公开(公告)号：US08283631B2

公开(公告)日：2012-10-09

申请号：US12351215

申请日：2009-01-09

Applicant: Mehdi Vaez-Iravani ,  Mehran Nasser-Ghodsi ,  Guoheng Zhao

Inventor： Mehdi Vaez-Iravani ,  Mehran Nasser-Ghodsi ,  Guoheng Zhao

IPC: G01N23/00 ,  G21K7/00 ,  H01J40/00

CPC classification number: H01J37/244 ,  G01N2223/079 ,  G01N2223/086 ,  G01N2223/33 ,  H01J37/256 ,  H01J2237/24495 ,  H01J2237/2511 ,  H01J2237/2807

Abstract: A spectrometer having an electron beam generator for generating an electron beam that is directed at a sample. An electron beam positioner directs the electron beam onto a position of the sample, and thereby produces a secondary emitted stream from the sample, where the secondary emitted stream includes at least one of electrons and x-rays. An secondary emitted stream positioner positions the secondary emitted stream onto a detector array, which receives the secondary emitted stream and detects both the amounts and the received positions of the secondary emitted stream. A modulator modulates the electron beam that is directed onto the sample, and thereby sweeps the electron beam between a first position and a second position on the sample. An extractor is in signal communication with both the modulator and the detector array, and extracts a differential signal that represents a difference between the signals that are received from the first position and the signals that are received from the second position.

Abstract translation: 具有用于产生针对样品的电子束的电子束发生器的光谱仪。 电子束定位器将电子束引导到样品的位置，从而产生来自样品的二次发射流，其中二次发射流包括电子和X射线中的至少一个。 二次发射流定位器将二次发射流定位在检测器阵列上，检测器阵列接收二次发射流并检测二次发射流的量和接收位置。 调制器调制被引导到样品上的电子束，从而在样品上的第一位置和第二位置之间扫描电子束。 提取器与调制器和检测器阵列进行信号通信，并且提取表示从第一位置接收的信号与从第二位置接收的信号之间的差的差分信号。

公开(公告)号：US20100001202A1

公开(公告)日：2010-01-07

申请号：US12374892

申请日：2007-07-26

Applicant: Hiroyuki Matsuda ,  Horoshi Daimon

Inventor： Hiroyuki Matsuda ,  Horoshi Daimon

IPC: H01J3/18 ,  G01N23/00

CPC classification number: H01J37/12 ,  H01J37/252 ,  H01J2237/05 ,  H01J2237/153 ,  H01J2237/1532 ,  H01J2237/244 ,  H01J2237/2511 ,  H01J2237/2538

Abstract: A spherical aberration correction decelerating lens corrects a spherical aberration occurring in an electron beam or an ion beam (hereinafter, referred to as “beam”) emitted from a predetermined object plane position with a certain divergence angle, and said spherical aberration correction decelerating lens comprises at least two electrodes, each of which is constituted of a surface of a solid of revolution whose central axis coincides with an optical axis and each of which receives an intentionally set voltage applied by an external power supply, wherein at least one of the electrodes includes one or more meshes (M) which has a concaved shape opposite to an object plane (P0) and which is constituted of a surface of a solid of revolution so that a central axis of the concaved shape coincides with the optical axis, and a voltage applied to each of the electrodes causes the beam to be decelerated and causes formation of a decelerating convergence field for correcting the spherical aberration occurring in the beam. This makes it possible to provide a spherical aberration correction decelerating lens which converges a beam, emitted from the sample and having high energy and a large divergence angle, onto an image plane.

