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公开(公告)号:US20220392955A1
公开(公告)日:2022-12-08
申请号:US17369917
申请日:2021-07-07
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Hung-Chan Lin , Yu-Ping Wang
Abstract: A method for fabricating a semiconductor device includes the steps of: forming a magnetic tunneling junction (MTJ) on a substrate; forming a first spin orbit torque (SOT) layer on the MTJ; forming a passivation layer around the MTJ; forming a second SOT layer on the first SOT layer and the passivation layer; and patterning the second SOT layer and the passivation layer.
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公开(公告)号:US20200176510A1
公开(公告)日:2020-06-04
申请号:US16214127
申请日:2018-12-09
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Hui-Lin Wang , Chia-Chang Hsu , Chen-Yi Weng , Hung-Chan Lin , Jing-Yin Jhang , Yu-Ping Wang
IPC: H01L27/22 , G11C11/16 , H01L23/48 , H01L23/485 , H01L23/544 , H01L21/321 , H01L21/762 , H01L43/12
Abstract: The disclosure provides a semiconductor memory device including a substrate having a memory cell region and an alignment mark region; a dielectric layer covering the memory cell region and the alignment mark region; conductive vias in the dielectric layer within the memory cell region; an alignment mark trench in the dielectric layer within the alignment mark region; and storage structures disposed on the conductive vias, respectively. Each of the storage structures includes a bottom electrode defined from a bottom electrode metal layer, a magnetic tunnel junction (MTJ) structure defined from an MTJ layer, and a top electrode. A residual metal stack is left in the alignment mark trench. The residual metal stack includes a portion of the bottom electrode metal layer and a portion of the MTJ layer.
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公开(公告)号:US10665772B2
公开(公告)日:2020-05-26
申请号:US16178542
申请日:2018-11-01
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Yu-Chun Chen , Ya-Sheng Feng , Chiu-Jung Chiu , Hung-Chan Lin
Abstract: A semiconductor device includes a magnetic tunneling junction (MTJ) on a substrate, a first spacer on one side of the MTJ, and a second spacer on another side of the MTJ, wherein the first spacer and the second spacer are asymmetric. Specifically, the MTJ further includes a first bottom electrode disposed on a metal interconnection, a capping layer on the bottom electrode, and a top electrode on the capping layer, in which a top surface of the first spacer is even with a top surface of the top electrode and a top surface of the second spacer is lower than the top surface of the top electrode and higher than the top surface of the capping layer.
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公开(公告)号:US20200111950A1
公开(公告)日:2020-04-09
申请号:US16178542
申请日:2018-11-01
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Yu-Chun Chen , Ya-Sheng Feng , Chiu-Jung Chiu , Hung-Chan Lin
Abstract: A semiconductor device includes a magnetic tunneling junction (MTJ) on a substrate, a first spacer on one side of the MTJ, and a second spacer on another side of the MTJ, wherein the first spacer and the second spacer are asymmetric. Specifically, the MTJ further includes a first bottom electrode disposed on a metal interconnection, a capping layer on the bottom electrode, and a top electrode on the capping layer, in which a top surface of the first spacer is even with a top surface of the top electrode and a top surface of the second spacer is lower than the top surface of the top electrode and higher than the top surface of the capping layer.
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公开(公告)号:US10249528B2
公开(公告)日:2019-04-02
申请号:US15681419
申请日:2017-08-20
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chiu-Jung Chiu , Hung-Chan Lin , Yu-Chun Chen
IPC: H01L21/762 , H01L21/02 , H01L27/06 , H01L21/768 , H01L29/94 , H01L49/02 , H01L21/8234 , H01L21/28
Abstract: An integrated circuit includes a first insulation layer, a bottom plate, a first patterned dielectric layer, a medium plate, a second patterned dielectric layer, and a top plate. The first patterned dielectric layer is disposed on the bottom plate. The medium plate is disposed on the first patterned dielectric layer. At least a part of the first patterned dielectric layer and the medium plate and a part of the bottom plate are disposed in a first trench penetrating the first insulation layer. The bottom plate, the first patterned dielectric layer, and the medium plate constitute a first metal-insulator-metal (MIM) capacitor. The second patterned dielectric layer is disposed on the medium plate. The top plate is disposed on the second patterned dielectric layer. The medium plate, the second patterned dielectric layer, and the top plate constitute a second MIM capacitor. The bottom plate is electrically connected with the top plate.
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公开(公告)号:US10032777B1
公开(公告)日:2018-07-24
申请号:US15613288
申请日:2017-06-05
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Hsin-Wen Chen , Chi-Chang Shuai , Hung-Chan Lin , Ting-Hao Chang , Hsien-Hung Tsai
IPC: H01L27/108 , G06F12/0846
Abstract: An array of dynamic random access memory cells includes a first set of memory cell pairs in a first row, a second set of memory cells in a second row, and a first set of bit line contacts in the first row. The second set of memory cell pairs are disposed adjacent to the first set of memory cell pairs, and each two of the memory cell pairs in the second row include a common S/D region. Each of the first set of bit line contacts is electrically coupled to each of the common S/D regions of the memory cell pairs in the second row respectively.
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公开(公告)号:US12262544B2
公开(公告)日:2025-03-25
申请号:US18595363
申请日:2024-03-04
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Hung-Chan Lin , Yu-Ping Wang
Abstract: A method for fabricating a semiconductor device includes the steps of: forming a magnetic tunneling junction (MTJ) on a substrate; forming a first spin orbit torque (SOT) layer on the MTJ; forming a passivation layer around the MTJ; forming a second SOT layer on the first SOT layer and the passivation layer, and patterning the second SOT layer and the passivation layer.
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公开(公告)号:US12190926B2
公开(公告)日:2025-01-07
申请号:US18108025
申请日:2023-02-10
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Hung-Chan Lin , Jia-Rong Wu , Yi-Ting Wu
Abstract: A layout pattern of a magnetoresistive random access memory (MRAM) includes a substrate having a first cell region, a second cell region, a third cell region, and a fourth cell region, a first gate pattern extending from the first cell region to the third cell region along a first direction, a first diffusion region extending from the first cell region to the second cell region along a second direction, a first metal pattern adjacent to one side of the first gate pattern and overlapping the first diffusion region, a source line pattern extending from the first cell region to the second cell region along the second direction, and a first spin orbit torque (SOT) pattern extending along the first direction and overlapping the first metal pattern and the source line pattern.
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公开(公告)号:US11968911B2
公开(公告)日:2024-04-23
申请号:US17518571
申请日:2021-11-03
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Hung-Chan Lin , Yu-Ping Wang , Chien-Ting Lin
Abstract: A method for fabricating a semiconductor device includes the steps of: forming a magnetic tunneling junction (MTJ) stack on a substrate; forming a first spin orbit torque (SOT) layer on the MTJ stack; forming a first hard mask on the first SOT layer; and using a second hard mask to pattern the first hard mask, the first SOT layer, and the MTJ stack to form a MTJ.
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公开(公告)号:US11956973B2
公开(公告)日:2024-04-09
申请号:US17369917
申请日:2021-07-07
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Hung-Chan Lin , Yu-Ping Wang
Abstract: A method for fabricating a semiconductor device includes the steps of: forming a magnetic tunneling junction (MTJ) on a substrate; forming a first spin orbit torque (SOT) layer on the MTJ; forming a passivation layer around the MTJ; forming a second SOT layer on the first SOT layer and the passivation layer; and patterning the second SOT layer and the passivation layer.
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