Silica zeolite low-k dielectric thin films and methods for their production
    21.
    发明授权
    Silica zeolite low-k dielectric thin films and methods for their production 有权
    二氧化硅沸石低k电介质薄膜及其制备方法

    公开(公告)号:US06573131B2

    公开(公告)日:2003-06-03

    申请号:US09900386

    申请日:2001-07-06

    Abstract: Thin films for use as dielectric in semiconductor and other devices are prepared from silica zeolites, preferably pure silica zeolites such as pure-silica MFI. The films have low k values, generally below about 2.7, ranging downwards to k values below 2.2. The films have relatively uniform pore distribution, good mechanical strength and adhesion, are relatively little affected by moisture, and are thermally stable. The films may be produced from a starting zeolite synthesis or precursor composition containing a silica source and an organic zeolite structure-directing agent such as a quaternary ammonium hydroxide. In one process the films are produced from the synthesis composition by in-situ crystallization on a substrate. In another process, the films are produced by spin-coating, either through production of a suspension of zeolite crystals followed by redispersion or by using an excess of the alkanol produced in preparing the synthesis composition. Zeolite films having patterned surfaces may also be produced.

    Abstract translation: 用于半导体和其它器件中的电介质的薄膜由二氧化硅沸石,优选纯二氧化硅沸石如纯二氧化硅MFI制备。 电影具有低k值,一般低于2.7左右,低于2.2以下的k值。 这些膜具有相对均匀的孔分布,良好的机械强度和粘附性,相对较少受水分的影响,并且是热稳定的。 膜可以由起始沸石合成或含有二氧化硅源和有机沸石结构导向剂如氢氧化季铵的前体组合物制备。 在一个过程中,通过在基底上原位结晶从合成组合物制备薄膜。 在另一种方法中,通过旋涂来生产薄膜,无论是通过生产沸石晶体的悬浮液,然后再分散,或通过使用过量的制备合成组合物中生成的链烷醇。 也可以生产具有图案化表面的沸石膜。

    Hydrophilic zeolite coating
    23.
    发明授权
    Hydrophilic zeolite coating 失效
    亲水性沸石涂层

    公开(公告)号:US06500490B1

    公开(公告)日:2002-12-31

    申请号:US09535000

    申请日:2000-03-23

    Applicant: Yushan Yan

    Inventor: Yushan Yan

    Abstract: A hydrophilic coating can be optionally corrosion resistant and/or microbial resistant for a substrate such as a heat exchanger. The coating is provided by a zeolite layer that can be formed from a synthesis solution comprising a structure directing agent, a base, a silicon source, an aluminum source, and a solvent. In one preferred embodiment, the synthesis solution comprises tetrapropylammonium hydroxide, sodium hydroxide, aluminum oxide, tetraethylorthosilicate, and water. The layer is characterized by a zeolite MFI structure and by a composition having the formula of Mn/m[AlnSi(96−n)O192], or [AlnSi(96−n)O192]·4[(CH3CH2CH2)4N—OH] wherein M is a metal ion of valence m+ (e.g., Na+) and 27>n>=0. After formation of the coating, the organic structure directing agent can be left intact inside the zeolite coating to make the coating corrosion resistant. Alternatively, and after removal of the organic structure directing agent, a biocidal metal ion can be incorporated into the coating by an ion exchange process to render the coating microbial resistant. A hydrophilic coating that is also corrosion resistant and microbial resistant can be made by a zeolite coating with two sub-layers—the bottom sub-layer being corrosion resistant and the top sub-layer being microbial resistant.