Abstract translation: 球面像差校正减速透镜校正从具有一定发散角的预定物平面位置发射的电子束或离子束（以下称为“光束”）中发生的球面像差，并且所述球面像差校正减速透镜包括 至少两个电极，每个电极由其中心轴与光轴重合的旋转实体表面构成，每个电极接收由外部电源施加的有意设定的电压，其中至少一个电极包括 一个或多个网格（M），其具有与物平面（P0）相反的凹形，并且由旋转实体的表面构成，使得凹形的中心轴与光轴重合，并且电压 施加到每个电极使得光束减速，并且形成用于校正球面像差的减速会聚场 在梁中发生。 这使得可以提供一种球面像差校正减速透镜，其将从样品发射并具有高能量和大发散角的光束会聚到图像平面上。

公开(公告)号：US07205542B1

公开(公告)日：2007-04-17

申请号：US11343418

申请日：2006-01-31

Applicant: Marian Mankos ,  Kurt Weiner

Inventor： Marian Mankos ,  Kurt Weiner

IPC: H01J37/304

CPC classification number: H01J37/28 ,  H01J37/228 ,  H01J37/256 ,  H01J2237/2446 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/2482 ,  H01J2237/2511 ,  H01J2237/2522 ,  H01J2237/255

Abstract: One embodiment relates to a scanning electron beam apparatus having curved electron-optical axes. An electron gun and illumination electron optics are configured to generate a primary electron beam along a first axis. Objective electron optics is configured about a second axis to receive the primary electron beam, to focus the incident electron beam onto the substrate, and to retrieve an emitted beam of scattered electrons from the substrate. Detection electron optics is configured about a third axis to receive the emitted beam and to focus the emitted beam onto a detector. A beam separator is coupled to and interconnecting the illumination electron optics, the objective electron optics, and the detection electron optics in such a way that there is a same angle between the first and second axes as between the second and third axes. A beam deflector is configured to controllably scan the primary electron beam across the substrate and to de-scan the emitted electron beam. Other embodiments are also disclosed.

Abstract translation: 一个实施例涉及具有弯曲电子 - 光轴的扫描电子束装置。 电子枪和照明电子光学器件被配置为沿着第一轴产生一次电子束。 物镜电子光学被配置成围绕第二轴线接收一次电子束，以将入射的电子束聚焦到衬底上，并且从衬底中取出发射的散射电子束。 检测电子光学器件被构造为围绕第三轴线接收发射的光束并且将发射的光束聚焦到检测器上。 光束分离器以这样的方式耦合到照明电子光学器件，物镜电子光学器件和检测电子光学器件，并且在第一和第二轴线之间具有与第二和第三轴线之间相同的角度。 光束偏转器被配置为可控地扫描穿过衬底的一次电子束并且扫描发射的电子束。 还公开了其他实施例。

公开(公告)号：US06448555B1

公开(公告)日：2002-09-10

申请号：US09362756

申请日：1999-07-28

Applicant: Fumio Hosokawa

Inventor： Fumio Hosokawa

IPC: H01J3726

CPC classification number: H01J37/256 ,  H01J2237/2511 ,  H01J2237/2561

Abstract: There is disclosed a TEM (transmission electron microscope)/SEM (scanning electron microscope) instrument capable of x-ray mapping with automated correction of specimen drift. In x-ray mapping, an SE (secondary electron) image of a scanned region on a specimen is stored as a reference image in memory in the first scan. After a given number of scans are made, an SE image is derived and subject to comparison. The cross-correlation function between each image to be compared and the reference image is calculated to find the direction and amount of the deviation of each image from the reference image. The electron beam deflection system is so controlled as to cancel the deviation, thus correcting the specimen drift. Whenever a given number of scans are made, the correction of the specimen drift is performed.

Abstract translation: 公开了能够通过自动校正样品漂移的x射线映射的TEM（透射电子显微镜）/ SEM（扫描电子显微镜）仪器。 在x射线映射中，在第一次扫描中将样本上的扫描区域的SE（二次电子）图像作为参考图像存储在存储器中。 在进行了一定数量的扫描之后，导出SE图像并进行比较。 计算要比较的每个图像与参考图像之间的互相关函数，以找出每个图像与参考图像的偏差的方向和量。 电子束偏转系统被控制以抵消偏差，从而校正样品漂移。 每当进行给定数量的扫描时，执行样本漂移的校正。