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    ELECTRON BEAM DRAWING APPARATUS AND METHOD OF MANUFACTURING DEVICE
    25.
    发明申请
    ELECTRON BEAM DRAWING APPARATUS AND METHOD OF MANUFACTURING DEVICE 审中-公开
    电子束绘图装置和制造装置的方法

    公开(公告)号：US20120288800A1

    公开(公告)日：2012-11-15

    申请号：US13462088

    申请日：2012-05-02

    Applicant: Jun ITO

    Inventor： Jun ITO

    IPC: G03F7/20 ,  H01J3/02

    CPC classification number: H01J3/06 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/028 ,  H01J37/067 ,  H01J37/3174 ,  H01J2237/0206 ,  H01J2237/022

    Abstract: An electron beam drawing apparatus performs drawing on a substrate with an electron beam emitted by an electron gun. The apparatus includes a conditioning chamber configured to perform conditioning of a spare electrode that is a spare for an electrode which constitutes the electron gun, and a driving mechanism configured to remove a used electrode from the electron gun, and to install, into the electron gun, the spare electrode having been subjected to the conditioning, wherein the conditioning includes supplying of electric power to the spare electrode.

    Abstract translation: 电子束描绘装置利用电子枪发射的电子束对衬底进行绘图。 该装置包括：调节室，被配置为执行作为构成电子枪的电极备用的备用电极的调节;以及驱动机构，其构造成从电子枪中去除使用的电极，并将其安装到电子枪 所述备用电极已经进行了调节，其中所述调节包括向备用电极供电。

    Article comprising MEMS-based two-dimensional e-beam sources and method for making the same
    27.
    发明授权
    Article comprising MEMS-based two-dimensional e-beam sources and method for making the same 有权
    文章包括基于MEMS的二维电子束源及其制作方法

    公开(公告)号：US06809465B2

    公开(公告)日：2004-10-26

    申请号：US10350614

    申请日：2003-01-24

    Applicant: Sungho Jin

    Inventor： Sungho Jin

    IPC: H01J102

    CPC classification number: B82Y10/00 ,  H01J3/028 ,  H01J35/065 ,  H01J2201/30 ,  H01J2329/00 ,  Y10S977/939

    Abstract: In accordance with the invention, an electron beam source for exposing selected portions of a surface to electrons comprises a plurality of nanoscale electron emitters and, associated with each electron emitter, a directional control element to direct the emitter toward a selected portion of the surface. In a preferred embodiment, the emitters are nanotubes or nanowires mounted on electrostatically controlled MEMS directional control elements. An alternative embodiment uses electrode directional control elements.

    Abstract translation: 根据本发明，用于将表面的选定部分暴露于电子的电子束源包括多个纳米级电子发射器，并且与每个电子发射器相关联，定向控制元件将发射极引向表面的选定部分。 在优选实施例中，发射器是安装在静电控制MEMS方向控制元件上的纳米管或纳米线。 替代实施例使用电极方向控制元件。

    Electron gun
    28.
    发明授权
    Electron gun 有权
    电子枪

    公开(公告)号：US06774552B2

    公开(公告)日：2004-08-10

    申请号：US10443817

    申请日：2003-05-23

    Applicant: Akira Chiba

    Inventor： Akira Chiba

    IPC: H01J2306

    CPC classification number: H01J3/027 ,  H01J3/028 ,  H01J3/38 ,  H01J23/06

    Abstract: An electron gun also has a cathode for emitting electrons, a heater cap which contains a heater for applying the cathode with thermal energy for emitting electrons, a retainer for securing the cathode on the heater cap by clamping the peripheral edge of the cathode onto the heater cap, and a cylindrical Wehnelt supporter. The cylindrical Wehnelt supporter has a Wehnelt electrode for focusing an electron beam that is formed in such a shape that an average angle of the surface thereof with respect to an outermost shell of the electron beam matches a Pierce angle, and three or more heater cap supporters for securely supporting the heater cap at a position at which an electron emitting surface of the cathode and an opening formed through the Wehnelt electrode satisfy a predetermined perveance.

    Abstract translation: 电子枪还具有用于发射电子的阴极，加热器帽，其包含用于向发射电子的热能施加阴极的加热器，用于通过将阴极的周边边缘夹持在加热器上来将阴极固定在加热器盖上的保持器 帽和圆柱形的Wehnelt支持者。 圆筒形的Wehnelt支架具有用于聚焦电子束的Wehnelt电极，该电子束形成为使得其表面相对于电子束的最外壳的平均角度与Pierce角相匹配的形状，以及三个或更多个加热器帽支撑件 用于在阴极的电子发射表面和通过Wehnelt电极形成的开口满足预定的范围的位置处可靠地支撑加热器盖。

    Open type X-ray generating apparatus
    29.
    发明授权
    Open type X-ray generating apparatus 有权

    公开(公告)号：US06639969B2

    公开(公告)日：2003-10-28

    申请号：US10132736

    申请日：2002-04-26

    Applicant: Yutaka Ochiai ,  Kinji Takase

    Inventor： Yutaka Ochiai ,  Kinji Takase

    IPC: H01J3500

    CPC classification number: H01J3/028 ,  H01J35/025 ,  H01J35/06 ,  H01J35/14 ,  H01J2235/186 ,  Y10S439/936

    Abstract: For eliminating a high-tension cable in order to improve the handling, the open type X-ray generating apparatus (1) in accordance with the present invention employs a mold power unit in which a high-voltage generating part, a grid connecting line, and a filament connecting line which attain a high voltage are molded with a resin, whereas the mold power unit is secured to the proximal end side of a tubular portion (2), whereby an apparatus of a type integrated with a power supply is realized. Since the high-voltage generating part, grid connecting line, and filament connecting line are confined within the resin mold as such, the degree of freedom in structure of the high-voltage generating part and the degree of freedom in bending the lines improve remarkably.

    Electron gun
    30.
    发明授权
    Electron gun 失效
    电子枪

    公开(公告)号：US4621213A

    公开(公告)日：1986-11-04

    申请号：US626996

    申请日：1984-07-02

    Applicant: Roy E. Rand

    Inventor： Roy E. Rand

    IPC: H01J3/02 ,  H01J23/06 ,  H01J35/04 ,  H01J1/00

    CPC classification number: H01J3/028 ,  H01J23/06 ,  H01J35/04

    Abstract: An electron gun which can be easily disassembled to replace a defective cathode assembly and which can be easily and quickly reassembled and realigned.

    Abstract translation: 一种电子枪，可以轻松地拆卸，以更换有缺陷的阴极组件，并且可以方便快速地重新组装和重新对准。

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