Laser process
    21.
    发明申请
    Laser process 失效
    激光工艺

    公开(公告)号:US20060194377A1

    公开(公告)日:2006-08-31

    申请号:US11321641

    申请日:2005-12-30

    摘要: A laser annealing process for recovering crystallinity of a deposited semiconductor film such as of silicon which had undergone morphological damage, said process comprising activating the semiconductor by irradiating a pulsed laser beam operating at a wavelength of 400 nm or less and at a pulse width of 50 nsec or less onto the surface of the film, wherein, said deposited film is coated with a transparent film such as a silicon oxide film at a thickness of from 3 to 300 nm, and the laser beam incident to said coating is applied at an energy density E (mJ/cm2) provided that it satisfies the relation: log10N≦−0.02(E−350), where N is the number of shots of the pulsed laser beam.

    摘要翻译: 一种激光退火工艺,用于回收沉积的半导体膜(例如已经形成损伤的硅)的半导体膜的结晶度,所述方法包括通过照射在400nm或更小的波长下以脉冲宽度为50的脉冲激光束来激活半导体 nsec以下,其中,所述沉积膜涂覆有厚度为3至300nm的诸如氧化硅膜的透明膜,并且入射到所述涂层的激光束以能量施加 密度E(mJ / cm 2),条件是其满足关系:<?in-line-formula description =“In-line Formulas”end =“lead”?> log 10 < /SUB>N<=-0.02(E-350),<?in-line-formula description =“In-line Formulas”end =“tail”?>其中N是脉冲激光束的镜头数。

    Method of manufacturing a semiconductor device utilizing a laser annealing process
    23.
    发明授权
    Method of manufacturing a semiconductor device utilizing a laser annealing process 失效
    利用激光退火工艺制造半导体器件的方法

    公开(公告)号:US06440785B1

    公开(公告)日:2002-08-27

    申请号:US09351159

    申请日:1999-07-12

    IPC分类号: H01L2100

    摘要: A laser annealing process for recovering crystallinity of a deposited semiconductor film such as of silicon which had undergone morphological damage, said process comprising activating the semiconductor by irradiating a pulsed laser beam operating at a wavelength of 400 nm or less and at a pulse width of 50 nsec or less onto the surface of the film, wherein, said deposited film is coated with a transparent film such as a silicon oxide film at a thickness of from 3 to 300 nm, and the laser beam incident to said coating is applied at an energy density E (mJ/cm2) provided that it satisfies the relation: log10N≦−0.02(E−350), where N is the number of shots of the pulsed laser beam.

    摘要翻译: 一种激光退火工艺,用于回收沉积的半导体膜(例如已经形成损伤的硅)的半导体膜的结晶度,所述方法包括通过照射在400nm或更小的波长下以脉冲宽度为50的脉冲激光束来激活半导体 nsec以下,其中,所述沉积膜涂覆有厚度为3至300nm的诸如氧化硅膜的透明膜,并且入射到所述涂层的激光束以能量施加 密度E(mJ / cm2),条件是它满足关系:其中N是脉冲激光束的镜头数。

    Laser processing apparatus
    24.
    发明授权
    Laser processing apparatus 失效
    激光加工设备

    公开(公告)号:US5897799A

    公开(公告)日:1999-04-27

    申请号:US661869

    申请日:1996-06-11

    摘要: A laser processing apparatus including a laser device for emitting a first laser beam having a first cross section having a length and a width and an optical system for modifying the first laser beam to produce a second laser beam having a virtual focus. The second laser beam has a second cross section of which length is larger than the length of the first cross section and is constant with propagation of the second laser beam. The apparatus further includes a condenser located after the virtual focus for focusing the second laser beam on a specimen to be treated, wherein said second laser beam is condensed in only a widthwise direction of the cross section, and device for moving the specimen along the widthwise direction. Specifically, laser processing apparatus may include a laser device, a vertical fly-eye lens for homogenizing an intensity along a lengthwise direction of the first cross section, a mirror for directing the laser beam and cylindrical convex lens.

    摘要翻译: 一种激光加工装置,包括用于发射具有长度和宽度的第一横截面的第一激光束的激光装置和用于修改第一激光束以产生具有虚焦点的第二激光束的光学系统。 第二激光束的第二横截面的长度大于第一横截面的长度,并且随着第二激光束的传播而恒定。 该装置还包括位于虚拟焦点之后的聚光器,用于将第二激光束聚焦在被处理样品上,其中所述第二激光束仅在横截面的宽度方向上冷凝,以及用于沿着宽度方向移动样本的装置 方向。 具体地,激光加工装置可以包括激光装置,用于使沿着第一横截面的长度方向均匀化的强度的垂直复眼透镜,用于引导激光束和圆柱形凸透镜的反射镜。

    Protease-activated receptor 3 and uses thereof
    28.
    发明授权
    Protease-activated receptor 3 and uses thereof 失效
    蛋白酶激活受体3及其用途

    公开(公告)号:US07176283B1

    公开(公告)日:2007-02-13

    申请号:US09208629

    申请日:1998-12-08

    IPC分类号: C07K14/705

    摘要: Disclosed are cDNAs and genomic DNAs encoding protease-activated receptor 3 (PAR3) from mouse and human, and the recombinant polypeptides expressed from such cDNAs. The recombinant receptor polypeptides, receptor fragments and analogs expressed on the surface of cells are used in methods of screening candidate compounds for their ability to act as agonists or antagonists to the effects of interaction between thrombin and PAR3. Agonists are used as therapeutics to treat wounds, thrombosis, atherosclerosis, restenosis, inflammation, and other thrombin-activated disorders. Antagonists are used as therapeutics to control blood coagulation and thereby treating heart attack and stroke. Antagonists mediate inflammatory and proliferative responses to injury as occur in normal wound healing and variety of diseases including atherosclerosis, restenosis, pulmonary inflammation (ARDS) and glomerulosclerosis. Antibodies specific for a protease-activated receptor 3 (or receptor fragment or analog) and their use as a therapeutic are also disclosed.

    摘要翻译: 公开了编码来自小鼠和人的蛋白酶活化受体3(PAR3)的cDNA和基因组DNA,以及从这些cDNA表达的重组多肽。 在细胞表面表达的重组受体多肽,受体片段和类似物用于筛选候选化合物作为激动剂或拮抗剂对凝血酶和PAR3之间相互作用的作用的能力的方法。 激动剂用作治疗创伤,血栓形成,动脉粥样硬化,再狭窄,炎症和其他凝血酶激活的疾病。 拮抗剂用作治疗剂以控制血液凝固,从而治疗心脏病发作和中风。 拮抗剂介导在正常伤口愈合和各种疾病(包括动脉粥样硬化,再狭窄,肺部炎症(ARDS)和肾小球硬化)中发生的损伤的炎症和增殖反应。 还公开了对蛋白酶激活受体3(或受体片段或类似物)特异的抗体及其作为治疗剂的用途。