Diode
    22.
    发明申请
    Diode 审中-公开
    二极管

    公开(公告)号:US20090224353A1

    公开(公告)日:2009-09-10

    申请号:US12382012

    申请日:2009-03-05

    IPC分类号: H01L29/872

    摘要: A diode includes the following: an n type semiconductor region; a p type semiconductor region provided in a part of a front face of the n type semiconductor region; an anode electrode (front face electrode) which adjoins a front face of the n type semiconductor region and a front face of the p type semiconductor region while at least forming a Schottky junction on a front face of the n type semiconductor region; and an insulating region which has a right-hand side (first side) and a left-hand side (second side) adjacent to the n type semiconductor region, the right-hand side facing a second n type semiconductor region which is located below the Schottky junction, the left-hand side facing a first n type semiconductor region which is located below a pn junction between the n type semiconductor region and the p type semiconductor region.

    摘要翻译: 二极管包括:n型半导体区域; 设置在n型半导体区域的正面的一部分中的p型半导体区域; 邻接n型半导体区域的前表面和p型半导体区域的正面的阳极电极(正面电极),同时至少在n型半导体区域的正面上形成肖特基结; 以及具有与n型半导体区域相邻的右侧(第一侧)和左侧(第二侧)的绝缘区域,所述右侧面向位于所述n型半导体区域下方的第二n型半导体区域 肖特基结,左手侧面对位于n型半导体区域和p型半导体区域之间的pn结的下方的第一n型半导体区域。

    SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THEREOF
    23.
    发明申请
    SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THEREOF 有权
    半导体器件及其制造方法

    公开(公告)号:US20090159898A1

    公开(公告)日:2009-06-25

    申请号:US12338151

    申请日:2008-12-18

    IPC分类号: H01L29/24 H01L21/265

    摘要: A semiconductor device is provided in which the contact resistance of the interface between an electrode and the semiconductor substrate is reduced. The semiconductor device includes a 4H polytype SiC substrate, and an electrode formed on a surface of the substrate. A 3C polytype layer, which extends obliquely relative to the surface of the substrate and whose end portion at the substrate surface is in contact with the electrode, is formed at the surface of the substrate. The 3C polytype layer has a lower bandgap than 4H polytype. Hence, electrons present in the 4H polytype region pass through the 3C polytype layer and reach the electrode. More precisely, the width of the passageway of the electrons is determined by the thickness of the 3C polytype layer. Consequently, with this semiconductor device, in which the passageway of the electrons is narrow, the electrons are able to reach the electrode at a speed close to the theoretical value, by the quantum wire effect. In this way, the contact resistance can be reduced in the semiconductor device.

    摘要翻译: 提供一种半导体器件,其中电极和半导体衬底之间的界面的接触电阻降低。 半导体器件包括4H多型SiC衬底和形成在衬底的表面上的电极。 形成在基板表面上相对于基板的表面倾斜地延伸并且其基板表面的端部与电极接触的3C多型层。 3C多型层具有比4H多型更低的带隙。 因此,存在于4H多型区域中的电子通过3C多型层并到达电极。 更准确地说,电子通道的宽度由3C多型层的厚度决定。 因此,通过电子通道窄的这种半导体器件,电子能够以接近理论值的速度通过量子线效应到达电极。 以这种方式,可以在半导体器件中降低接触电阻。