公开(公告)号：US06654111B2

公开(公告)日：2003-11-25

申请号：US09789699

申请日：2001-02-22

申请人： Hisashi Isozaki ,  Hiroshi Yoshikawa

发明人： Hisashi Isozaki ,  Hiroshi Yoshikawa

IPC分类号： G01N2100

CPC分类号： G01N21/9501

摘要： A first light receiving section and a second light receiving section receive light from an inspected object, and respectively form a first light receiving signal and a second light receiving signal which are different in sensitivity or dynamic range from each other. The first light receiving signal and the second light receiving signal which are different in sensitivity or dynamic range from each other are synthesized in order to form a measuring signal. The measuring signal is used to detect whether there are any foreign matters on a surface of the inspected object.

摘要翻译： 第一光接收部分和第二光接收部分接收来自检测对象的光，分别形成彼此灵敏度或动态范围不同的第一光接收信号和第二光接收信号。 合成彼此灵敏度或动态范围不同的第一光接收信号和第二光接收信号，以形成测量信号。 测量信号用于检测检查对象表面是否有异物。

公开(公告)号：US06587192B2

公开(公告)日：2003-07-01

申请号：US09785530

申请日：2001-02-20

申请人： Hisashi Isozaki ,  Yutaka Shida

发明人： Hisashi Isozaki ,  Yutaka Shida

IPC分类号： G01N2100

CPC分类号： G01N21/9501

摘要： A surface inspection apparatus includes a light source section for emitting first and second luminous fluxes; a first irradiation optical system which irradiates the first luminous flux on an inspected object at a first irradiation angle; a second irradiation optical system which irradiates the second luminous flux on an inspected object at a second irradiation angle; a light receiving optical system for receiving scattered light of the first and second luminous fluxes; first and second light receiving sections for converting the scattered light of the first and second luminous fluxes into first and second light receiving signals, respectively; a displacement section for relatively displacing an inspected object and an irradiation luminous flux of the irradiation optical system; and a discrimination section for discriminating the kind of inspection object based on the strength of the scattered light and the scattered range of the first and second light receiving signals.

摘要翻译： 表面检查装置包括用于发射第一和第二光束的光源部分; 第一照射光学系统，其以第一照射角度对被检查物体照射第一光束; 第二照射光学系统，其以第二照射角度将被检查物体上的第二光束照射; 用于接收第一和第二光束的散射光的光接收光学系统; 第一和第二光接收部分，用于将第一和第二光束的散射光分别转换成第一和第二光接收信号; 用于相对移动检查对象的位移部分和照射光学系统的照射光束; 以及鉴别部分，用于基于散射光的强度和第一和第二光接收信号的散射范围来鉴别检查对象的种类。

公开(公告)号：US20120120485A1

公开(公告)日：2012-05-17

申请号：US13322851

申请日：2009-09-11

申请人： Fumio Ootomo ,  Kazuo Nunokawa ,  Miyano Nunokawa ,  Masayuki Momiuchi ,  Hisashi Isozaki ,  Kazuhiro Miyakawa

发明人： Fumio Ootomo ,  Kazuo Nunokawa ,  Miyano Nunokawa ,  Masayuki Momiuchi ,  Hisashi Isozaki ,  Kazuhiro Miyakawa

IPC分类号： G02B21/06 ,  G01B11/02

CPC分类号： G01B9/02032 ,  G01B9/02007 ,  G01B9/0209 ,  G01B9/04 ,  G01B11/2441 ,  G01B2290/45 ,  G01N21/9501 ,  G02B21/0016

摘要： In an interference microscope and a measuring device for observing and inspecting the surface and inside of a specimen such as a wafer by applying laser light to the specimen and using an interferometer, a reference optical path for conducting light is provided between a beam splitter and a reference mirror, and a measurement optical path for conducting light is provided between the beam splitter and the specimen, thereby providing an optical path difference between the reference optical path and the measurement optical path. Further, the reference mirror is tilted slightly, thereby forming interference fringes on detection means. It is possible to measure the surface shape of the specimen (measurement object) such as a wafer only by slightly tilting the reference mirror with a simple configuration and locate the accurate coordinate positions of foreign particles and pole pieces.

