtering the fluid and an adhesive capillary structure for generating capillary forces. The adhesive capillary structure is attached to the filter element by using an adhesive property of the adhesive capillary structure. The adhesive capillary structure is preferentially made of a double-sided tape, which is adhesive on two sides. The filtering apparatus further includes a filtering location where the filter element is located, and a detection location where a property of the fluid is detectable. The capillary structure is formed such that the filtered fluid is guided from the filtering location to the detection location.