COATING DEVICE AND COATING METHOD
    21.
    发明申请

    公开(公告)号:US20190193103A1

    公开(公告)日:2019-06-27

    申请号:US16232161

    申请日:2018-12-26

    发明人: Satoshi TOMOEDA

    IPC分类号: B05C5/02 B05D1/26

    CPC分类号: B05C5/02 B05D1/26

    摘要: A coating device includes a nozzle, a pressure wave imparting component, and a controller. For each discharge of the coating liquid, the controller causes the pressure wave imparting component to perform a shaking operation that generates a pressure wave in the coating liquid inside the nozzle to an extent that a droplet is not discharged from the nozzle and the coating liquid is shaken in the nozzle, and a discharge operation that generates a pressure wave in the coating liquid inside the nozzle to an extent that a droplet is discharged from the nozzle after the shaking operation. The drive of the pressure wave imparting component in the shaking operation and the drive of the pressure wave imparting component in the discharge operation are kept constant, and a waiting time between the shaking operation and the discharge operation is adjusted.