Plasma whirl reactor apparatus and methods of use
    3.
    发明授权
    Plasma whirl reactor apparatus and methods of use 有权
    等离子旋转反应器装置及使用方法

    公开(公告)号:US09445488B2

    公开(公告)日:2016-09-13

    申请号:US14217207

    申请日:2014-03-17

    发明人: Todd Foret

    摘要: A plasma system includes a plasma arc torch, a cylindrical tube and an eductor. The plasma arc torch includes a cylindrical vessel having a first end and a second end, a first tangential inlet/outlet connected to or proximate to the first end, a second tangential inlet/outlet connected to or proximate to the second end, an electrode housing connected to the first end such that a first electrode is (a) aligned with a longitudinal axis of the cylindrical vessel, and (b) extends into the cylindrical vessel, and a hollow electrode nozzle connected to the second end of the cylindrical vessel. The cylindrical tube is attached to the hollow electrode nozzle and aligned with the longitudinal axis, the cylindrical tube having a side inlet and a radio frequency coil disposed around or embedded within the cylindrical tube. The eductor is attached to the cylindrical tube and aligned with the longitudinal axis.

    摘要翻译: 等离子体系统包括等离子弧焊炬,圆柱形管和喷射器。 等离子弧焊炬包括具有第一端和第二端的圆柱形容器,连接到第一端或接近第一端的第一切向入口/出口,连接到第二端或靠近第二端的第二切向入口/出口,电极壳体 连接到第一端,使得第一电极(a)与圆柱形容器的纵向轴线对准,并且(b)延伸到圆柱形容器中,以及连接到圆柱形容器的第二端的中空电极喷嘴。 圆柱形管连接到中空电极喷嘴并与纵向轴线对齐,圆柱形管具有设置在圆柱形管周围或嵌入圆柱形管内的侧入口和射频线圈。 喷射器连接到圆柱形管并与纵向轴线对齐。

    Roller mold manufacturing device and manufacturing method
    4.
    发明授权
    Roller mold manufacturing device and manufacturing method 有权
    辊模制造装置及制造方法

    公开(公告)号:US09000325B2

    公开(公告)日:2015-04-07

    申请号:US13700783

    申请日:2011-06-08

    摘要: A phenomenon where a depicted pattern becomes unclear owing to a rotational runout of a roller mold in the direction of a rotary shaft is suppressed while restraining an increase in the cost. For the purpose of achieving the above, a roller mold manufacturing device (1) is provided with an electron beam irradiation device (2); a mask (3) which has an opening that allows passage of some of electron beams, and which forms a plurality of beams that perform simultaneous depiction on a resist; a rotation drive device (4) which rotates a roller mold (100) around a rotary shaft (8); a displacement amount detection sensor (5) which detects a rotational runout displacement amount of the roller mold (100) in the direction of the rotary shaft (8); a control device (6); and an actuator (7) which, based on a control signal from the control device (6), allows a depiction position by the electron beams to follow the displacement of the roller mold (100) in the direction of the rotary shaft (8), wherein misalignment of an exposed position of the resist, which is caused by rotational runout displacement of the roller mold (100) in the direction of the rotary shaft (8), is suppressed.

    摘要翻译: 在抑制成本增加的同时抑制了由于辊模在旋转轴的方向上的旋转跳动而导致的图形变得不清楚的现象。 为了实现上述目的,一种辊模制造装置(1)设置有电子束照射装置(2); 具有允许一些电子束通过的开口的掩模(3),并形成对抗蚀剂进行同时描绘的多个光束; 旋转驱动装置(4),其围绕旋转轴(8)旋转辊模具(100); 位移量检测传感器(5),其检测所述滚筒模具(100)沿所述旋转轴(8)的方向的旋转偏移位移量; 控制装置(6); 以及基于来自控制装置(6)的控制信号的致动器(7)允许电子束的描绘位置跟随滚子模具(100)沿旋转轴(8)的方向的位移, 其特征在于,抑制由所述辊模(100)沿所述旋转轴(8)的方向的旋转偏移而引起的所述抗蚀剂的露出位置的偏移。

