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    APPARATUS AND METHOD OF APPLYING SMALL-ANGLE ELECTRON SCATTERING TO CHARACTERIZE NANOSTRUCTURES ON OPAQUE SUBSTRATE
    1.
    发明申请
    APPARATUS AND METHOD OF APPLYING SMALL-ANGLE ELECTRON SCATTERING TO CHARACTERIZE NANOSTRUCTURES ON OPAQUE SUBSTRATE 有权
    将小角度电子散射应用于特征基片上的纳米结构的装置和方法

    公开(公告)号：US20150340201A1

    公开(公告)日：2015-11-26

    申请号：US14720122

    申请日：2015-05-22

    Applicant: Industrial Technology Research Institute

    Inventor： Wen-Li Wu ,  Yun-San Chien ,  Wei-En Fu ,  Yen-Song Chen ,  Hsin-Chia Ho

    IPC: H01J37/29 ,  H01J37/147 ,  H01J37/145 ,  H01J37/06

    CPC classification number: H01J37/29 ,  G01N23/20058 ,  H01J37/04 ,  H01J37/06 ,  H01J37/145 ,  H01J37/295 ,  H01J2237/0492 ,  H01J2237/255

    Abstract: An apparatus and methods for small-angle electron beam scattering measurements in a reflection or a backscattering mode are provided. The apparatus includes an electron source, electron collimation optics before a sample, electron projection optics after the sample, a sample stage capable of holding the sample, and a electron detector module. The electrons emitted from the source are collimated and positioned to impinge nanostructures on the sample. The signals resulting from the interactions between the impinging electrons and the nanostructures are further magnified by the electron projection optics to reach a sufficient angular resolution before recorded by the electron detector module.

    Abstract translation: 提供了一种用于反射或后向散射模式的小角度电子束散射测量的装置和方法。 该装置包括电子源，样品前的电子准直光学器件，样品后的电子投影光学器件，能够保持样品的样品台，以及电子检测器模块。 从源发射的电子被准直并定位成将纳米结构撞击在样品上。 由撞击电子和纳米结构之间的相互作用产生的信号被电子投影光学器件进一步放大，以在由电子检测器模块记录之前达到足够的角度分辨率。

    Method of determining average crystallite size of material and apparatus and method for preparing thin film of the material
    2.
    发明授权
    Method of determining average crystallite size of material and apparatus and method for preparing thin film of the material 失效
    确定材料和设备的平均微晶尺寸的方法以及制备该材料的薄膜的方法

    公开(公告)号：US06420701B1

    公开(公告)日：2002-07-16

    申请号：US09119660

    申请日：1998-07-21

    Applicant: Hiroyuki Hashimoto

    Inventor： Hiroyuki Hashimoto

    IPC: H01J3729

    CPC classification number: H01J37/252 ,  H01J2237/255

    Abstract: A specimen of thin film of a material having a crystal structure and exhibiting an absorption in ultraviolet region is irradiated with electron beams and the energy loss spectrum of the reflected electrons is observed and utilized. For example, the correlations of (1) the energy of the plasmon peak and the relative intensity of the plasmon peak to the elastic peak or the profile thereof, (2) the energy (loss energy being between 4 and 8 eV) of the peak attributed to &pgr;→&pgr;* transition and the relative intensity of the &pgr;→&pgr;* peak to the elastic peak or the profile thereof and (3) the profile of the background of the continuous spectrum formed by inelastic scattering of electrons or the relative intensity of a point to the elastic peak and the average crystallite size of the material of the specimen are used to determine the crystallite size of the material.

    Abstract translation: 用电子束照射具有晶体结构且在紫外线区域呈现吸收的材料的薄膜样本，并观察并利用反射电子的能量损失谱。 例如，（1）等离子体激元峰的能量与等离子体激元峰的相对强度与弹性峰值或其轮廓的相关性，（2）峰值的能量（损耗能量在4和8eV之间） 归因于pi-> pi *转变和pi-> pi *峰相对于弹性峰或其轮廓的相对强度，以及（3）由电子或相对的非弹性散射形成的连续光谱的背景分布 使用试样的材料的弹性峰点和平均微晶尺寸的强度来确定材料的微晶尺寸。

    Scanning electron microscope with curved axes
    7.
    发明授权
    Scanning electron microscope with curved axes 有权
    具有弯曲轴的扫描电子显微镜

    公开(公告)号：US07205542B1

    公开(公告)日：2007-04-17

    申请号：US11343418

    申请日：2006-01-31

    Applicant: Marian Mankos ,  Kurt Weiner

    Inventor： Marian Mankos ,  Kurt Weiner

    IPC: H01J37/304

    CPC classification number: H01J37/28 ,  H01J37/228 ,  H01J37/256 ,  H01J2237/2446 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/2482 ,  H01J2237/2511 ,  H01J2237/2522 ,  H01J2237/255

