公开(公告)号：US5417120A

公开(公告)日：1995-05-23

申请号：US072811

申请日：1993-06-07

Applicant: Rand H. Hulsing, II

Inventor： Rand H. Hulsing, II

IPC: G01L1/10 ,  G01L1/18 ,  G01L1/00

CPC classification number: G01L1/10 ,  G01L1/183

Abstract: A vibrating beam force transducer is comprised of an oscillating sensing element having an output frequency indicative of the force applied to the sensing element. The sensing element has a variable electrical resistance which can vary in accordance with temperature fluctuations over the operating range of the transducer.A drive circuit utilizes an AC drive signal source that is electrically coupled to the sensing element to drive the sensing element at its resonant frequency which is a function of the force applied to the sensing element. The drive circuit has a DC compensation circuit that alters the electrical characteristics of the drive circuit in response to variations in the electrical resistance of the sensing element.

Abstract translation: 振动梁力传感器包括具有指示施加到感测元件的力的输出频率的振荡感测元件。 感测元件具有可变电阻，其可以根据换能器的操作范围上的温度波动而变化。 驱动电路使用电耦合到感测元件的AC驱动信号源来驱动感测元件处于其感应元件的共振频率，该谐振频率是施加到感测元件的力的函数。 驱动电路具有DC补偿电路，其响应于感测元件的电阻的变化而改变驱动电路的电特性。

公开(公告)号：US5275055A

公开(公告)日：1994-01-04

申请号：US937068

申请日：1992-08-31

Applicant: James D. Zook ,  David W. Burns

Inventor： James D. Zook ,  David W. Burns

IPC: G01P15/10 ,  G01B7/16 ,  G01L1/18 ,  G01L9/00 ,  G01L9/08 ,  G01P15/08 ,  G01P15/097

CPC classification number: G01P15/097 ,  G01B7/16 ,  G01L1/183 ,  G01L9/0019 ,  Y10S73/01

Abstract: A resonant strain gauge includes a silicon substrate, a polysilicon flexure beam attached at both ends to the substrate, and a polysilicon rigid cover cooperating with the substrate to enclose the flexure beam within a sealed vacuum chamber. An upper bias electrode is formed on the cover, and a lower bias electrode is formed on the substrate directly beneath and spaced apart from the flexure beam. A drive electrode is formed in or on the beam, centered between the upper and lower bias electrodes transversely with respect to the direction of beam elongation. The upper and lower electrodes are biased at constant voltage levels, of equal magnitude and opposite polarity. The drive electrode, ordinarily biased at ground, is selectively charged by applying an oscillating drive voltage, to cause mechanical oscillation of the beam. A piezoresistor element, formed on the beam, senses beam oscillation and provides a position indicating input to the oscillator circuit that drives the beam. The beam tends to oscillate at its natural resonant frequency. The piezoresistor thus provides the natural resonant frequency to the oscillating circuit, adjusting the frequency of the beam drive signal toward coincidence with the natural resonant frequency. A shield electrode can be formed on the flexure beam between the piezoresistor and the drive electrode, to insure against parasitic capacitance. In alternative embodiments, the drive signal is applied to one of the bias electrodes to oscillate the beam, and beam oscillation is sensed capacitively.

Abstract translation: 共振应变计包括硅衬底，在两端附着到衬底的多晶硅弯曲梁和与衬底配合的多晶硅刚性盖，以将挠曲梁封闭在密封的真空室内。 在盖上形成上部偏置电极，并且在基板上直接形成下部偏置电极，并将其与挠曲梁间隔开。 驱动电极形成在梁上或梁上，中心在上偏置电极和下偏置电极之间横向相对于光束伸长方向。 上电极和下电极以恒定的电压电平被偏置，具有相等的幅度和相反的极性。 通常施加在地面上的驱动电极通过施加振荡驱动电压来选择性地充电，以引起光束的机械振荡。 形成在光束上的压敏电阻元件感测光束振荡，并提供指示输入到驱动光束的振荡器电路的位置。 光束倾向于以其固有谐振频率振荡。 因此，压电晶体管向振荡电路提供固有谐振频率，从而将光束驱动信号的频率调整为与固有谐振频率一致。 可以在压敏电阻和驱动电极之间的挠曲束上形成屏蔽电极，以确保寄生电容。 在替代实施例中，将驱动信号施加到偏置电极之一以振荡该光束，并且电容地感测光束振荡。

