公开(公告)号：US11655534B2

公开(公告)日：2023-05-23

申请号：US17857370

申请日：2022-07-05

申请人： APPLIED MATERIALS, INC.

发明人： Wenting Hou ,  Jianxin Lei ,  Jothilingam Ramalingam ,  Prashanth Kothnur ,  William R. Johanson

IPC分类号： H01J37/32 ,  C23C14/18 ,  C23C14/34 ,  C23C14/35 ,  C23C14/14 ,  C23C14/16

CPC分类号： C23C14/18 ,  C23C14/14 ,  C23C14/16 ,  C23C14/3414 ,  C23C14/354 ,  H01J37/32027 ,  H01J37/32082

摘要： Apparatus that forms low resistivity tungsten film on substrates. In some embodiments, the apparatus may provide reduced resistivity of tungsten by being configured to generate a plasma in a processing volume of a physical vapor deposition (PVD) chamber with a process gas of krypton and using an RF power with a frequency of approximately 60 MHz, apply bias power at frequency of approximately 13.56 MHz to a substrate, and sputter a tungsten target to deposit a tungsten thin film on the substrate. At least approximately 90% of the deposited tungsten thin film has a crystalline orientation plane approximately parallel to a top surface of the substrate.

公开(公告)号：US11634830B2

公开(公告)日：2023-04-25

申请号：US17411305

申请日：2021-08-25

申请人： Applied Materials, Inc.

发明人： Jing Xu ,  John L. Klocke ,  Marvin L. Bernt ,  Eric J. Bergman ,  Kwan Wook Roh

IPC分类号： C25D3/38 ,  C25D5/02 ,  C25D5/54 ,  H01L21/288 ,  C23C14/18 ,  H01L21/28 ,  H01L21/768 ,  C23C16/455

摘要： Exemplary methods of electroplating include contacting a patterned substrate with a plating bath in an electroplating chamber, where the pattern substrate includes at least one opening having a bottom surface and one or more sidewall surfaces. The methods may further include forming a nanotwin-containing metal material in the at least one opening. The metal material may be formed by two or more cycles that include delivering a forward current from a power supply through the plating bath of the electroplating chamber for a first period of time, plating a first amount of the metal on the bottom surface of the opening on the patterned substrate and a second amount of the metal on the sidewall surfaces of the opening, and delivering a reverse current from the power supply through the plating bath of the electroplating chamber to remove some of the metal plated in the opening on the patterned substrate.

公开(公告)号：US11619764B2

公开(公告)日：2023-04-04

申请号：US16832974

申请日：2020-03-27

申请人： RAYTHEON COMPANY

发明人： John P. Schaefer ,  Paul J. Gasloli

IPC分类号： G02B1/11 ,  C23C14/06 ,  C23C14/18 ,  C23C14/24 ,  G02B1/113

摘要： A high-performance optical surface includes: a substrate having a first surface and a second surface opposite to the first surface; a first anti-reflection (A/R) coating formed on the second surface of the substrate; a coated layer formed over the A/R coating on a surface of the A/R coating opposite to the stress compensation layer, where a surface of the coating layer opposite to the first A/R coating is diamond point turned or polished to improve finish; and a second A/R coating formed on the polished surface of the coating layer to formed the high-performance reflective surface.

公开(公告)号：US11585013B2

公开(公告)日：2023-02-21

申请号：US16758915

申请日：2018-10-24

申请人： THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ALABAMA ,  TDK CORPORATION

发明人： Takao Suzuki ,  Tim Mewes ,  Gary Mankey ,  Isao Kanada ,  Yusuke Ariake

IPC分类号： C30B29/52 ,  C30B29/16 ,  C30B23/02 ,  B32B15/01 ,  H01F1/147 ,  C22C38/10 ,  C22C38/06 ,  C23C14/35 ,  C23C14/18 ,  C22C5/04 ,  C22C30/00 ,  C23C14/34 ,  B32B15/04 ,  C23C28/02 ,  C23C30/00 ,  B32B15/18 ,  C22C19/07 ,  B32B15/20

摘要： An Fe—Co—Al alloy magnetic thin film contains, in terms of atomic ratio, 20% to 30% Co and 1.5% to 2.5% Al. The Fe—Co—Al alloy magnetic thin film has a crystallographic orientation such that the (100) plane is parallel to a substrate surface and the direction is perpendicular to the substrate surface. The Fe—Co—Al alloy magnetic thin film has good magnetic properties, that is, a magnetization of 1440 emu/cc or more, a coercive force of less than 100 Oe, a damping factor of less than 0.01, and an FMR linewidth ΔH at 30 GHz of less than 70 Oe.

公开(公告)号：US20230002886A1

公开(公告)日：2023-01-05

申请号：US17941389

申请日：2022-09-09

申请人： CANON ANELVA CORPORATION

发明人： HIROSHI YAKUSHIJI ,  REIJI SAKAMOTO ,  MASAHIRO SHIBAMOTO

IPC分类号： C23C14/58 ,  C23C14/06 ,  C23C14/18 ,  C23C14/34 ,  C23C14/50 ,  C23C14/54

摘要： A film forming apparatus has a process chamber and a processing unit provided in the process chamber and forming adhesive film. The surface of the inner walls of the process chamber is formed of a material having a large getter effect on gas or water (H2O) remaining in the process chamber.

