METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
    22.
    发明申请
    METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE 有权
    制造半导体器件的方法

    公开(公告)号:US20090302456A1

    公开(公告)日:2009-12-10

    申请号:US12476491

    申请日:2009-06-02

    IPC分类号: H01L23/12 H01L21/58

    摘要: To provide a simple method for manufacturing a semiconductor device in which deterioration in characteristics due to electrostatic discharge is reduced, a plurality of element layers each having a semiconductor integrated circuit and an antenna are sealed between a first insulator and a second insulator; a layered structure having a first conductive layer formed on a surface of the first insulator, the first insulator, the element layers, the second insulator, and a second conductive layer formed on a surface of the second insulator is formed; and the first insulator and the second insulator are melted, whereby the layered structure is divided so as to include at least one of the semiconductor integrated circuits and one of the antennas.

    摘要翻译: 为了提供一种制造半导体器件的简单方法,其中由于静电放电引起的特性劣化减少,多个元件层各自具有半导体集成电路和天线被密封在第一绝缘体和第二绝缘体之间; 形成具有形成在第一绝缘体的表面上的第一导电层,第一绝缘体,元件层,第二绝缘体和形成在第二绝缘体的表面上的第二导电层的层状结构; 并且第一绝缘体和第二绝缘体熔化,由此将分层结构分割为包括至少一个半导体集成电路和天线中的一个。

    SEMICONDUCTOR SUBSTRATE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
    23.
    发明申请
    SEMICONDUCTOR SUBSTRATE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE 有权
    半导体基板和制造半导体器件的方法

    公开(公告)号:US20110318881A1

    公开(公告)日:2011-12-29

    申请号:US13165063

    申请日:2011-06-21

    IPC分类号: H01L21/50

    摘要: Provided is a method for manufacturing a semiconductor device, which prevents waste generation from being caused peeling of films and prevents failure of peeling from being caused by waste due to peeling of films. A first semiconductor substrate is used which has a structure in which a peeling layer is not formed in a section subjected to a first dividing treatment, so that the peeling layer is not exposed at the end surface of a second semiconductor substrate when the second semiconductor substrate is cut out of the first semiconductor substrate. In addition, a supporting material is provided on a layer to be peeled of the second semiconductor substrate before the second semiconductor substrate is subjected to a second dividing treatment.

    摘要翻译: 提供一种制造半导体器件的方法,其防止废物产生被膜剥离,并防止由于剥离而导致的剥离不会导致剥离。 使用第一半导体基板,其具有其中在经受第一分割处理的部分中不形成剥离层的结构,使得当第二半导体基板上的剥离层不暴露在第二半导体基板的端面时 被切出第一半导体衬底。 另外,在对第二半导体衬底进行第二次分割处理之前,在要被剥离的第二半导体衬底的层上提供支撑材料。