公开(公告)号：US5165289A

公开(公告)日：1992-11-24

申请号：US551523

申请日：1990-07-10

Applicant: Hendrikus A. C. Tilmans

Inventor： Hendrikus A. C. Tilmans

IPC: G01L1/18 ,  G01L9/00 ,  G01P15/097 ,  G01P15/10

CPC classification number: G01P15/097 ,  G01L1/183 ,  G01L9/0042 ,  G01L9/008

Abstract: The sensor according to the present invention provides a device for measuring the magnitude of an applied load as a shift in resonant frequency of a mechanical resonator caused by load-induced strains on the resonator. The sensor includes a substrate, generally constructed of a semiconductor material, e.g. silicon, a diaphragm substantially supported along its outer periphery by the substrate, a boss abutting a region of the diaphragm remote from the outer periphery of the diaphragm, at least one resonator in the form of a beam having one end integral to the diaphragm proximate the region of the boss and the other end integral to the diaphragm remote from the boss, a hermetic seal for enclosing the resonator, and an exciter/detector for measuring changes in the natural frequency of the resonator due to an applied load. Preferably, the sensor includes a differential resonator configuration in which the resonators are positioned rectilinearly with respect to each other and are covered by the same hermetic seal.

Abstract translation: 根据本发明的传感器提供了一种用于测量施加的负载的大小作为由谐振器上的负载引起的应变引起的机械谐振器的谐振频率的偏移的装置。 传感器包括通常由半导体材料构成的衬底，例如 硅，其基板沿着其外周基本上被支撑的隔膜;凸起邻接所述隔膜的远离所述隔膜的外周的区域;至少一个波形形式的谐振器，其一端与所述隔膜接近的一端 凸台的一部分和与凸台相隔离的隔膜的另一端，用于封闭谐振器的气密密封件，以及用于测量由施加的负载引起的谐振器固有频率变化的激励器/检测器。 优选地，传感器包括差分谐振器结构，其中谐振器相对于彼此直线定位并被相同的气密密封覆盖。

公开(公告)号：US4901586A

公开(公告)日：1990-02-20

申请号：US316899

申请日：1989-02-27

Applicant: Graeme A. Blake ,  Brian L. Norling

Inventor： Graeme A. Blake ,  Brian L. Norling

IPC: G01L1/10 ,  G01L1/18 ,  G01P15/097 ,  G01P15/10

CPC classification number: G01P15/097 ,  G01L1/10 ,  G01L1/183 ,  Y10S73/01

Abstract: A dual vibrating beam force transducer having an electrostatic drive system. The transducer comprises a body having first and second generally parallel beams, coupled together at their ends. First and second electrodes are positioned adjacent to but not in contact with the respective beams. A drive circuit causes an oscillating voltage to be applied to the electrodes. The beams are thus subjected to electrostatic forces that cause the beams to oscillate in a vibration plane containing both beams. The mechanical resonance of the beams controls the oscillation frequency, such that the frequency is a function of a force exerted along the beams. An embodiment is also described in which the drive means is coupled directly to one of the beams.

Abstract translation: 具有静电驱动系统的双振动束力传感器。 换能器包括具有第一和第二大致平行的梁的主体，它们的端部联接在一起。 第一和第二电极定位成与各个光束相邻而不与其接触。 驱动电路使振荡电压施加到电极。 因此，光束受到静电力的作用，使得光束在包含两个光束的振动平面中振荡。 光束的机械谐振控制振荡频率，使得频率是沿着光束施加的力的函数。 还描述了一种实施例，其中驱动装置直接连接到一个梁。

公开(公告)号：US09625329B2

公开(公告)日：2017-04-18

申请号：US14635205

申请日：2015-03-02

Applicant: InvenSense, Inc.

