公开(公告)号：US12195327B2

公开(公告)日：2025-01-14

申请号：US17497538

申请日：2021-10-08

Applicant: STMicroelectronics S.r.l.

Inventor： Domenico Giusti ,  Marco Ferrera ,  Fabio Quaglia

IPC: B81B7/00 ,  B81B3/00 ,  B81C1/00 ,  H10N30/20 ,  H10N30/30

Abstract: A PMUT device includes a membrane element adapted to generate and receive ultrasonic waves by oscillating, about an equilibrium position, at a corresponding resonance frequency. A piezoelectric element is located over the membrane element along a first direction and configured to cause the membrane element to oscillate when electric signals are applied to the piezoelectric element, and generate electric signals in response to oscillations of the membrane element. A damper is configured to reduce free oscillations of the membrane element, and the damper includes a damper cavity surrounding the membrane element, and a polymeric member having at least a portion over the damper cavity along the first direction.

公开(公告)号：US11981558B2

公开(公告)日：2024-05-14

申请号：US17240782

申请日：2021-04-26

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Domenico Giusti ,  Marco Ferrera ,  Carlo Luigi Prelini

IPC: H04R7/04 ,  B81B3/00 ,  B81C1/00 ,  F16K31/00 ,  H04R1/02 ,  H04R3/00 ,  H04R7/18 ,  H04R19/02

CPC classification number: B81B3/007 ,  B81C1/00658 ,  F16K31/005 ,  H04R1/02 ,  H04R3/00 ,  H04R7/04 ,  H04R7/18 ,  H04R19/02 ,  B81B2201/0257 ,  B81B2201/054 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81B2203/0338 ,  B81B2203/04 ,  B81B2207/03 ,  H04R2201/003

Abstract: The MEMS actuator is formed by a body, which surrounds a cavity and by a deformable structure, which is suspended on the cavity and is formed by a movable portion and by a plurality of deformable elements. The deformable elements are arranged consecutively to each other, connect the movable portion to the body and are each subject to a deformation. The MEMS actuator further comprises at least one plurality of actuation structures, which are supported by the deformable elements and are configured to cause a translation of the movable portion greater than the deformation of each deformable element. The actuation structures each have a respective first piezoelectric region.

公开(公告)号：US20180052066A1

公开(公告)日：2018-02-22

申请号：US15783894

申请日：2017-10-13

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alberto Pagani ,  Bruno Murari ,  Marco Ferrera ,  Domenico Giusti ,  Daniele Caltabiano

IPC: G01L9/00 ,  G01L15/00

Abstract: A pressure sensor with double measuring scale includes: a flexible body designed to undergo deflection as a function of a the pressure; piezoresistive transducers for detecting the deflection; a first focusing region designed to concentrate, during a first operating condition, a first value of the pressure in a first portion of the flexible body so as to generate a deflection of the first portion of the flexible body; and a second focusing region designed to concentrate, during a second operating condition, a second value of said pressure in a second portion of the flexible body so as to generate a deflection of the second portion of the flexible body. The piezoresistive transducers correlate the deflection of the first portion of the flexible body to the first pressure value and the deflection of the second portion of the flexible body to the second pressure value.

公开(公告)号：US11600765B2

公开(公告)日：2023-03-07

申请号：US17137220

申请日：2020-12-29

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Domenico Giusti ,  Carlo Luigi Prelini ,  Marco Ferrera ,  Carla Maria Lazzari ,  Luca Seghizzi ,  Nicolo′ Boni ,  Roberto Carminati ,  Fabio Quaglia

IPC: H01L41/09 ,  B01L3/00 ,  F16K99/00 ,  G05D7/06 ,  H01L41/22 ,  H01L41/332 ,  H01L41/08 ,  B81B7/00

Abstract: The MEMS actuator is formed by a substrate, which surrounds a cavity; by a deformable structure suspended on the cavity; by an actuation structure formed by a first piezoelectric region of a first piezoelectric material, supported by the deformable structure and configured to cause a deformation of the deformable structure; and by a detection structure formed by a second piezoelectric region of a second piezoelectric material, supported by the deformable structure and configured to detect the deformation of the deformable structure.

公开(公告)号：US09921405B2

公开(公告)日：2018-03-20

申请号：US15401681

申请日：2017-01-09

Applicant: STMicroelectronics S.r.l. ,  STMicroelectronics International N.V.

Inventor： Benedetto Vigna ,  Marco Ferrera ,  Sonia Costantini ,  Marco Salina

IPC: G02B26/08 ,  H04N9/31 ,  H02N1/00 ,  B81B3/00 ,  B81C1/00 ,  G02B27/10

CPC classification number: G02B26/0841 ,  B81B3/0045 ,  B81B2201/042 ,  B81B2203/0154 ,  B81C1/00198 ,  G02B27/1006 ,  H02N1/002 ,  H02N1/006 ,  H04N9/3129 ,  H04N9/3135 ,  Y10T29/49002

Abstract: An electrostatically actuated oscillating structure includes a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion. Torsional elastic elements mounted to the first and second rotor subregions define an axis of rotation. A mobile element is coupled to the torsional elastic elements. The stator subregions are electrostatically coupled to respective regions of actuation on the mobile element. The stator subregions exhibit an element of structural asymmetry such that the electrostatic coupling surface between the first stator subregion and the first actuation region differs from the electrostatic coupling surface between the second stator subregion and the second actuation region.