摘要翻译： 在干涉显微镜和测量装置中，通过向样本施加激光并使用干涉仪来观察和检查诸如晶片的样品的表面和内部的测量装置，在分束器和光束分离器之间提供用于导光的参考光路 在分束器和样本之间设置参考反射镜和用于导光的测量光路，从而在参考光路和测量光路之间提供光程差。 此外，参考镜稍微倾斜，从而在检测装置上形成干涉条纹。 可以通过简单的结构轻微地倾斜参考反射镜来测量诸如晶片的样品（测量对象）的表面形状，并且定位异物和极片的精确坐标位置。

公开(公告)号：US20110315877A1

公开(公告)日：2011-12-29

申请号：US13165046

申请日：2011-06-21

申请人： Hisashi Isozaki ,  Hirotaka Tanaka

发明人： Hisashi Isozaki ,  Hirotaka Tanaka

IPC分类号： G01N23/20

CPC分类号： H01J37/228 ,  H01J37/226 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2443 ,  H01J2237/2482

摘要： The present invention provides an electron microscope device, comprising a scanning electron microscope 2 and an optical microscope 3, wherein the scanning electron microscope has scanning means 10 for scanning an electron beam and an electron detector 12 for detecting electron 11 issued from a specimen 8 scanned over by the electron beam, and the scanning electron microscope acquires a scanning electron image based on a detection result from the electron detector, the optical microscope has a light emitting source 13 for illuminating an illumination light, and the optical microscope illuminates the illumination light to the specimen, and acquires an optical image by receiving a reflection light from the specimen, and wherein the electron detector has a fluorescent substance layer for electron-light conversion, a wavelength filter for restricting so that all or almost all of wavelength ranges of the fluorescent light from the fluorescent substance layer passes through, and a wavelength detecting element for receiving the fluorescent light passing through the wavelength filter and performing optical-electric conversion, wherein the light amount of the illumination light in the wavelength range passing through the wavelength filter does not exceed a limit of deterioration of the scanning electron image.

摘要翻译： 本发明提供了一种电子显微镜装置，包括扫描电子显微镜2和光学显微镜3，其中扫描电子显微镜具有用于扫描电子束的扫描装置10和用于检测从扫描的样本8发出的电子11的电子检测器12 并且扫描电子显微镜基于来自电子检测器的检测结果获取扫描电子图像，光学显微镜具有用于照射照明光的发光源13，并且光学显微镜将照明光照射到 并且通过接收来自试样的反射光获取光学图像，并且其中电子检测器具有用于电子 - 光转换的荧光物质层，用于限制使得荧光的全部或几乎全部波长范围的波长滤波器 来自荧光物质层的光通过，并且是波长 用于接收通过波长滤波器的荧光并进行光电转换的检测元件，其中通过波长滤波器的波长范围内的照明光的光量不超过扫描电子图像的劣化极限。

公开(公告)号：US20100163729A1

公开(公告)日：2010-07-01

申请号：US12653366

申请日：2009-12-11

申请人： Hisashi Isozaki

发明人： Hisashi Isozaki

IPC分类号： G01N23/225

CPC分类号： H01J37/244 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/02 ,  H01J2237/2445

摘要： The present invention provides an electron microscope device, comprising a scanning electron microscope 2 provided with scanning means 10 for scanning an electron beam and an electron detector 12 for detecting an electron 11 issued from a specimen 8 where the electron beam is projected for scanning, wherein a scanning electron image is acquired based on a detection result from the electron detector, wherein the electron detector comprises a fluorescent substance layer for performing photoelectric conversion, a wavelength filter giving restriction so that all or almost all of wavelength ranges of fluorescent lights from the fluorescent substance layer can be transmitted, and a wavelength detecting element for receiving the fluorescent light transmitted through the wavelength filter and for performing photoelectric conversion.

摘要翻译： 本发明提供一种电子显微镜装置，包括：扫描电子显微镜2，其具有用于扫描电子束的扫描装置10;以及电子检测器12，用于检测从用于扫描的电子束投射的样本8发出的电子11，其中 基于来自电子检测器的检测结果获取扫描电子图像，其中电子检测器包括用于进行光电转换的荧光物质层，波长滤波器提供限制，使得荧光灯的全部或几乎所有的荧光波长范围 可以传输物质层，以及用于接收透过波长滤波器并用于进行光电转换的荧光的波长检测元件。

公开(公告)号：US06941792B2

公开(公告)日：2005-09-13

申请号：US10213607

申请日：2002-08-06

申请人： Hisashi Isozaki ,  Masanori Matsuda

发明人： Hisashi Isozaki ,  Masanori Matsuda

IPC分类号： G01B11/30 ,  G01N21/93 ,  G01N21/95 ,  G01N21/956 ,  H01L21/66 ,  G01B11/00

CPC分类号： G01N21/93 ,  G01N21/9501

摘要： A surface inspection system, comprising a calibration wafer where particles of known specifications are spread, a wafer transport unit having a transport robot, a surface inspection unit, and a calibration wafer accommodation unit for accommodating the calibration wafer.