Inventor： Ilya Gurin ,  Joe Seeger

IPC: G01L1/18 ,  G01D18/00 ,  G01L27/00 ,  G01L1/22

CPC classification number: G01L1/18 ,  G01D18/00 ,  G01L1/183 ,  G01L1/2293 ,  G01L27/002

Abstract: An example system comprises a microelectromechanical system (MEMS) sensor, a strain gauge, and a strain compensation circuit. The MEMS sensor is operable to generate a sensor output signal that corresponds to a sensed condition (e.g., acceleration, orientation, and/or pressure). The strain gauge is operable to generate a strain measurement signal indicative of a strain on the MEMS sensor. The strain compensation circuit is operable to modify the sensor output signal to compensate for the strain based on the strain measurement signal. The strain compensation circuit stores sensor-strain relationship data indicative of a relationship between the sensor output signal and the strain measurement signal. The strain compensation circuit is operable to use the sensor-strain relationship data for the modifying of the sensor output signal. The modification of the sensor output signal comprises one or both of: removal of an offset from the sensor signal, and application of a gain to the sensor signal.

公开(公告)号：US20160258825A1

公开(公告)日：2016-09-08

申请号：US14635205

申请日：2015-03-02

Applicant: InvenSense, Inc.

Inventor： Ilya Gurin ,  Joe Seeger

IPC: G01L1/18 ,  G01D18/00

CPC classification number: G01L1/18 ,  G01D18/00 ,  G01L1/183 ,  G01L1/2293 ,  G01L27/002

Abstract: An example system comprises a microelectromechanical system (MEMS) sensor, a strain gauge, and a strain compensation circuit. The MEMS sensor is operable to generate a sensor output signal that corresponds to a sensed condition (e.g., acceleration, orientation, and/or pressure). The strain gauge is operable to generate a strain measurement signal indicative of a strain on the MEMS sensor. The strain compensation circuit is operable to modify the sensor output signal to compensate for the strain based on the strain measurement signal. The strain compensation circuit stores sensor-strain relationship data indicative of a relationship between the sensor output signal and the strain measurement signal. The strain compensation circuit is operable to use the sensor-strain relationship data for the modifying of the sensor output signal. The modification of the sensor output signal comprises one or both of: removal of an offset from the sensor signal, and application of a gain to the sensor signal.

Abstract translation: 示例系统包括微机电系统（MEMS）传感器，应变计和应变补偿电路。 MEMS传感器可操作以产生对应于感测状态（例如，加速度，取向和/或压力）的传感器输出信号。 应变仪可操作以产生指示MEMS传感器上的应变的应变测量信号。 应变补偿电路可操作以修改传感器输出信号以补偿基于应变测量信号的应变。 应变补偿电路存储表示传感器输出信号和应变测量信号之间的关系的传感器 - 应变关系数据。 应变补偿电路可操作地使用传感器 - 应变关系数据来修改传感器输出信号。 传感器输出信号的修改包括以下一个或两个：从传感器信号中去除偏移，以及对传感器信号应用增益。

公开(公告)号：US20160073539A1

公开(公告)日：2016-03-10

申请号：US14846718

申请日：2015-09-04

Applicant: DIMENSIONAL INDUSTRIES, INC.

Inventor： Jonathan Daniel Driscoll ,  Aaron Tynes Hammack

IPC: H05K7/14 ,  H02M1/32 ,  G01L1/18 ,  H02M7/219

CPC classification number: G01L1/18 ,  G01L1/183 ,  H02M1/32 ,  H02M7/219

Abstract: A flexible printed circuit board assembly for electronic devices is disclosed. An example embodiment includes: a force sense resistor (FSR) comprising: at least one flexible common reference trace; at least one flexible conductive trace having a varying-width pattern and being placed adjacent to the at least one flexible common reference trace, the conductive trace being at a varying distance from the common reference trace relative to a location along the FSR; and a flexible piece of piezoresistive material covering the common reference trace and the conductive trace, the flexible piece of piezoresistive material being configured to produce a measurable electrical resistance relative to a distance between the conductive trace and the common reference trace as pressure is applied to the piezoresistive material, the FSR enabling detection of pressure levels and locations along the FSR.

