公开(公告)号：US20150340410A1

公开(公告)日：2015-11-26

申请号：US14698352

申请日：2015-04-28

Applicant: Universal Display Corporation

Inventor： Michael HACK ,  Michael Stuart WEAVER ,  Ruiqing MA ,  William E. QUINN ,  Gregory MCGRAW

IPC: H01L27/32 ,  H01L51/56

CPC classification number: H01L27/3218 ,  H01L27/3213 ,  H01L27/322 ,  H01L51/5265 ,  H01L51/56 ,  H01L2251/5315

Abstract: Full-color pixel arrangements for use in devices such as OLED displays are provided, in which multiple sub-pixels are configured to emit different colors of light, with each sub-pixel having a different optical path length than some or all of the other sub-pixels within the pixel.

Abstract translation: 提供了用于诸如OLED显示器的设备中的全色像素布置，其中多个子像素被配置为发射不同颜色的光，其中每个子像素具有不同于其他子像素的部分或全部的光程长度 像素内的像素。

公开(公告)号：US20240247375A1

公开(公告)日：2024-07-25

申请号：US18625401

申请日：2024-04-03

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  William E. QUINN ,  Gregg KOTTAS ,  Siddharth HARIKRISHNA MOHAN ,  Matthew KING

IPC: C23C16/455 ,  B41J2/00 ,  C23C14/12 ,  C23C14/24 ,  H10K71/13

CPC classification number: C23C16/45563 ,  B41J2/00 ,  C23C14/12 ,  C23C14/24 ,  C23C14/243 ,  C23C16/45519 ,  H10K71/135

Abstract: Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.

公开(公告)号：US20230232697A1

公开(公告)日：2023-07-20

申请号：US18103667

申请日：2023-01-31

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Gregory MCGRAW ,  Gregg KOTTAS ,  Xin XU ,  Julia J. BROWN

IPC: B41J2/11 ,  B05B12/18

CPC classification number: H10K71/13 ,  B05B12/18 ,  H10K50/11 ,  H10K71/00 ,  H10K2101/10 ,  H10K2101/40

Abstract: Embodiments of the disclosed subject matter provide a device including a micronozzle array having separate redundant groups of depositors that each include a delivery aperture disposed between two exhaust apertures. The device may include a first row of depositors of a first redundant group, each of which may be connected in parallel to first common delivery lines and first common exhaust lines. The device may include a second row of depositors of a second redundant group, each of which is connected in parallel to second common delivery and second common exhaust lines. The first row of depositors and the second row of depositors may operate independently from one another. The device may be disposed within a deposition chamber and in proximity of a substrate.

公开(公告)号：US20230063757A1

公开(公告)日：2023-03-02

申请号：US17880130

申请日：2022-08-03

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Craig Anthony OUTTEN ,  Gregory MCGRAW ,  Kent Khuong NGUYEN ,  Steven Shigeki AOCHI ,  Neil D. NGUYEN ,  David SMILEY ,  Michael FILIPPI

IPC: B05B7/16

Abstract: An organic vapor jet printing (OVJP) device is provided that includes an OVJP print head having a nozzle configured to eject an organic material entrained in a carrier gas, one or more heaters to heat the nozzle, and one or more heat sinks to remove heat from the region of the nozzle. OVJP deposition devices and techniques are also provided in which heat sinks are arranged in the region of one or more OVJP nozzle, which maintain an ambient temperature of not more than 40 C. when the print head is operated at an operating temperature of 450 C.

公开(公告)号：US20230011198A1

公开(公告)日：2023-01-12

申请号：US17848674

申请日：2022-06-24

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Craig Anthony Outten ,  Kent Khuong Nguyen ,  Steven Shigeki Aochi ,  Neil D. NGUYEN

IPC: C23C14/24 ,  C23C14/12 ,  C23C14/04

Abstract: Embodiments of the disclosed subject matter provide a system having at least one carrier gas source, at least one heated container that includes organic material, and a jet array print head that includes a plurality of apertures to print lines on a substrate, and that is connected to a vacuum source. The system includes a pair of gas bearing plates, with a top gas bearing plate and a bottom gas bearing plate, each having a plurality of pressure apertures and vacuum apertures. The top gas bearing plate applies a uniform force to a top surface of the substrate, and the bottom gas bearing plate applies a uniform force to a bottom surface of the substrate. The top gas bearing plate includes a slot configured for the print head to fit within. The vacuum apertures are arranged perpendicular to a direction of travel of the substrate.