    FORMING AN ELECTRON MICROSCOPE SAMPLE FROM HIGH-PRESSURE FROZEN MATERIAL
    6.
    发明申请
    FORMING AN ELECTRON MICROSCOPE SAMPLE FROM HIGH-PRESSURE FROZEN MATERIAL 有权
    从高压冷冻材料形成电子显微镜样品

    公开(公告)号:US20140014834A1

    公开(公告)日:2014-01-16

    申请号:US13934925

    申请日:2013-07-03

    申请人: FEI Company

    IPC分类号: B23K15/08 G01N1/06

    摘要: A method of forming a sample from a capillary with high-pressure frozen sample material comprises providing a high-pressure capillary with vitrified sample material at a temperature T1 below the glass transition temperature Tg, cutting the capillary, warming the capillary to a temperature T2 between temperature T1 and temperature Tg, cooling the capillary to a temperature T3 below temperature T2, as a result of which material is extruded from the capillary, and freeing a sample from the extruded sample material at a temperature below temperature Tg. Repeating this temperature cycle results in further extrusion of the sample material. The extruded material can then be sliced by, for example, ion beam milling.

    摘要翻译: 从具有高压冷冻样品的毛细管形成样品的方法包括在低于玻璃化转变温度Tg的温度T1下提供具有玻璃化样品的高压毛细管,切割毛细管,使毛细管升温至 温度T1和温度Tg,将毛细管冷却至低于温度T2的温度T3,结果从毛细管中挤出材料,并在低于Tg的温度下从挤出的样品材料中取出样品。 重复该温度循环导致样品材料的进一步挤出。 然后可以通过例如离子束研磨将挤出的材料切片。

    ROLLER MOLD MANUFACTURING DEVICE AND MANUFACTURING METHOD
    7.
    发明申请
    ROLLER MOLD MANUFACTURING DEVICE AND MANUFACTURING METHOD 有权
    滚筒模制造装置及制造方法

    公开(公告)号:US20130068734A1

    公开(公告)日:2013-03-21

    申请号:US13700783

    申请日:2011-06-08

    IPC分类号: B29C33/38

    摘要: A phenomenon where a depicted pattern becomes unclear owing to a rotational runout of a roller mold in the direction of a rotary shaft is suppressed while restraining an increase in the cost. For the purpose of achieving the above, a roller mold manufacturing device (1) is provided with an electron beam irradiation device (2); a mask (3) which has an opening that allows passage of some of electron beams, and which forms a plurality of beams that perform simultaneous depiction on a resist; a rotation drive device (4) which rotates a roller mold (100) around a rotary shaft (8); a displacement amount detection sensor (5) which detects a rotational runout displacement amount of the roller mold (100) in the direction of the rotary shaft (8); a control device (6); and an actuator (7) which, based on a control signal from the control device (6), allows a depiction position by the electron beams to follow the displacement of the roller mold (100) in the direction of the rotary shaft (8), wherein misalignment of an exposed position of the resist, which is caused by rotational runout displacement of the roller mold (100) in the direction of the rotary shaft (8), is suppressed.

    摘要翻译: 在抑制成本增加的同时抑制了由于辊模在旋转轴的方向上的旋转跳动而导致的图形变得不清楚的现象。 为了实现上述目的,一种辊模制造装置(1)设置有电子束照射装置(2); 具有允许一些电子束通过的开口的掩模(3),并且形成对抗蚀剂进行同时描绘的多个光束; 旋转驱动装置(4),其围绕旋转轴(8)旋转辊模具(100); 位移量检测传感器(5),其检测所述滚筒模具(100)沿所述旋转轴(8)的方向的旋转偏移位移量; 控制装置(6); 以及基于来自控制装置(6)的控制信号的致动器(7)允许电子束的描绘位置跟随滚子模具(100)沿旋转轴(8)的方向的位移, 其特征在于,抑制由所述辊模(100)沿所述旋转轴(8)的方向的旋转偏移而引起的所述抗蚀剂的露出位置的偏移。