Abstract translation: 公开了一种用于电子设备的柔性印刷电路板组件。 示例实施例包括：力检测电阻器（FSR），包括：至少一个柔性公共参考迹线; 至少一个柔性导电迹线具有变化的宽度图案并且被放置成与所述至少一个柔性公共参考迹线相邻，所述导电迹线与所述共同参考迹线相对于沿着所述FSR的位置处于变化的距离; 以及覆盖所述公共参考迹线和所述导电迹线的柔性片状压阻材料，所述柔性片状压阻材料被配置为相对于所述导电迹线和所述公共参考迹线之间的距离产生可测量的电阻， 压阻材料，FSR能够检测压力水平和沿FSR的位置。

公开(公告)号：US20120279319A1

公开(公告)日：2012-11-08

申请号：US13511130

申请日：2010-11-22

Applicant: Mehdi Boukallel ,  Mathieu Grossard

Inventor： Mehdi Boukallel ,  Mathieu Grossard

IPC: G01L1/10

CPC classification number: G01L1/162 ,  G01L1/106 ,  G01L1/183 ,  G01L9/0022

Abstract: A micro-force sensor comprising a one-piece plate including a first area defining a first recess, which must be held in position relative to a mounting, a second area connected to the first area defining the first recess and a second recess, a measuring beam across the first recess having a first end embedded in the first area and a second end connected to the second area, an excitation beam across the second recess having two ends embedded in the second area and being provided with at least one excitation element, a third area connected to the first area and an effector beam having one free end for receiving the force being measured and one end-embedded in the third area, and a fourth area connecting the embedded end of the effector beam to the second end of the measuring beam, which is provided with a measuring element.

Abstract translation: 一种微力传感器，包括一体式板，其包括限定第一凹部的第一区域，所述第一区域必须相对于安装件保持在适当位置，连接到限定所述第一凹部的所述第一区域的第二区域和第二凹部， 横跨第一凹部的第一凹部具有嵌入在第一区域中的第一端和连接到第二区域的第二端，跨越第二凹部的激发束，其具有嵌入第二区域中的两个端部并且设置有至少一个激励元件， 连接到第一区域的第三区域和具有一个自由端的效应器梁，用于接收被测量的力和一个端部嵌入在第三区域中;以及第四区域，其将效应束的嵌入端连接到测量的第二端 梁，其设有测量元件。

公开(公告)号：US08156807B2

公开(公告)日：2012-04-17

申请号：US12214627

申请日：2008-06-20

Applicant: Philippe Robert

Inventor： Philippe Robert

IPC: G01P15/10

CPC classification number: B81B3/0086 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0264 ,  B81B2201/0271 ,  G01C19/574 ,  G01C19/5755 ,  G01C19/5769 ,  G01L1/183 ,  G01P15/0802 ,  G01P15/097 ,  H03H9/02259

Abstract: This invention relates to a resonant device with detection in the piezo-resistive plane made using surface technologies on a bulk, which comprises a resonator connected to this bulk by at least one embedded portion, means of exciting this resonator and detection means comprising at least one suspended beam type strain gauge made from piezo-resistive material, in which each strain gauge has a common plane with the resonator, and is connected to this resonator at a point situated outside of this at least one embedded portion to increase the stress observed by this strain gauge.

Abstract translation: 本发明涉及一种谐振装置，其在使用体上的表面技术制成的压电平面中具有检测功能，该谐振装置包括通过至少一个嵌入部分连接到该体的谐振器，激励该谐振器的装置和包括至少一个 由压电材料制成的悬挂梁式应变计，其中每个应变计具有与谐振器的公共平面，并且在位于该至少一个嵌入部分外部的点处连接到该谐振器，以增加由该观测到的应力 应变计。

公开(公告)号：US20110107841A1

公开(公告)日：2011-05-12

申请号：US12616965

申请日：2009-11-12

Applicant: Tymon Barwicz ,  Hendrik F. Hamann ,  Levente Klein

Inventor： Tymon Barwicz ,  Hendrik F. Hamann ,  Levente Klein

IPC: G01L1/18 ,  G01P15/12

CPC classification number: G01L1/183 ,  G01P15/097 ,  G01P15/123 ,  H03H9/02259 ,  H03H9/2405

Abstract: An apparatus is provided and includes compressed conductive elements that each have independently adjustable dimensions sufficient to provide substantially enhanced piezoresistance to a current flowing across each conductive element with each of the conductive elements subjected to compressive strain, the conductive elements being oscillated in a direction parallel to that of the compressive strain at a defined frequency such that a resistance of the conductive elements to the current is thereby substantially reduced.

Abstract translation: 提供了一种装置并且包括压缩的导电元件，每个压缩导电元件具有足够的独立调节尺寸，以足以对流过每个导电元件的电流提供显着增强的压阻，导电元件经受压应变，导电元件在平行于 在限定的频率下的压缩应变，使得导电元件对电流的电阻因此显着降低。