公开(公告)号：US20220403500A1

公开(公告)日：2022-12-22

申请号：US17528694

申请日：2021-11-17

申请人： Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences

发明人： Peng Wang ,  Li Qiao ,  Hong Zhang ,  Xiaogang Bai

IPC分类号： C23C14/18 ,  H05B3/12 ,  C23C14/35

摘要： The present disclosure relates to a structural coating and preparation method and use thereof. The structural coating provided in the present disclosure includes a titanium transition layer and platinum-hafnium composite structure layers laminated in sequence on a surface of a substrate; the number of the platinum-hafnium composite structure layer is ≥3; the platinum-hafnium composite structure layer includes a hafnium layer and a platinum layer laminated in sequence.

公开(公告)号：US20220388900A1

公开(公告)日：2022-12-08

申请号：US17816364

申请日：2022-07-29

申请人： View, Inc.

发明人： Anshu A. Pradhan ,  Robert T. Rozbicki ,  Dane Thomas Gillaspie ,  Sridhar Karthik Kailasam

IPC分类号： C03C17/34 ,  C23C10/28 ,  C23C14/08 ,  C23C14/18 ,  C23C14/56 ,  C23C14/58 ,  G02F1/1524 ,  G02F1/1523

摘要： Prior electrochromic devices frequently suffer from high levels of defectivity. The defects may be manifest as pin holes or spots where the electrochromic transition is impaired. This is unacceptable for many applications such as electrochromic architectural glass. Improved electrochromic devices with low defectivity can be fabricated by depositing certain layered components of the electrochromic device in a single integrated deposition system. While these layers are being deposited and/or treated on a substrate, for example a glass window, the substrate never leaves a controlled ambient environment, for example a low pressure controlled atmosphere having very low levels of particles. These layers may be deposited using physical vapor deposition. In certain embodiments, the device includes a counter electrode having an anodically coloring electrochromic material in combination with an additive.

公开(公告)号：US20220325865A1

公开(公告)日：2022-10-13

申请号：US17640459

申请日：2020-09-03

申请人： ZKW Group GmbH

发明人： Jochen Sattler ,  Thomas Haas ,  Lukas Dienstbier

IPC分类号： F21S41/50 ,  C23C14/34 ,  C23C14/00 ,  C23C14/08 ,  C23C14/20 ,  C23C14/18 ,  C03C17/36 ,  B60Q1/04

摘要： The invention relates to a motor vehicle headlamp (8) comprising a vehicle headlamp housing (9), an at least sectionally transparent cover pane (10) that closes the vehicle headlamp housing (9), a light source (11) that is accommodated in the vehicle headlamp housing (9) and serves for radiating light through the cover pane (10), and at least one motor vehicle design element (3) that is accommodated in the vehicle headlamp housing (9), wherein the at least one motor vehicle design element (3) comprises a dimensionally stable substrate (1) with at least one coated side.

公开(公告)号：US20220325416A1

公开(公告)日：2022-10-13

申请号：US17846626

申请日：2022-06-22

申请人： SAINT-GOBAIN GLASS FRANCE

发明人： Julian LINGNER ,  Jan HAGEN ,  Norbert HUHN ,  Julie RUFF

IPC分类号： C23C28/00 ,  C03C17/36 ,  C23C14/06 ,  C23C14/18 ,  C23C14/35 ,  C23C16/27 ,  C23C16/50

摘要： A coated substrate includes a coating, wherein the coating includes, starting from the substrate in this order: a. a layer of diamond-like carbon, b. a metallic multi-ply layer, wherein the metallic multi-ply layer contains b1) tin and at least one alloying element for tin, or b2) magnesium and at least one alloying element for magnesium, wherein the metallic multi-ply layer is formed from two, three, or more plies, wherein one or more plies contain tin and one or more plies made of at least one alloying element for tin selected from antimony, copper, lead, silver, indium, gallium and/or germanium, are arranged alternatingly, or wherein one or more plies contain magnesium and one or more plies made of at least one alloying element for magnesium selected from aluminum, bismuth, manganese, copper, cadmium, iron, strontium, zirconium, thorium, lithium, nickel, lead, silver, chromium, silicon, tin, gadolinium, yttrium, calcium and/or antimony, are arranged alternatingly.

公开(公告)号：US20220305253A1

公开(公告)日：2022-09-29

申请号：US17697480

申请日：2022-03-17

申请人： Board of Regents, The University of Texas System ,  University of Wollongong

发明人： Mario I. Romero-Ortega ,  Gordon G. Wallace ,  Maria Gonzalez-Gonzalez ,  Rouhollah Ali Jalili

IPC分类号： A61N1/05 ,  C23C14/34 ,  C23C14/18 ,  H01M4/96

摘要： The present disclosure provides methods of making and applying metalized graphene fibers in bioelectronics applications. For example, platinized graphene fibers may be used as an implantable conductive suture for neural and neuro-muscular interfaces in chronic applications. In some embodiments, an implantable electrode includes a multi-layer graphene-fiber core, an insulative coating surrounding the multi-layer graphene-fiber core, and a metal layer disposed between the multi-layer graphene-fiber core and the insulative coating.