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公开(公告)号：US20100269898A1
公开(公告)日：2010-10-28
申请号：US12810060
申请日：2008-12-24
CPC分类号： C23C14/0084 , C23C14/086 , H01L31/022466 , H01L31/022483 , H01L31/1884 , Y02E10/50
摘要： A method for manufacturing a photovoltaic cell that is provided with an upper electrode that is arranged on the light incoming side and functions as a power extraction electrode, the method including the step of: forming the upper electrode on a substrate by sputtering using a target that contains a zinc oxide-based material, wherein in the step of forming the upper electrode, the sputtering is performed in an atmosphere that contains two or three selected from a group consisting of hydrogen gas, oxygen gas, and water vapor.
摘要翻译： 一种制造光电池的方法，其具有布置在光入射侧上并用作功率提取电极的上电极，所述方法包括以下步骤：通过使用靶材溅射在基板上形成上电极， 含有氧化锌系材料，其中在形成上部电极的步骤中，在含有选自氢气，氧气和水蒸气中的两种或三种的气氛中进行溅射。
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公开(公告)号：US20090303406A1
公开(公告)日：2009-12-10
申请号：US12475907
申请日：2009-06-01
申请人： Satoru Takasawa , Masaki Takei , Hirohisa Takahashi , Hiroaki Katagiri , Sadayuki Ukishima , Noriaki Tani , Satoru Ishibashi , Tadashi Masuda
发明人： Satoru Takasawa , Masaki Takei , Hirohisa Takahashi , Hiroaki Katagiri , Sadayuki Ukishima , Noriaki Tani , Satoru Ishibashi , Tadashi Masuda
IPC分类号： G02F1/1343 , C23F1/00 , H01L29/78
CPC分类号： H01L23/53238 , H01L21/2855 , H01L23/53233 , H01L27/124 , H01L2924/0002 , H05K1/0306 , H05K3/16 , H05K3/388 , H01L2924/00
摘要： A wiring film having excellent adhesion and barrier property and a low resistance value is formed. An oxygen gas is introduced into a vacuum chamber in which an object to be film formed is disposed; a sputtering target is sputtered in a vacuum ambience containing oxygen; and a first metallic film is formed on a surface of the object to be film formed. The first sputtering target includes copper as a major component and at least one kind of additive elements selected from an additive element group consisting of Mg, Al, Si, Be, Ca, Sr, Ba, Ra, Sc, Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb and Dy. Thereafter, a second metallic film is formed on a surface of the first metallic film by sputtering the sputtering target in a state in which the introduction of the oxygen gas into a vacuum ambience is stopped, and then a wiring film is formed by etching the first and second metallic films.
摘要翻译： 形成具有优异的粘附性和阻隔性和低电阻值的布线膜。 将氧气引入其中设置有被成膜物体的真空室中; 溅射靶在含有氧的真空环境中溅射; 并且在待成膜物体的表面上形成第一金属膜。 第一溅射靶包括铜作为主要成分，以及选自由Mg，Al，Si，Be，Ca，Sr，Ba，Ra，Sc，Y，La，Ce组成的添加元素组中的至少一种添加元素， Pr，Nd，Pm，Sm，Eu，Gd，Tb和Dy。 此后，在将氧气引入真空环境的状态下，通过溅射溅射靶溅射溅射靶，在第一金属膜的表面上形成第二金属膜，然后通过蚀刻第一金属膜形成布线膜 和第二金属膜。
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公开(公告)号：US20050205328A1
公开(公告)日：2005-09-22
申请号：US11081544
申请日：2005-03-17
摘要： A motorcycle has an engine mounting structure in which a rear wheel supporting swing arm is vertically swung together with a rear wheel, and in which both sides in the vehicle body width direction of a vehicle body side bracket provided in a vehicle body frame are clamped between a left-right pair of engine-side brackets provided on an engine and the engine is mounted to the vehicle body side bracket through elastic members. The vehicle body frame includes a left-right pair of auxiliary brackets disposed on both sides of the vehicle body side bracket, with an interval therebetween. The left and right engine-side brackets are clamped by the auxiliary brackets. An engine supporting bolt is made to penetrate through the vehicle body side bracket, the left and right engine-side brackets and the left and right auxiliary brackets, whereby the brackets are connected to each other.