摘要翻译： 一种表面检查系统，包括已知规格的颗粒被扩散的校准晶片，具有传送机器人的晶片传送单元，表面检查单元和用于容纳校准晶片的校准晶片容纳单元。

公开(公告)号：US06847444B2

公开(公告)日：2005-01-25

申请号：US10669706

申请日：2003-09-25

申请人： Hisashi Isozaki ,  Hiroshi Yoshikawa

发明人： Hisashi Isozaki ,  Hiroshi Yoshikawa

IPC分类号： G01B11/30 ,  G01N21/95 ,  G01N21/956 ,  G06T1/00 ,  H01L21/66 ,  G01N21/00

CPC分类号： G01N21/9501

摘要： A surface inspection apparatus includes a light source section for emitting a first and a second luminous flux; a first and a second irradiation optical system in which the first and the second luminous flux are irradiated on the surface of an inspected object at a first and a second irradiation angle, respectively; a displacement section for relatively displacing an inspected object and an irradiation luminous flux of the irradiation optical system; a light receiving optical system for receiving scattered light of the first and the second luminous flux; a first and a second light receiving section for converting scattered light of the first and second luminous flux into a first and a second light receiving signal, respectively; and a signal forming section for forming a measuring signal on the basis of the first and the second light receiving signal. The first and the second light receiving section form a first and a second light receiving signal which are different in sensitivity or dynamic range from each other, and synthesizes the first and the second light receiving signal to form a measuring signal.

摘要翻译： 表面检查装置包括用于发射第一和第二光通量的光源部分; 第一和第二照射光学系统，其中第一和第二光束分别以第一和第二照射角照射在被检查物体的表面上; 用于相对移动检查对象的位移部分和照射光学系统的照射光束; 用于接收第一和第二光束的散射光的光接收光学系统; 第一和第二光接收部分，用于将第一和第二光束的散射光分别转换成第一和第二光接收信号; 以及信号形成部分，用于基于第一和第二光接收信号形成测量信号。 第一和第二光接收部分形成彼此不同的灵敏度或动态范围的第一和第二光接收信号，并且合成第一和第二光接收信号以形成测量信号。

公开(公告)号：US06331888B1

公开(公告)日：2001-12-18

申请号：US09613464

申请日：2000-07-10

申请人： Hisashi Isozaki

发明人： Hisashi Isozaki

IPC分类号： G01N2100

CPC分类号： G01N21/8851

摘要： A foreign matter on the surface of an object of inspection is detected by throwing an inspecting light beam on the surface of the object of inspection and sensing a scattered light beam reflected from the surface of the object of inspection while the inspecting light beam is allowed to make a spiral scan. When the signal of the scattered light beam by the foreign matter exceeds a threshold signal at a point while the inspection light beam scans the object in the predetermined direction, the point is stored as a start point and, when, thereafter, the foreign-matter scattered signal falls below the threshold signal at a point, the point is stored as an end point, and, further, a point between the start point and the end point where the foreign-matter scattered signal was at its maximum level is stored as a peak. A threshold signal level is established between the effective range where a foreign matter or flaw is measured and the circumferential range beyond the effective range. While measurement is being made in the effective range, when the threshold signal level is exceeded at a point, the point is set as a start position and, when the threshold signal level is exceeded thereafter, the point is set as an end position. The manner of measurement between the start position and the end position is made different from the manner of measurement in the effective range and, further, the manner of measurement between the start position and the end position and the manner of measurement in the effective range are automatically changed over.

摘要翻译： 通过在检查对象的表面上投射检查光束，并且在检查光束被允许的情况下感测从检查对象的表面反射的散射光束来检测检查对象的表面上的异物 进行螺旋扫描。 当检测光束沿预定方向扫描物体时，异物散射光束的信号超过阈值信号时，将该点作为起始点存储，此后，当异物 散射信号在某点下降到阈值信号以下，该点被存储为终点，并且另外，异物散射信号处于其最大电平的起始点和终点之间的点被存储为 峰。 在测量异物或缺陷的有效范围与超出有效范围的圆周范围之间建立阈值信号电平。 当在有效范围内进行测量时，当在某一点超过阈值信号电平时，该点被设置为起始位置，并且当其后超过阈值信号电平时，该点被设置为结束位置。 开始位置和结束位置之间的测量方式与有效范围内的测量方式不同，此外，开始位置和结束位置之间的测量方式以及有效范围内的测量方式是 自动切换。

