PROCESS OF MANUFACTURING AN AVALANCHE DIODE
    22.
    发明申请

    公开(公告)号:US20180309012A1

    公开(公告)日:2018-10-25

    申请号:US16017492

    申请日:2018-06-25

    CPC classification number: H01L31/107 H01L27/1446 H01L31/022408 H01L31/1804

    Abstract: In one form, a process of manufacturing an avalanche photodiode includes forming an insulating layer over an active region of a semiconductor substrate. A shallow terminal of the avalanche photodiode is defined using a first patterned mask. A first dopant is implanted through the first patterned mask and the insulating layer to form the shallow terminal. The first patterned mask is removed. A deep terminal of the avalanche photodiode is defined using second patterned mask. A second dopant is implanted through the second patterned mask and insulating layer to form the deep terminal of the avalanche photodiode. A respective terminal of at least one of the shallow terminal and the deep terminal is defined using a respective patterned mask that forms at least two regions that are spatially separated from each other with no implanted structure located in a space therebetween.

    Semiconductor photomultiplier
    27.
    发明授权
    Semiconductor photomultiplier 有权
    半导体光电倍增管

    公开(公告)号:US09437630B2

    公开(公告)日:2016-09-06

    申请号:US14283006

    申请日:2014-05-20

    CPC classification number: H01L27/1446 H01L31/107 H01L31/115

    Abstract: The present disclosure relates to photon detectors. In particular, the present disclosure relates to high sensitivity photon detectors such as semiconductor photomultipliers. A semiconductor photomultiplier is described which comprises an array of interconnected photosensitive microcells; and at least one dark count rate (DCR) suppression element associated with the array.

    Abstract translation: 本公开涉及光子检测器。 特别地,本发明涉及诸如半导体光电倍增管的高灵敏度光子检测器。 描述了一种半导体光电倍增管,其包括互连的光敏微电池阵列; 以及与阵列相关联的至少一个暗计数率(DCR)抑制元件。

    LiDAR apparatus
    29.
    发明授权

    公开(公告)号:US10422862B2

    公开(公告)日:2019-09-24

    申请号:US15377263

    申请日:2016-12-13

    Abstract: A LiDAR apparatus comprising a laser source for emitting laser pulses. An SiPM detector is provided for detecting reflected photons. Optics and an aperture stop is provide. The aperture stop is provided intermediate the SiPM detector and the optics for limiting an angle of view of the SiPM detector.

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