    Abstract translation: 对于诸如热交换器的基底,亲水涂层可以任选地具有耐腐蚀性和/或微生物性。 该涂层由可由包含结构导向剂,碱,硅源,铝源和溶剂的合成溶液形成的沸石层提供。 在一个优选实施方案中,合成溶液包括四丙基氢氧化铵,氢氧化钠,氧化铝,原硅酸四乙酯和水。 该层的特征在于沸石MFI结构和通式为Mn / m [AlnSi(96-n)O192]或[AlnSi(96-n)O192] .4 [(CH3CH2CH2)4N-OH] 其中M是价数m +(例如Na +)和27> n> = 0的金属离子。 在形成涂层之后,有机结构导向剂可以保持在沸石涂层内部,使涂层具有耐腐蚀性。 或者,除去有机结构导向剂后,可以通过离子交换法将杀生物金属离子引入涂层中,以使涂层微生物具有抗性。 也可以通过具有两个子层的沸石涂层来制备也具有耐腐蚀和微生物抵抗性的亲水性涂层 - 底部亚层是耐腐蚀的,顶部亚层是微生物抗性的。

    Highly basic ionomers and membranes and anion/hydroxide exchange fuel cells comprising the ionomers and membranes
    24.
    发明授权
    Highly basic ionomers and membranes and anion/hydroxide exchange fuel cells comprising the ionomers and membranes 有权
    高度基本的离聚物和膜和阴离子/氢氧化物交换包含离聚物和膜的燃料电池

    公开(公告)号:US08535586B2

    公开(公告)日:2013-09-17

    申请号:US13091122

    申请日:2011-04-20

    Abstract: A family of functionalized polymers is provided capable of forming membranes having exceptional OH− ionic conductivity as well as advantageous mechanical properties, which may be applied to membranes including such polymers for use in, e.g., AEMFC/HEMFC fuel cells. Preferred functional groups include a quaternary phosphonium, and the polymer may specifically be (tris(2,4,6-trimethoxyphenyl) phosphine)3 functionalized phosphonium polysulfone hydroxide, ECL-PVBC-QPOH, or QPOH based on any of the commercial polumers including polycarbonate (PC), poly(2,6-dimethyl-1,4-phenylene oxide) (PPO), polyetherimine (PEI), poly(ether sulfone) (PES), poly(phenylene sulfoxide) PPS, poly(ether ether ketone) (PEEK), or polybenzimidazole (PBI), polyvinyl chloride (PVC). An ionomer membrane may include polysulfone based TPQPOH, ECL-PVBC-QPOH, and/or PPO.

    Abstract translation: 提供了一系列官能化聚合物,其能够形成具有特殊OH-离子导电性的膜以及有利的机械性能,其可以应用于包括用于例如AEMFC / HEMFC燃料电池的这种聚合物的膜。 优选的官能团包括季鏻,并且该聚合物可以具体为(三(2,4,6-三甲氧基苯基)膦)3官能化鏻聚砜氢氧化物,ECL-PVBC-QPOH或QPOH,其基于包括聚碳酸酯 (PC),聚(2,6-二甲基-1,4-亚苯基氧化物)(PPO),聚醚亚胺(PEI),聚(醚砜)(PES),聚(亚苯基亚砜)PPS,聚(醚醚酮) (PEEK)或聚苯并咪唑(PBI),聚氯乙烯(PVC)。 离聚物膜可以包括基于聚砜的TPQPOH,ECL-PVBC-QPOH和/或PPO。

    ZEOLITE AND BONE MIMETIC ZEOLITE BASED COATINGS FOR BIOIMPLANTS
    25.
    发明申请
    ZEOLITE AND BONE MIMETIC ZEOLITE BASED COATINGS FOR BIOIMPLANTS 审中-公开
    沸石和骨骼基于硅胶的沸石涂料

    公开(公告)号:US20110129925A1

    公开(公告)日:2011-06-02

    申请号:US12997849

    申请日:2009-06-12

    Abstract: The disclosure provides biocompatible metal compositions, methods of making such compositions and uses thereof, including a method of synthesizing zeolite coatings. The disclosure further provides the zeolite-hydroxyapatite composite coatings and methods of making them, which includes forming a base zeolite layer, forming a hydroxyapatite layer on the base zeolite layer, and interlocking the hydroxyapatite layer with an outer zeolite layer. The composite can be formed on a metal substrate for bioimplants, such as titanium alloy and/or stainless steel, which is used for bioimplants.

