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93 条记录 (耗时 0.024 秒)

    Methods for sample preparation and observation, charged particle apparatus
    21.
    发明授权
    Methods for sample preparation and observation, charged particle apparatus 有权
    样品制备和观察方法，带电粒子装置

    公开(公告)号：US07482586B2

    公开(公告)日：2009-01-27

    申请号：US11482094

    申请日：2006-07-07

    申请人： Tohru Ishitani ,  Uki Kabasawa ,  Tsuyoshi Ohnishi

    发明人： Tohru Ishitani ,  Uki Kabasawa ,  Tsuyoshi Ohnishi

    IPC分类号： G01N31/00 ,  G01N33/00 ,  G01N23/00 ,  G21K7/00 ,  G21K5/10 ,  H01J37/08

    CPC分类号： G01N23/225 ,  H01J37/3005 ,  H01J37/3056 ,  H01J2237/1536 ,  H01J2237/31745

    摘要： In an SEM observation in a depth direction of a cross section processed by repeated FIB cross-sectioning and SEM observation to correct a deviation in an observation field of view and a deviation in focus, are corrected, the deviations occurring when a processed cross section moves in the depth direction thereof; information on a height and a tilt of a surface of cross section processing area is calculated before the processing, the above information is used, the deviation in a field of view and the deviation in focus in SEM observation, which correspond to an amount of movement of the cross section at a time of the processing, are predicted, and the SEM is controlled based on the predicted values.

    摘要翻译： 在通过重复的FIB横截面处理的横截面的深度方向的SEM观察和用于校正观察视场偏离和聚焦偏差的SEM观察中，校正了当处理的横截面移动时发生的偏差 在其深度方向; 在处理之前计算关于横截面处理区域的表面的高度和倾斜的信息，使用上述信息，SEM视场中的偏差和对应于移动量的SEM观察中的偏差 的预测值，并且根据预测值来控制SEM。

    Method for separating specimen and method for analyzing the specimen separated by the specimen separating method
    23.
    发明授权
    Method for separating specimen and method for analyzing the specimen separated by the specimen separating method 失效
    分离样品的方法和分离样品分离方法的方法

    公开(公告)号：US5270552A

    公开(公告)日：1993-12-14

    申请号：US933232

    申请日：1992-08-21

    申请人： Tsuyoshi Ohnishi ,  Tohru Ishitani

    发明人： Tsuyoshi Ohnishi ,  Tohru Ishitani

    IPC分类号： G01N1/28 ,  G01N23/22 ,  H01J37/20 ,  H01J37/305 ,  H01J37/31

    CPC分类号： H01J37/3056 ,  G01N23/2202 ,  H01J37/20 ,  H01J37/31 ,  H01J2237/2007 ,  H01J2237/20264

    摘要： When a desired portion is separated from an integrated circuit chip or a semiconductor wafer, the portion is separated without dividing the chip or the wafer, so that the separated specimen can be moved to a desired position, and the separated specimen can be set to a desired attitude. Therefore, various analyses on the specimen through TEM, SEM, SIMS and so on can be carried out. A minute piece of specimen is cut and separated from the substrate of a specimen by use of a three-dimensional minute processing technique and a micro-manipulation technique. A surface of the specimen is subjected to an FIB processing from at least two kinds of angles, the separated specimen being mechanically connected to an external probe in a step for separating a part of the specimen including a portion to be analyzed. The separated specimen is supported by the probe, being moved. The separated specimen is subjected to analysis through TEM, SEM, SIMS, etc.

    摘要翻译： 当将期望的部分与集成电路芯片或半导体晶片分离时，该部分被分离而不分割芯片或晶片，使得分离的样本可以移动到期望的位置，并且分离的样本可以被设置为 期望的态度 因此，可以通过TEM，SEM，SIMS等对样品进行各种分析。 通过使用三维微细处理技术和微操作技术，将一分片样品切割并与样品的基底分离。 将样品的表面从至少两种角度进行FIB处理，将分离出的试样机械地连接到外部探针上，以分离包含待分析部分的试样的一部分的步骤。 分离的样品由探头支撑，移动。 分离的样品通过TEM，SEM，SIMS等进行分析