公开(公告)号：US20220190245A1

公开(公告)日：2022-06-16

申请号：US17549066

申请日：2021-12-13

Applicant: Universal Display Corporation

Inventor： Kent Khuong NGUYEN ,  Sriram KRISHNASWAMI ,  Daniel TOET ,  Jeff HAWTHORNE ,  William E. QUINN

IPC: H01L51/00

Abstract: Systems and methods for depositing materials on a substrate via OVJP are provided. A float table and grippers are used to move and position the substrate relative to one or more OVJP print bars to reduce the chance of damaging or compromising the substrate or prior depositions.

公开(公告)号：US20210351385A1

公开(公告)日：2021-11-11

申请号：US17224240

申请日：2021-04-07

Applicant: Universal Display Corporation

Inventor： Matthew KING ,  Gregg KOTTAS ,  Gregory MCGRAW ,  William E. QUINN

IPC: H01L51/56 ,  H01L51/00 ,  B41J2/14

Abstract: Embodiments of the disclosed subject matter provide an apparatus having a device with a micronozzle array disposed on a micro-fabricated fluidic die. The device may include a first gas distribution plate and a second opposing plate, where the micro-fabricated fluidic die is disposed between the first gas distribution plate and the second opposing plate, wherein the first gas distribution plate is irreversibly joined to the micronozzle array with a seal that is gas-tight, and where the first gas distribution plate includes a plurality of sealed flow paths. A manifold may be reversibly joined to the first gas distribution plate, where the micro-fabricated fluidic die and the first gas distribution plate and the second opposing plate are disposed between the manifold. A thermally conductive plate may have at least one window that provides a clearance fit for the device across a range of motion relative to the thermally conductive plate.

公开(公告)号：US20210280785A1

公开(公告)日：2021-09-09

申请号：US16331615

申请日：2017-10-18

Applicant: Universal Display Corporation

Inventor： Xin XU ,  Gregory MCGRAW ,  William E. QUINN

IPC: H01L51/00 ,  C23C14/22 ,  C23C14/12 ,  C23C14/24

Abstract: Devices and techniques are provided for depositing material on a substrate, such as for fabrication of OLEDs and layers used in OLEDs. A depositor block includes one or more delivery apertures, one or more exhaust apertures, and one or more confinement gas channels. Each delivery aperture is arranged such that it is between an exhaust aperture and a confinement gas channel, thereby improving deposition by reducing overspray of material.

公开(公告)号：US20210167291A1

公开(公告)日：2021-06-03

申请号：US17142490

申请日：2021-01-06

Applicant: Universal Display Corporation

Inventor： Michael HACK ,  William E. QUINN ,  Gregory MCGRAW ,  William T. MAYWEATHER, III ,  Julia J. BROWN

IPC: H01L51/00 ,  C23C16/30 ,  H01L51/52 ,  H01L51/50

Abstract: Embodiments of the disclosed subject matter provide systems and methods of depositing a film on a selective area of a substrate. A first jet of a first material may be ejected from a first nozzle assembly of a jet head having a plurality of nozzle assemblies to form a first portion of a film deposition on the substrate. A second jet of a second material may be ejected from a second nozzle assembly of the plurality of nozzle assemblies, the second nozzle assembly being aligned with the first nozzle assembly parallel to a direction of motion between the plurality of nozzle assemblies and the substrate, and the second material being different than the first material. The second material may react with the first portion of the film deposition to form a composite film deposition on the substrate when using reactive gas precursors.

公开(公告)号：US20210119175A1

公开(公告)日：2021-04-22

申请号：US17136404

申请日：2020-12-29

Applicant: Universal Display Corporation

Inventor： Siddharth HARIKRISHNA MOHAN ,  William E. QUINN ,  Ruiqing MA ,  Emory KRALL ,  Luke WALSKI

IPC: H01L51/52 ,  H01L27/32 ,  H01L51/00 ,  H01L51/50 ,  H01L51/56

Abstract: A novel thin film encapsulated OLED panel architecture and a method for making the panels with improved shelf life is disclosed. The OLED panel consists of a plurality of OLED pixels; each OLED pixel is individually hermetically sealed and isolated from its neighboring pixels. The organic stack of the OLED pixel is contained within its own hermetically sealed structure, achieved by making the structure on a barrier coated substrate and using a first barrier material as the grid and a second barrier for encapsulating the entire OLED pixel. The first barrier material provides the edge seal while the second barrier disposed over the pixel provides protection from top down moisture diffusion. By isolating and hermetically sealing individual pixels; any damage such as moisture and oxygen ingress due to defects or particles, delamination, cracking etc. can be effectively contained within the pixel thereby protecting other pixels in the panel.