    Abstract translation: 本公开提供生物相容性金属组合物,制备这种组合物的方法及其用途,包括合成沸石涂层的方法。 本发明还提供了沸石 - 羟基磷灰石复合涂层及其制备方法,其包括形成基础沸石层,在基础沸石层上形成羟基磷灰石层,并将羟基磷灰石层与外部沸石层互锁。 该复合材料可以在用于生物材料的生物材料如钛合金和/或不锈钢的金属基底上形成。

    POST-SPIN-ON SILYLATION METHOD FOR HYDROPHOBIC AND HYDROFLUORIC ACID-RESISTANT POROUS SILICA FILMS
    26.
    发明申请
    POST-SPIN-ON SILYLATION METHOD FOR HYDROPHOBIC AND HYDROFLUORIC ACID-RESISTANT POROUS SILICA FILMS 审中-公开
    用于疏水性和耐油酸性多孔硅胶膜的后置硅烷化方法

    公开(公告)号:US20100249445A1

    公开(公告)日:2010-09-30

    申请号:US12730850

    申请日:2010-03-24

    CPC classification number: H01L21/3105

    Abstract: A method of silylating porous silica films comprises: preparing a porous silica film; and grafting the film with a hydrophobic functional group while annealing the film. The porous silica film is a sol-gel silica film, a mesoporous silica film, in situ crystallized polycrystalline pure-silica zeolite (PSZ), spin-on PSZ, and spin-on PSZ MEL (or PSZ MEL-structural type) films. The hydrophobic functional group is trimethylchlorosilane (TMCS); dimethyldichlorosilane; methyltrichlorosilane; alkylchlorosilanes, such as (CH3(CH2)n)xSiCl4-x, where x is 1, 2, or 3; alkoxychlorosilanes; hexamethyldisilazane (HMDS), and/or aminosilanes. In addition, the steps of grafting and annealing the film are performed simultaneously, which imparts hydrofluoric acid resistance and reduces moisture adsorption to the film.

    Abstract translation: 甲硅烷基化多孔二氧化硅膜的方法包括:制备多孔二氧化硅膜; 并在使膜退火的同时用疏水官能团接枝该膜。 多孔二氧化硅膜是溶胶 - 凝胶二氧化硅膜,介孔二氧化硅膜,原位结晶多晶纯二氧化硅沸石(PSZ),旋涂PSZ和旋涂PSZ MEL(或PSZ MEL结构型)膜。 疏水官能团为三甲基氯硅烷(TMCS); 二甲基二氯硅烷; 甲基三氯硅烷; 烷基氯硅烷,如(CH 3(CH 2)n)x SiCl 4-x,其中x为1,2或3; 烷氧基氯硅烷; 六甲基二硅氮烷(HMDS)和/或氨基硅烷。 此外,同时进行接枝和退火膜的步骤,这赋予耐氢氟酸性并降低对膜的吸湿性。

    AMBIENT PRESSURE SYNTHESIS OF ZEOLITE FILMS AND THEIR APPLICATION AS CORROSION RESISTANT COATINGS
    27.
    发明申请
    AMBIENT PRESSURE SYNTHESIS OF ZEOLITE FILMS AND THEIR APPLICATION AS CORROSION RESISTANT COATINGS 审中-公开
    沸石薄膜的环境压力合成及其作为耐腐蚀涂料的应用

    公开(公告)号:US20100119736A1

    公开(公告)日:2010-05-13

    申请号:US12575433

    申请日:2009-10-07

    CPC classification number: C01B39/38 C01B39/36 C01B39/54 C23C18/1212 Y02P20/542

    Abstract: A method for producing zeolite films or membranes at essentially ambient pressure, which includes preparing a synthesis mixture comprising an ionic liquid solvent and an aluminum and/or silicon and/or phosphate source and converting the synthesis mixture to form a continuous zeolite layer. In addition, a method of synthesizing zeolite nanocrystals, which includes preparing a synthesis mixture, the synthesis mixture having a silica or a silica and alumina source, and a template; and synthesizing the synthesis mixture to form zeolite nanocrystals.