    Methods for sample preparation and observation, charged particle apparatus
    24.
    发明申请
    Methods for sample preparation and observation, charged particle apparatus 有权
    样品制备和观察方法，带电粒子装置

    公开(公告)号：US20070023651A1

    公开(公告)日：2007-02-01

    申请号：US11482094

    申请日：2006-07-07

    申请人： Tohru Ishitani ,  Uki Kabasawa ,  Tsuyoshi Ohnishi

    发明人： Tohru Ishitani ,  Uki Kabasawa ,  Tsuyoshi Ohnishi

    IPC分类号： G01N23/00

    CPC分类号： G01N23/225 ,  H01J37/3005 ,  H01J37/3056 ,  H01J2237/1536 ,  H01J2237/31745

    摘要： In an SEM observation in a depth direction of a cross section processed by repeated FIB cross-sectioning and SEM observation to correct a deviation in an observation field of view and a deviation in focus, are corrected, the deviations occurring when a processed cross section moves in the depth direction thereof; information on a height and a tilt of a surface of cross section processing area is calculated before the processing, the above information is used, the deviation in a field of view and the deviation in focus in SEM observation, which correspond to an amount of movement of the cross section at a time of the processing, are predicted, and the SEM is controlled based on the predicted values.

    摘要翻译： 在通过重复的FIB横截面处理的横截面的深度方向的SEM观察和用于校正观察视场偏离和聚焦偏差的SEM观察中，校正了当处理的横截面移动时发生的偏差 在其深度方向; 在处理之前计算关于横截面处理区域的表面的高度和倾斜的信息，使用上述信息，SEM视场中的偏差和对应于移动量的SEM观察中的偏差 的预测值，并且根据预测值来控制SEM。

    Observation method and apparatus for removing an oxidation layer and forming an image from a sample
    28.
    发明授权
    Observation method and apparatus for removing an oxidation layer and forming an image from a sample 失效
    用于去除氧化层并从样品形成图像的观察方法和装置

    公开(公告)号：US5495110A

    公开(公告)日：1996-02-27

    申请号：US258334

    申请日：1994-06-10

    申请人： Tsuyoshi Ohnishi ,  Tohru Ishitani

    发明人： Tsuyoshi Ohnishi ,  Tohru Ishitani

    IPC分类号： H01J37/256 ,  B23K15/08 ,  G01Q90/00 ,  H01J37/22 ,  H01J37/252 ,  H01J37/30 ,  G01N23/225

    CPC分类号： B23K15/08 ,  H01J37/3005 ,  H01J2237/2806 ,  H01J2237/317

    摘要： The present invention is intended to form a satisfactory SIM image having high contrast without requiring comparatively high current density and high vacuum, and to enable satisfactory observation of grains in a high resolution at a reduced cost. An object area on a sample is divided virtually into a plurality of small areas, the small areas are irradiated sequentially in a time series mode with a surface processing beam and a data acquisition beam, the irradiation of each small area is executed, secondary signals produced by the sample when the sample is irradiated with the data acquisition beam, and an image of the object area on the sample is formed on the basis of the detected secondary signals.

    摘要翻译： 本发明旨在形成具有高对比度的令人满意的SIM图像，而不需要相对较高的电流密度和高真空度，并且能够以较低的成本以高分辨率令人满意地观察晶粒。 样本上的物体区域虚拟地划分成多个小区域，以表面处理光束和数据采集光束的时间序列模式依次照射小区域，执行每个小区域的照射，产生二次信号 利用数据采集光束照射样品时的样品，并且基于检测到的次级信号形成样品上的对象区域的图像。

    Method and apparatus for specimen fabrication
    29.
    发明授权
    Method and apparatus for specimen fabrication 有权
    用于样品制造的方法和装置

    公开(公告)号：US08796651B2

    公开(公告)日：2014-08-05

    申请号：US12929396

    申请日：2011-01-20

    申请人： Hiroyasu Shichi ,  Tohru Ishitani ,  Hidemi Koike ,  Kaoru Umemura ,  Eiichi Seya ,  Mitsuo Tokuda ,  Satoshi Tomimatsu ,  Hideo Kashima ,  Muneyuki Fukuda

