公开(公告)号：US20060226753A1

公开(公告)日：2006-10-12

申请号：US11387090

申请日：2006-03-22

Applicant: Pavel Adamec ,  Stefan Lanio

Inventor： Pavel Adamec ,  Stefan Lanio

IPC: H01J9/02

CPC classification number: H01J1/135 ,  H01J1/18 ,  H01J37/07 ,  H01J37/242 ,  H01J2237/06316

Abstract: An emitter for a charged particle beam apparatus is provided, said emitter comprising a filament extending between and being attached to first and second supports, an emitter tip attached to the filament, and a stabilization element attached to a third support and to the filament, wherein the first, second and third supports define a triangle so that the stabilization element extends at least partially in a direction perpendicular to the direction in which the filament extends.

Abstract translation: 提供了一种用于带电粒子束装置的发射器，所述发射器包括在第一和第二支撑件之间延伸并连接到第一和第二支撑件的灯丝，连接到灯丝的发射极尖端以及连接到第三支撑件和灯丝的稳定元件，其中 第一，第二和第三支撑件限定三角形，使得稳定元件至少部分地沿垂直于灯丝延伸方向的方向延伸。

公开(公告)号：US06590216B1

公开(公告)日：2003-07-08

申请号：US09492076

申请日：2000-01-27

Applicant: Samuel K. Doran ,  Steven D. Golladay

Inventor： Samuel K. Doran ,  Steven D. Golladay

IPC: B23K1500

CPC classification number: H01J37/242 ,  H01J1/135

Abstract: An automatic control servo system having a number of cascaded loops equal in number to the number of voltage sources applied to elements of a high-emittance electron source provides accurate and stable electron emission current control independently of beam energy and accommodates large differences in thermal mass between the elements of the electron source, as may be encountered in high-emittance, indirectly heated cathode electron sources. Individual loops of the system may be critically tuned independently of each other.

Abstract translation: 具有数量等于施加到高发射电子源的元件的电压源的数量的级联回路的自动控制伺服系统提供精确和稳定的电子发射电流控制，独立于束能量，并且适应于 电子源的元素，如高发射率可能遇到的，间接加热的阴极电子源。 可以独立于彼此独立地调节系统的各个循环。

公开(公告)号：US4594554A

公开(公告)日：1986-06-10

申请号：US509517

申请日：1983-06-30

Applicant: Jerome D. Schick

Inventor： Jerome D. Schick

IPC: H01J37/06 ,  H01J1/13 ,  H01J37/24 ,  H01J37/244 ,  H01J19/82 ,  H05G1/52

CPC classification number: H01J37/242 ,  H01J1/135

Abstract: A method of extending the lifetime of an electron beam filament, typically LaB.sub.6 by applying power to the filament over a preselected period in a substantially linear manner. The time period is typically 20 minutes before a steady state power level is attained with a fully stabilized instrument. Power-down is a reverse of the power-up sequence until all power is removed.

Abstract translation: 一种延长电子束灯丝寿命的方法，通常在大部分线性方式的预选时间内，通过在灯丝上施加电力来延长寿命。 在完全稳定的仪器达到稳态功率水平之前，时间通常为20分钟。 断电功能与上电顺序相反，直到所有电源都被去除。

公开(公告)号：US4317983A

公开(公告)日：1982-03-02

申请号：US83384

申请日：1979-10-10

Applicant: Wilhelm Scheffels ,  Ruprecht Hoffmann

Inventor： Wilhelm Scheffels ,  Ruprecht Hoffmann

IPC: H01J37/315 ,  H01J37/24 ,  H05B39/04 ,  B23K15/00 ,  H05B41/36

CPC classification number: H01J37/242

Abstract: In an electron beam machine for e.g. beam welding, the beam current I.sub.em is stabilized by negative feedback applied to the grid of the electron gun. The optimum cathode heating current is ascertained by causing the cathode heating current I.sub.H to decrease steadily from a maximum value. The beam current is kept constant by the feedback, which adjusts the grid voltage U.sub.W to offset the decrease in cathode temperature caused by the decreasing heating current; the rate of change of the grid voltage U.sub.W is monitored, and when this rate of change exceeds a threshold, the decrease in heating current is arrested, and the heating current is maintained at the thus established optimal value or preferably set at a slightly higher value, which secures an extended length of life of the cathode. This setting of the cathode heating current is repeated after a predetermined interval of time to establish a new value in response to a change of the condition of the cathode.