公开(公告)号：US06204918B1

公开(公告)日：2001-03-20

申请号：US09285259

申请日：1999-04-02

申请人： Hisashi Isozaki ,  Yutaka Shida ,  Takuji Sato

发明人： Hisashi Isozaki ,  Yutaka Shida ,  Takuji Sato

IPC分类号： G01N2100

CPC分类号： G01N21/8851

摘要： An apparatus for surface inspection according to the invention comprises an irradiating optical system for throwing an irradiating light beam from a light source onto the surface of an object of inspection, a light receiving optical system for receiving a scattered light beam reflected from the surface of the object of inspection irradiated by the irradiating optical system, a photosensing portion for forming a surface data signal from the scattered light beam received by the light receiving optical system, a displacement portion for displacing the surface of the object of inspection relative to the irradiating optical system, plus the light receiving optical system, continuously in the main scanning direction and intermittently in the sub-scanning direction, and a foreign matter detecting portion for detecting a foreign matter present on the surface of the object of inspection on the basis of the maximum value level of the surface data signal and obtaining the position, in the sub-scanning direction, of the foreign matter present on the surface of the object of inspection on the basis of at least two adjoining surface data signals in the sub-scanning direction.

摘要翻译： 根据本发明的用于表面检查的装置包括：照射光学系统，用于将来自光源的照射光束投射到检查对象的表面上;光接收光学系统，用于接收从所述光源的表面反射的散射光束; 由照射光学系统照射的检查对象物，用于由受光光学系统接收的散射光形成表面数据信号的光敏部分，用于使检查对象的表面相对于照射光学系统移位的位移部分 加上受光光学系统，在主扫描方向上连续地并且在副扫描方向上间歇地，以及异物检测部分，用于根据最大值检测存在于检查对象表面上的异物 水平的表面数据信号并获得位置，在sub sca 基于在副扫描方向上的至少两个邻接表面数据信号存在于检查对象表面上的异物的方向。

公开(公告)号：US6108078A

公开(公告)日：2000-08-22

申请号：US196739

申请日：1998-11-20

申请人： Hisashi Isozaki

发明人： Hisashi Isozaki

IPC分类号： G01N21/88 ,  G01N21/00

CPC分类号： G01N21/8851

摘要： A foreign matter on the surface of an object of inspection is detected by throwing an inspecting light beam on the surface of the object of inspection and sensing a scattered light beam reflected from the surface of the object of inspection while the inspecting light beam is allowed to make a spiral scan. When the signal of the scattered light beam by the foreign matter exceeds a threshold signal at a point while the inspection light beam scans the object in the predetermined direction, the point is stored as a start point and, when, thereafter, the foreign-matter scattered signal falls below the threshold signal at a point, the point is stored as an end point, and, further, a point between the start point and the end point where the foreign-matter scattered signal was at its maximum level is stored as a peak. A threshold signal level is established between the effective range where a foreign matter or flaw is measured and the circumferential range beyond the effective range. While measurement is being made in the effective range, when the threshold signal level is exceeded at a point, the point is set as a start position and, when the threshold signal level is exceeded thereafter, the point is set as an and position. The manner of measurement between the start position and the end position is made different from the manner of measurement in the effective range and, further, the manner of measurement between the start position and the end position and the manner of measurement in the effective range are automatically charged over.

摘要翻译： 通过在检查对象的表面上投射检查光束，并且在检查光束被允许的情况下感测从检查对象的表面反射的散射光束来检测检查对象的表面上的异物 进行螺旋扫描。 当检测光束沿预定方向扫描物体时，异物散射光束的信号超过阈值信号时，将该点作为起始点存储，此后，当异物 散射信号在某点下降到阈值信号以下，该点被存储为终点，并且另外，异物散射信号处于其最大电平的起始点和终点之间的点被存储为 峰。 在测量异物或缺陷的有效范围与超出有效范围的圆周范围之间建立阈值信号电平。 当在有效范围内进行测量时，当在某一点超过阈值信号电平时，该点被设置为起始位置，并且当其后超过阈值信号电平时，将该点设置为位置。 开始位置和结束位置之间的测量方式与有效范围内的测量方式不同，此外，开始位置和结束位置之间的测量方式以及有效范围内的测量方式是 自动收费。