    发明人： Hiroyasu Shichi ,  Tohru Ishitani ,  Hidemi Koike ,  Kaoru Umemura ,  Eiichi Seya ,  Mitsuo Tokuda ,  Satoshi Tomimatsu ,  Hideo Kashima ,  Muneyuki Fukuda

    IPC分类号： G21G5/00

    CPC分类号： G01N23/20 ,  B23K15/0006 ,  B23K15/0013 ,  G01N1/286 ,  H01J2237/3114 ,  H01J2237/31745

    摘要： A sample fabricating method of irradiating a sample with a focused ion beam at an incident angle less than 90 degrees with respect to the surface of the sample, eliminating the peripheral area of a micro sample as a target, turning a specimen stage around a line segment perpendicular to the sample surface as a turn axis, irradiating the sample with the focused ion beam while the incident angle on the sample surface is fixed, and separating the micro sample or preparing the micro sample to be separated. A sample fabricating apparatus for forming a sample section in a sample held on a specimen stage by scanning and deflecting an ion beam, wherein an angle between an optical axis of the ion beam and the surface of the specimen stage is fixed and formation of a sample section is controlled by turning the specimen stage.

    摘要翻译： 相对于样品表面以小于90度的入射角照射具有聚焦离子束的样品的样品制造方法，消除作为目标的微量样品的周边区域，将样品台围绕线段 垂直于样品表面作为转动轴线，同时在样品表面上的入射角被固定的同时用聚焦离子束照射样品，并分离微量样品或制备待分离的微量样品。 一种样品制造装置，用于通过扫描和偏转离子束来形成保持在样品台上的样品中的样品部分，其中离子束的光轴与样品台的表面之间的角度被固定并形成样品 通过转动样品台来控制切片。

    SCANNING CHARGED PARTICLE MICROSCOPE
    30.
    发明申请
    SCANNING CHARGED PARTICLE MICROSCOPE 审中-公开
    扫描充电颗粒显微镜

    公开(公告)号：US20110254944A1

    公开(公告)日：2011-10-20

    申请号：US13122532

    申请日：2009-10-02

    申请人： Tohru Ishitani ,  Isao Nagaoki

    发明人： Tohru Ishitani ,  Isao Nagaoki

    IPC分类号： H04N7/18 ,  G06K9/36

    CPC分类号： H01J37/28 ,  H01J37/09 ,  H01J37/222 ,  H01J2237/0216 ,  H01J2237/223 ,  H01J2237/2817

    摘要： When a scanning image of a scanning charged particle microscope is impaired by an external disturbance, a disturbance frequency can be simply and precisely analyzed from the image in order to specify the external disturbance. The maximum frequency analyzable by the scanning charged particle microscope can also be increased up to several kHz, which is the rotation frequency of, for example, a turbo-molecular pump commonly used as an exhaust pump of the scanning charged particle microscope. In an FFT analysis of a stripe pattern which is an impairment of the scanning image, the scanning charged particle microscope performs a one-dimensional FFT (1D-FFT) in the Y-direction (sub-deflection direction of the charged particle beam) or a one-dimensional DFT (1D-DFT) in the X-direction (main deflection direction of the charged particle beam). To extend the analyzable maximum frequency up to several kHz, the scanning charged particle microscope also performs the 1D-FFT (or 1D-DFT) analysis in the X-direction (main deflection direction of the charged particle beam) along which the charged particle beam has a fast scanning speed.

    摘要翻译： 当扫描带电粒子显微镜的扫描图像被外部干扰削弱时，可以从图像中简单且精确地分析干扰频率，以便指定外部干扰。 通过扫描带电粒子显微镜可分析的最大频率也可以增加到几kHz，这是例如通常用作扫描带电粒子显微镜的排气泵的涡轮分子泵的旋转频率。 扫描带电粒子显微镜在对扫描图像的损伤的条纹图案进行FFT分析时，在Y方向（带电粒子束的副偏转方向）上进行一维FFT（1D-FFT）或 在X方向（带电粒子束的主偏转方向）上的一维DFT（1D-DFT）。 为了将可分析的最大频率扩展到几kHz，扫描带电粒子显微镜还可以在带电粒子束的X方向（带电粒子束的主偏转方向）上进行1D-FFT（或1D-DFT）分析 扫描速度快。