Abstract translation: 在例如电子束机中。 光束焊接，通过施加到电子枪的栅格的负反馈使束电流Iem稳定。 通过使阴极加热电流IH从最大值稳定地降低来确定最佳阴极加热电流。 光束电流通过反馈保持恒定，这调整电网电压UW以抵消由于加热电流的降低引起的阴极温度的降低; 监测电网电压UW的变化率，当该变化率超过阈值时，停止加热电流的减少，并且将加热电流维持在如此确定的最佳值或优选设定在略高的值 ，其确保阴极延长的使用寿命。 在预定的时间间隔之后重复该阴极加热电流的设定，以响应于阴极的状况的改变而建立新的值。

公开(公告)号：US08756021B2

公开(公告)日：2014-06-17

申请号：US12912312

申请日：2010-10-26

Applicant: Russell J. Low ,  Kevin M. Daniels ,  Bon-Woong Koo ,  Richard M. White ,  James W. Blanchette

Inventor： Russell J. Low ,  Kevin M. Daniels ,  Bon-Woong Koo ,  Richard M. White ,  James W. Blanchette

IPC: G01B3/44

CPC classification number: H01J37/3171 ,  H01J37/08 ,  H01J37/242 ,  H01J2237/304

Abstract: A method of controlling operation of an indirectly-heated cathode (IHC) ion source includes a step of measuring a rate of loss of cathode weight of the IHC ion source that occurs during operation using a first cathode configuration and under a first set of operation conditions. A maximum weight loss for the first cathode configuration is determined, and a cathode lifetime is calculated based upon the rate of cathode weight loss and the maximum weight loss. A further method includes receiving a minimum source bias power value for operation of a cathode in a first configuration, measuring a rate of decrease in source bias power for a cathode in the first configuration, and calculating a lifetime of the cathode based upon the minimum source bias power and rate of decrease in source bias power.

Abstract translation: 控制间接加热的阴极（IHC）离子源的操作的方法包括以下步骤：测量在使用第一阴极配置的操作期间和在第一组操作条件下发生的IHC离子源的阴极重量损失率 。 确定第一阴极构造的最大重量损失，并且基于阴极重量损失率和最大重量损失计算阴极寿命。 另一种方法包括：在第一配置中接收用于阴极操作的最小源偏置功率值，测量第一配置中阴极的源极偏置功率的降低率，以及基于最小源计算阴极的寿命 偏置功率和源偏置功率的降低率。

公开(公告)号：US20120074318A1

公开(公告)日：2012-03-29

申请号：US13277583

申请日：2011-10-20

Applicant: John Notte, IV ,  Randall G. Percival ,  Milton Rahman ,  Louise Barriss ,  Russell Mello ,  Mark D. DiManna

Inventor： John Notte, IV ,  Randall G. Percival ,  Milton Rahman ,  Louise Barriss ,  Russell Mello ,  Mark D. DiManna

IPC: G01N23/00

CPC classification number: G05D23/27 ,  H01J37/08 ,  H01J37/22 ,  H01J37/242 ,  H01J37/243 ,  H01J2237/0807

Abstract: Systems and methods for heating an apex of a tip of a charged particle source are disclosed. The charged particle source can be, for example, a gas ion source. The systems can include a detector configured to detect light generated by the tip apex, and a controller coupled with the charged particle source and the detector so that the controller can control heating of the tip apex based on the light detected by the detector.

Abstract translation: 公开了用于加热带电粒子源的尖端的顶点的系统和方法。 带电粒子源可以是例如气体离子源。 该系统可以包括检测器，其被配置为检测由尖端尖端产生的光，以及控制器，其与带电粒子源和检测器耦合，使得控制器可以基于由检测器检测到的光来控制尖端顶点的加热。

公开(公告)号：US20100252734A1

公开(公告)日：2010-10-07

申请号：US12675855

申请日：2008-08-20

Applicant: Heung-Bok Kim ,  Kyeong-Il Kwak ,  Byung-Chul Jeon ,  Jong-Hyun Kim

Inventor： Heung-Bok Kim ,  Kyeong-Il Kwak ,  Byung-Chul Jeon ,  Jong-Hyun Kim

IPC: H01J37/28 ,  H01J29/48

CPC classification number: H01J37/241 ,  H01J37/242 ,  H01J37/243 ,  H01J37/28 ,  H01J2237/2485

Abstract: A power supply for supplying an electric power to an electron gun, which is used in an electron microscope, and an electron microscope having the same are disclosed. The power supply includes a base board, and at least one sub-board vertically mounted on the base board to supply an electric power to an anode electrode, a filament for emitting electrons, and a grid. The at least one sub-board can include a first sub-board to supply an accelerating voltage to the anode electrode, a second sub-board to supply a heating current to the filament, and a third sub-board to supply a grid voltage to the grid.