摘要翻译： 摩托车具有发动机安装结构，其中后轮支撑摆臂与后轮一起垂直摆动，其中设置在车体框架中的车身侧支架的车身宽度方向上的两侧夹在车身框架之间 设置在发动机上的左右一对发动机侧支架，发动机通过弹性部件安装在车体侧支架上。 车体框架包括设置在车体侧支架的两侧的左右一对辅助支架，其间具有间隔。 左右发动机侧支架由辅助支架夹紧。 引擎支撑螺栓穿过车体侧支架，左右发动机侧支架和左右辅助支架，由此支架彼此连接。
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公开(公告)号：US08154531B2
公开(公告)日：2012-04-10
申请号：US13137212
申请日：2011-07-28
申请人： Hirohisa Takahashi , Satoru Ishibashi , Noriaki Tani , Sadayuki Ukishima , Satoru Takasawa , Kyuzo Nakamura , Haruhiko Yamamoto
发明人： Hirohisa Takahashi , Satoru Ishibashi , Noriaki Tani , Sadayuki Ukishima , Satoru Takasawa , Kyuzo Nakamura , Haruhiko Yamamoto
IPC分类号： G06F3/041
CPC分类号： G06F3/045
摘要： A touch panel having high durability is provided. Either one or both of a display device and a flexible panel have island-shaped protective bodies formed on surfaces of electrode layers (upper electrode layer, lower electrode layer), and a transparent conductive film is exposed between the protective bodies. Since the protective bodies protrude highly from the surface of the transparent conductive film, when the flexible panel is pressed and the upper electrode and the lower electrode layer are brought into contact, a load to be applied to the transparent conductive film is reduced by the protective bodies, so that the transparent conductive film is not broken.
摘要翻译： 提供了具有高耐久性的触摸面板。 显示装置和柔性面板中的任一个或两者具有形成在电极层（上电极层，下电极层）的表面上的岛状保护体，并且在保护体之间露出透明导电膜。 由于保护体从透明导电膜的表面突出高度突出，当按压柔性面板并使上部电极和下部电极层接触时，通过保护性 使透明导电膜不破裂。
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公开(公告)号：US08031183B2
公开(公告)日：2011-10-04
申请号：US12814039
申请日：2010-06-11
申请人： Hirohisa Takahashi , Satoru Ishibashi , Noriaki Tani , Sadayuki Ukishima , Satoru Takasawa , Kyuzo Nakamura , Haruhiko Yamamoto
发明人： Hirohisa Takahashi , Satoru Ishibashi , Noriaki Tani , Sadayuki Ukishima , Satoru Takasawa , Kyuzo Nakamura , Haruhiko Yamamoto
IPC分类号： G06F3/041
CPC分类号： G06F3/045
摘要： A touch panel having high durability is provided. Either one or both of a display device and a flexible panel have island-shaped protective bodies formed on surfaces of electrode layers (upper electrode layer, lower electrode layer), and a transparent conductive film is exposed between the protective bodies. Since the protective bodies protrude highly from the surface of the transparent conductive film, when the flexible panel is pressed and the upper electrode and the lower electrode layer are brought into contact, a load to be applied to the transparent conductive film is reduced by the protective bodies, so that the transparent conductive film is not broken.
摘要翻译： 提供了具有高耐久性的触摸面板。 显示装置和柔性面板中的任一个或两者具有形成在电极层（上电极层，下电极层）的表面上的岛状保护体，并且在保护体之间露出透明导电膜。 由于保护体从透明导电膜的表面突出高度突出，当按压柔性面板并使上部电极和下部电极层接触时，通过保护性 使透明导电膜不破裂。
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公开(公告)号：US20110089026A1
公开(公告)日：2011-04-21
申请号：US13000105
申请日：2009-07-03
IPC分类号： C23C14/34
CPC分类号： G06F3/045 , C23C14/0036 , C23C14/086
摘要： A touch panel manufacturing method is a method for manufacturing a touch panel including a transparent substrate having a main surface on which a transparent-electroconductive film is formed. The transparent-electroconductive film is formed on the main surface of the transparent substrate by carrying out sputtering using a target made of a zinc oxide-based material in a reactive gas atmosphere containing two or three gases selected from a group consisting of hydrogen gas, oxygen gas, and water vapor.
摘要翻译： 触摸屏制造方法是一种用于制造包括具有形成有透明导电膜的主表面的透明基板的触摸面板的方法。 透明导电膜通过在含有选自氢气，氧气中的两种或三种气体的反应气体气氛中，使用由氧化锌基材料制成的靶进行溅射而形成在透明基板的主表面上 气体和水蒸气。
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公开(公告)号：US20100294650A1
公开(公告)日：2010-11-25
申请号：US12864179
申请日：2009-01-20
IPC分类号： C23C14/34
CPC分类号： C23C14/086 , G02F1/1303 , G02F1/13439
摘要： A process for producing a liquid crystal display device that includes at least a pair of substrates holding a liquid crystal layer therebetween and a pixel electrode superimposed on the liquid crystal layer side of the pair of substrates, the pixel electrode on at least one of the pair of substrates being formed of a transparent electroconductive film made of zinc oxide as a fundamental constituent material, the process includes: a step of forming a zinc oxide transparent electroconductive film on the substrate by sputtering, using a target of a zinc oxide series material to form the pixel electrode, wherein, in the step of forming the pixel electrode, sputtering is performed in an atmosphere containing two or three materials selected from the group consisting of hydrogen gas, oxygen gas, and water vapor.