    Abstract: One embodiment relates to a scanning electron beam apparatus having curved electron-optical axes. An electron gun and illumination electron optics are configured to generate a primary electron beam along a first axis. Objective electron optics is configured about a second axis to receive the primary electron beam, to focus the incident electron beam onto the substrate, and to retrieve an emitted beam of scattered electrons from the substrate. Detection electron optics is configured about a third axis to receive the emitted beam and to focus the emitted beam onto a detector. A beam separator is coupled to and interconnecting the illumination electron optics, the objective electron optics, and the detection electron optics in such a way that there is a same angle between the first and second axes as between the second and third axes. A beam deflector is configured to controllably scan the primary electron beam across the substrate and to de-scan the emitted electron beam. Other embodiments are also disclosed.

    Abstract translation: 一个实施例涉及具有弯曲电子 - 光轴的扫描电子束装置。 电子枪和照明电子光学器件被配置为沿着第一轴产生一次电子束。 物镜电子光学被配置成围绕第二轴线接收一次电子束，以将入射的电子束聚焦到衬底上，并且从衬底中取出发射的散射电子束。 检测电子光学器件被构造为围绕第三轴线接收发射的光束并且将发射的光束聚焦到检测器上。 光束分离器以这样的方式耦合到照明电子光学器件，物镜电子光学器件和检测电子光学器件，并且在第一和第二轴线之间具有与第二和第三轴线之间相同的角度。 光束偏转器被配置为可控地扫描穿过衬底的一次电子束并且扫描发射的电子束。 还公开了其他实施例。

    Apparatus and method for imaging a particle beam
    8.
    发明授权
    Apparatus and method for imaging a particle beam 失效
    用于对粒子束进行成像的装置和方法

    公开(公告)号：US06198095B1

    公开(公告)日：2001-03-06

    申请号：US09006985

    申请日：1998-01-14

    Applicant: Philippe Staib

    Inventor： Philippe Staib

    IPC: H01J4900

    CPC classification number: H01J49/488 ,  H01J37/252 ,  H01J2237/255

    Abstract: An apparatus and method for imaging on a detector a particle beam of charged particles having a distinct energy distribution and a distinct angle distribution. The apparatus has deflectors which are provided to create in the particle beam essentially parallel particle paths spaced to correspond to their original angle distribution. The deflectors also direct the particle beam to semi-transmissive, aligned filter electrodes, which produce a potential difference to create a deceleration field to allow the particles to pass through by means of energy selectivity.

    Abstract translation: 一种用于在检测器上成像具有不同能量分布和不同角度分布的带电粒子的粒子束的装置和方法。 该设备具有偏转器，其设置成在粒子束中产生基本平行的颗粒路径，其间隔开以对应于其原始角度分布。 偏转器还将粒子束引导到半透射的对准的滤光器电极，其产生电位差以产生减小场，以允许粒子通过能量选择性通过。

    Method for identifying surface atoms of solid sample and apparatus therefor
    9.
    发明授权
    Method for identifying surface atoms of solid sample and apparatus therefor 失效
    确定固体样品表面原子的方法及其设备

    公开(公告)号：US5635716A

    公开(公告)日：1997-06-03

    申请号：US614678

    申请日：1996-03-13

    Applicant: Ziyuan Liu ,  Tadataka Morishita

    Inventor： Ziyuan Liu ,  Tadataka Morishita

    IPC: G01N23/20 ,  G01N23/225 ,  H01J37/252 ,  H01J37/26

    CPC classification number: G01N23/2251 ,  H01J37/252 ,  H01J2237/255 ,  H01J2237/2561

    Abstract: The atoms constituting a surface of a solid sample are identified by first forming, on the surface, island-like deposits of a substance capable of generating fluorescent X-rays upon being energized by an electron beam. The deposits are then energized with the electron beam so that fluorescent X-rays are emitted therefrom and reflected on the surface. From the critical angle for total reflection of the fluorescent X-rays reflected on that portion of the surface of the sample on which no deposits are present, the atoms constituting the surface may be determined. An apparatus for carrying out the above method is also disclosed which is a modification of the conventional RHEED/TRAXS device.

    Abstract translation: 通过首先在表面上形成能够通过电子束激发能够产生荧光X射线的物质的岛状沉积物来识别构成固体样品表面的原子。 然后用电子束使沉积物通电，使得荧光X射线从其发射并在表面上反射。 从在没有沉积物的样品表面部分上反射的荧光X射线的全反射的临界角度，可以确定构成表面的原子。 还公开了用于执行上述方法的装置，其是常规RHEED / TRAXS装置的修改。

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