    Abstract translation: 一种在基本环境压力下生产沸石膜或膜的方法,其包括制备包含离子液体溶剂和铝和/或硅和/或磷酸盐源的合成混合物,并转化合成混合物以形成连续的沸石层。 此外,合成沸石纳米晶体的方法,其包括制备合成混合物,具有二氧化硅或二氧化硅和氧化铝源的合成混合物和模板; 并合成合成混合物以形成沸石纳米晶体。

    Hydrophilic zeolite coating
    28.
    发明授权
    Hydrophilic zeolite coating 失效
    亲水性沸石涂层

    公开(公告)号:US06849568B2

    公开(公告)日:2005-02-01

    申请号:US10319027

    申请日:2002-12-12

    Applicant: Yushan Yan

    Inventor: Yushan Yan

    Abstract: A hydrophilic coating can be optionally corrosion resistant and/or microbial resistant for a substrate such as a heat exchanger. The coating is provided by a zeolite layer that can be formed from a synthesis solution comprising a structure directing agent, a base, a silicon source, an aluminum source, and a solvent. In one preferred embodiment, the synthesis solution comprises tetrapropylammonium hydroxide, sodium hydroxide, aluminum oxide, tetraethylorthosilicate, and water. The layer is characterized by a zeolite MFI structure and by a composition having the formula of Mn/m[AlnSi(96-n)O192], or [AlnSi(96-n)O192].4[(CH3CH2CH2)4N—OH] wherein M is a metal ion of valence m+ (e.g., Na+) and 27>n>=0. After formation of the coating, the organic structure directing agent can be left intact inside the zeolite coating to make the coating corrosion resistant. Alternatively, and after removal of the organic structure directing agent, a biocidal metal ion can be incorporated into the coating by an ion exchange process to render the coating microbial resistant. A hydrophilic coating that is also corrosion resistant and microbial resistant can be made by a zeolite coating with two sub-layers—the bottom sub-layer being corrosion resistant and the top sub-layer being microbial resistant.

    Abstract translation: 对于诸如热交换器的基底,亲水涂层可以任选地具有耐腐蚀性和/或微生物性。 该涂层由可由包含结构导向剂,碱,硅源,铝源和溶剂的合成溶液形成的沸石层提供。 在一个优选实施方案中,合成溶液包括四丙基氢氧化铵,氢氧化钠,氧化铝,原硅酸四乙酯和水。 该层的特征在于沸石MFI结构和通式为Mn / m [AlnSi(96-n)O192]或[AlnSi(96-n)O192] .4 [(CH3CH2CH2)4N-OH] 其中M是价数m +(例如Na +)和27> n> = 0的金属离子。 在形成涂层之后,有机结构导向剂可以保持在沸石涂层内部,使涂层具有耐腐蚀性。 或者,除去有机结构导向剂后,可以通过离子交换法将杀生物金属离子引入涂层中,以使涂层微生物具有抗性。 也可以通过具有两个子层的沸石涂层来制备也具有耐腐蚀和微生物抵抗性的亲水性涂层 - 底部亚层是耐腐蚀的,顶部亚层是微生物抗性的。

    Silica zeolite low-k dielectric thin films

    公开(公告)号:US06630696B2

    公开(公告)日:2003-10-07

    申请号:US10112162

    申请日:2002-03-28

    Abstract: Thin films for use as dielectric in semiconductor and other devices are prepared from silica zeolites, preferably pure silica zeolites such as pure-silica MFI. The films have low k values, generally below about 2.7, ranging downwards to k values below 2.2. The films have relatively uniform pore distribution, good mechanical strength and adhesion, are relatively little affected by moisture, and are thermally stable. The films may be produced from a starting zeolite synthesis or precursor composition containing a silica source and an organic zeolite structure-directing agent such as a quaternary ammonium hydroxide. In one process the films are produced from the synthesis composition by in-situ crystallization on a substrate. In another process, the films are produced by spin-coating, either through production of a suspension of zeolite crystals followed by redispersion or by using an excess of the alkanol produced in preparing the synthesis composition. Zeolite films having patterned surfaces may also be produced.

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