摘要翻译： 一种制造液晶显示装置的方法，该液晶显示装置包括至少一对在其间保持液晶层的基板和叠置在该对基板的液晶层侧上的像素电极，该至少一个对上的像素电极 的基板由由氧化锌作为基本构成材料制成的透明导电膜形成，该方法包括：通过溅射在基板上形成氧化锌透明导电膜的步骤，使用氧化锌系列材料的靶材形成 像素电极，其中，在形成像素电极的步骤中，在含有选自氢气，氧气和水蒸汽的两种或三种材料的气氛中进行溅射。
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28.发明申请公开(公告)号：US20100258433A1
公开(公告)日：2010-10-14
申请号：US12808006
申请日：2008-12-17
CPC分类号： C23C14/086 , C23C14/0036
摘要： A film forming method for a transparent electrically conductive film that forms a zinc oxide-based transparent electrically conductive film on a substrate by sputtering using a target containing a zinc oxide-based material, performing the sputtering in a reactive gas atmosphere that contains two types or three types selected from among a group consisting of hydrogen gas, oxygen gas and water vapor.
摘要翻译： 一种用于透明导电膜的成膜方法，其通过使用含有氧化锌基材料的靶通过溅射在衬底上形成氧化锌基透明导电膜，在包含两种类型的反应气体气氛中进行溅射， 选自由氢气，氧气和水蒸气组成的组中的三种。
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公开(公告)号：US20100193352A1
公开(公告)日：2010-08-05
申请号：US12678578
申请日：2008-09-17
IPC分类号： C23C14/35
CPC分类号： H01L31/1884 , C23C14/086 , H01L31/022466 , Y02E10/50
摘要： The present invention relates to a method for manufacturing a solar cell provided with a buffer layer or an intermediate electrode. The buffer layer is disposed between a rear electrode and a photovoltaic cell. The rear electrode is disposed on the opposite side of a light incidence side and functions as an electrode for extracting electric power. The intermediate electrode is disposed between a plurality of photovoltaic cells. The intermediate electrode or the buffer layer comprises a ZnO-based transparent conductive film. The method comprises forming the intermediate electrode or the buffer layer by sputtering a target on which a formation material of the transparent conductive film is provided while applying sputtering voltage to generate a horizontal magnetic field on a surface of the target. The intermediate electrode or the buffer layer is formed through sputtering at a sputtering voltage of 340V or less.
摘要翻译： 本发明涉及一种具有缓冲层或中间电极的太阳能电池的制造方法。 缓冲层设置在后电极和光伏电池之间。 后电极设置在光入射侧的相反侧，并且用作用于提取电力的电极。 中间电极设置在多个光伏电池之间。 中间电极或缓冲层包括ZnO基透明导电膜。 该方法包括通过溅射在其上提供透明导电膜的形成材料的靶而形成中间电极或缓冲层，同时施加溅射电压以在靶的表面上产生水平磁场。 中间电极或缓冲层通过溅射形成，溅射电压为340V以下。
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公开(公告)号：US20090134013A1
公开(公告)日：2009-05-28
申请号：US12359675
申请日：2009-01-26
IPC分类号： C23C14/34
CPC分类号： C23C14/3414 , C23C14/086 , C23C14/5806
摘要： A transparent electroconductive film having a low resistivity is provided. In a film-forming method of the present invention, a transparent electroconductive film is formed on a surface of a substrate by sputtering, in a vacuum atmosphere, a target in which ZnO is a main component and Al2O3 and TiO2 are added to ZnO, and then the transparent electroconductive film is annealed by the heating thereof at a temperature of 250° C. or more and 400° C. or less. The resistivity of the obtained transparent electroconductive film is reduced because the film has ZnO as the main component and Al and Ti added therein. The transparent electroconductive film formed by the present invention is suitable as a transparent electrode for the FDP, etc.
摘要翻译： 提供具有低电阻率的透明导电膜。 在本发明的成膜方法中，在真空气氛中，通过溅射在基板的表面上形成透明导电膜，其中ZnO作为主要成分，并将Al 2 O 3和TiO 2加入到ZnO中， 然后通过在250℃以上且400℃以下的温度下的加热对透明导电膜进行退火。 所得到的透明导电膜的电阻率降低，因为膜以ZnO为主要成分，并添加了Al和Ti。 由本发明形成的透明导电膜适合作为FDP等的透明电极。
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