Abstract translation: 公开了一种用于向电子显微镜中使用的电子枪供电的电源和具有该电源的电子显微镜。 电源包括基板和垂直安装在基板上的至少一个子板，以向阳极电极提供电力，用于发射电子的灯丝和电网。 所述至少一个子板可以包括用于向所述阳极电极提供加速电压的第一子板，向所述灯丝供应加热电流的第二子板，以及向所述第一子板提供电网电压的第三子板 电网。

公开(公告)号：US07808183B2

公开(公告)日：2010-10-05

申请号：US11373865

申请日：2006-03-10

Applicant: Günter Klemm ,  Andreas Thiede ,  Hans-Jürgen Schneider

Inventor： Günter Klemm ,  Andreas Thiede ,  Hans-Jürgen Schneider

IPC: H05B41/14

CPC classification number: H01J37/242

Abstract: An arrangement for the regulation of the electron beam power of an electron gun, which comprises a filament cathode, a block cathode and an anode. Between the filament cathode and the block cathode is applied a first voltage, while between the block cathode and the anode a second voltage is applied. With the aid of a first closed-loop regulated system the filament cathode is regulated to a constant current value, which has a filament temperature sufficient for the maximum beam power of the block cathode. A second closed-loop regulated system, such including a block power regulator, which is acted upon by the difference between instantaneous block power value and nominal block power value, regulates the voltage between the filament cathode and the block cathode.

Abstract translation: 用于调节电子枪的电子束功率的装置，其包括灯丝阴极，块阴极和阳极。 在灯丝阴极和阻挡阴极之间施加第一电压，而在阻挡阴极和阳极之间施加第二电压。 借助于第一个闭环调节系统，灯丝阴极被调节到恒定电流值，其具有足以使块状阴极的最大光束功率足够的灯丝温度。 第二个闭环调节系统，包括由瞬时阻断功率值和标称功率值之间的差异作用的块功率调节器，调节灯丝阴极和块阴极之间的电压。

公开(公告)号：US20040149927A1

公开(公告)日：2004-08-05

申请号：US10712344

申请日：2003-11-14

Applicant: NISSIN ELECTRIC CO., LTD.

Inventor： Koji Iwasawa

IPC: H01J027/00

CPC classification number: H01J27/022 ,  H01J37/08 ,  H01J37/242

Abstract: An ion source device includes an ion source having a filament for emitting thermoelectrons, a current measuring device for measuring current flowing through the filament, a voltage measuring device for measuring voltage across the filament, a resistance operation device for computing a resistance value of the filament by using the current and the voltage measured by the current and voltage measuring devices, and a prediction operation device for computing a time till the application limits of the filament or a time left till the application limits of the filament.

Abstract translation: 离子源装置包括具有用于发射热电子的灯丝的离子源，用于测量流过灯丝的电流的电流测量装置，用于测量灯丝两端的电压的电压测量装置，用于计算灯丝电阻值的电阻操作装置 通过使用由电流和电压测量装置测量的电流和电压，以及用于计算直到灯丝的施加极限或剩余时间直到灯丝的施加极限的时间的预测操作装置。

公开(公告)号：US3885194A

公开(公告)日：1975-05-20

申请号：US35601873

申请日：1973-04-30

Applicant: WESTINGHOUSE ELECTRIC CORP

Inventor： SCHUMACHER BERTHOLD W

IPC: G05F1/46 ,  H01J37/06 ,  H01J37/24 ,  H05B39/04

CPC classification number: G05F1/46 ,  H01J37/06 ,  H01J37/242

Abstract: A method and apparatus for regulating and determining the temperature of a heated cathode in an electron beam system to regulate the magnitude of the beam current both during operation and prior to turn on. This is accomplished by measuring the thermionic emission of a well defined area of the cathode, regardless of whether the electron beam is being drawn from the cathode, and utilizing this measured signal to control the temperature of the heated cathode.

Abstract translation: 一种用于调节和确定电子束系统中的加热阴极的温度的方法和装置，以在操作期间和接通之前调节束电流的大小。 这通过测量阴极的良好限定区域的热离子发射来实现，而不管电子束是否从阴极吸取，并且利用该测量信号来控制加热的阴极的温度。