公开(公告)号：US20170123202A1

公开(公告)日：2017-05-04

申请号：US15401681

申请日：2017-01-09

Applicant: STMicroelectronics S.r.l. ,  STMicroelectronics International N.V.

Inventor： Benedetto Vigna ,  Marco Ferrera ,  Sonia Costantini ,  Marco Salina

IPC: G02B26/08 ,  H02N1/00 ,  B81C1/00 ,  H04N9/31 ,  B81B3/00

CPC classification number: G02B26/0841 ,  B81B3/0045 ,  B81B2201/042 ,  B81B2203/0154 ,  B81C1/00198 ,  G02B27/1006 ,  H02N1/002 ,  H02N1/006 ,  H04N9/3129 ,  H04N9/3135 ,  Y10T29/49002

Abstract: An electrostatically actuated oscillating structure includes a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion. Torsional elastic elements mounted to the first and second rotor subregions define an axis of rotation. A mobile element is coupled to the torsional elastic elements. The stator subregions are electrostatically coupled to respective regions of actuation on the mobile element. The stator subregions exhibit an element of structural asymmetry such that the electrostatic coupling surface between the first stator subregion and the first actuation region differs from the electrostatic coupling surface between the second stator subregion and the second actuation region.

公开(公告)号：US20160349129A1

公开(公告)日：2016-12-01

申请号：US14989709

申请日：2016-01-06

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alberto Pagani ,  Bruno Murari ,  Marco Ferrera ,  Domenico Giusti ,  Daniele Caltabiano

IPC: G01L9/00

CPC classification number: G01L9/0052 ,  G01L9/0054 ,  G01L15/00

Abstract: A pressure sensor with double measuring scale includes: a flexible body designed to undergo deflection as a function of a the pressure; piezoresistive transducers for detecting the deflection; a first focusing region designed to concentrate, during a first operating condition, a first value of the pressure in a first portion of the flexible body so as to generate a deflection of the first portion of the flexible body; and a second focusing region designed to concentrate, during a second operating condition, a second value of said pressure in a second portion of the flexible body so as to generate a deflection of the second portion of the flexible body. The piezoresistive transducers correlate the deflection of the first portion of the flexible body to the first pressure value and the deflection of the second portion of the flexible body to the second pressure value.

Abstract translation: 具有双重测量刻度的压力传感器包括：柔性体，设计成作为压力的函数进行偏转; 用于检测偏转的压阻传感器; 第一聚焦区域，设计成在第一操作条件期间将柔性体的第一部分中的压力的​​第一值集中以产生柔性体的第一部分的偏转; 以及设计成在第二操作条件期间将所述压力的第二值集中在柔性体的第二部分中以便产生柔性体的第二部分的偏转的第二聚焦区域。 压阻传感器将柔性体的第一部分的偏转与第一压力值和柔性体的第二部分的偏转相关联到第二压力值。

公开(公告)号：US20150168715A1

公开(公告)日：2015-06-18

申请号：US14564237

申请日：2014-12-09

Applicant: STMicroelectronics S.r.l. ,  STMicroelectronics International N.V.

Inventor： Benedetto Vigna ,  Marco Ferrera ,  Sonia Costantini ,  Marco Salina

IPC: G02B26/08 ,  H02N1/00 ,  H04N9/31

CPC classification number: G02B26/0841 ,  B81B3/0045 ,  B81B2201/042 ,  B81B2203/0154 ,  B81C1/00198 ,  G02B27/1006 ,  H02N1/002 ,  H02N1/006 ,  H04N9/3129 ,  H04N9/3135 ,  Y10T29/49002

Abstract: An electrostatically actuated oscillating structure includes a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion. Torsional elastic elements mounted to the first and second rotor subregions define an axis of rotation. A mobile element is coupled to the torsional elastic elements. The stator subregions are electrostatically coupled to respective regions of actuation on the mobile element. The stator subregions exhibit an element of structural asymmetry such that the electrostatic coupling surface between the first stator subregion and the first actuation region differs from the electrostatic coupling surface between the second stator subregion and the second actuation region.

Abstract translation: 静电驱动的振荡结构包括第一定子子区域，第二定子子区域，第一转子子区域和第二转子子区域。 安装到第一和第二转子子区域上的扭转弹性元件限定了旋转轴线。 移动元件联接到扭转弹性元件。 定子子区域静电耦合到移动元件上的各个致动区域。 定子子区域呈现结构不对称的元件，使得第一定子子区域和第一致动区域之间的静电耦合表面与第二定子子区域和第二致动区域之间的静电耦合表面不同。