    Laser drilling components
    8.
    发明授权
    Laser drilling components 有权
    激光钻孔部件

    公开(公告)号:US08164026B2

    公开(公告)日:2012-04-24

    申请号:US12216495

    申请日:2008-07-07

    申请人: Paul E. Williams

    发明人: Paul E. Williams

    IPC分类号: B23K26/38

    摘要: A method of drilling through a wall of a hollow component in which a high energy beam is directed at an outer surface of the wall and emerges into a cavity from an inner surface of the wall, comprising the step of providing in the cavity a medium comprising a ceramic dispersed within a silica sol.

    摘要翻译: 一种穿过中空部件的壁的方法,其中高能量​​光束被引导到壁的外表面并从壁的内表面排出到空腔中,包括在空腔中提供包括 分散在二氧化硅溶胶内的陶瓷。

    Stamping Tool and Treatment Method for Stamping Tool Surface
    9.
    发明申请
    Stamping Tool and Treatment Method for Stamping Tool Surface 有权
    冲压工具和冲压工具表面处理方法

    公开(公告)号:US20110061510A1

    公开(公告)日:2011-03-17

    申请号:US12878403

    申请日:2010-09-09

    IPC分类号: B26F1/44 G21K5/00

    摘要: To enable fabrication of a precise stamped product having an extremely low surface roughness. Ripples 24 having depths ranging from 10 to 100 nm are formed with periodicities ranging from 100 to 1000 nm on a stamping tool surface that comes into contact with a workpiece material. The ripples 24 have a stripe shape extending in a direction substantially perpendicular to the direction of sliding between the stamping tool (die 21) and the workpiece material (the direction of the arrow a). The ripples 24 serve as micro pools. For example, a product that is required to have a surface roughness of the order of several tens of nm or lower can be satisfactorily stamped.

    摘要翻译: 为了制造具有极低表面粗糙度的精密冲压产品。 在与工件材料接触的冲压工具表面上形成深度范围为10至100nm的波纹24,周期范围为100至1000nm。 波纹24具有在与冲压工具(模具21)和工件材料(箭头a的方向)之间的滑动方向基本垂直的方向上延伸的条纹形状。 波纹24作为微池。 例如,可以令人满意地冲压要求具有几十nm以下的表面粗糙度的产品。

    FLUID JET CUTTING SYSTEM WITH BED SLAT CAPS
    10.
    发明申请
    FLUID JET CUTTING SYSTEM WITH BED SLAT CAPS 审中-公开
    流体喷嘴切割系统与床单SLA CAPS

    公开(公告)号:US20100064870A1

    公开(公告)日:2010-03-18

    申请号:US12233004

    申请日:2008-09-18

    申请人: Carl C. Olsen

    发明人: Carl C. Olsen

    IPC分类号: B26F3/00

    摘要: A bed slat cap is configured to protect a bed slat in a fluid jet cutting system. A fluid jet cutting system includes a plurality of bed slats, at least some of the plurality of bed slats being protected by one or more corresponding bed slat caps. A bed slat cap may include a hardened material to protect the bed slat. A bed slat cap may include a material softer than the bed slaps to protect the bottom of a workpiece. A fluid jet bed slat may be constructed as a composite assembly including a support portion and one or more fluid jet impingement portions.

    摘要翻译: 床板盖被配置成保护流体喷射切割系统中的床板条。 流体射流切割系统包括多个床板,所述多个床板中的至少一些由一个或多个相应的床板盖保护。 床板条可以包括用于保护床板的硬化材料。 床板条可以包括比床垫更软的材料,以保护工件的底部。 流体喷射床板可以被构造为包括支撑部分和一个或多个流体喷射冲击部分的复合组件。